Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1995.07c
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- Pages.1209-1212
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- 1995
A Porous Silicon-Based Capacitive Humidity Sensor
다공질 실리콘 산화막을 이용한 용량형 습도 센서
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Min, Nam-Ki
(Korea University) ;
- Chin, Min-Suk (Korea University) ;
- Ahn, Kwang-Ho (Mando Machinery Co.)
- Published : 1995.07.20
Abstract
This paper presents a capacitive humidity sensor using porous silicon layers formed tom the anodization of p-type silicon in HF solution. The upper electrodes consist of many aluminum strips over porous silicon, between which the porous silicon is etched away. The sensor showed a good sensitivity(20pF/%RH) and lineaity in the range of 40%RH
Keywords