• Journal of Sensor Science and Technology
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• v.19 no.3
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• pp.191-196
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• 2010

In this paper, modeling of the non-ideal frequency response, especially "notch-and-spike" magnitude phenomenon and phase lag distortion, are discussed. To characterize the non-ideal frequency response, a new electro-mechanical simulation model based on SPICE is proposed using the driving loop of the capacitive vibratory gyroscope. The parasitic components of the driving loop are found to be the major factors of non-ideal frequency response, and it is verified with the measurement results.

• The Transactions of the Korean Institute of Power Electronics
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• v.24 no.1
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• pp.62-65
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• 2019

Wireless power transfer systems require an algorithm to determine the presence of the target object for mitigating standby power and safety issues. Although many schemes that sense various external objects have been actively proposed for inductive power transfer systems, not many studies on capacitive power transfer systems have been conducted compared with those on inductive power transfer systems. This study proposes a target object detection algorithm by monitoring the capacitance in transmitter-side electrodes without additional pressure sensors or distance sensors. The proposed algorithm determines the presence of a target object by monitoring the change in capacitance in transmitter-side electrodes using the step pulse of the microcontroller unit. The algorithm is verified by two step processes. First, the performance in capacitance measurement is compared with that of an LCR meter. Then, the verification is conducted in a 5-W capacitive power transfer hardware. Experimental result shows that the interelectrode capacitance increases by 6 times when the target object is fully aligned. Thus, the proposed scheme can successfully detect the presence of the target object.

• ETRI Journal
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• v.36 no.3
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• pp.361-366
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• 2014

In this paper, a new, simple capacitive tilt sensor with a metallic ball is proposed. The proposed tilt sensor has only two electrodes and a metallic ball, and this design assists in managing the inherent contact problem in measuring tilt angles. Capacitive sensing, compared with other types of tilt sensor, has many advantages such as simplicity, noncontact measurement, long-throw linear displacement, and sub-micron plate spacing. Its design and fabrication process are significantly simpler than previous types of tilt sensors. The dimensions of the prototype tilt sensor are $20mm{\times}20mm$, and the diameter of the polystyrene tube is 5 mm with a tube thickness of 0.15 mm. An analytical study of the prototype capacitive tilt sensor was undertaken, and the experimental results demonstrate the relationship between the tilt angles and measured capacitances compared with the analytical study.

• Journal of Sensor Science and Technology
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• v.21 no.3
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• pp.235-239
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• 2012

This paper presents frequency response compensation technique, and a self-oscillation circuit for capacitive microresonator with the compensation technique using programmable capacitor array, to compensate for the frequency response distorted by parasitic capacitances, and to obtain stable oscillation condition. The parasitic capacitances between the actuation input port and capacitive output port distort the frequency response of the microresonator. The distorted non-ideal frequency response can be compensated using two programmable capacitor arrays, which are connected between anti-phased actuation input port and capacitive output port. The simulation model includes the whole microresonator system, which consists of mechanical structure, transimpedance amplifier with automatic gain control, actuation driver and compensation circuit. The compensation operation and oscillation output of the system is verified with the simulation results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.987-992
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• 2000

In a high speed spindle system, it is very important to monitor the operation of the spindle to prevent catastrophic damage to the system. Widely used sensors for monitoring are eddy-current and capacitive types. These sensors provide high accuracy of monitoring, but their steep prices lead to expensive high speed spindle systems. The main goal of our research is to develop technology for producing high speed spindle system utilizing magnetic bearings. As active magnetic bearings require position sensors for feedback control, a noncontact position sensor is being developed as a part of this main goal. Once developed, it will contribute to affordable high speed spindle system. This paper describes the selection process of the sensor types and the design of the driving circuit. We also report the experimental results that characterize the static and dynamic performances of the inductive sensor.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.10a
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• pp.32-37
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• 2000

In a high speed spindle system, it is very important to monitor the operation of the spindle to prevent catastrophic damage to the system. Widely used sensors for monitoring are eddy-current and capacitive types. These sensors provide high accuracy of monitoring, but their steep prices lead to expensive high speed spindle system. The main god of our research is to develop technology to produce high speed spindle system utilizing magnetic bearings. As active magnetic bearings require position sensors for feedback control, a noncontact position sensor is bang developed as a part of this main goal. Once developed, it will contribute to affordable high speed spindle system. In this paper, we report the selection process of the sensor types and the experimental results with driving circuits.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.768-771
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• 2001

Non-contacting capacitive sensor, based on principle of the cross capacitor, for measuring of $\mu\textrm{m}$-order displacements have been fabricated and characterized. To overcome disadvantages of the existed capacitive sensors of parallel type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes, two of them used high and low electrode the other two used as guard electrodes, on a sapphire plate with diameter 17 mm and thickness 0.7 mm, and are symmetrically situated with a constant gap of 0.2 mm between the electrodes. This sensor can be used for measuring the distance between sensor and target not only the metallic but also non-metallic target without ground connection.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.55 no.9
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• pp.443-448
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• 2006

Non-contacting capacitive sensor based on Thompson-Lampard theorem have been fabricated and characterized for measuring of 때 order displacements. To overcome disadvantages of the existed capacitive sensors of parallel plate type with 2-electrodes and 3-electrodes, the developed new sensor was designed to have 4-electrodes with a constant gap of 0.2mm between the electrodes. Two of the electrodes were used as a high potential electrode and a low one, the other two electrodes were used as guard electrodes. These electrodes were made from copper using RF sputtering system on a sapphire plate with diameter 17 mm and thickness 0.7 mm. This sensor can be used for measuring the distance not only between the sensor and metallic target connected to ground potential but also non-metallic target without ground connection.

• Journal of Sensor Science and Technology
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• v.19 no.2
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• pp.92-98
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• 2010

The capacitive sensor has a simple structure, compact size and low cost, but a small dynamic range. The small range is caused by use of gap variation. If the sensor takes area variation type with one plate moving horizontally, it can have a large measurable range. While the area variation has relatively low sensitivity, some studies have found methods to improve the sensitivity. Even though the methods are effective, parameters of the results are limited and 2 dimensional. This study provides more practical and 3 dimensional analysis and suggests relations between parameters. Using the results, the optimized design parameters of a high dynamic range capacitive sensor can be found.

• Journal of Sensor Science and Technology
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• v.14 no.4
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• pp.219-224
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• 2005

In this paper, a contact-type linear encoder-like capacitive displacement sensor (CLECDS) is proposed. It is based on the linear encoder capacitive displacement sensor that consists of two substrates with a series of conducting grating in identical size and it is used as a contact sensor of which the two substrates assembled faced to each other after coated with thin dielectric film. It was confirmed that the prototype of this sensor has resolution of about 126nm and measuring range of 20 mm in the test.