• 한국전기전자재료학회논문지
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• 제23권4호
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• pp.317-322
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• 2010

This paper reports the fabrication and characterization of surface micromachined poly 3C-SiC capacitive pressure sensors on silicon wafer operable in touch mode and normal mode for high temperature applications. FEM(finite elements method) simulation has been performed to verify the analytical mode. The sensing capacitor of the capacitive pressure sensor is composed of the upper metal and the poly 3C-SiC layer. Measurements have been performed in a temperature range from $25^{\circ}C$ to $500^{\circ}C$. Fabrication process of designed poly 3C-SiC touch mode capacitive pressure sensor was optimized and would be applicable to capacitive pressure sensors that are required high precision and sensitivity at high pressure and temperature.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.31-32
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• 2006

A signal conditioning circuit for capacitive sensors was developed using a commercial single chip solution. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. Up to now, several companies already have succeeded in the development of the capacitive sensors system and they are commercially available in the market. In this research, to construct the signal processing circuits more easily and simply, we used a universal LVDT signal conditioner (AD698). Since the AD698 provides one chip solution for a basic signal processing including modulation and demodulation using various internal components, we can build the processing circuits successfully with minimal additional circuits: a compensation circuits for the drift caused by the bias current of OP amplifiers and a fine adjustment circuit for the elimination of nonlinearity. The signal processing circuits shows nonlinearity less than 0.05% in the comparison with a laser interferometer.

• 센서학회지
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• 제14권4호
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• pp.265-271
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• 2005

In this study, a variable capacitive pressure sensor is fabricated for TPMS (Tire Pressure Monitoring System). This study is for developing sensors which consecutively measure the tire pressure given as 30 psi from the industrial standard. For improving non-linearity of the prior capacitive pressure sensors, it is suggested that touch mode capacitive pressure sensor be applied. In addition, initial capacitance is designed as small as possible for the conformity to the wireless sensor. ANSYS, commercial FEA package, is used for designing and simulating the sensor. The device is progressed by MEMS (Micro Electro Mechanical Systems) fabrication and packaged with PDMS. The result is obtained sensitivity, 1 pF/psi, through a pressure test. The simulation result is discrepant from experiment one. Wafer's uniformity is presumed as the main reason of discrepancy.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2015년도 춘계학술대회
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• pp.509-512
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• 2015

본 논문에서는 유압 실린더내의 피스톤 위치를 측정하기 위한 정전용량 센서(Capacitive Sensor) 구조를 연구하였다. 기존에 유압 실린더 내 피스톤 위치 측정을 위해 인덕티브(Inductive) 방식을 응용한 LVDT(Linear Variable Differential Transformer) 센서가 사용되고 있으며, 높은 정확도를 갖지만, 고가이며 구조적으로 복잡하다는 단점이 있다. 본 논문에서는 이러한 단점을 극복하기 위한 방법으로 유압실린더 내 최적화된 구조를 바탕으로 여러 가지 비접촉 정전용량 센서 구조 방식을 연구하였다. 실험을 통하여 본 논문의 제안구조를 사용하면 유압 실린더 내 피스톤 위치측정이 가능함을 확인하였다.

• 한국정밀공학회지
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• 제24권9호
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• pp.60-67
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• 2007

A signal conditioning circuit for capacitive displacement sensors was developed using a high frequency modulation/demodulation method, and its performance was evaluated. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. The developed signal processing circuit consists of three parts: linearization, modulation/demodulation, and nonlinearity compensation. Each part was constructed discretely using several IC chips and passive elements. An evaluation system for precision displacement sensors was developed using a laser interferometer, a precision stage, and a PID position controller. The signal processing circuit was tested using the evaluation system in the respect of resolution, repeatability, linearity, and so on. From the experimental results, we know that a highly linear voltage output can be obtained successfully, which is proportional to displacement and the nonlinearity of output is less than 0.02% of full range. However, in the future, further investigation is required to reduce noise level and phase delay due to a low-pass filter. The evaluation system also can be applied effectively to calibration and evaluation of precision sensors and stages.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.483-486
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• 2003

This paper presents a small capacitance measuring circuit for capacitive sensors. The proposed circuit consists of sinewave generator, detector and demodulator. Results of experiments are shown that the circuit can be able to measure small capacitance exiting in a capacitive sensor filled with a vegetable oil. The sensitivity of the circuit is from 0.4V/pF to 4V/pF and the resolution is from 0.0025 pF to 0.00025 pF.

• 센서학회지
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• 제23권1호
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• pp.24-28
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• 2014

A lock-in amplifier was proposed for capacitive sensor applications. This amplifier was based on a general-purpose microcontroller and had only a charge amplifier as analog circuits. All the other functions of lock-in amplifier except for the charge amplifier were implemented with firmware and the internal resources of the microcontroller. A rectangular signal, generated by the microcontroller, was used in a sensor-driving signal instead of a conventional sinusoidal signal. This makes it possible that the phase comparison circuit in the lockin amplifier is made with analog-to-digital converter, a timer and an interrupt controller. Using the oversampling method and the rectangular driving signal, we can make it easy to implement the peak detection function with software and sample the peak-to-peak signal at charge amplifier output. A charge amplifier was proposed to cancel out the base capacitance existing in capacitive sensors structurally. The experimental results show that the lock-in amplifier operating in the supply voltage of 3.0 V cancels out the base capacitance and has good linearity.

• 대한기계학회논문집
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• 제19권9호
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• pp.2082-2088
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• 1995

In this paper, we designed and fabricated the magnetic bearings and built-in type cylindrical capacitive transducers for improving the vibration characteristics of rotating shaft. The eddy current and magnetic field from the electromagnet of the bearing don't affect the measuring signal of the capacitive type transducers so that it is possible to locate the capacitive sensor plates around the magnetic bearing poles and can improve the spillover problem which is induced by the noncollocation of the sensors and actuators. According to the sensitivity calibration schemes using a X-Y table, the cylindrical capacitive transducers have a good linearities in the .+-.70.mu.m range from the geometric center of the sensor plates. The measured results also show high displacement sensitivities of the sensors. According to the performance test of the magnetic bearing which is controlled by the analog PD controllers, we found that the built-in capacitive transducer system successfully measures the journal displacement in the magnetic field and therefore the magnetic bearing system supports the rotating shaft up to 12,000 rpm.

• 센서학회지
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• 제19권4호
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• pp.271-277
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• 2010

Intravenous(IV) drip therapy is extensively used for all kinds of treatments. It works by delivering medicine directly into the vein. When the medicine has been fully dispensed, a dangerous situation occurs since air in the IV drip bag could enter the patient's vein, which is hazardous to the patient’s safety. In this paper, using capacitive sensors to detect the residual quantity of a plastic IV drip pack is proposed. A simulation model of this technology was shown by a finite elements analysis(FEA) program to find out its feasibility and analyze the proper geometrical dimension of a capacitive sensor. According to the FEA simulation, 3 kinds of capacitive sensors were attached to the bottom surface of the plastic IV drip bag to detect the residual quantity in the experiment. Experimental data showed an agreement with the FEA simulation model estimation and confirmed that the sensor works.

• 한국정보통신학회논문지
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• 제10권10호
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• pp.1835-1841
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• 2006

해양환경 규제 MEPC의 규제 강화로 인하여 더욱 정밀하고, 신뢰성을 확보한 빌지분리 센서 시스템이 필요하다. 빌지 분류기를 설계 제작하기 위해서는 기름과 물을 구별하는 정밀한 유수분리 레벨센서가 필요하다. 이를 위하여 본 연구에서는 정전용량형 레벨센서의 특성 파악을 위해 3차원 시뮬레이션을 수행하여 특성을 파악하였으며, 이를 토대로 레벨센서의 설계시 주요한 설계인자를 추출하였다. 동작회로를 Digital 회로로 구성함으로써, 정전용량형 센서의 원천적인 기생커패시턴스 문제를 해결하였으며, 실험장치를 구성한 후 실험을 수행하였다. 실험 결과를 보면 노이즈에는 강인해졌음을 알 수 있었다. 그리고 추출한 정전용량형 레벨센서의 설계인자를 이용하여 정밀도를 향상시키기 위한 연구가 향후에 진행 될 필요성이 있다.