• Journal of the Microelectronics and Packaging Society
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• v.28 no.1
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• pp.39-46
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• 2021

The quantitative measurement of interfacial adhesion energy (Gc) of multilayer thin films for Cu interconnects was investigated using a double cantilever beam (DCB) and 4-point bending (4-PB) test. In the case of a sample with Ta diffusion barrier applied, all Gc values measured by the DCB and 4-PB tests were higher than 5 J/㎡, which is the minimum criterion for Cu/low-k integration without delamination. However, in the case of the Ta/Cu sample, measured Gc value of the DCB test was lower than 5 J/㎡. All Gc values measured by the 4-PB test were higher than those of the DCB test. Measured Gc values increase with increasing phase angle, that is, 4-PB test higher than DCB test due to increasing plastic energy dissipation and roughness-related shielding effects, which matches well interfacial fracture mechanics theory. As a result of the 4-PB test, Ta/Cu and Cu/Ta interfaces measured Gc values were higher than 5 J/㎡, suggesting that Ta is considered to be applicable as a diffusion barrier and a capping layer for Cu interconnects. The 4-PB test method is recommended for quantitative adhesion energy measurement of the Cu interconnect interface because the thermal stress due to the difference in coefficient of thermal expansion and the delamination due to chemical mechanical polishing have a large effect of the mixing mode including shear stress.

• KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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• v.22 no.3
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• pp.95-102
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• 2016

This study investigated the effects of the oxygen permeability of vacuum packaging film and the storage temperature on the quality and shelf life of Hamburg steaks during storage for 14 days. Control samples (C) were packaged in a polyamide/polyethylene (PA/PE) film and stored at $5^{\circ}C$. Treatment samples were either packaged in an ethylene vinyl alcohol/polyethylene (EVOH/PE) copolymer film and stored at $5^{\circ}C$ (T1), and in a PA/PE film and stored at $-18^{\circ}C$ (T2). The initial total plate count (TPC) was 3.6 log cfu/g. In T1 samples, TPC and Brochothrix thermosphacta counts were increased, similar to those in C samples, whereas Pseudomonas spp. counts were significantly lower than those in C samples during storage. Over the storage period, the volatile basic nitrogen values increased most rapidly in C samples, followed by T1 and then T2 samples. The values of thiobarbituric acid reactive substances steadily increased in all samples during storage. The colour parameters were not significantly different among the samples during storage. T1 samples maintained sensory qualities in flavour and off-odour parameters for two days longer than C samples did. At day 12, T2 samples were evaluated as being below the marketability score of 5.0 for texture. In conclusion, using high oxygen barrier films like EVOH/PE copolymer for packaging Hamburg steaks could extend the sensory qualities in view of flavour and off-odour during chilled storage. However, frozen storage at $-18^{\circ}C$ is recommended when the storage period is extended beyond 14 days at $5^{\circ}C$.

• Polymer(Korea)
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• v.39 no.1
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• pp.88-98
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• 2015

4-Amino-N-hexadecylbenzamide-graphene sheets (AHB-GSs), used in the preparation of the polyimide (PI) nanocomposite films, were synthesized by mixing a dispersion of graphite oxide with a solution of the ammonium salt of AHB. The atomic force microscope image of functionalized-GS on mica and a profile plot revealed the average thickness of AHB-GS to be ~3.21 nm. PI films were synthesized by reacting 4,4'-biphthalic anhydride and bis(4-aminophenyl) sulfide. PI nanocomposite films containing various contents of AHB-GS over the range of 0-10 wt% were synthesized using the solution intercalation method. The PI nanocomposite films under different thermal imidization temperatures, 250 and $350^{\circ}C$, were examined. The graphenes, for the most part, were well dispersed in the polymer matrix despite some agglomeration. However, micrometer-scale particles were not detected. The average thickness of the particles was <10 nm, as revealed from the transmission electron microscope images. Only a small amount of AHB-GS was required to improve the gas barrier, and electrical conductivity. In contrast, the glass transition and initial decomposition temperatures of the PI hybrid films continued to decrease with increasing content of AHB-GS up to 10 wt%. In general, the properties of the PI hybrid films heat treated at $350^{\circ}C$ were better than those of films heat treated at $250^{\circ}C$.

• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.4
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• pp.202-208
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• 2001

In Recent results suggested that doping $Ta_2O_5$ with a small amount of $TiO_2$ using standard ceramic processing techniques can increase the dielectric constant of $Ta_2O_5$ significantly. In this paper, this concept is studied using RTCVD (Rapid Thermal Chemical Vapor Deposition). Ti-doped $Ta_2O_5$ films are deposited using $TaC_{12}H_{30}O_5N$, $C_8H_{24}N_4Ti$, and $O_2$ on both Si and $NH_3$-nitrided Si substrates. An $NH_3$-based interface layer at the Si surface is used to prevent interfacial oxidation during the CVD process and post deposition annealing is performed in $H_2/O_2$ ambient to improve film quality and reduce leakage current. A sputtered TiN layer is used as a diffusion barrier between the Al gate electrode and the $TaTi_xO_y$ dielectric. XPS analyses confirm the formation of a ($Ta_2O_5)_{1-x}(TiO_2)_x$ composite oxide. A high quality $TaTi_xO_y$ gate stack with EOT (Equivalent Oxide Thickness) of $7{\AA}$ and leakage current $Jg=O.5A/textrm{cm}^2$ @ Vg=-1.0V has been achieved. We have also succeeded in forming a $TaTi_x/O_y$ composite oxide by rapid thermal oxidation of the as-deposited CVD TaTi films. The electrical properties and Jg-EOT characteristics of these composite oxides are remarkably similar to that of RTCVD $Ta_2O_5, suggesting that the dielectric constant of $Ta_2O_5$ is not affected by the addition of $TiO_2$.

• Journal of the Microelectronics and Packaging Society
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• v.23 no.1
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• pp.11-15
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• 2016

The organic light emitting diodes (OLEDs) have been studied as large flexible displays, light source and hard wares of internet of things. However, OLEDs show some drawbacks in terms of external environments due to the low work function of the metals and the reactive organic materials. In particular, the operation functions of the OLEDs tend to deteriorate rapidly by exposing the oxygen and moisture. So as to prevent it, domestic and overseas studies underway in various method such as ALD, PVD, CVD. But it has complex process and high cost. Therefore In order to protect devices from the external environments, it is important to develop the passivation thin films of low-cost and simple process which can prevent the devices from the penetration of the oxygen and moistures. In this study, to improve the reliability, passivation thin films were coated onto the green OLEDs by spin coating method and investigated the changes of the optical properties of the prepared devices at various doping concentrations of sodium alginate (SA). The passivation solutions were synthesized by using polyvinyl alcohol (PVA) host material with a dopant of SA which were added with the amounts of 10, 20 and 40 wt% into the PVA. As a result, the best barrier properties of the OLEDs were obtained for the samples with 40 wt% SA. Finally, the passivation films can be optimized by using the mixture solution of PVA and SA materials.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.38.2-38.2
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• 2011

폴리머 박막은 그 고유한 특성으로 인해 여러 산업적으로 널리 사용되고 있는 재료이다 예로 의약품이나 식품 포장지의 배리어, 전자부품의 절연체, 반도체 공정에서의 사용, 혹은 부식방지를 위해 사용 되어지기도 한다. 이 폴리머 박막을 증착 하기 위한 방법으로 이전부터 CVD (Chemical Vapor Deposition) 방법이 많이 사용되었고 지금까지도 가장 많이 사용되는 방법이다. CVD를 사용하여 $SiO_2$-like 필름의 증착은 전구체(precursor)로 Silane ($SiH_4$)을 사용하였으며, 플라즈마 발생 소스(source)로 열 혹은 전기장 등을 사용 하며 공정 시 압력 또한 대부분 저압 하에서 실시 하였다. 이와 같은 이전 CVD 방법의 문제는 사용되는 Silane 자체가 인체에 해로울 정도로 독성이 있으며 폭발성도 같이 가지고 있어 작업환경의 위험성이 높으며 열을 사용한 CVD의 경우 높은 공정 온도로 인해 증착 할 수 있는 대상이 제한 되어 지며 높은 열의 발생을 위해 많은 에너지의 소비가 필요하다. 저압 플라즈마를 사용한 CVD 는 공정상 높은 열의 발생이 일어나지 않아 기판 운용상 문제가 되지 않지만 저압 환경에서 해당 공정이 이루어기 때문에 인해 필수적으로 고가의 진공 챔버가 필수적이며 저압을 유지할 고가의 진공 펌프나 추가 장비들이 필요하게 된다, 또한 챔버 내에서 이루어지는 공정으로 인해 공정의 연속성이 떨어져 시잔비용 또한 많이 잡아 먹는다. 이러한 열 혹은 저압 플라즈마등을 사용한 공정의 단점을 해결하기 위해 여러 연구자들이 다양한 방법을 통해 연구를 하였다. 대기압 유전체 배리어 방전(AP-DBD: Atmospheric Pressure-Dielectric Barrier Discharge)을 사용한 폴리머 박막의 증착은 이전 전통적인 방법에 비해 낮은 장비 가격과 낮은 공정 온도 그리고 연속적인 공정 등의 장점이 있는 폴리머 박막 증착 방법 이다. 대기압 유전체 배리어 방전 공정 변수로 공급 전압 및 주파수 그리고 공급 전압의 영향, 전구체를 유전체 배리어 방전 전극으로 이동 시키기 위해 사용된 캐리어 가스의 종류 및 유량, 화학양론적 계수를 맞추기 위해 같이 포함되는 산소 가스의 유량, DBD 전극의 형태에 따른 증착 박막의 균일성 등 이 존재하며 이런 많은 변수 들에 대한 연구가 진행 되었지만 아직 이 대기압 DBD를 이용한 폴리머 박막의 증착에 대한 명확한 이해는 아직 완전 하다 할 수 없다. 본 연구에서는 이러한 대기압 DBD를 이용하여 폴리머 박막의 증착시 영향을 미치는 많은 공정 변수 등이 박막생성에 미치는 영향과 증착된 박막의 성질에 대한 연구를 진행 하였다.

• KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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• v.23 no.1
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• pp.9-15
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• 2017

To identify applicability for packaging material of polyvinyl alcohol (PVA)/boric acid (BA) coating solution with highly-enhanced water vapor and oxygen barrier properties, the PET/PVA-BA/OPP multi-layer films were prepared through comma coating and lamination process. The oxygen and water vapor permeabilities, and tensile strength of as-prepared multi-layer films were investigated before and after pressure cooker test (PCT). Although oxygen and water vapor permeabilites, and mechanical properties of PET/PVA-BA/OPP multi-layer films was decreased after PCT, their properties were highly enhanced as increase of BA contents in PVA matrix. This is strongly related with enhanced cross-linking density in PVA-BA layer. In storage test of seasoned-laver, the PET/PVA-BA/OPP multi-layer films were comparatively effective to suppress the increase in peroxide value originating from oxidation of seasoned-laver. Comparing the commercially available PP/Al-metallized PP for seasoned-laver packaging, however, PET/PVA-BA/OPP multi-layer films did not show any advantage in water activity. This is due to higher water vapor permeation properties of as-prepared multi-layer films. Therefore, further studies are required to enhance the water vapor permeation in PET/PVA-BA/OPP multi-layer films.

• Korean Journal of Food Science and Technology
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• v.26 no.3
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• pp.246-249
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• 1994

Shelf-life of pork packaged under $CO_{2}$ was observed and the optimal volume of $CO_{2}$ gas was determined. High gas barrier film, EVOH($CO_{2}$ permiability; 1 $cc/cm^{2}{\cdot}24\;h{\cdot}atm$) was used as packaging material and the volume ratios of sample to $CO_{2}$ of 1 : 1, 1 : 3 and 1 : 5 were tried using the control of vacuum packaged pork. To ev.3luate quality of pork cuts, total plate counts, TBA, color and sensory score were monitored during the storage at $4{\pm}1^{\circ}C$ for 31 days. TPC of vacuum packaged pork increased up to $4.6{\times}10^{6}\;CFU/cm^{2}$ in 24 days while that of $CO_{2}$ gas packaged pork $4.5{\times}10^{5}\;CFU/cm^{2}$ at the same storage period, and it took 7 days more for gas packaged pork to reach the same TPC count. There was no significant difference in TBA value between vacuum packaged and gas packaged pork. In the color L and a values were not affected by treatment but vacuum packaged pork cuts showed higher b value than gas packaged pork. According to sensory evaluation, gas packaged pork showed less off flavor, better flavor and freshness than vacuum packaged one (P<0.05).

• Membrane Journal
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• v.6 no.3
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• pp.173-181
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• 1996

Common volatile organic compounds(VOCs) such as toluene and methanol were removed successfully from N$_{2}$ using a novel silicone-coated hollow fiber membrane module. This novel membrane is a thin film composite(TFC) and was highly efficient in removing VOCs selectively from a N$_{2}$ stream. This membrane had some innate advantages over other silicone-based membrane in that the selective barrier was ultrathin(~1 $\mu$m) and the porosity of the polypropylene substrate was high which leads to a low permeation resistance. The substram was very strongly bonded to the coating layer by plasma polymerization and can withstand a very high pressure. A small hollow fiber module having a length of 25cm and 50 fibers could remove 96~99% of toluene as well as methanol vapors when the feed flow rate was up to 60cc/min. The percent removal of VOCs were even higher when the feed inlet concentration was higher. This process is especially suitable for treating streams having a low flow rate and high VOCs concentration. The permeances of VOCs through this membrane was in the range of $4~30 \times 10^{-9}gmol/sec \cdot cm^{2}\cdot cmHg$ for both toluene and methanol, and nitrogen permeance was between $3~9 \times 10^{-10}gmol/sec \cdot cm^{2} \cdot cmHg$. High separation factor between 10~55 for toluene/N$_{2}$ and 15~125 for methanol/N$_{2}$ were obtained depending on the feed flow rate ranges and feed VOCs concentration levels.

• Food Science and Preservation
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• v.17 no.6
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• pp.908-913
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• 2010

Modified atmosphere packaging (MAP) was evaluated for the storage of pumpkin rice cake as a means of preserving quality and extending shelf-life. Retail-sized amounts of rice cake were packaged in trays under different modified atmosphere conditions (air, vacuum, 60% $CO_2$/40% $N_2$ and 100% $CO_2$) using gas-barrier plastic film; control was in air-permeable stretch wrap. The packages were stored at $20^{\circ}C$ with periodical measurement of package atmosphere and cake quality attributes. The modified atmosphere packages of 60% $CO_2$/40% $N_2$ and 100% $CO_2$ inhibited the growth of molds/yeasts completely and significantly retarded the growth of aerobic bacteria. All the packages except that of 100% $CO_2$ showed the reduction of internal $O_2$ concentration and increase of the $CO_2$ with storage time due to the microbial activity. There has been slight decrease of $CO_2$ concentration for 60% $CO_2$/40% $N_2$ and 100% $CO_2$ packages just after start of the storage possibly due to dissolution of headspace $CO_2$ into the cake. Any MAP conditions did not affect the retrogradation of the rice cake. Surface color of the cake within affordable microbial quality limit was not affected significantly by packaging conditions.