• Journal of Institute of Control, Robotics and Systems
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• v.17 no.6
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• pp.566-572
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• 2011

In recent semiconductor and FPD (Flat Panel Display) manufacturing processes, high clean-class delivery operation is required more and more for short working time and better product quality. Traditionally SLIM (Single-sided Linear Induction Motor) is widely used in the liner drive applications because of its simplicity in the rail structure. A magnetically levitated (Maglev) unmanned vehicle with SLIM traction, which is powered by a CPS (Contactless Power Supply) can be a high precision delivery solution for this industry. In this paper unmanned FPD-carrying vehicle, which can levitate without contacting the rail structure, is suggested for high clean-class FPD delivery applications. It can be more acceptable for the complex facilities composed with many processes which require longer rails, because of simple rail structure. The test setup consists of a test vehicle and a rounded rail, in which the vehicle can load and unload products at arbitrary position commanded through wireless communications of host computer. The experimental results show that the suggested vehicle and rail have reasonable traction servo and robust electromagnetic suspensions without any contact. The resolution of point servo errors in the SLIM traction system is accomplished under 1mm. The maximum gap error is ${\pm}0.25mm$ with nominal air gap length of 4.0mm in the electromagnetic suspensions. This type of automated delivery vehicle is expected to have significant role in the clean delivery like FPD glass delivery.

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.18 no.2
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• pp.130-137
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• 1989

본 논문은 1. 초청정기술의 현황, 2. 초청정장치의 요소기술, 3. 초청정장치의 개요, 4. 국부청정실의 기본계획에 대해 기술하고 있다. 1. 초청정기술의 현황에서는, 본 연구수행의 방향설정을 위해 미국과 일본의 관련 학${\cdot}$협회의 동향 및 최근에 발표된 논문에 근거한 초청정기술의 연구경향과 과제 등을 파악 분석했다. 2. 초청정장치의 요소기술에서는, 초청정장치 개발에 필요한 미립자제거, 환경조건과 오염제어 기술을 확립하기 위해, Filter와 System Ceiling 방식, 온${\cdot}$습도, 진동, 정전기제어 기술에 관한 문제점과 대책에 대해 검토했다. 3. 초청정장치의 개요에서는, 초청정장치로써 대표적인 클린벤취의 관련규격, 설계요점 등을 검토하여 설계를 위한 기초자료로 삼았다. 4. 국부청정실의 기본계획에서는 상기의 요소기술과 기초자료에 근거하여 본 연구를 수행하기 위한 Line 형의 클린터널 유닛의 기본계획을 수립했다.

• Analytical Science and Technology
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• v.25 no.3
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• pp.190-196
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• 2012

The human exposure of lead has usually detected the amount of lead in the whole blood, however, this method has a shortcoming to give the information on the short-term exposure to lead. In that sense, it is desirable to estimates the level of lead in plasma to draw the chronic bio-marker of lead exposure even though it is difficult to measure lead of several ng/L. An inductively coupled plasma-mass spectrometry (ICP-MS) method was developed for determining lead in plasma as the chronic bio-marker of lead of workers. To minimize the contamination of lead from the environment, we constructed class 1,000 clean room and compared the amount of floating dust before and after the operation of the clean room. The limit of detection (LOD) and the limit of quantification (LOQ) of lead in fetal bovine serum were 4.3 ng/L and 12.2 ng/L by NIOSH method (statistical calculation method) and 7.0 ng/L and 22.1 ng/L by signal/noise ratio, respectively. The accuracy was in a range of 92.3-101.3%, and the precision of the assay was less than 4% in the samples spiked in the concentration of 20 ng/L and 2,000 ng/L. The method was simple, reproducible and sensitive enough to permit reliable analysis of lead to the ng/L level in plasma and/or serum. The method was also useful for the biological monitoring of chronic exposure to lead.

• Journal of The Korea Institute of Healthcare Architecture
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• v.29 no.3
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• pp.17-28
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• 2023

Purpose: This study aims to provide basic data for the future construction plans of the Infectious Disease Hospitals by analyzing the area composition and required room ratios in the wards and ICU of currently under-construction infectious disease hospitals. Methods: 3 Methods have been used in this paper. 1) This study conducted a literature review on major considerations and related guidelines for hospitals specializing in infectious diseases using existing data. 2) Based on the objects and activities of the hospital space, zones and areas were set for each department according to infection control. 3) Based on the established zones and areas, basic plan drawings of three hospitals specializing in infectious diseases currently under construction were collected and architectural drawing analysis was performed. Results: 1) Infectious Diseases Hospital must have a spatial organization that can accommodate patient isolation, infection control, efficiency of medical service, and changes. 2) Zones for infection control are divided into negative pressure and non-negative pressure zones based on airborne precaution isolation. It is divided into clean and contaminated zone according to class of cleanliness by Aseptic technique. Areas are classified by objects (patients, healthcare workers, supplies) and activities (access, medical treatment, support), and a system for organizing space is established based on this. 3) By analyzing the area composition of each departmental area, each required room, and each required space in the wards and intensive care units, it provides basic data for the spatial organization for architectural planning of the infectious disease hospital. Implication: It can be used as basic data when planning related facilities by analyzing the characteristics of the space plan of the required room according to the relationship between activities, movement lines, and operation plans based on user behavior.

• Journal of Surface Science and Engineering
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• v.34 no.1
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• pp.33-38
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• 2001

10cm-diameter Si(100)∥$1.3\mu\textrm{m}$-X$1.3_2$X$1.3\mu\textrm{m}$-$SiO_2$∥Si(100) afers were prepared using a fast linear annealing (FLA) equipment. 1.3$\mu\textrm{m}$-thick $SiO_2$ films were grown by dry oxidation process. After cleaning and premating the wafers in a class 100 clean room, they were heat treated using with the FLA and conventional electric furnace. Bonded area and bond strength of wafer pairs were measured using a infrared (IR) camera and razor blade crack opening method, respectively. It was confinmed that the bonded area by FLA was around 99% and the bond strength value reached 2172mJ/$\m^2$, which is equivalent to theoritical bond strength. Our result implies that thick $SiO_2$ SOI may be prepared more easily by using $SiO_2$$SiO_2$ bonding interfaces then those of Si/$SiO_2$'s.

• Journal of environmental and Sanitary engineering
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• v.24 no.3
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• pp.16-27
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• 2009

In this paper, I examined the level of fine dust in medical institutions, educational institutions and multi-purposed facilities to grasp the exact state of the present, and decided the level of air-borne particulate(KSM ISO Standard and ISO Standard 14644-1). We compared new proposed cleaner equipped with HEPA Filter with general cleaner and analyzed the rate of removal according to height, air volume and the equipment with the compulsive air intake. Through this comparison, I reached the conclusion as follows: 1. According to the examination, the fine dust of medical institutions, educational institutions and multi-purposed facilities in Kwang Ju is class 9. 2. The filter used in general cleaner on the market is that of HEPA-type, and its removal efficiency for fine particles($0.3{\sim}0.5{\mu}m$) is very low. 3. In the removal efficiency of new proposed cleaner equipped with HEPA Filter, the higher it is, the better, especially more than 180cm in height. 4. In case it is operated for 5 minutes under the condition of the space of $9.4m^{3}$ and the maximum air volume equipped with two induction pipes, we can keep the air cleanness level of 5 ~ 6. 5. To maintain the air cleanness for a long time, if we first operate for 5 minutes at maximum air volume and then operate at medium maximum air volume, we can keep the air cleanness with low energy.

• Food Science and Biotechnology
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• v.16 no.1
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• pp.18-22
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• 2007

The objective of this study was to develop and assess the performance of an aseptic system for liquid milk contained in plastic bottles, from a small-scale production standpoint. Commercial sterility tests conducted on the bottled milk were utilized in our assessments of the system, via the identification and monitoring of the principal points of the process. Four 150 L batches of milk with pH values of approximately 6.7 were heat-processed at between 137 and $143^{\circ}C$ for 10 see in a plate heat exchanger, and then aseptically transferred to 500 mL high-density polyethylene (HOPE) bottles, in an ISO class 7 clean room. The aseptic condition of the bottles was achieved via 10 see of rinsing with a mixture containing 0.5% peracetic acid and 0.8% hydrogen peroxide at $30^{\circ}C$, followed by another rinse with sterile water. Of the 4 batches processed, 2 were determined to exhibit commercial sterility, on the basis of the physical-chemical and microbiological criteria adopted. It was concluded that some adjustment of the processing line was required in order to achieve full commercial sterility for all processes. The aseptic system developed and assessed in this study was demonstrated to have great potential for the processing and transferring of milk into plastic bottles, from a small-scale production standpoint.

• Analytical Science and Technology
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• v.28 no.5
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• pp.309-316
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• 2015

The analytical method of lead in plasma by ICP-MS was validated after securing environment within class 1,000 classification. We tested specificity and accuracy of within-run and between-run. According to measurement of the amount of suspended particulates in a clean room, 0.3~62 particles were detected in 0.3 µm size while 0.0~28.3 particles were observed in 0.5 µm size. Total suspended particulates met required environment with up to 90.3 particles. The MDL (Method detection limit) of the sample which has been fabricated using fetal bovine serum (FBS) blank was 1.77 ng/L, and LOQ (Limit of quantification) was 5.55 ng/L. The slope, intercept and correlation coefficient of the calibration curve were y=1.09×10⁻³x+4.88×10⁻² and r=0.9999, which showed good correlation. The specificity, within-run and between-run accuracy satisfied the standard at more than 50 ng/L. The average lead concentration in plasma of the general people, current workers and retired workers was 55.4 ng/L, 440 ng/L, and 132 ng/L.

• KIEAE Journal
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• v.8 no.6
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• pp.3-10
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• 2008

Since fire was founded in the world, human races have invented various heating methods. Ondol is traditional heating method in Korea. It is very the important work to trace the history and characteristics of Ondol which originated and was developed in the Korean peninsula. Especially, the study on Ondol will contribute to improving the present heating methods and predicting future ones. In this paper, we shall study through the analysis of documents such as oriental documents, the document of Choseon dynasty, European documents and American documents. In order to discover the origins of Ondol as one of the excellent heating method all over the world, This study aims at identifying the history and characteristics of Ondol in the Korean peninsula, through document analysis. Results of this study are as follows. 1) The first document about Ondol is Sookyongjoo(水經注), Chinese ancient geography book. Contents recorded in the book include the description related to Ondol at Kwankyesa temple which was located at the border land between Gogooryo(ancient Korea) and the northeast of China. 2) Ondol was popular heating method in Gogooryo(ancient Korea) and it was used in not only Gogooryo but also Silla Kingdom and Beakje Kingdom. Thereafter, it was also used widely in Goryo dynasty and Choseon dynasty. Thereby we know that Ondol has been used as a heating method for a long time in the Korean peninsula. 3) Ondol was covered with a floor paper since the beginning of Choseon dynasty. the paper made room clean and impacted on Korean life style. Because the floor was clean and warm, Koreans thus took off shoes and sat on the floor. 4) Ondol was spreaded to Jeju island in Korea before 16th century but wasn't used widely there. The reason was that Ondol was rare high class heating system and the weather was warm in Jeju island. 5) The overspreading of Ondol caused that poor people built roughly Ondol in the last of Choseon dynasty. So, the quality of Ondol gradually became lower and lower. 6) A westerner was impressed by the novelty of Ondol and Frank Lloyd Wright had played an important role to update and spread Ondol widely all over the world. Hailing Ondol as the ideal heating system, Frank Lloyd Wright began incorporating it in his buildings back in the U.S. and even invented a modified ondol system, using hot water running through pipes instead of the hot exhaust through flues.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.4
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• pp.301-307
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• 2002

Direct bonded SOI wafer pairs with $Si ll SiO_2/Si_3N_4 ll Si$ the heterogeneous insulating layers of SiO$_2$-Si$_3$N$_4$are able to apply to the micropumps and MEMS applications. Direct bonding should be executed at low temperature to avoid the warpage of the wafer pairs and inter-diffusion of materials at the interface. 10 cm diameter 2000 ${\AA}-SiO_2/Si(100}$ and 560 $\AA$- ${\AA}-Si_3N_4/Si(100}$ wafers were prepared, and wet cleaned to activate the surface as hydrophilic and hydrophobic states, respectively. Cleaned wafers were pre- mated with facing the mirror planes by a specially designed aligner in class-100 clean room immediately. We employed a heat treatment equipment so called fast linear annealing(FLA) with a halogen lamp to enhance the bonding of pre mated wafers We kept the scan velocity of 0.08 mm/sec, which implied bonding process time of 125 sec/wafer pairs, by varying the heat input at the range of 320~550 W. We measured the bonding area by using the infrared camera and the bonding strength by the razor blade clack opening method, respective1y. It was confirmed that the bonding area was between 80% and to 95% as FLA heat input increased. The bonding strength became the equal of $1000^{\circ}C$ heat treated $Si ll SiO_2/Si_3N_4 ll Si$ pair by an electric furnace. Bonding strength increased to 2500 mJ/$\textrm{m}^2$as heat input increased, which is identical value of annealing at $1000^{\circ}C$-2 hr with an electric furnace. Our results implies that we obtained the enough bonding strength using the FLA, in less process time of 125 seconds and at lowed annealing temperature of $400^{\circ}C$, comparing with the conventional electric furnace annealing.