• Korean Journal of Metals and Materials
• /
• v.48 no.8
• /
• pp.730-740
• /
• 2010

Aluminum, magnesium, titanium and high Mn steel are difficult to use in electron backscatter diffraction (EBSD) sample preparation due to the formation of an oxidation layer under conventional polishing. Alcohol-based polishing with colloidal silica suspension was introduced for these delicate samples. A hard particle-embedded sample was analyzed successfully using mechanical polishing. Ion-milling was effective in removing oxidized, deformed and transformed layers after mechanical polishing and was able to reduce artifacts significantly. The microstructure of a cross-section of a thin copper film was evaluated by attachment of a dummy to the film for mechanical polishing.

• Transactions of Materials Processing
• /
• v.31 no.6
• /
• pp.337-343
• /
• 2022

Electrically assisted pressure joining (EAPJ) utilizes electric current-induced kinetic enhancement to achieve solid state diffusion bonding within a short time. In this study, aluminum alloy specimens, which are known as a hard-to-weld metal, were successfully solid-state joined through EAPJ. The bonding process was performed in two ways: continuous direct current (CDC), which applies relatively low current density, and pulsed direct current (PDC), which applies high current density. It was observed that the bonding strength was higher in PDC than in CDC. The microstructure of the joint was characterized using 3D X-ray microscopy (XRM) and electron backscatter diffraction (EBSD).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.32 no.1
• /
• pp.20-24
• /
• 2019

Ferroelectric material properties are strongly governed by domain structures and their evolution processes, but the evolution processes of complex domain patterns during a macroscopic electrical poling process are still elusive. In the present work, domain-evolution processes in a PZT ceramic near the morphotropic phase-boundary composition were studied during a step-wise electrical poling using piezoresponse force microscopy (PFM). Electron backscatter diffraction was used with the PFM data to identify the grain boundaries in the region of interest. In response to an externally the applied electric field, growth and retreat of non-$180^{\circ}$ domain boundaries wasere observed. The results indicate that ferroelectric polarization-switching nucleates and evolves in concordance with the pattern of the pre-existing domains.

• Journal of the Korean Physical Society
• /
• v.80
• /
• pp.1035-1041
• /
• 2022

Nondestructive nano-characterization methods were reviewed with respect to technical aspect and practicability. Micro-photoluminescence, cathodoluminscence and Raman spectroscopy with mapping modes were investigated as optical characterization tools, while electron backscatter diffraction and piezoresponse force microscopy were introduced as monitoring techniques for the crystallographic and electromechanical properties. Especially, the spatial resolution of the data acquisition and analysis was carefully inspected in the representative semiconducting nanomaterial systems. Some of efforts to overcome the limit of these characterizations were also taken into consideration.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.109-110
• /
• 2014

주사전자현미경(Scanning Electron Microscopy: SEM)은 고체상태에서 미세조직과 형상을 관찰하는 데에 가장 다양하게 쓰이는 분석기기로서 최근에 판매되고 있는 고분해능 SEM은 수 나노미터의 분해능을 가지고 있다. 그리고 SEM의 초점심도가 크기 때문에 3차원적인 영상의 관찰이 용이해서 곡면 혹은 울퉁불퉁한 표면의 영상을 육안으로 관찰하는 것처럼 보여준다. 활용도도 매우 다양해서 금속파면, 광물과 화석, 반도체 소자와 회로망의 품질검사, 고분자 및 유기물, 생체시료 nnnnnnnnn와 유가공 제품 등 모든 산업영역에 걸쳐 있다(Fig. 1). 입사된 전자빔이 시료의 원자와 탄성, 비탄성 충돌을 할 때 2차 전자(secondary electron)외에 후방산란전자(back scattered electron), X선, 음극형광 등이 발생하게 되는 이것을 통하여 topography (시료의 표면 형상), morphology(시료의 구성입자의 형상), composition(시료의 구성원소), crystallography (시료의 원자배열상태)등의 정보를 얻을 수 있다. SEM은 2차 전자를 이용하여 시료의 표면형상을 측정하고 그 외에는 SEM을 플랫폼으로 하여 EDS (Energy Dispersive X-ray Spectroscopy), WDS (Wave Dispersive X-ray Spectroscope), EPMA (Electron Probe X-ray Micro Analyzer), FIB (Focus Ion Beam), EBIC (Electron Beam Induced Current), EBSD (Electron Backscatter Diffraction), PBMS (Particle Beam Mass Spectrometer) 등의 많은 분석장치들이 SEM에 부가적으로 장착되어 다양한 시료의 측정이 이루어진다. 이 중 결정구조, 조성분석을 쉽고 효과적으로 할 수 있게 하는 X선 분석장치인 EDS를 SEM에 일체화시킨 장비와 EDS 및 PBMS를 SEM에 장착하여 반도체 공정 중 발생하는 나노입자의 형상, 성분, 크기분포를 측정하는 PCDS(Particle Characteristic Diagnosis System)에 대해 소개하고자 한다. - EDS와 통합된 SEM 시스템 기본적으로 SEM과 EDS는 상호보완적인 기능을 통하여 매우 밀접하게 사용되고 있으나 제조사와 기술적 근간의 차이로 인해 전혀 다른 방식으로 운영되고 있다. 일반적으로 SEM과 EDS는 별개의 시스템으로 스캔회로와 이미지 프로세싱 회로가 개별적으로 구현되어 있지만 로렌츠힘에 의해 발생하는 전자빔의 왜곡을 보정을 위해 EDS 시스템은 SEM 시스템과 연동되어 운영될 수 밖에 없다. 따라서, 각각의 시스템에서는 필요하지만 전체 시스템에서 보면 중복된 기능을 가지는 전자회로들이 존재하게 되고 이로 인해 SEM과 EDS에서 보는 시료의 이미지의 차이로 인한 측정오차가 발생한다(Fig. 2). EDS와 통합된 SEM 시스템은 중복된 기능인 스캔을 담당하는 scanning generation circuit과 이미지 프로세싱을 담당하는 FPGA circuit 및 응용프로그램을 SEM의 회로와 프로그램을 사용하게 함으로 SEM과 EDS가 보는 시료의 이미지가 정확히 일치함으로 이미지 캘리브레이션이 필요없고 측정오차가 제거된 EDS 측정이 가능하다. - PCDS 공정 중 발생하는 입자는 반도체 생산 수율에 가장 큰 영향을 끼치는 원인으로 파악되고 있으며, 생산수율을 저하시키는 원인 중 70% 가량이 이와 관련된 것으로 알려져 있다. 현재 반도체 공정 중이나 반도체 공정 장비에서 발생하는 입자는 제어가 되고 있지 않은 실정이며 대부분의 반도체 공정은 저압환경에서 이루어지기에 이 때 발생하는 입자를 제어하기 위해서는 저압환경에서 측정할 수 있는 측정시스템이 필요하다. 최근 국내에서는 CVD (Chemical Vapor Deposition) 시스템 내 파이프내벽에서의 오염입자 침착은 심각한 문제점으로 인식되고 있다(Fig. 3). PCDS (Particle Characteristic Diagnosis System)는 오염입자의 형상을 측정할 수 있는 SEM, 오염입자의 성분을 측정할 수 있는 EDS, 저압환경에서 기체에 포함된 입자를 빔 형태로 집속, 가속, 포화상태에 이르게 대전시켜 오염입자의 크기분포를 측정할 수 있는 PBMS가 일체화 되어 반도체 공정 중 발생하는 나노입자 대해 실시간으로 대처와 조치가 가능하게 한다.

• Journal of the Korean Society for Heat Treatment
• /
• v.30 no.3
• /
• pp.117-126
• /
• 2017

The variation in microstructure and mechanical properties during heat treatment was examined in a series of 0.27% C-1.5% Mn-1.0% Cr steels with silicon contents in the range of 0 to 1.0 wt%. It was found that addition of 0.5%~1.0% silicon increased both tensile strength and impact toughness through solid solution strengthening and microstructural refinement. 0.27% C-1.0% Si-1.5% Mn-1.0% Cr steel showed tensile strength of 1,700 MPa in the as-quenched condition and the steel revealed a full martensitic structure even after air cooling from $900^{\circ}C$ to room temperature, showing air hardening characteristics. Tempering at $150^{\circ}C$ which corresponds to the typical paint-baking temperature after painting of body in white, slightly decreased the tensile strength and increased elongation, but substantially increased the impact toughness compared to the as-quenched steel.

• Journal of the Korean Society for Heat Treatment
• /
• v.29 no.4
• /
• pp.181-189
• /
• 2016

The variation in microstructure and mechanical properties during heat treatment was examined in a series of 0.27% C-1.0% Si-1.5% Mn steels with chromium contents in the range of 0 to 1.0 wt%. It was found that chromium decreased the martensite packet size through the austenite grain refinement and increased tensile strength in the as-quenched steel, about 70 MPa per 1.0 wt%. The 0.27% C-1.0% Si-1.5% Mn-1.0% Cr steel showed tensile strength of 1700 MPa in the as-quenched steel. The 0.27% C-1.0% Si-1.5% Mn-1.0% Cr steel revealed a full martensitic structure after air cooling from $900^{\circ}C$ to room temperature, showing air hardening characteristics. Tempering at $150^{\circ}C$ slightly decreased the tensile strength and increased elongation, which is in a good agreement with impact toughness result.

• Journal of Powder Materials
• /
• v.19 no.3
• /
• pp.204-209
• /
• 2012

In this work, powder metallurgy and severe plastic deformation by high-pressure torsion (HPT) approaches were combined to achieve both full density and grain refinement at the same time. Pure Cu powders were mixed with 5 and 10 vol% diamonds and consolidated into disc-shaped samples at room temperature by HPT at 1.25 GPa and 1 turn, resulting in ultrafine grained metallic matrices embedded with diamonds. Neither heating nor additional sintering was required with the HPT process so that in situ consolidation was successfully achieved at ambient temperature. Significantly refined grain structures of Cu metallic matrices with increasing diamond volume fractions were observed by electron backscatter diffraction (EBSD), which enhanced the microhardness of the Cu-diamond composites.

• Transactions of Materials Processing
• /
• v.21 no.4
• /
• pp.240-245
• /
• 2012

With the increasing demand for light-weight materials to reduce fuel consumption, the automobile industry has extensively studied magnesium alloys which are light weight metals. The intrinsic poor formability and poor ductility at ambient temperature due to the hexagonal close-packed (HCP) crystal structure and the associated insufficient number of independent slip systems restricts the practical usage of these alloys. Hot working of magnesium alloys using a forging or extrusion enables net-shape manufacturing with enhanced formability and ductility since there are several operative non-basal slip systems in addition to basal slip plane, which increases the workability. In this research, the thermomechanical properties of AZ80 Mg alloy were obtained by compression testing at the various temperatures and strain rates. Optical microscopy and EBSD were used to study the microstructural behavior such as misorientation distribution and dynamic recrystallization. The results were correlated to the hardening and the softening of the alloy. The experimental data in conjunction with a physical explanation provide the optimal conditions for net-shape forging under hot or warm temperatures through control of the grain refinement and the working conditions.

• Korean Journal of Metals and Materials
• /
• v.48 no.7
• /
• pp.605-614
• /
• 2010

Conventional rolling (symmetric) and differential speed rolling (DSR) were both applied to AA1050 sheets at various velocity ratios, from 1 to 2 between the top and bottom rolls. An electron backscatter diffraction (EBSD) technique was used to measure texture inhomogeneity through the thickness direction. After the annealing process, the annealing texture of the DSR processed sheets was different from that of conventionally rolled sheets. The velocity ratio between the top and bottom rolls affected the texture inhomogeneity and macroscopic plastic strain ratio of the AA1050 sheets. A prediction for the macroscopic plastic strain ratio of AA1050 sheets was carried out using a visco-plastic self-consistent (VPSC) polycrystal model. The strain ratio directionality that was predicted using the VPSC polycrystal model was in good agreement with experimental results.