• 한국산업보건학회지
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• 제30권1호
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• pp.39-49
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• 2020

Objectives: We investigated the status of accidents and deaths caused by chemical leakage and skin contact in Korea. The purpose of this study was to produce and provide technical reference data for the efficient management of accidents and the rational management of accidental chemicals. Methods: Accidents and deaths caused by chemical leakage and skin contact in industry were investigated. Based on 68 accident reports related to chemical leakage and skin contact, the causes of accidental deaths were analyzed. In addition, we investigated the chemical substances and articles that caused these accidents and deaths. Based on the results of the investigation, the causes of accidents caused by chemical leakage and skin contact were identified and practical management measures for the chemicals were suggested. Results and Conclusions: In 2018, 372 people suffered from chemical leaks and skin contact, up by 123 (about 49.4%) from the previous year. The number of accident deaths was 14, an increase of five (about 55.6%) from the previous year. In the last three years (2016-2018), 91 chemical substances and article groups were involved in accidents caused by chemical leakage and skin contact. There were 16 chemical substance and article groups involved in accidental deaths. There were ten cases of accidents involving two or more casualties due to chemical leakage and skin contact, and 23 deaths occurred. Most of these accidental deaths were caused by subcontractor workers outsourcing risks. Therefore, there is an apparent need to strengthen the responsibility for safety and health among subcontractors.

• 한국가스학회지
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• 제26권5호
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• pp.22-27
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• 2022

반도체 생산 설비 중 ALD는 열이나 플라즈마로 분해한 Gas를 Wafer에 증착시켜 원자층을 형성시키는 설비로 주로 인화성 물질인 NH₃와 SIH4이 사용된다. 이중 NH₃는 연소·폭발 범위가 상한(UFL) 33.6%, 하한(LEL) 15%로 폭발 범위가 비교적 좁지만 많은 양이 갑자기 한곳에 모이면 폭발할 수 있고, 피부에 닿거나 흡입하면 치명적이다. NH₃는 ALD Gas inlet의 배관과 전기·기계 기구를 통해 Chamber로 공급되는데 많은 누출 가능점이 존재하여 누출 시 화재·폭발 또는 중독 사고로 이어질 수 있어 NH₃ 누출 시나리오에 대한 내부 유동과 제어 속도를 이해하고 고환기가 가능한 배기장치를 설계하는 것이 필요하여 본 연구자는 NH₃의 누출시나리오를 CFD에 적용하여 내부유동과 제어 속도를 수치 분석하여 설계 시 반영할 수 있도록 하였다.