• Title/Summary/Keyword: base-metal

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실리콘 기판 위에 화학적 방법으로 증착된 구리 박막의 특성 연구 (A study on copper thin film growth by chemical vapor deposition onto silicon substrates)

  • 조남인;박동일;김창교;김용석
    • 한국결정성장학회지
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    • 제6권3호
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    • pp.318-326
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    • 1996
  • 본 연구는 초고집적회로의 금속 배선으로써 보다 유용할 것으로 기대되는 구리박막의 화학적인 증착기술에 관한 것으로 precursor 물질로는 (hfac)Cu(I)VTMS ; (hevaflouoroacetylacetonate trimethyvinylsilane copper)로 명명된 금속 유기 물질을 사용하였다. 실험시스템의 초기 압력은 $10^{-6}$ Torr를 유지하고, 시스템의 챔버압력과 기판온도가 조정 가능하도록 설계, 제작되었다. 공정 조건에 따른 구리 박막 결정의 성장속도, Grain size, 전기적 성질을 측정하였다. 구리 박막을 증착하기 전에 W(tungsten) 또는 TiN(titanium nitride)이 증착되어 있는 실리콘 웨이퍼를 사용하였다. 본 연구에서는 $250^{\circ}C$이하의 상대적으로 낮은 실리콘 웨이퍼 온도에서의 실험이 가능하였으며 헬륨을 carrier gas로 사용하였는데 연구 결과 구리 박막 증착율이 $220^{\circ}C$에서 최대 $1,800\;{\AA}/분$으로 증가한 반면 표면 거칠기는 $200\;{\AA}$를 갖는 다결정 구리 박막을 관찰하게 되었다. 기판 온도가 $250^{\circ}C$이하일 때의 W(또는 TiN)과 $SiO_{2}$ 기판사이에서 구리 증착 선택성이 관찰되었으며, 최적의 기판 증착 온도는 약 $180^{\circ}C$와 반응용기 압력 0.8 Torr로 나타났다.

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수소생산을 위한 Sulfide-Iodine 공정장치용 초내식 탄탈코팅층 전착특성 (Electrodeposition Characteristics of Corrosion Resistant Tantalum Coating Layer for Hydrogen Production Sulfide-Iodine Process)

  • 이영준;김대영;한문희;강경수;배기광;이종현
    • 한국수소및신에너지학회논문집
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    • 제23권6호
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    • pp.573-580
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    • 2012
  • Corrosion resistance and basic physical properties of solid tantalum are not comparable to most of the structural metallic materials. The relative high cost and melting temperature of tantalum are obstacles to be widely applied to general engineering processes. Electrodeposition in molten salt enables compact and uniform tantalum coating. In this study, Ta was coated onto base metal (SUS316L) with different current densities (0.5, 5, $20mA/cm^2$) by using MSE (Molten Salt Electrodeposition). In this study, it showed that deposition efficiency and microstructure of Ta coating layer were strongly depended on current density. In the case of the current density of $5mA/cm^2$, densest microstructure was obtained. The current density above $5mA/cm^2$ caused non-uniform microstructure due to rapid deposition rate. Dense microstructure and intact coating layer contributed to significant corrosion resistance enhancement.

탄소나노튜브를 활용한 에너지 저장 소자에 관한 연구 (The research regarding the energy storage device which applies the carbon nanotube)

  • 김도환;강순덕
    • 정보학연구
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    • 제10권2호
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    • pp.37-45
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    • 2007
  • The multiple-ability which the structure and the physical properties which the carbon or scull tube are unique show the applicability is superior in the plane indication element which is an indispensability of information communications apparatus, the stubbornness memory element, 2nd change of air and the rough copy dosage [khay] plaque seater, the hydrogen store material and the chemical sensor back and it has the possibility which will pass over the limit which the element of existing has. from the present paper it compared in the steel and only 10 the boat it did and it analyzed against an energy storage space voluntary application and developmental apply the carbon or scull tube trend in order about under researching the effective energy storage element it could be appeared, the technique of the strong carbon nano tube. 1. The hazard which embodies the energy storage element which uses the carbon or scull tube it follows in the function which stands and CNT of the structure which is various is necessary. 2. CNT fabrications of each one must precede possible not only must be each Cabinet conference circumstances quality gain and loss. 3. The structural control of syntheses, length controls, diameter controls and the metal - CNT junction control backs of quality CNT must precede. Applies the hereafter carbon or the scull tube in the various element with the primary preceding base technique for the structural plan technique of the carbon or scull tube to be certainly established, it does, secondarily the various element functional control technique which uses the carbon or scull tube is researched and will do.

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Progress in Novel Oxides for Gate Dielectrics and Surface Passivation of GaN/AlGaN Heterostructure Field Effect Transistors

  • Abernathy, C.R.;Gila, B.P.;Onstine, A.H.;Pearton, S.J.;Kim, Ji-Hyun;Luo, B.;Mehandru, R.;Ren, F.;Gillespie, J.K.;Fitch, R.C.;Seweel, J.;Dettmer, R.;Via, G.D.;Crespo, A.;Jenkins, T.J.;Irokawa, Y.
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제3권1호
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    • pp.13-20
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    • 2003
  • Both MgO and $Sc_2O_3$ are shown to provide low interface state densities (in the $10^{11}{\;}eV^{-1}{\;}cm{\;}^{-2}$ range)on n-and p-GaN, making them useful for gate dielectrics for metal-oxide semiconductor(MOS) devices and also as surface passivation layers to mitigate current collapse in GaN/AlGaN high electron mobility transistors(HEMTs).Clear evidence of inversion has been demonstrated in gate-controlled MOS p-GaN diodes using both types of oxide. Charge pumping measurements on diodes undergoing a high temperature implant activation anneal show a total surface state density of $~3{\;}{\times}{\;}10^{12}{\;}cm^{-2}$. On HEMT structures, both oxides provide effective passivation of surface states and these devices show improved output power. The MgO/GaN structures are also found to be quite radiation-resistant, making them attractive for satellite and terrestrial communication systems requiring a high tolerance to high energy(40MeV) protons.

Effect of soldering techniques and gapdistance on tensile strength of soldered Ni-Cr alloy joint

  • Lee, Sang-Yeob;Lee, Jong-Hyuk
    • The Journal of Advanced Prosthodontics
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    • 제2권4호
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    • pp.117-121
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    • 2010
  • PURPOSE. The present study was intended to evaluate the effect of soldering techniques with infrared ray and gas torch under different gap distances (0.3 mm and 0.5 mm) on the tensile strength and surface porosity formation in Ni-Cr base metal alloy. MATERIALS AND METHODS. Thirty five dumbbell shaped Ni-Cr alloy specimens were prepared and assigned to 5 groups according to the soldering method and the gap distance. For the soldering methods, gas torch (G group) and infrared ray (IR group) were compared and each group was subdivided by corresponding gap distance (0.3 mm: G3 and IR3, 0.5 mm: G5, IR5). Specimens of the experimental groups were sectioned in the middle with a diamond disk and embedded in solder blocks according to the predetermined distance. As a control group, 7 specimens were prepared without sectioning or soldering. After the soldering procedure, a tensile strength test was performed using universal testing machine at a crosshead speed 1 mm/min. The proportions of porosity on the fractured surface were calculated on the images acquired through the scanning electronic microscope. RESULTS. Every specimen of G3, G5, IR3 and IR5 was fractured on the solder joint area. However, there was no significant difference between the test groups (P > .05). There was a negative correlation between porosity formation and tensile strength in all the specimens in the test groups (P < .05). CONCLUSION. There was no significant difference in ultimate tensile strength of joints and porosity formations between the gas-oxygen torch soldering and infrared ray soldering technique or between the gap distance of 0.3 mm and 0.5 mm.

Effect of abutment shade, ceramic thickness, and coping type on the final shade of zirconia all-ceramic restorations: in vitro study of color masking ability

  • Oh, Seon-Hee;Kim, Seok-Gyu
    • The Journal of Advanced Prosthodontics
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    • 제7권5호
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    • pp.368-374
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    • 2015
  • PURPOSE. The aim of the study was to evaluate the effect of abutment shade, ceramic thickness, and coping type on the final shade of zirconia all-ceramic restorations. MATERIALS AND METHODS. Three different types of disk-shaped zirconia coping specimens (Lava, Cercon, Zirkonzahn: ${\phi}10mm{\times}0.4mm$) were fabricated and veneered with IPS e.max Press Ceram (shade A2), for total thicknesses of 1 and 1.5 mm. A total of sixty zirconia restoration specimens were divided into six groups based on their coping types and thicknesses. The abutment specimens (${\phi}10mm{\times}7mm$) were prepared with gold alloy, base metal (nickel-chromium) alloy, and four different shades (A1, A2, A3, A4) of composite resins. The average $L^*$, $a^*$, $b^*$ values of the zirconia specimens on the six abutment specimens were measured with a dental colorimeter, and the statistical significance in the effects of three variables was analyzed by using repeated measures analysis of variance (${\alpha}$=.05).The average shade difference (${\Delta}E$) values of the zirconia specimens between the A2 composite resin abutment and other abutments were also evaluated. RESULTS. The effects of zirconia specimen thickness (P<.001), abutment shade (P<.001), and type of zirconia copings (P<.003) on the final shade of the zirconia restorations were significant. The average ${\Delta}E$ value of Lava specimens (1 mm) between the A2 composite resin and gold alloy abutments was higher (close to the acceptability threshold of 5.5 ${\Delta}E$) than th ose between the A2 composite resin and other abutments. CONCLUSION. This in-vitro study demonstrated that abutment shade, ceramic thickness, and coping type affected the resulting shade of zirconia restorations.

용접부 균열의 균열진전력에 대한 구조물 형상과 균열 위치의 영향 (Effect of Structural Geometry and Crack Location on Crack Driving Forces for Cracks in Welds)

  • 오창균;김종성;진태은;김윤재
    • 대한기계학회논문집A
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    • 제30권8호
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    • pp.931-940
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    • 2006
  • Defect assessment of a weld zone is important in fitness-for-service evaluation of plant components. Typically a J and $C^*$ estimation method for a defective homogeneous component is extended to a mismatched component, by incorporating the effect due to the strength mismatch between the weld metal and the base material. The key element is a mismatch limit load. For instance, the R6/R5 procedure employs an equivalent material concept, defined by a mismatch limit load. A premise is that if a proper mismatch limit load solution is available, the same concept can be used for any defect location (either a weld centre defect or a heat affected zone (HAZ) defect) and for any material combination (either two-material or multi-material combinations; either similar or dissimilar joints). However, validation is still limited, and thus a more systematic investigation is needed to generalise the suggestion to any geometry, any defect location and any material combination. This paper describes the effect of structural geometry on the $C^*$ integral for defective similar welds, based on systematic elastic-creep 2-D and 3-D finite element (FE) analyses, to attempt to elucidate the questions given above. It is found that the existing 'equivalent material' concept is valid only for limited cases, although it provides conservative estimates of $C^*$ for most of cases. A modification to the existing equivalent material concept is suggested to improve accuracy.

國산構造용 鋼板 의 水中熔接性 과 熔接强度 特性 (Weldability and Weld Strength of Underwater Welds of Domestic Structural Steel Plates)

  • 오세규;남기우
    • 대한기계학회논문집
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    • 제7권3호
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    • pp.263-269
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    • 1983
  • Underwater welding by a gravity arc welding process was investigated by using six types of coated electrodes and SM41A steel plates of 10 mm thickness as base metal and it was ascertained that this process may be put to practical use. Main results obtained are summarized as follows: 1. Angle of electrode affects no influence on bead appearance and the proper range of welding current and diameter of electrode for the high titanium oxide type is relatively wider than that for the ilmenite type. And the lime titania type, high titanium oxide type and ilmenite type of domestic coated arc welding electrodes of .phi.4 mm could attain the soundest underwater welded joints which contain no welding imperfection. 2. According to macro-structure, micro-structure and hardness distribution inspectionson underwater welded joint, the area between the HAZ and the surface of the weld in neighbourhood of the bond has the maximum hardness value. The structure of these parts is martensite and bainite. Other parts contain mocro-ferrite, micro-pearlite structure, which contain soundness of welded joint free from weld imperfection. 3. On consideration of both tensile strength of more than 100% joint efficiency and sufficient impact value, the welding condition which can get optimal welding strength is heat input of 1,400-1,500 J/mm, current of 200-215 ampere (voltage of 32-33 volts) in the case of lime titania type electrode. 4. Underwater welding strength (tensile strength, impact strength) depends on heat input (or current) quantitatively and they have the relationship of parabolic function. Each experimental equation has a high reliability and its percent of mean error is 4.14%. 5. It is suggested that the optimal design of weld strength by welding condition (current, heat input) could be utilized for a quality control of underwater welding.

금형재료용 주철의 다이오드 레이저 표면경화처리에 관한 연구(III) - 경화부의 미세조직 특성 - (A Study on the Diode Laser Surface Hardening Treatment of Cast Iron for Die Material(III) - Characteristics of Microstructures in Hardened Zone -)

  • 김종도;송무근;황현태
    • Journal of Advanced Marine Engineering and Technology
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    • 제36권1호
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    • pp.78-84
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    • 2012
  • 금형의 공정 과정에서 금형과 성형품 사이에서 발생하는 마찰로 인해 발생하는 금형의 마모가공차로 작용하여 성형 품질을 저하시킬 수 있다. 따라서 금형의 내마모성을 향상시키기 위해 질화나 침탄처리, 화염 및 고주파 표면처리 등의 방법들이 적용되어 왔다. 하지만 형상의 제한이나 제품의 변형 등과 같은 문제점을 수반하고 있기 때문에, 이러한 문제점을 해결할 수 있는 표면처리 방법으로써 레이저 표면처리 기술이 검토되고 있다. 따라서 본 연구에서는 고출력 다이오드 레이저를 이용, 금형재료용 주철의 표면처리를 시도하였다. 앞서 제1보와 제2보의 논문에서는 금형의 재료 및 형상의 차이에 따른 열처리 특성을 비교하였다면, 본 논문에서는 열처리 후 생성되는 경화부, 경계부위 및 모재의 조직적 차이를 분석하기 위해 광학 현미경 및 전자 현미경을 이용하여 미세조직을 관찰하고, EDS를 통해 조직의 상태를 파악하였다. 미세조직 관찰 결과, 경화부는 침상의 마르텐사이트 조직이 형성되어 있었다.

Ti 합금의 용체화열처리와 시효열처리에 따른 부식거동 (The Study of Corrosion Behavior for Solution and Aging Heat Treated Ti alloy)

  • 백신영
    • 해양환경안전학회지
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    • 제22권1호
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    • pp.138-144
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    • 2016
  • 티타늄은 표면에 형성되는 보호성 부동태 피막 때문에 일반부식과 해수에서 내식성이 강하지만 염산, 황산, 인산 등의 산에서는 보호성 산화물 피막이 파괴된다고 알려져 있다. 본 연구에서는 Ti에 Al 및 V등을 첨가한 ${\alpha}+{\beta}$계에 대하여 $1066^{\circ}C$$966^{\circ}C$에서 5시간 용체화 열처리를 실시하고, 이 시편을 $550^{\circ}C$, $600^{\circ}C$, 및 $650^{\circ}C$에서 각각 1시간, 4시간, 8시간 및 16시간 시효열처리한 후 마이크로비커스 경도를 측정하고, 이 시편을 1N $H_2SO_4$ 용액에서 전기화학적 분극법으로 부식을 계측하였으며, 분극을 마친 시편의 표면을 현미경 조직사진으로 부식상태를 검토하였다. 시험 결과 용체화열처리한 시편이 모재와 시효열처리한 시편보다 높은 내식성을 나타내며. 용체화 온도가 높고 시간이 길어질수록 내식성은 증가하였다.