• 센서학회지
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• 제13권4호
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• pp.287-291
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• 2004

A capacitive type humidity sensor has been fabricated using a polyimide film without hydrophobic elements and its characteristics has been evaluated for hermeticity measurement of micro packages. For a highly sensitive humidity sensor, a polyimide film without hydrophobic elements has been synthesized and used instead of using a commercial one in which 7 group elements such as fluorine or chlorine are included. Sensitivity, stability and hysteresis has been performed to characterize the fabricated sensors. The sensitivity defined as normalized percent capacitance change was 0.3751%RH and hysteresis was 0.77% in the range of 10%RH to 90%RH. Maximum deviation from the average capacitance measured for 120 minutes at 50%RH was 0.25%. The proposed humidity sensor can be used for hermeticity measurement of micro packages.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1388-1390
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• 1994

A polyimide-based capacitive humidity sensor has been designed and fabricated using silicon integrated-circuit technology, and its performance measured. The sensor showed excellent linearity, low temperature coefficient, and low hysteresis over a wide range of relative humidity and temperature. The signal conditioning circuits for detecting relative humidity and converting it to voltage have been developed based on a charge redistribution between capacitors using switched -capacitors.

• 폴리머
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• 제30권3호
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• pp.207-209
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• 2006

ITO 코팅 글라스를 기판으로 사용하고 폴리(페닐렌에테르설폰)(PES)을 감습막으로 하여 정전용량형 습도센서를 제작하였다. 감습막은 PES를 m-cresol에 용해한 후 스핀코팅으로 제조하였고 그 상부에 다공성 Au막을 스퍼터링으로 증착하였다. 상대습도 $20\sim90%$의 범위에서 센서의 용량은 감습막두께에 반비례하였고 1% 미만의 비선형 특성을 나타내었다. 또한 $1.4{\mu}m$ 두께의 샘플에서는 20 kHz에서 1.3%의 히스테리시스와 1.14의 우수한 감도를 얻을 수 있었다.

• 산업기술연구
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• 제34권
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• pp.39-43
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• 2014

This paper represents a highly porous MWCNT film electrode with interconnected open pores and demonstrated the possibility of using an MWCNT network film as the top electrode for polyimide capacitive humidity sensors. Polyimide humidity sensors with MWCNT electrodes exhibited about 6 times faster response than equivalent Cr electrode sensors. This result may be due to their percolated pore structures, which make water molecules accessible to all polyimide surfaces. The much faster response times of MWCNT electrode sensors is attributed to the percolated pore network, which allows more water molecules to be accessible to polyimide surfaces.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 2004년도 추계학술대회 학술발표 논문집 제14권 제2호
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• pp.515-520
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• 2004

In this paper, a passive telemetry RF capacitive humidity sensor system using a RLSE(Recursive Least Square Estimation) technique is proposed. To overcome these trouble problems such as a power limitation and a estimation complexity that the general passive telemetry sensor system including It chip has, the principle of inductive coupling was applied to the modeling of a passive telemetry RF capacitive humidity sensor system and its capacitance was estimatedd by the RLSE algorithm. Specially, by introducing the optimal forgetting factor, we showed that the accuracy of its estimation was improved even in the time varying system and also the convergence time was reduced.

• 전기학회논문지
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• 제57권5호
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• pp.858-865
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• 2008

In this paper, Capacitive Telemetry RF Sensor System using Recursive Least Square (RLS) algorithm was proposed. General Telemetry RF Sensor System means that it should be "wireless", "implantable" and "batterless". Conventional Telemetry RF Sensor System adopts Integrated Circuit type, but there are many defects like complexity of structure and the limitation of large power consumption in some cases. In order to overcome these disadvantages, Telemetry RF Sensor System based on inductive coupling principle was proposed in this paper. Proposed Telemetry RF Sensor System is very simple because it consists of R, L and C and measures the changes of environment like pressure and humidity in the type of capacitive value. This system adopted RLS algorithm for estimation of this capacitive parameter. For the purpose of applying RLS algorithm, proposed system was mathematically modelled with phasor method and was quasi-linearized. As two parameters such as phase and amplitude of output voltage for estimation were needed, Phase Difference Detector and Amplitude Detector were proposed respectively which were implemented using TMS320C2812 made by Texas Instrument. Finally, It is verified that the capacitance of proposed telemetry RF Sensor System using RLS algorithm can be estimated efficiently under noisy environment.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 C
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• pp.1209-1212
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• 1995

This paper presents a capacitive humidity sensor using porous silicon layers formed tom the anodization of p-type silicon in HF solution. The upper electrodes consist of many aluminum strips over porous silicon, between which the porous silicon is etched away. The sensor showed a good sensitivity(20pF/%RH) and lineaity in the range of 40%RH$\sim$80%RH, a hysteresis of ${\pm}2%$ RH, and a slow transient response. These preliminary resluts show that futher improvement can still be expected.

• 센서학회지
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• 제24권5호
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• pp.287-290
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• 2015

Liquid crystal polymer (LCP) is a thermoplastic polymer with superior mechanical and thermal properties. In addition, its characteristics include very low water absorption rate and possibility to apply bonding process under low temperature. In this study, LCP is utilized as a packaging material for a microelectronic system (MEMS) based safety device with suggestion of a low temperature packaging process. Highly sensitive and stable capacitive type humidity sensor is fabricated to investigate hermeticity of the packaged MEMS device.

• 전기학회논문지
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• 제57권10호
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• pp.1861-1868
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• 2008

In this paper, Passive Telemerty RF Sensor System using Unscented Kalman Filter algorithm(UKF) is proposed. General Passive Telemerty RF Sensor System means that it should be "wireless", "implantable" and "batterless". Conventional Passive Telemerty RF Sensor System adopts Integrated Circuit type, but there are defects like complexity of structure and limit of large power consumption in some cases. In order to overcome these kinds of faults, Passive Telemetry RF Sensor System based on inductive coupling principle is proposed in this paper. Because passive components R, L, C have stray parameters in the range of high frequency such as about 200[KHz] used in this paper, Passive Telemetry RF Sensor System considering stray parameters has to be derived for accurate model identification. Proposed Passive Telemetry RF Sensor System is simple because it consists of R, L and C and measures the change of environment like pressure and humidity in the type of capacitive value. This system adopted UKF algorithm for estimation of this capacitive parameter included in nonlinear system like Passive Telemetry RF Sensor System. For the purpose of obtaining learning data pairs for UKF Algorithm, Phase Difference Detector and Amplitude Detector are proposed respectively which make it possible to get amplitude and phase between input and output voltage. Finally, it is verified that capacitive parameter of proposed Passive Telemetry RF Sensor System using UKF algorithm can be estimated in noisy environment efficiently.

• 대한전자공학회논문지SD
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• 제46권6호
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• pp.25-30
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• 2009

본 논문에서는 터치키에 응용할 수 있는 풀 디지털 방식의 정전용량 센싱 기법을 제안한다. 제안된 회로는 측정하고자 하는 정전용량 두 개와 두 정전용량 사이 저항으로 구성된다. 각 정전용량과 저항으로 지연을 측정한 후 두 지연의 차이로 측정하고자 하는 두 정전용량의 차이를 구하는 방식으로 동작전압, 온도, 습도와 같은 동작환경변화의 영향을 완화시킬 수 있는 장점이 있다. 실험결과 제안된 방식의 정전용량 해상도가 1.02pF이어서 터치키에 적용할 수 있음을 보였다.