• 제목/요약/키워드: c-axis oriented

검색결과 225건 처리시간 0.024초

퇴적 온도와 열처리에 따른 SiC에 퇴적된 Ga 도핑된 ZnO의 구조 및 전기적 특성 (Deposition Temperature and Annealing Temperature Dependent Structural and Electrical Properties of Ga-doped ZnO on SiC)

  • 이정호;구상모
    • 한국전기전자재료학회논문지
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    • 제25권2호
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    • pp.121-124
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    • 2012
  • The characteristics of Ga-doped zinc oxide (GZO) thin films deposited at different deposition temperatures (TS~250 to $550^{\circ}C$) on 4H-SiC have been investigated. Structural and electrical properties of GZO thin film on n-type 4H-SiC(0001) were investigated by using x-ray diffraction(XRD), atomic force microscopy(AFM), Hall effect measurement, barrier height from I-V curve and Auger electron spectroscopy(AES). XRD $2\theta$ scan shows GZO thin film has preferential orientation with c-axis perpendicular to SiC substrate surface. The lowest resistivity ($\sim1.9{\times}10^{-4}{\Omega}cm$) was observed for the GZO thin film deposited at $400^{\circ}C$. As deposition temperature increases, barrier height between GZO and SiC was increased. Whereas, resistivity of GZO thin films as well as barrier height between GZO and SiC were increased after annealing process in air atmosphere. It has been found that the c-axis oriented crystalline quality as well as the relative amount of activated Ga3+ ions and oxygen vacancy may affect the electrical properties of GZO films on SiC.

FePt/MgO(100) 자성박막의 결정화 연구 (Crystallization of FePt/MgO(100) magnetic thin films)

  • 정지욱;조태식;이민수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.278-279
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    • 2005
  • The crystallization of FePt/MgO(100) magnetic thin films of various thicknesses has been studied using synchrotron x-ray scattering, atomic force microscope, and vibrating sample magnetometer. In film with a 500-${\AA}$-thick, ordered (fct) FePt phase was dominantly crystallized into perpendicular (001) grains keeping the magnetically easy c-axis normal to the film plane during annealing. In film with a 812-${\AA}$-thick, however, longitudinal (110) grains keeping the c-axis parallel to the film plane were grown on top of the perpendicular (001) grains. The behavior of the magnetic properties was consistent with the thickness dependence of the crystallization. We attribute the thickness dependence of the crystallization to the substrate effect, which prefers the growth of the c-axis oriented perpendicular grains near the film/substrate interfacial area.

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Magnetic Orientations of Bull Sperm Separated into Head and Flagellum Treated by DTT or Heparin

  • Suga, D.;Shinjo, A.;Kurnianto, E.;Nakada, T.
    • Asian-Australasian Journal of Animal Sciences
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    • 제13권2호
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    • pp.167-175
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    • 2000
  • This paper describes the magnetic orientation of bull sperm separated into the head and the flagellum treated by DTT or heparin in a 5,400G static field. Semen samples collected from four bulls (Japanese Black) were mixed to the same sperm density. One percentage triton X-100 was used to extract the plasma membrane. The intact and demembranated sperm suspensions were treated with 20, 200, 2,000 mM DTT, 100, 1,000 or 10,000 units heparin solutions at $4^{\circ}C$ for 6 days. The decondensation of the sperm nuclei treated by DTT or heparin was examined by measuring the head area at 1, 3 and 6 days. After measuring the area, each sample was exposed to a 5,400G static magnetic field generated by Nd-Fe-B permanent magnets for 24 hours at room temperature. Results showed that the sperms were separated into the head and the flagellum through the DTT treatment. Almost of the separated heads showed that their long axis oriented perpendicularly to the magnetic lines of force, and most of the long axis perpendicularly oriented heads showed that their flat plane oriented perpendicularly in a 5,400G magnetic field. Also, the demembranation of the head tended to increase those perpendicular orientations, while those perpendicular orientations of the head declined with the decondensation of the sperm nuclei. These findings suggest that strong magnetic anisotropy for the perpendicular orientation of the long axis and the flat plane of the head occurs in the sperm nuclei in a 5,400G magnetic field. The separated flagellum showed lower parallel orientation, and the separated and demembranated flagellum showed parallel orientation to the magnetic lines of force in this magnetic field. These findings suggest that weak magnetic anisotropy of the parallel orientation of the flagellum occurs in the inside components in a 5,400G field.

새로운 단일 전구체를 이용한 AIN 박막의 제조 (Preparation of AlN Thin Film with New Type of Single Precursor)

  • 최승철;안창규;한성환
    • 한국세라믹학회지
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    • 제38권8호
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    • pp.761-764
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    • 2001
  • 새로운 AlN 박막 제조용 단일 전구체로 AlCl$_3$: $^{t}$ BuNH$_2$을 합성하였다. c축으로 배향된 AlN 박막을 80$0^{\circ}C$에서 사파이어(0006) 단결정 위에 MOCVD 공정으로 증착시켰다. 본 전구체를 사용함으로 박막내의 잔류탄소 및 산소의 오염을 크게 낮출수 있었으며 Al:N의 비율이 1:1인 화학량론비의 AlN 박막을 제조할 수 있었다. 단일 전구체의 결정 구조는 단결정 X선 구조분석과 원소분석을 통하여 규명하였으며 박막분석은 SEM, XRD, SEM, AFM과 RBS 등으로 행하였다.

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Transparent Conducting ZnO:$Ga_2O_3$ Thin Films Grown by r.f. Magnetron Sputtering

  • Lee, Yong-Eui;Yun, Sun-Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.822-824
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    • 2002
  • Transparent conducting ZnO:$Ga_2O_3$ thin films were deposited on glass substrates using rf magnetron sputtering method. The ZnO:$Ga_2O_3$ thin films were highly c-axis oriented normal to the substrates and had smooth surface features. The sheet resistance of the films was 2.8-6.4 ${\Omega}/{\square}$ at the growth temperature ranging from 25 to 30$^{\circ}C$.

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개량형 대향타겟스퍼터장치에 의한 Co-Cr 박막의 미세구조 (Microstructure of Co-Cr Thin Films Deposited by Improved Facing Targets Sputtering System)

  • 김경환;손인환;김명호;김재환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.363-366
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    • 1998
  • Shuttered Co-Cr thin films have been developed continuously as one of the major candidates for high density recording media. In this study, Co-26at%Cr thin films with c-axis oriented h.c.p. structure prepared by a improved facing targets sputtering system. We find that the effect of microstructural changes of sputtered Co-Cr thin films on magnetic properties and changes of crystal orientation due to variation substrate temperature.

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Sol-Gel 법으로 제작한 Zn1-xCoxO 박박의 미세조직 및 자기적 특성 (Microstructure and Magnetic Properties of Zn1-xCoxO Thin Films Grown by Sol-Gel Process)

  • 고윤덕;태원필;김응권;김기출;최춘기;김종민;송준태;박태석;서수정;김용성
    • 한국세라믹학회지
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    • 제42권7호
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    • pp.475-482
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    • 2005
  • Zn$_{l-x}$Co$_{x}$O (x = 0.05 - 0.20) films were grown on Coming 7059 glass by sol-gel process. A homogeneous and stable Zn$_{l-x}$Co$_{x}$O sol was prepared by dissolving zinc acetate dihydrate (Zn(CH$_{3}$COO)$_{2}$$\cdot$2H$_{2}$O), cobalt acetate tetrahydrate ((CH$_{3}$)$_{2}$$\cdot$CHOH) and aluminium chloride hexahydrate (AlCl$_{3}$ $\cdot$ 6H$_{2}$O) as solute in solution of isopropanol ((CH$_{3}$)$_{2}$$\cdot$CHOH) and monoethanolamine (MEA:H$_{2}$NCH$_{2}$CH$_{2}$OH). The films grown by spin coating method were postheated in air at 650°C for 1 h and annealed in the condition of vacuum (5 $\times$ 10$^{-6}$ Torr) at 300$^{\circ}C$ for 30 min and investigated the nature of c-axis preferred orientation and physical properties with different Co concentrations. Znl_xCOxO thin films with different Co concentrations were well oriented along the c-axis, but especially a highly c-axis oriented Zn$_{l-x}$Co$_{x}$O thin film was grown at 10 at$\%$ Co concentration. The transmittance spectra showed that Zn$_{l-x}$Co$_{x}$O thin films occur typical d-d transitions and sp-d exchange interaction became activated with increasing Co concentration. The electrical resistivity of the films at 10 at$\%$ Co had the lowest value due to the highest c-axis orientation. X-ray photoelectron spectroscopy and alternating gradient magnetometer analyses indicated that no Co metal cluster was formed, and the ferromagnetic properties appeared, respectively. The characteristics of the electrical resistivity and room temperature ferromagnetism of Zn$_{l-x}$Co$_{x}$O thin films suggested the possibility for the application to dilute magnetic semiconductors.

A Feasibility Study of Nano-grained ZnO Piezoelectric Thin Film Fabrication

  • Zhang, Ruirui;Lee, Eun-Ju;Yoon, Gi-Wan
    • Journal of information and communication convergence engineering
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    • 제7권4호
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    • pp.530-534
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    • 2009
  • C-axis-oriented ZnO thin films were successfully deposited on p-Si (100) in an RF magnetron sputtering system. Deposition conditions such as deposition power, working pressure, and oxygen gas ratio $O_2/(O_2+Ar)$ were varied. Crystalline structures of the deposited ZnO films were investigated by a scanning electron microscope (SEM) technique. Results show that the deposition parameters can have a strong impact on the preferred orientations and grain sizes of the deposited ZnO films.

Characterization of Nano-Grained ZnO Piezoelectric Thin Films Deposited under Various Sputtering Conditions

  • Zhang, Ruirui;Lee, Eunju;Yoon, Giwan
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2009년도 추계학술대회
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    • pp.428-430
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    • 2009
  • 본 논문은 RF 마그네트론 스퍼터링 시스템을 이용하여 p-Si (100) 기판위에 증착된 C축 배향을 가지는 ZnO 박막의 특성을 분석하고 있다. 증착 전력, 공정 압력, 반응가스로 사용된 산소 가스의 비율과 같은 증착 조건들을 변화시켰을 때, ZnO 박막의 결정구조의 변화를 분석한다. 증착된 ZnO 박막의 결정 구조는 주사 전자 현미경(scanning electron microscope, SEM)을 이용하여 조사되었다. 분석 결과 증착 파라미터들은 증착된 ZnO 박막의 결정(grain) 크기와 배향 특성에 강한 영향을 미친다는 사실을 알 수 있다.

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Origin of High Critical Current density in $MgB_2$ thin films

  • Kang, W.N.;Kim, Hyeong-Jin;Park, Eun-Mi;Kim, Mun-Seong;Kim, Kijoon H. P.
    • Progress in Superconductivity
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    • 제3권2호
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    • pp.135-139
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    • 2002
  • We have fabricated high-quality c-axis-oriented $MgB_2$ thin films by using a pulsed laser deposition technique. The thin films grown on (1 1 0 2) $Al_2$$O_3$ substrates show an onset transition temperature of 39.2 K with a sharp transition width of ~0.15 K. X-ray diffraction patterns indicate a c-axis-oriented crystal structure perpendicular to the substrate surface. We observed high critical current densities ($J_{c}$) of ~ 16 $MA/\textrm{cm}^2$ at 15 K and under self-field, which is comparable to or exceeds those of cuprate high-temperature superconductors. The extrapolation $J_{c}$ at 5 K was estimated to be ~ 40 MA/$\textrm{cm}^2$, which is the highest record for $MgB_2$ compounds. At a magnetic field of 5 T, the $J_{c}$ of~ 0.1 $MA/\textrm{cm}^2$ was detected at 15 K, suggesting that this compound is very promising candidate for the practical applications at high temperature with lower power consumption. As a possible explanation for the high current-carving capability, the vortex-glass phase will be discussed.d.d.d.

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