• 한국정밀공학회지
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• 제12권10호
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• pp.69-77
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• 1995

This laser measurement system has been developed using He-Ne laser and photodiode. The laser beam intensity transmitted on a photodiode was disturbed by eccentrically rotating disk cam with various speeds. The photodiode and an amplifier were used to change the detected beam intensity into voltage. The digitized data through the developed system were recorded on a micro-computer by using a signal analysis program. Its reliability was ascertained by using FFT analyzer. The vibration of rotating disk cam can be analyzed by measureing the intensity change of laser beam which the results by FFT analyzer were similar to. The amplifier was devised to be able to modulate the fluctuations of laser beam. The voltage could be linearly recorded with the change of the laser beam intensity.

• 한국정밀공학회지
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• 제14권5호
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• pp.34-41
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• 1997

The dimension measurement problem of products has been a major concern in the quality control in the industrial fields. A non-contacting measurement system using the vision sensor is proposed in this paper. The system consists of a CCD camera for the image capture, a frame grabber for the acquired image processing, a laser unit for the illumination, scanning unit for the measurement, and a personal computer for the geometry computation. The slit beam which is generated by passing the laser beam through a cylin- drical lens is fired to the axial-symmetric object on the rotating plate. The image of objects reflected by the laser slit beam, acquired by the CCD camera, becomes much brighter than the other parts of objects. After the histogram of brightness for the captured image is calculated, low intensity pixels are filtered out by threshold method. The performance of proposed measurement system is obtained for several different axial symmetric objects. The proposed system is verified as a good tool for measuring axial-symmetric parts in a limited condition with a minor investment cost.

• Journal of Information Display
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• 제3권1호
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• pp.17-21
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• 2002

Measurement of the ion-induced secondary electron emission coefficient (${\gamma}_i$) for insulating films is hampered by an unavoidable charging problem. Here, we demonstrate that a pulsed ion beam technique is a viable solution to the problem, allowing for accurate measurement of ${\gamma}_i$ for insulating materials. To test the feasibility of the pulsed ion beam method, the secondary electron emission coefficient from n-Si(100) is measured and compared with the result from the conventional continuous beam method. It is found that the ${\gamma}_i$ from n-Si(100) by the ion pulsed beam measured to be 0.34, which is the same as that obtained by continuous ion beam. However, for the 1000 A $SiO_2$ films thermally deposited on Si substrate, the measurement of ${\gamma}_i$ could be carred out by the pulsed ion method, even though the continuous beam method faced charging problem. Thus, the pulsed ion beam is regarded to be one of the most suitable methods for measuring secondary electron coefficient for the surface of insulator materials without experiencing charging problem. In this report, the dependence of ${\gamma}_i$ on the kinetic energy of $He^+$ is presented for 1000 ${\AA}$ $SiO_2$ films. And the secondary electron emission coefficient of 1000 ${\AA}$ MgO e-beam-evaporated on $SiO_2/Si$ is obtained using the pulsing method for $He^+$ and $Ar^+$ with energy ranging from 50 to 200 eV, and then compared with those from the conventional continuous method.

• 대한기계학회논문집
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• 제17권5호
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• pp.1202-1207
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• 1993

본 논문에서는 삼차원형상 측정의 슬릿광 주사방법(slit beam scanning topography)의 형상측정에 응용에 대해 기술한다. 이는 광학적인 방법으로 레이저 평면광을 물체에 주사하여 얻어지는 변형된 광궤적으로부터 광삼각법(optical triangulation)과 컴퓨터비젼 기술을 응용하여 삼차원형상을 측정한다. 기존의 방법 들과 비교하여 슬릿광 주사방법은 고속의 삼차원측정이 가능하여 검사자동화에 용이 하게 적용될 수 있는 장점을 갖는다. 본 논문에서는 슬릿광 주사방법에 대한 기본원 리를 유도하며, 이를 구현할 수 있는 측정시스템의 설계와 실제 측정예를 통해 본 방법이 갖는 장단점에 관하여 검토한다.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2009년도 추계학술대회
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• pp.422-424
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• 2009

본 논문은 반도체 제조 장비 중 몰드 장비에서 슬릿빔을 이용하여 칩 적층 높이를 측정하는 방법을 연구하였다. 본 논문에서는 슬릿빔을 이용한 높이 측정 방법의 기본 원리를 응용하여 반도체 제조 장비 안에 적용하면서 칩의 적층높이 측정 성능을 높이기 위하여 두 가지 방법을 연구하였다. 첫째로, 카메라 노출 시간과 높이 측정 반복성의 관계이며, 둘째는 PCB(Printed Circuit Board)휨 현상에 대한 측정 오류 최소화를 위하여 최소자승법을 응용하여 측정 성능을 향상 시킬 수 있었다.

• 제어로봇시스템학회논문지
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• 제20권6호
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• pp.641-646
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• 2014

In this paper, we propose a controller for a ball and beam system which reduces the measurement error effect under AC and DC noise. The ball and beam system measures data through a sensor. If sensor noise is included in a controller via the feedback channel, the signal is distorted and the entire system cannot work normally. Therefore, some appropriate action for the measurement error effect is essential in the controller design. Our controller is equipped with a gain-scaling factor and a compensator to reduce the effect of measurement error in the feedback signal. Effectively, our proposed controller can reduce the AC and DC noise of a feedback sensor. We analyze the proposed controller by Laplace transform technique and illustrate the improved control performance via an experiment for a ball and beam system.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.1994-1998
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• 2005

Characteristic analysis of the depth measurement system with a laser, a camera and a rotating mirror has been done and the parameter calibration technique for it has been proposed. In the proposed depth measurement system, the laser beam is reflected to the object by the rotating mirror and again the position of the laser beam is observed through the same mirror by the camera. The depth of the object pointed by the laser beam is computed depending on the pixel position on the CCD. There involved several number of internal and external parameters such as inter-pixel distance, focal length, position and orientation of the system components in the depth measurement error. In this paper, it is shown through the error sensitivity analysis of the parameters that the most important parameters in the sense of error sources are the angle of the laser beam and the inter pixel distance. The calibration techniques to minimize the effect of such major parameters are proposed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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• pp.125-129
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• 2006

The analysis of the depth measurement system with multi-sensors (laser, camera, mirror) has been done and the parameter calibration technique has been proposed. In the proposed depth measurement system, the laser beam is reflected to the object by the rotating mirror and again the position of the laser beam is observed through the same mirror by the camera. The depth of the object pointed by the laser beam is computed depending on the pixel position on the CCD. There involved several number of internal and external parameters such as inter-pixel distance, focal length, position and orientation of the system components in the depth measurement error. In this paper, it is shown through the error sensitivity analysis of the parameters that the most important parameters in the sense of error sources are the angle of the laser beam and the inter pixel distance.

• 대한구강악안면임플란트학회지
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• 제22권4호
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• pp.210-218
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• 2018

Purpose: The purpose of this study was to investigate the validity and reproducibility of a method based on cone-beam computed tomography (CBCT) technology for the visualization and measurement of gingival soft-tissue dimensions. Material and Methods: A total of 66 selected points in soft-tissue of the ex vivo head of an adult pig were investigated in this study. For the measurement of radiographic thickness (RT), wet soft-tissue surfaces were lightly covered with barium sulfate powder using a powder spray. CBCT was taken and DICOM files were assessed for soft-tissue thickness measurement at reference points. A periodontal probe and a rubber stop were used for the measurement of trans-gingival probing thickness (TPT). After flap elevation, actual thickness of soft-tissue (actual thickness, AT) was measured. Correlation analysis and intraclass correlation coefficients analysis (ICC) were performed for AT, TPT, and RT. Results: All variables were distributed normally. Strong significant correlations of AT with RT and TPT values were found. The two ICC values between TPT vs. AT and RT vs. AT differed significantly. Conclusion: Our results indicated that correlation of RT was stronger than that of TPT with AT. We concluded that soft tissue measurement with CBCT could be a reliable method, compared to the trans-gingival probing measurement method.

• Nuclear Engineering and Technology
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• 제43권2호
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• pp.133-140
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• 2011

In this paper, a deformation measurement technology for nuclear fuel rods is proposed. The deformation measurement system includes a high-definition CMOS image sensor, a lens, a semiconductor laser line beam marker, and optical and mechanical accessories. The basic idea of the proposed deformation measurement system is to illuminate the outer surface of a fuel rod with a collimated laser line beam at an angle of 45 degrees or higher. For this method, it is assumed that a nuclear fuel rod and the optical axis of the image sensor for observing the rod are vertically composed. The relative motion of the fuel rod in the horizontal direction causes the illuminated laser line beam to move vertically along the surface of the fuel rod. The resulting change of the laser line beam position on the surface of the fuel rod is imaged as a parabolic beam in the high-definition CMOS image sensor. An ellipse model is then extracted from the parabolic beam pattern. The center coordinates of the ellipse model are taken as the feature of the deformed fuel rod. The vertical offset of the feature point of the nuclear fuel rod is derived based on the displacement of the offset in the horizontal direction. Based on the experimental results for a nuclear fuel rod sample with a formation of surface crud, an inspection resolution of 50 ${\mu}m$ is achieved using the proposed method. In terms of the degree of precision, this inspection resolution is an improvement of more than 300% from a 150 ${\mu}m$ resolution, which is the conventional measurement criteria required for the deformation of neutron irradiated fuel rods.