• Journal of the Korean Society for Precision Engineering
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• v.22 no.4
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• pp.84-91
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• 2005

We measured the pitch of one-dimensional (ID) grating specimens using a metrological atomic force microscope (M-AFM). The ID grating specimens a.e often used as a magnification standard in nano-metrology, such as scanning probe microscopy (SPM) and scanning electron microscopy (SEM). Thus, we need to certify the pitch of grating specimens fur the meter-traceability in nano-metrology. To this end, an M-AFM was setup at KRISS. The M-AFM consists of a commercial AFM head module, a two-axis flexure hinge type nanoscanner with built-in capacitive sensors, and a two-axis heterodyne interferometer to establish the meter-traceability directly. Two kinds of ID grating specimens, each with the nominal pitch of 288 nm and 700 nm, were measured. The uncertainty in pitch measurement was evaluated according to Guide to the Expression of Uncertainty in Measurement. The pitch was calculated from 9 line scan profiles obtained at different positions with 100 ㎛ scan range. The expanded uncertainties (k = 2) in pitch measurement were 0.10 nm and 0.30 nm for the specimens with the nominal pitch of 288 nm and 700 nm. The measured pitch values were compared with those obtained using an optical diffractometer, and agreed within the range of the expanded uncertainty of pitch measurement. We also discussed the effect of averaging in the measurement of mean pitch using M-AFM and main components of uncertainty.

• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.195-202
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• 2008

A biosensor based on the measurement of capacitance changes has been designed and fabricated for simple and realtime detection of bacteria. Compared to an impedance measurement technique, the capacitance measurement can make additional measurement circuits simpler, which improves a compatability for integration between the sensor and circuit. The fabricated sensor was characterized by detecting Escherichia coli(E. coli). The capacitance changes measured by the sensor were proportional to E. coli cell density, and the proposed sensor could detect $1{\times}10^6$ cfu/ml E. coli at least. The real-time detection was verified by measuring the capacitance every 20 minutes. After 7 hours of E. coli growth experiment, the capacitance of the sensor in the micro volume well with $4.5{\times}10^5$ cfu/ml of initial E. coli density increased by 20 pF, and that in another wells with $1.5{\times}10^6$ cfu/ml and $8.5{\times}10^7$ cfu/ml initial E. coli density increased by 56 pF and 71 pF, respectively. The proposed sensor has a possibility of the real-time detection for bacterial growth, and can detect E. coli cells with $1.8{\times}10^5$ cfu in nutrient broth in 5 hours.

• Journal of Sensor Science and Technology
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• v.6 no.2
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• pp.137-144
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• 1997

In this paper, the design of a 10-bit 40-MS/s pipelined A/D converter is implemented to achieve low static power dissipation of 70 mW at the ${\pm}2.5\;V$ or +5 V power supply environment for high speed applications. A 1.5 b/stage pipeline architecture in the proposed ADC is used to allow large correction range for comparator offset and perform the fast interstage signal processing. According to necessity of high-performance op amps for design of the ADC, the new op amp with gain boosting based on a typical folded-cascode architecture is designed by using SAPICE that is an automatic design tool of op amps based on circuit simulation. A dynamic comparator with a capacitive reference voltage divider that consumes nearly no static power for this low power ADC was adopted. The ADC implemented using a $1.0{\mu}m$ n-well CMOS technology exhibits a DNL of ${\pm}0.6$ LSB, INL of +1/-0.75 LSB and SNDR of 56.3 dB for 9.97 MHz input while sampling at 40 MHz.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.11
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• pp.1571-1574
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• 2014

In this paper, we propose a unidirectional transmission of critical information obtained by keyboard hacking or kernel and keyboard driver hacking even though the computer is not connected to the external network. We show the hacking can be attempted in the proposed method to show the way preventing such attempts in advance. Firewalls and other various methods are used to prevent the hacking from the external network but the hacking is also attempted in various ways to detour the firewall. One of the most effective way preventing from the hacking attack is physically disconnect the internal intranet systems from the external internet and most of the government systems, military systems and big corporate systems are using this way as on one of the protection method. In this paper, we show the feasibility of transmission of security codes, etc via the short message to the external network on the assumption that a hacking program such as Trojan Horse is installed on the computer systems separated from the external network. Previous studies showed that the letters on the monitor can be hijacked by electromagnetic analysis on the computer to obtain the information even though the system is not connected ti the network. Other studies showed that the security code hint can obtained by analyzing the power consumption distribution of CPU. In this paper, the power consumption distribution of externally accessible power line is analyzed to obtain the information and the information can be transmitted to the external network. Software controlling the CPU and GPU usage is designed to control the power supply of computer. The sensors such as the Rogowski coils can be used on the external power line to collect the data of power consumption change rates. To transmit the user password by short message, due to the capacitive components and the obstacle from other power supply, A very slow protocol are used.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.289-290
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• 2006

In general, atomic force microscope (AFM) used for metrological purpose has measuring range less than a few hundred micrometers. We design and fabricate an AFM with long measuring range of $200mm{\times}200mm$ in X and Y axes. The whole stage system is composed of surface plate, global stage, microstage. By combining global stage and microstage, the fine and long movement can be provided. We measure the position of the stage and angular motions of the stage by laser interferometer. A piezoresistive type cantilever is used for compact and long term stability and a flexure structure with PZT and capacitive sensor is used for Z axis feedback control. Since the system is composed of various actuators and sensors, a real time control program is required for the implementation of AFM. Therefore, in this work, we designed a multi-axis control program using a FPGA module, which has various functions such as interferometer signal converting, PID control and data acquisition with triggering. The control program achieves a loop rate more than 500 kHz and will be applied for the measurement of grating pitch and step height.

• IEMEK Journal of Embedded Systems and Applications
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• v.15 no.4
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• pp.159-166
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• 2020

The IBC (Intra-Body Communication) benefits from a wireless communication system for exchanging various kinds of digital information through wearable electronic devices and sensors. The IBC using the human body as the transmission channel allows wireless communication without the transmitting radio frequency waves to the air. This paper discusses the results of experiments on electrostatic coupling IBC based on FSK (Frequency Shift Keying) and 1 bit error correction. We implemented FSK communication and 1 bit error correction algorithm using the MCU boards and aluminum tape electrodes. The transmitter modulates digital data using 50% duty square wave as carrier signal and transmits data through human body. The receiver performs ADC (Analog to Digital Conversion) on carrier signal from human body. In order to figure out the frequency of carrier signal from ADC results, we applied zero-crossing algorithm which is used to detect the edge characteristic in computer vision. Experiment results shows that digital data modulated as square wave can be successfully transmitted through human body by applying the proposed architecture of a 1ch GPIO as a transmitter and 1ch ADC for as a receiver. Also, this paper proposes 1 bit error correction technique for reliable IBC. This technique performs error correction by utilizing the feature that carrier signal has 50% duty ratio. When 1 bit error correction technique is applied, the byte error rate at receiver side is improved around 3.5% compared to that not applied.

• Journal of Sensor Science and Technology
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• v.7 no.4
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• pp.293-299
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• 1998

An objective of this study is to develop a voltage measuring device that uses a gas-filled switch (GS) on 22.9 kV-y extra-high voltage distribution lines. The voltage measuring device proposed in this paper is a kind of capacitive divider which consists of a detecting electrode attached outside of the bushing of GS, an impedance matching circuit, and a voltage buffer. It can be easily installed in an established GS without changing the structure. For the calibration and application investigations, the voltage measuring device was set up in the 25.8 kV 400 A GS, and a step pulse generator having 5 ns rise time is used. As a result, it was found that the frequency bandwidth of the voltage measuring device ranges from 1.35 Hz to about 13 MHz. The error of voltage dividing ratio which is evaluated by the commercial frequency voltage of 60 Hz was less than 0.2%. In addition, voltage dividing ratio in the commercial frequency voltage and in a non-oscillating impulse voltage were compared, and their deviation were less than 0.7%.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.11
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• pp.75-82
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• 2004

A metrological atomic force microscope (M-AFM) was developed fur the length measurements of nanometer range, through the modification of a commercial AFM. To eliminate nonlinearity and crosstalk of the PZT tube scanner of the commercial AFM, a two-axis flexure hinge scanner employing built-in capacitive sensors is used for X-Y motion instead of PZT tube scanner. Then two-dimensional displacement of the scanner is measured using two-axis heterodyne laser interferometer to ensure the meter-traceability. Through the measurements of several specimens, we could verify the elimination of nonlinearity and crosstalk. The uncertainty of length measurements was estimated according to the Guide to the Expression of Uncertainty in Measurement. Among several sources of uncertainty, the primary one is the drift of laser interferometer output, which occurs mainly from the variation of refractive index of air and the thermal stability. The Abbe error, which is proportional to the measured length, is another primary uncertainty source coming from the parasitic motion of the scanner. The expanded uncertainty (k =2) of length measurements using the M-AFM is √(4.26)$^2$+(2.84${\times}$10$^{-4}$ ${\times}$L)$^2$(nm), where f is the measured length in nm. We also measured the pitch of one-dimensional grating and compared the results with those obtained by optical diffractometry. The relative difference between these results is less than 0.01 %.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.5
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• pp.423-432
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• 2023

With the increasing demand for mobile devices featuring multi-touch operation, extensive research is being conducted on touch screen panel (TSP) Readout ICs (ROICs) that should possess low power consumption, compact chip size, and immunity to external noise. Therefore, this paper discusses capacitive touch sensors and their readout circuits, and it introduces research trends in various circuit designs that are robust against external noise sources. The recent state-of-the-art TSP ROICs have primarily focused on minimizing the impact of parasitic capacitance (Cp) caused by thin panel thickness. The large Cp can be effectively compensated using an area-efficient current compensator and Current Conveyor (CC), while a display noise reduction scheme utilizing a noise-antenna (NA) electrode significantly improves the signal-to-noise ratio (SNR). Based on these achievements, it is expected that future TSP ROICs will be capable of stable operation with thinner and flexible Touch Screen Panels (TSPs).

• Smart Media Journal
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• v.9 no.4
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• pp.102-108
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• 2020

In this paper, we propose a real-time method of detecting hand motions and extracting the signal frame induced by EF(Electric Field) sensors. The signal induced by hand motion includes not only noises caused by various environmental sources as well as sensor's physical placement, but also different initial off-set conditions. Thus, it has been considered as a challenging problem to detect the motion signal and extract the motion frame automatically in real-time. In this study, we remove the PLN(Power Line Noise) using LPF with 10Hz cut-off and successively apply MA(Moving Average) filter to obtain clean and smooth input motion signals. To sense a hand motion, we use two thresholds(positive and negative thresholds) with offset value to detect a starting as well as an ending moment of the motion. Using this approach, we can achieve the correct motion detection rate over 98%. Once the final motion frame is determined, the motion signals are normalized to be used in next process of classification or recognition stage such as LSTN deep neural networks. Our experiment and analysis show that our proposed methods produce better than 98% performance in correct motion detection rate as well as in frame-matching rate.