• Title/Summary/Keyword: beam quality

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Enhanced LTPS Manufacturing Equipment employing Excimer Laser Crystallization

  • Herbst, Ludolf;Simon, Frank;Rebhan, Ulrich;Geuking, Thorsten;Klaft, Ingo;Fechner, Burkhard
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1123-1126
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    • 2005
  • For creation of low temperature polycrystallinesilicon (LTPS) the line beam excimer laser annealing (ELA) is a well known and established technique in mass production. With introduction of Sequential Lateral Solidification (SLS) some aspects such as crystalline quality, throughput and flexibility regarding the substrate size could be improved, but for OLED manufacturing still further process development is necessary. This paper discusses line beam ELA and SLS techniques that might enable process engineers to make polycrystalline-silicon (poly-Si) films with a high degree of uniformity and quality as required for system on glass (SOG) and active matrix organic light emitting displays (AMOLED). Equipment requirements are discussed and compared to previous standards. SEM images of process examples are shown in order to demonstrate the viability.

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Dynamic Characteristic Improvement of Laser Scanning Unit for Laser Beam Printer (레이저 프린터용 광스캔유닛(LSU) 의 동특성 개선)

  • 조문선;차덕순
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2001.05a
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    • pp.189-193
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    • 2001
  • The performance of printer can be determined by the printing speed, noise level, printing quality which includes the resolution, regularity of printed matter and etc. Among them, printing quality mostly depends on the irregularity of the line spacing and dot size. The irregular line spacing and dot size in laser beam printer are mainly from the jitter which comes from the vibration of Organic Photo Conductive(OPC) drum and the Laser Scanning Unit(LSU). Jitter due to the vibration of LSU appears as high-frequency component which occurs 100-300$\mu\textrm{m}$ interval in printed matter and the causes of it can be estimated as the vibration of polygon motor, case, reflecting mirror and etc. In this paper, vibration characteristics of the LSU under development are investigated and the strategy for improvement of the dynamic characteristics is established and its validity is demonstrated.

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Molecular beam epitaxial growth and characterization of Sb .delta.-doped Si layers using substrate temperature modulation technique (저온 변조 성장 기법을 이용하여 Sb가 ${\delta}$ 도핑된 다층 구조의 Si 분자선 박막 성장과 특성 분석)

  • Le, Chan ho
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.32A no.12
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    • pp.142-148
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    • 1995
  • Sb ${\delta}$-doped Si layers were grown by Si MBE (Molecular Beam Epitaxy) system using substrate temperature modulation technique. The Si substrate temperatures were modulated between 350$^{\circ}C$ and 600$^{\circ}C$. The doping profile was as narrow as 41$\AA$ and the doping concentration of up to 3.5${\times}10^{20}cm^{3}$ was obtained. The film quality was as good as bulk material as verified by RHEED (Reflected High Energy Electron Diffraction), SRP (Spreading Resistance Profiling) and Hall measurement. Since the film quality is not degraded after the growth a Sb ${\delta}$-doped Si layer, the ${\delta}$-doped layers can be repeated as many times as we want. The doping technique is useful for many Si devices including small scale devices and those which utilize quantum mechanical effects.

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Multi-kilowatt Single-mode Ytterbium-doped Large-core Fiber Laser

  • Jeong, Yoon-Chan;Boyland, Alexander J.;Sahu, Jayanta K.;Chung, Seung-Hwan;Nilsson, Johan;Payne, David N.
    • Journal of the Optical Society of Korea
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    • v.13 no.4
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    • pp.416-422
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    • 2009
  • We have demonstrated a highly efficient cladding-pumped ytterbium-doped fiber laser, generating $>$2.1 kW of continuous-wave output power at 1.1 μm with 74% slope efficiency with respect to launched pump power. The beam quality factor ($M^2$) was better than 1.2. The maximum output power was only limited by available pump power, showing no evidence of roll-over even at the highest output power. We present data on how the beam quality depends on the fiber parameter, based on our current and past fiber laser developments. We also discuss the ultimate power-capability of our fiber in terms of thermal management, Raman nonlinear scattering, and material damage, and estimate it to 10 kW.

Determinationof Optimal Cutting Condition for High Quality Cutting Surface (표면품질 향상을 위한 레이저 절단조건)

  • 황경현
    • Proceedings of the Optical Society of Korea Conference
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    • 1990.02a
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    • pp.37-41
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    • 1990
  • The quality of cutting surface such as surface roughness, heat affected zone, serf width can be improved by controlling the parameters of cuting process. These parameters includes cutting velocity, laser beam power, material depth and assistant gas. Thermodynamic analysis and systematical experiments are attempted to pedict and determine the optimal cutting condition. There exists the optimal cutting condition to ensure high quality surface. Under this operation, the minimum surface roughness of the mild steel, the stainless steel and the titanium becomes 3.8${\mu}{\textrm}{m}$ 13${\mu}{\textrm}{m}$ and 10${\mu}{\textrm}{m}$ respectively.

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Characteristics of Surface Hardened Press Die Materials by CO2 Laser Beam Irradiation (CO2 레이저 빔 조사에 의한 프레스 금형재료의 표면경화 특성)

  • Yang, Se-Young;Choi, Seong-Dae;Choi, Myeong-Soo;Jun, Jae-Mok
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.10 no.1
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    • pp.31-37
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    • 2011
  • Recently, the technology of surface treatment is being more important which affects the material cost reduction and substitution to the expensive material. The material used for the mechanical processing should have not only high intensity, but also strength toughness, wear resistance and corrosion resistance. In order to increase the durability and have better quality of the parts using such kind of tooling material, various kinds of research of the surface hardening through many kinds of heat resources is being done and practically applied. In this study, the characteristics of hardening surface zone for high strength of the press die material through laser beam irradiation are researched. In this study, it is experimentally observed by the status of the surface morphology, tensile strength, the hardness distribution of the base metal and wear condition by the surface hardness pattern by the laser beam based on the process parameters of $CO_2$ laser by using SM45C and STD11 used for press tool. Through this research, the characteristics of surface hardened zone for high strength of the thin metal by laser beam irradiation is done.

The study for the forming technology of Automobile Bumper beam using the Tailored Blank of Mash Seam Welding (매쉬심 합체박판을 이용한 자동차 Bumper beam의 성형기술에 관한 연구)

  • Shin W.G.;Lee S.H.;Kim E.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1376-1380
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    • 2005
  • In recent automotive industry, vehicle weight can be reduced by one-step forming of tailored blanks welded with two or more sheets of metal blanks. Tailored blank(TB) welding is a production method for blanks involving welding together materials of different quality, thickness, and coating, and has proved popular in fabrication automotive parts. This paper deals with the forming characteristics of mash seam welded tailored blanks. Using these forming characteristics, the bumper beam was developed using the mash seam welded tailored blank with the different thickness. We performed the forming simulation with respect to strain distribution on blank during the stamping of the bumper rail part. Based on these results, we made some stamping tryouts with selected types of blank designs to investigate the formability of tailored blank with different thickness. During the tryouts, we knew that it was important the BHF(Blank Holding Force). We obtained to reducing 10.5% weight and cost with adapting the bumper beam of automotive component using the tailored blank of mash seam welding.

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Monte Carlo Simulation for Electron Contamination of Photon Beam (치료용 광자선의 전자오염에 대한 몬테카를로 시뮬레이션)

  • Chung, Kap-Soo;Ko, Shin-Kwan;Yang, Han-Joon;Han, Chang-Yul
    • Journal of radiological science and technology
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    • v.22 no.2
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    • pp.47-51
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    • 1999
  • We calculated the energy distribution and the percentage depth-dose at 10 cm in a $10{\times}10\;cm^2$ with a photon beam at SSD of 100 cm by using a Monte Carlo Simulation. PDD is used as a beam-quality specifier for radiotherapy beams. It is better than the commonly used values of TPR or nominal accelerating potential. The presence of electron contamination affects the measurement of PDD, but can be removed by the use of a 0.1 cm lead filter. It reduces surface dose from contaminant electrons from the accelerator by more than 90% for radiotherapy beams. The filter performs best when it is placed immediately below the head. An electron-contamination correction factor is introduced to correct for electron contamination from the filter and air. It converts PDD which includes the electron contamination with the filter in place into PDD for the photons in the filtered beam. The correction factor can be used to determine stopping-power ratio. Calculations show that the values of water-to-air slopping power ratio in the unfiltered beam are related to PDD.

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Numerical Analysis of Working Distance of Square-shaped Beam Homogenizer for Laser Shock Peening

  • Kim, Taeshin;Hwang, Seungjin;Hong, Kyung Hee;Yu, Tae Jun
    • Current Optics and Photonics
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    • v.1 no.3
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    • pp.221-227
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    • 2017
  • To apply a square-shaped beam homogenizer to laser shock peening, it should be designed with a long working distance and by considering metal targets with various shapes and textures. For long working distances, a square-shaped beam homogenizer with a long depth of focus is required. In the range of working distance, the laser beam is required to have not only high efficiency but high uniformity, in other words, a good peening quality is guaranteed. In this study, we defined this range as the working distance for laser shock peening. We have simulated the effect of some parameters on the working distance. The parameters include the focal length of the condenser lens, pitch size of the array lens, and plasma threshold of the metal. The simulation was performed through numerical analysis by considering the diffraction effect.

Oscillation of Microbeam Structure with Irregular Mass Distribution

  • Kang, Seok-Joo;Kim, Jung-Hwan;Kim, Ji-Hwan
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2013.04a
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    • pp.528-532
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    • 2013
  • In this study, an analytical model of micro-beam structure including thermoelastic damping with irregularly distributed masses is investigated. The significance of thermoelastic damping for micro-scale mechanical resonators is evaluated to design -with high quality factor(Q-factor). The beam model of this work is based on Euler-Bernoulli beam theory. In order to determine the natural frequency of the model, energy method is applied. Also, the thermoelatic damping effects are considered by using heat conduction equations, and the Q-factor can be determined. To derive the equation of motion, non-dimensionalization is employed for systematic analysis. Results of the model are verified, and present mode shapes and Q-factors for the micro-beam with thermoelastic damping including random point masses.

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