• 제목/요약/키워드: annealing.

검색결과 5,939건 처리시간 0.036초

Reverse annealing of boron doped polycrystalline silicon

  • Lim, Jung-Yoon;Hong, Won-Eui;Kim, Deok-Hoi;Uemoto, Tstomu;Kim, Chi-Woo;Ro, Jae-Sang
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.264-267
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    • 2008
  • Through-doping conditions with higher energies and doses were intentionally chosen to understand reverse annealing behavior. We observed that the implantation condition plays a critical role on dopant activation. We found a certain implantation condition with which the sheet resistance is not changed at all upon activation annealing.

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Physical effect of annealing conditions on soluble organic semiconductor for organic thin film transistors

  • Kim, Dong-Woo;Kim, Doo-Hyun;Kim, Keon-Soo;Kim, Hyung-Jin;Lee, Dong-Hyuck;Hong, Mun-Pyo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.268-269
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    • 2008
  • We have examined the effect of physical drying and annealing conditions for the soluble derivatives of polythiophene as p-type channel materials of organic thin film transistors (OTFTs) in our special designed drying system; performances of the jetting-processed OTFTs can be improved more than 10 times just by optimizing the physical conditions of drying and annealing.

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Effect of annealing temperature on amorphous indium zinc oxide thin films prepared by a sol-gel spin-coating method

  • Lee, Sang-Hyun;Lee, Seung-Yup;Park, Byung-Ok
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • 제22권1호
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    • pp.15-18
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    • 2012
  • Transparent conductive indium zinc oxide thin films were prepared by spin-coating a sol-gel solution. Zinc acetate dihydrate [$Zn(CH_3COO)_2{\cdot}2H_2O$] and indium acetate [In$(CH_3COO)_3$] were used as starting precursors, and 2-methoxyethanol with 1-propanol as solvents. Upon annealing in a temperature range from 500 to $1000^{\circ}C$, the thin film crystallizes into polycrystalline $In_2O_3$(ZnO). The lowest electrical resistivity was obtained at an annealing temperature of $700^{\circ}C$ as $2{\Omega}{\cdot}cm$. Average optical transmittances were higher than 80% at all annealing temperatures. These experimental results confirm that the sol-gel spin-coating can be a good simplified practical method for forming transparent electrodes.

Manufacture of Precision Thin film Resistors using Ni-Cr Alloy and Their Properties (Ni-Cr계 합금을 이용한 정밀 박막저항체의 제조 및 특성)

  • Lee Young Hwa;Park Se Il;Kim Kook Jin;Ihm Young Eon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • 제19권1호
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    • pp.52-57
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    • 2006
  • Precision thin film resistors using evanohm R alloy were fabricated by do magnetron sputtering method. The physical and electrical properties of the resistors were studied after treatment of thermal annealing. The crystallization of the film was increased as the annealing temperature increase. Diffusion and oxidation of Cr and Al elements were occurred into the film surface. The minimum TCR values of 10.46 ppm/$^{\circ}C$ and 10.65 ppm/$^{\circ}C$ were measured at the annealing temperatures of $200^{\circ}C$ and $300^{\circ}C$, respectively. We are conducting additional studies to improve characteristics of our resistors for practical device application.

Fabrication and Characterization of ${LiMn_2}{O_4}$ Cathode for Lithium Rechargeable Battery by R.F.Magnetron Sputtering (R.F. Magnetron Sputtering을 이용한 리튬이차전지 정극용 ${LiMn_2}{O_4}$의 제조 및 특성)

  • 우태욱;손영국
    • Journal of the Korean Ceramic Society
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    • 제37권6호
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    • pp.552-558
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    • 2000
  • LiMn2O4 thin fiolm cathodes for Li-ion secondary battery were fabricated by r.f. magnetron sputtering technique. As-deposited films were amorphous. A spinel structure could not be obtained LiMn2O4 films by in-situ thermal annealing. After post thermal annealing over $700^{\circ}C$ in oxygen atmosphere, LiMn2O4 films prepared above 100 W r.f. power could be crystallized into a spinel structure. The electrochemical property of the LiMn2O4 film cathodes was tested in a Li/1 M LiClO4 in PC/LiMn2O4 cell. From cyclic voltammetry at scan rate of 2mV/sec of 2.5~4.5V, LiMn2O4 electrode prepared by post annealing at 75$0^{\circ}C$ showed good initial capacity. LiMn2O4 electrode prepared by post annealing at 80$0^{\circ}C$ showed the best crycling performance.

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LTCC 기판에 성장시킨 PZT 박막의 열처리 조건에 따른 특성

  • Lee, Gyeong-Cheon;Hwang, Hyeon-Seok;Lee, Tae-Yong;Heo, Won-Yeong;Song, Jun-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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    • pp.14-14
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    • 2010
  • Recently, low temperature co-fired ceramic (LTCC) technology has gained a remarkable application potential in sensors, actuators and micro systems fields because of its very good electrical and mechanical properties, high reliability and stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of annealing treatment on the electrical properties of $Pb(ZrTi)O_3$ (PZT) thin films deposited on LTCC substrate. PZT thin films were deposited on Au / LTCC substrates by RF magnetron sputtering method. Then, the change of the crystallization of the films were investigated under various annealing temperatures and times. The results showed that the crystallization of the films were enhanced as increasing annealing temperatures. The film, annealed at $700^{\circ}C$, 3min, was well crystallized in the perovskite structure.

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Characteristic of Ni and Co metal-catalyst surface roughness in graphene (Ni와 Co 촉매금속의 표면 거칠기에 따른 그래핀 성장 특성)

  • Kim, Eun-Ho;An, Hyo-Sub;Jang, Hyon-Chul;Cho, Won-Ju;Lee, Wan-Kyu;Jung, Jong-Wan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.263-263
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    • 2010
  • High temperature annealing is required to synthesize graphene using CVD. When thin metal catalyst is used for the synthesis, the high temperature pre-annealing makes the thin catalyst highly agglomerated. We investigated the agglomeration effect on the shape of the synthesized graphene. It is found that high temperature annealing makes randomly distributed many hole or blister on metal catalyst, and the synthesized graphene features floral pattern around the hole. The floral patterns of graphene turned out to be multi-layers and higher D peaks in raman spectrum.

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A Study on Determination of Starting Temperature for the Method of Simulated Annealing (Simulated Annealing법의 적용시 Starting Temperature 결정에 관한 연구)

  • Lee, Young-Jin;Lee, Kwon-Soon
    • Proceedings of the KIEE Conference
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    • 대한전기학회 1992년도 하계학술대회 논문집 A
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    • pp.288-289
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    • 1992
  • The method of simulated annealing is a technique that has recently attracted significant attention as suitable for optimization problem of very large scale. If the temperature is too high, then some of the structure created by the heuristic will be destroyed and unnecessary extra work will be done. If it is too low then solution is lost, similar to the case of a quenching cooling schedule in the Simulated Annealing (SA) phase. Therefore, a crucial issue in this study is the determination of the starting temperature and cooling schedule for SA phase.

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Characteristic in Mg-doped p-type GaN changing activation temperature in $N_2$ gas ambient

  • Lee, Sung-Ho;Kim, Chul-Joo;Seo, Yong-Gon;Seo, Mun-Suek;Hwang, Sung-Min
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.113-114
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    • 2008
  • Conventional furnace annealing (CFA) for activating Mg-doped p-type GaN films had been performed in pure $N_2$ ambient. All sample activated the same gas ambient. The annealing process change temperature: the first process is performed at $550^{\circ}C$ for 10 min. but, the first process is the same bulk. From second to five process increase activation temperature to change $50^{\circ}C$ and annealing time keeping for 10 min. It is found that the samples characteristic measure hall measurement. Similar results were also evidenced by photoluminescence (PL) measurement.

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Structure and Electrical Properties of P-doped ZnO Thin Films with Annealing Temperatures (열처리 온도에 따른 P-doped ZnO 박막의 구조적 및 전기적 특성)

  • Han, Jung-Woo;Yoon, Yung-Sup;Kang, Seong-Jun;Joung, Yang-Hee
    • Proceedings of the IEEK Conference
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    • 대한전자공학회 2008년도 하계종합학술대회
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    • pp.501-502
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    • 2008
  • In this study, P-doped ZnO thin films were prepared on sapphire substrates by pulsed laser deposition and annealing method. The electrical properties were investigated as a function of annealing temperatures at a fixed oxygen pressure. The XRD measurement showed that p-doped ZnO thin films were c-axis oriented. The Hall measurement showed that p-type ZnO thin film was observed. The carrier concentration of $1.18{\times}10^{16}cm^{-3}$ and the mobility of $0.96\;cm^{-3}/Vs$ were obtained for the P-doped ZnO thin film fabricated annealing temperature $850^{\circ}C$.

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