• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1381-1384
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• 2005

In these days, the piezoresistive material has been applied to various sensors in order to measure the change of physical quantities. But the relationship between the sensitivity of a sensor and the position and size of piezoresistor has rarely been studied. Therefore, this paper was focused on the distribution of the resistance change ratio on the diaphragm and bridge surface where piezoresistor would be formed, and proposed the proper size and position of piezoresistor with which the sensitivity of sensor was increased. As the width of mass and boss was increased, the distance between piezoresistors was closed and the maximum value of resistance change ratio was decreased by the increase of the structure stiffness. And according to the increment of seismic mass size, the value of resistance change ratio is decreased by increase of the structure stiffness. Y directional piezoresistor is formed in the position of $100\mu{m}\;apart\;from\;cantilever\;edge\;and\;length\;of\;that\;is\;800\mu{m}$.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.24-29
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• 2005

Silicon nitride cantilevers integrated with silicon heaters and piezoelectric sensors were developed for the scanning probe microscope (SPM) based data storage application. These nitride cantilevers are expected to have better mechanical stability and uniformity of initial bending than the previously developed silicon cantilevers. Data bits of 40 nm in diameter were recorded on PMMA film and the sensitivity of the piezoelectric sensor was 0.615 fC/nm, meaning that indentations less than 20 nm in depth can be detected. For high speed operation, $128{\times}128$ cantilever array was developed.

• Journal of IKEEE
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• v.19 no.1
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• pp.52-57
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• 2015

The disease diagnosis system has been developed using the thin nitride(Si3N4) cantilever arrays which can measure the difference of capacitances between sensor and reference. The system consists of 32-bits RISC(Reduced Instruction Set Computer), RAM/Flash, bus, communication IP's, ADC(Analog Digital Converter) board, and LCD display. The marker selection method, which give us the good accuracy from reasonal numbers of markers, is suggested. The developed system has the resolution under 1fF and can detect 10nM concentration of Thrombin.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.5
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• pp.416-421
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• 2011

Nowadays, the increasing demands upon mobile devices such as wireless sensor networks and the recent advent of low power electrical devices such as MEMS make such renewable power sources attractive. A vibration-driven MEMS lead zirconate titanate $Pb(Zr,Ti)O_3$ (PZT) cantilever device is developed for energy harvesting application. This paper presents a piezoelectric based energy harvester which is suitable for power generating from conventional vibration and has in providing energy for low power electron ic devices. The PZT cantilever is used d33 mode to get the electrical power. The PZT cantilever based energy harvester with the dimension of 7 mm${\times}$3 mm${\times}$0.03 mm is fabricated using micromachining technologies. This PZT cantilever has the mechanical resonance frequency with a 900 Hz. With these conditions, we get experimentally the 37 uW output power from this device with the application of 1g acceleration using the 900 Hz vibration. From this study, we show the feasibility of one of energy harvesting candidates using PZT based structure. This PZT energy harvester could be used for various applications such a batteryless micro sensors and micro power generators.

• 한국가시화정보학회:학술대회논문집
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• 2002.04a
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• pp.1-7
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• 2002

This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.11
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• pp.22-29
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• 2008

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.3
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• pp.187-192
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• 2017

This paper presents an ongoing study to develop a novel pressure sensor by means of a Nano Carbon Piezoresistive Composite (NCPC). The sensor was fabricated using the 3D printing process. We designed a miniaturized cantilever-type sensor electrode to improve the pressure sensing performance and utilized a 3D printer to build a small-sized body. The sensor electrode was made of 2 wt％ MWCNT/epoxy piezoresistive nano-composite, and the sensor body was encapsulated with a pipe plug cap for easy installation to any pressure system. The piezoresistivity responses of the sensor were converted into stable voltage outputs by using a signal processing system, which is similar to a conventional foil strain gauge. We evaluated the pressure-sensing performances using a pressure calibrator in the lab environment. The 3D-printed cantilever electrode pressure sensor showed linear voltage outputs of up to 16,500 KPa, which is a 200％ improvement in the pressure sensing range when compared with the bulk-type electrode used in our previous work.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.04a
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• pp.45-48
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• 2007

Conventional force sensors such as piezoelectric sensor has limitations for measuring micro/nano-scale thrust. In this study we developed nano-scale measurement system using laser displacement sensor and cantilever. And electrospray microthruster was fabricated by using stainless capillary and extraction electrode, to generate nano-scale thrust. The measurement system can measure the around 90 nN thrust from this thruster. In addition, we designed and fabricated electrospray micro thruster based on PMMA(Polymethyl methacrylate), which has a nozzle protruded from the substrate.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.1
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• pp.263-270
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• 1995

The use of the shape memory alloy, Nitinol wire, is investigated as an actuator for enhancing the damping in structural vibration systems. The first-order mathematical model of the Nitinol wire is obtained from the experimental data for an actuator. Finite element method is utilized for the strain gage sensor model, which is installed at the root of cantilever beam. A simple system, cantilever beam, is built as a flexible structural system to implement a control law with the Nitinol wire actuator. The system model including sensor and actuator is derived, which agrees with the experimental results. The actuator dynamics is augmented with the system so as to design PI controller and the one of robust controllers, LQG/LTR controller, and the control laws are implemented experimentally. The experimental study shows the feasibility of utilizing the Nitinol wire as an actuator for the purpose of vibration control.

• KIEE International Transaction on Systems and Control
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• v.2D no.2
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• pp.65-71
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• 2002

In this paper, an experiment for the active vibration control of a cantilever beam uses electromagnet as an actuator and uses a laser sensor to measure the position of the bending beam, constituting a non-contacting control system. A mathematical model of the overall system is derived to analytically design an appropriate controller. Dynamic equations of the electromagnetic actuator and the beam are combined to find the transfer function from the actuator to the sensor. The effectiveness of the obtained model is verified by various experiments and an improper PID controller is designed based on the obtained model. According to analysis, the coefficient of the derivative controller is the most important parameter for handling the performance and the stability margin of the control system. The experimental results of the active control system are compared with those of the open loop system.