• Title/Summary/Keyword: back analysis method

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Optimization of Cu CMP Process Parameter using DOE Method (DOE 방법을 이용한 Cu CMP 공정 변수의 최적화)

  • Choi, Min-Ho;Kim, Nam-Hoon;Kim, Sang-Yong;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.711-714
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    • 2004
  • Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. However, it still has various problems to the CMP equipment, in particular, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the interaction between the various parameters such as turntable and head speed, down force and back pressure during CMP. Using statistical analysis techniques, a better understanding of the interaction behavior between the various parameters and the effect on removal rate, no-uniformity and ETC (edge to center) is achieved.

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A Study on the Change of Campus Circumference Transversal Spatial Configuration (Focusing on the back-street of Kangwon University Campus) (캠퍼스 주변 가로공간구조 변화에 관한 연구 (강원대학교 캠퍼스 후문을 중심으로))

  • Hwang, Dong-Keun;Kim, Young-Ook;Lee, Nak-Woon
    • Journal of Industrial Technology
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    • v.29 no.B
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    • pp.47-56
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    • 2009
  • University is very big scale among urban facilities as for single facilities and there is characteristic that accompany various university support functions in contiguity area. Width that have diverse spatial configuration generally our country university campus around was formed, this does function that connect university and ambit. Specially, formation enables change of spatial configuration that existent width system has if is new around university campus. Also, can form more animate and lively width spatial configuration by forming more various and complex width spatial configuration in width had formed in existing. It is that search special quality of university surrounding width spatial configuration analyzing existing width spatial configuration of Kangwon National University back gate by formation if this study is new in city and forecasts the change, and used space syntax by spatial configuration analysis method.

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Study on the performance improvement of turbopump inducer by numerical flow analysis (수치 유동 해석을 이용한 터보펌프용 인듀서의 성능 향상에 대한 연구)

  • Lee, Kyoung-Hoon;Kim, Kyung-Ho;Kim, Young-Soo;Woo, Yoo-Cheol
    • 유체기계공업학회:학술대회논문집
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    • 2001.11a
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    • pp.235-242
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    • 2001
  • Hydraulic performance of LCH4 fuel inducer in turbopump system was predicted by 3-D Wavier-stokes calculation. The inducer was designed initially using 1-D method. Different parameters with blade angle and flow coefficient were set from the initial design one, md computation was fulfilled to assess the redesigned models. Especially, influence of inlet back flow on inducer performance and its effective control were explored. The numerical results showed that through reducing inlet back flow strength., the hydraulic efficiency of inducer could be improved up to about $20\%$ compared to that of the initial design one.

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A Study on the Visualization of Electrohydrodynamic Spray Flow in High DC Voltages (고전압 직류전기장에서 전기수력학적 분무 유동 가시화에 관한 연구)

  • Sung, K.A.
    • Journal of ILASS-Korea
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    • v.11 no.3
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    • pp.131-139
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    • 2006
  • An experimental study was performed to investigate the liquid breakup and atomization characteristics in electrohydrodynamic atomization according to the changing of experimental parameters such as nozzle size, fluid flow, and electrical intensity. An original electrohydrodynamic atomizer equipment was designed and manufactured for the analysis of spray visualization and the exploration of relationship between applied power and the behavior of liquid atomization. The image processing technique by using the back-illumination method was applied to visualize the distilled liquid breakup process and to examine the variation of the droplet size distribution. The results show that the spray modes of electrohydrodynamic atomization are closelyconnected by the strength of the electric stresses at the surface of the liquid film and the kinetic energy of the liquid jet leaving the needle tip.

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Minimization of Inspection Cost in an Inspection System Considering the Effect of Lot Formation on AOQ

  • Yang, Moon-Hee
    • Management Science and Financial Engineering
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    • v.16 no.1
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    • pp.119-135
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    • 2010
  • In this paper, we readdress the optimization problem for minimizing the inspection cost in a back-light unit inspection system, which forms a network including a K-stage inspection system, a source inspection shop, and a re-inspection shop. In order to formulate our objective function when the system is in a steady state, assuming that the number of nonconforming items in a lot follows a binomial distribution when a lot is formed for inspection, we make a steady-state network flow analysis between shops, and derive the steady-state amount of flows between nodes and the steady-state fraction defectives by solving a nonlinear balance equation. Finally we provide some fundamental properties and an enumeration method for determining an optimal value of K which minimizes our objective function. In addition, we compare our results numerically with previous ones.

SpringBack Prediction for Sheet Metal forming Process Using Shell Element (쉘 요소를 이용한 박판성형 공정의 스프링 백 예측)

  • Ko Hyung-Hoon;Lee Chan-Ho;Kim Byung-Sik;Lee Kwang-Sik;Jung Dong-Won
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.10a
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    • pp.402-405
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    • 2005
  • Such press-forming process are the used machine ability and the characteristic, used material, tile accuracy of the part, condition of a process are considered the designed. In order to estimate in automotive sheet forming processes used AutoForm software. A through in simulation result comparison with experimentation result, it was possible to know that much the same estimated spring-back through a forming analysis. By making apply this to an industrial site the productivity improvement and cost reduction etc. effect able was predicted.

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Torque and Speed Characteristics of a Direct-Drive Slotless Synchronous Motor considering Mass Eccentricity (질량 불평형을 고려한 직접구동 슬롯리스형 동기전동기의 토크 및 속도특성)

  • Ahn, Ho-Jin;Kang, Gyu-Hong;Hong, Jung-Pyo;Kim, Gyu-Tak;Park, Jung-Woo
    • Proceedings of the KIEE Conference
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    • 2001.04a
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    • pp.135-137
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    • 2001
  • In slotless synchronous motor for precise position and speed control, eccentricity of rotor mass cause torque ripple, speed ripple and harmonics of back emf. This paper deals with magnetic field and characteristic analysis for ring type slotless synchronous motor by using analytical method. And then, speed and back emf harmonics are analysed.

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Analysis of Composition Chord Based on Back-propagation Neural Network (역전파 신경망을 이용한 작곡 코드 분석)

  • Jo Jae-Young;Kim Yoon-Ho;Lee Myung-kil
    • Journal of Digital Contents Society
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    • v.5 no.3
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    • pp.245-249
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    • 2004
  • This paper shows the reconstruction of existing composition chord program using back propagation neural network. In this approach, in order to produce the expectation values, weight values are controlled by neural network which rued chord pattern as a input vector. Experimental results showed that proposed approach is superior to a popular chord pattern method rather than existing composition program.

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A Study of Torque Ripple Minimization and Maximum Torque Control for IPMSM with Non Sinusoidal Back-EMF (비정현적인 역기전력을 가진 IPMSM의 토크리플 저감과 최대토크 제어에 관한 연구)

  • Hong In-Pyo;Lee Sang-Hun;Choi Cheol;Kim Jang-Mok;Kim Cheul-U
    • Proceedings of the KIPE Conference
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    • 2001.07a
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    • pp.142-145
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    • 2001
  • In this paper the electromagnetic torque developed in IPMSM(Interior Permanent Magnet Synchronous Motor) is analyzed. If flux distributions in the motor are not sinusoidal, a sinusoidal current produces important torque ripple. Torque ripple causes vibration and noise of motors. The optimized current waveforms for ripple free is able to be obtained by analysis of Back-EMF and torque equation. The method to find the optimal current is based on numerical predetermination. In this paper proposes current waveform which can eliminate the torque ripple, and the validity is verified through the simulation.

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Compensation Method of Position Signal Error with Misaligned Hall-Effect Sensors of BLDC Motor

  • Park, Joon Sung;Choi, Jun-Hyuk;Lee, Ju
    • Journal of Electrical Engineering and Technology
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    • v.11 no.4
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    • pp.889-897
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    • 2016
  • This paper presents an improved approach for compensating rotor position signal displacement in brushless DC (BLDC) motors with misaligned hall-effect sensors. Typically, the hall-effect sensors in BLDC motors are located in each phase and positioned exactly 120 electrical degrees apart. However, limitations in mechanical tolerances make it difficult to place hall-effect sensors at the correct location. In this paper, a position error compensator to counteract the hall-effect sensor positioning error is proposed. The proposed position error compensator uses least squares error analysis to adjust the relative position error and back-EMF information to reduce the absolute offset error. The effectiveness of the proposed approach is verified through several experiments.