• 전자공학회논문지D
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• 제35D권9호
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• pp.42-47
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• 1998

현재의 전자빔 묘화의 한계를 극복할 수 있는 마이크로 전자빔 시스템의 전자 광학 렌즈를 제작하였고 전자빔 묘화실험을 통하여 이를 검증하였다. 마이크로머시닝기술을 이용하여 실리콘 전극을 제작하고 이를 양극 접합을 통해 조립하여 다층 전극의 전자 광학 렌즈를 제작하였다. 완성된 전자 광학 소자를 초고진공 챔버에 장착하여, STM(Scanning Tunneling Microscope) 팁에서 방출된 전자빔의 focusing 특성을 관찰하였으며 전자를 집속하여 리소그라피를 수행하였다. E-beam 감광막은 PMMA(Poly-methylmethacrylate)를 사용하였고 0.13㎛의 패턴을 형성시킬 수 있었다.

• 전자공학회논문지A
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• 제32A권11호
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• pp.9-16
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• 1995

In this paper, an ultrasonic phased array transducer with spherical liquid lens, which utilizes both electronic focusing by linear phased array and variable geometric focusing by spherical lens. is investigated. This system reduces the elevational beamwidth which is disadvantage of the 1-dimensional linear phased array, and adds real-time dynamic focusing capability by controlling the volume of liquid in the lens. A prototype of this transducer is constructed and tested. The experimental results are compared with those of computer simulations. The range of applications are in the hyperthermia applicators or ultrasonic image system with narrow beam and rapid scanning characterisitcs.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 추계학술대회논문집
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• pp.1015-1021
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• 2002

Optical disk is the media which is used generally in data storage device, but it has a disadvantage in the vibration by spinning and the shock. For overcoming these disadvantage, we must control the optical disk to minimize the focusing error and tacking error. The present study investigates the disk profile for minimizing the focusing error subjected to environmental shock and weight of the disk. In this study, the disk is assumed to be a cantilever beam to determine the disk profile for the minimum displacement as to the shock considering only the first mode. Also, for the optimally determined profile by ADS program this paper recalculate the robust caltilever profile by using orthogonal array and ANOM.

• 대한기계학회논문집B
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• 제32권8호
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• pp.589-596
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• 2008

An orifice type of aerodynamic lens is generally used to focus nanoparticles. However, it is impossible to focus particles smaller than 10nm in air due to flow instability of fluid in a lens. In this study, we propose a new converging-diverging type of the aerodynamic lens capable of focusing particles of 5-50nm in air. Designing factors of the lens configurations is also extracted and explained in detail through a numerical simulation. It was demonstrated that the aerosols are delivered from the entrance to the downstream of the lens system with 90% transmission efficiency. The final beam diameters are shown to be more or less 1mm in the range of particle size.

• 마이크로전자및패키징학회지
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• 제16권4호
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• pp.33-39
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• 2009

마스크리스 리소그래피(maskless lithography)에 응용하기 위한 마이크로렌즈 어레이(microlens array, MLA)가 석영의 습식 식각과 UV 접착제(UV adhesive)의 코팅을 바탕으로 개발되었다. 제작된 MLA의 초점거리는 ${\sim}45\;{\mu}m$ 정도였으며, 집광되는 광선의 초점은 ${\sim}1\;{\mu}m$로 측정되었다. MLA를 통과하며 초점을 맺은 빔(beam)의 크기 및 세기가 charge coupled device (CCD) 카메라와 빔 프로파일러(beam profiler)를 이용하여 각각 측정되었으며, 일정한 세기의 점들이 초점면에서 고르게 관찰되었다. 초점거리는 코팅된 UV 접착제의 두께에 따라 변화하였으며, UV 접착제의 두께가 두꺼울수록 짧아지는 경향을 보였다. 일반적인 마스크 얼라이너(mask aligner)를 이용한 MLA의 UV 포커싱(UV focusing)이 감광막(photoresist, PR) 상에서 실시되었으며, MLA를 통과한 빛이 감광막 위에 일정하게 집광되었다. 마스크 얼라이너와 MLA 사이의 거리 변화에 따라 감광막에 구현된 패턴 사이즈가 조절 되었다. 고온에서 오랜 시간이 지난 후에도 소자의 특성은 전혀 변함이 없었다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 추계학술대회 논문집
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• pp.215-216
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• 2009

• 한국광학회:학술대회논문집
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• 한국광학회 1990년도 제5회 파동 및 레이저 학술발표회 5th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.222-226
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• 1990

This paper represents the construction of laser beam writing system, laser lithography, using new method that guarantees convenience and accuracy in laser focusing. The X, Y translation stage using DC motors was controlled by the computer. Minimum line width of 1.6${\mu}{\textrm}{m}$ was obtained by the laser lithography system.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2008년도 춘계학술발표대회 개요집
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• pp.45-45
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• 2008

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2008년도 Asian Magnetics Conference
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• pp.256.2-256.2
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• 2008

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 2001년도 봄 학술발표회 논문집
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• pp.691-698
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• 2001

Recent trends in the construction of long span or tall building frames feature the increase use of composite members that steel and concrete is functioning together in what terms of mixed structural systems. One of such systems, RCS (reinforced concrete column and steel beam) system is introduced and closely examined focusing on bearing strength of the composite joint in this paper. The main objective of this study was to develope detail to increase bearing capacity while bearing failure is one of the two primary modes of failure in RCS system. The results show that specimens with the U-type bearing reinforcement detail developed in this study enhanced the bearing strength by 1.20-1.50. The U-type reinforcement is the effective details to increase joint bearing strength compared to others like vertical reinforcement welded to beam flanges.