• Title/Summary/Keyword: annealing conditions

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Structural health monitoring through meta-heuristics - comparative performance study

  • Pholdee, Nantiwat;Bureerat, Sujin
    • Advances in Computational Design
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    • v.1 no.4
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    • pp.315-327
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    • 2016
  • Damage detection and localisation in structures is essential since it can be a means for preventive maintenance of those structures under service conditions. The use of structural modal data for detecting the damage is one of the most efficient methods. This paper presents comparative performance of various state-of-the-art meta-heuristics for use in structural damage detection based on changes in modal data. The metaheuristics include differential evolution (DE), artificial bee colony algorithm (ABC), real-code ant colony optimisation (ACOR), charged system search (ChSS), league championship algorithm (LCA), simulated annealing (SA), particle swarm optimisation (PSO), evolution strategies (ES), teaching-learning-based optimisation (TLBO), adaptive differential evolution (JADE), evolution strategy with covariance matrix adaptation (CMAES), success-history based adaptive differential evolution (SHADE) and SHADE with linear population size reduction (L-SHADE). Three truss structures are used to pose several test problems for structural damage detection. The meta-heuristics are then used to solve the test problems treated as optimisation problems. Comparative performance is carried out where the statistically best algorithms are identified.

Characteristics of CrOx Thin-films for High Precision Resistors (고정밀저항용 크롬산화박막의 특성)

  • Seo, Jeong-Hwan;Noh, Sang-Soo;Lee, Eung-Ahn;Kim, Kwang-ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.3
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    • pp.253-258
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    • 2005
  • This paper presents characteristics of CrOx thin-film, which were deposited on $Al_2$O$_3$ wafer by DC reactive magnetron sputtering in an argon-oxide atmosphere for high temperature applications. The present paper deals with a study of the technological characteristics of thin film resistors to provide a control in obtaining temperature coefficients of resistance of given value. The optimized condition of CrOx thin-film were thickness range of 2500 $\AA$ and annealing condition(350 $^{\circ}C$, 1 hr) in oxide partial pressure(3.5${\times}$10$^{-4}$ torr). Under optimum conditions, the CrOx thin-films is obtained a high resistivity, p=340 $\mu$Ωcm, a low temperature coefficient of resistance, TCR=-55 ppm/$^{\circ}C$. The CrOx thin films resistors which were fabricated in this paper had excellent characteristics as high precision resistors.

Characteristics of thin-film type pressure sensors for high pressure (고압용 박막형 압력센서의 특성)

  • 서정환;최성규;정찬익;류지구;남효덕;정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.737-740
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    • 2001
  • This paper describes the fabrication and characteristics of CrN thin-film type pessure sensors, which the sensing elements were deposited on SUS. 630 diaphragm by DC reactive magnetron sputtering in an argon-nitride atmosphere(Ar-(10%)N$_2$). The optimized condition of CrN thin-film sensing elements was thickness range of 3500${\AA}$ and annealing condition(300$^{\circ}C$, 3 hr) in Ar-10 %N$_2$deposition atmosphere. Under optimum conditions, the CrN thin-films for strain gauges is obtained a high resistivity, $\rho$=1147.65 ${\mu}$$\Omega$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal, 11.17. The output sensitivity of fabricated CrN thin-film type pressure sensors is 2.36 mV/V, 4∼20 mA and the maximum non-linearity is 0.4 %FS and hysteresis is less than 0.2 %FS.

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Formation Conditions of PZT Thin Films for ULSI -A study on the formation and characteristics of PZT thin films by rapid thermal annealing- (초고집적 회로용 PZT 박막의 형성조건 -스퍼터링법으로 Si, TiN/Ti/Si 기판위에 증착된 PZT 박막의 급속 열처리에 의한 결정화 및 특성-)

  • 마재평;박치선;백수현;황유상;백상훈;최진성;조현춘
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.30A no.10
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    • pp.59-66
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    • 1993
  • PZT thin film deposited by rf magnetron sputtering was annealed by rapid thermal process(RTP) in PbO ambient to prevent vaporing of Pb and interface reactions. Si and TiN/Ti/Si substrates were prepared to survey application of TiN/Ti layer which can prevent interface interaction with Si and crack of PZT thin films. As temperature increased. PZT thin films surface on Si substrate appeared more severe cracks which should affect electrical properties deadly. TiN/Ti(40-150${\mu}{\Omega}{\cdot}cm$) layer applied for buffer layer suppressed interface interaction and film cracking. The measured leakage current(LC) and breakdown voltage(BV) of PZT thin film on TiN/Ti/Si substrate annealed at 650$^{\circ}$C for 15 sec (thickness of 2500$\AA$) were 38 nA/cm2 and 3.5 MV/cm and dielectric constant was 310 at 1 MHz, and remanent polarization (Pr) and coercive field (Ec) were 6.4${\mu}C/cm^{2}$ and 0.2MV/cm at 60 Hz, respectively.

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$SrTiO_3$ Single Crystal Growth by Verneuil Method (Verneuil법에 의한 $SrTiO_3$ 단결정 성장)

  • Choi, I.S.;Cho, H.;Choi, J.K.;Orr, K.K.
    • Journal of the Korean Ceramic Society
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    • v.29 no.9
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    • pp.689-694
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    • 1992
  • Strontium Titanate single crystal is grown by Verneuil method. Feed materials were prepared by coprecipitation method which started with Sr(NO3)2 and TiCl4. SrTiO3 can not be grown from feed materials having the stoichiometric components due to volatilization of SrO, when the powder added more 3 wt% SrO used, the crystal can be grown. Growth conditions that the pressure of oxygen and hydrogen gas was 5 psi, the flow rate of oxygen and hydrogen was 7.3 and 30ι/min respectively, the growth rate was 20 mm/hr were optimum. The grown single crystal has the diameter of 10~15 mm and its length is 30~40 mm. The grown crystal was deep brown color and somewhat transparent. The color of grown crystal was lightened after annealing.

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Formation of $PbTiO_3$ Thin Films by Thermal Diffusion from Multilayrs (다층 구조로부터 열 확산에 의한 $PbTiO_3$ 박막의 제조)

  • 서도원;최덕균
    • Journal of the Korean Ceramic Society
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    • v.30 no.6
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    • pp.510-516
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    • 1993
  • $PbTiO_3$ thin films have been formed by rapid thermal annealing(RTA) of $TiO_2$/Pb/$TiO_2$ multilayer films deposited on Si wafers by RF sputtering. Based on the optimal depositon conditions of TiO2 and Pb, $TiO_2$/Pb/$TiO_2$ three layers were deposited for 900$\AA$ each. These films were subjected to RTA process at the temperatures ranging from $400^{\circ}C$ to $900^{\circ}C$ for 30 seconds in air, and were analyzed by X-ray diffraction and transmission electron microscopy to investigate the phases and the microstructures. As a result, perovskite $PbTiO_3$ phases was obtained above $500^{\circ}C$ with the trace of unreacted $TiO_2$. RBS analysis revealed the anisotropic behavior of diffusion that the diffusivity of Pb to the bottom $TiO_2$ layer was faster than that of Pb to the top $TiO_2$ layer. The amorphous Pb-silicate was formed between film and Si substrate due to the diffusion of Pb, but Pb-silicate existed locally at the interface and the amount of that phase was very small. Therefore the effect of bottom $TiO_2$ layer as a diffusion barrier was confirmed. $PbTiO_3$ films formed by current technique showed a relative dielectric constant of 60, and the maximum breakdown field reached 170kV/cm.

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Thermal Durability of Al2TiO5-Mullite Composites and Its Correlation with Microstructure

  • Kim, Hyung-Chul;Lee, Dong-Jin;Kweon, Oh-Seong;Kim, Ik-Jin
    • Journal of the Korean Ceramic Society
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    • v.42 no.8 s.279
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    • pp.532-536
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    • 2005
  • Thermal shock resistance of structural ceramics is a property that is difficult to quantity, and as such is usually expressed in terms of a number of empirical resistance parameters. These are dependant on the conditions imposed, but one method that can be used is the examination of density, Young's modulus and thermal expansion retention after quenching. For high temperature applications, long-annealing thermal durability, cycle thermal stability and residual mechanical properties are very important if these materials are to be used between $1000^{\circ}C$ and $1300^{\circ}C$. In this study, an excellent thermal shock-resistant material based on $Al_2TiO_5-mullite$ composites of various compositions was fabricated by sintering reaction from the individual oxides and adjusting the composition of $Al_2O_3TiO_2/SiO_2$ ratios. The characterization of the damage induced by thermal shock was done by measuring the evolution of the Young's modulus using ultrasonic analysis, density and thermal expansion coefficients.

The optical, electrical and structural properties in indium zinc oxide films deposited by LF magnetron sputtering

  • Kim, Eun-Lyoung;Jung, Sang-Kooun;Kim, Myung-Chan;Lee, Yun-Su;Song, Kap-Duk;Park, Lee-Soon;Sohn, Sang-Ho;Park, Duck-Kyu
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.1402-1405
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    • 2006
  • Using a indium zinc oxide (IZO) alloy target with a ratio of 90:10 in wt%, highly transparent conducting oxide (TCO) thin films are prepared on polyethersulfone (PES) substrates by lowfrequency (LF) magnetron sputtering system. These films have amorphous structures with excellent electrical stability, surface uniformity and high optical transmittance. Experiments were carried out as a function of applied voltage. At optimal deposition conditions, thin films of IZO with a sheet resistance of 29 ohm/sq. and an optical transmission of over 82 % in the visible spectrum range were achieved. The IZO thin films fabricated by this method do not require substrate heating during the film preparation or any additional post-deposition annealing treatment.

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Fabrication and Characteristics of pressure sensors for high pressure (고압용 압력센서의 제작과 그 특성)

  • Choi, Sung-Kyu;Seo, Jeong-Hwan;Chung, Gwiy-Sang
    • Proceedings of the KIEE Conference
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    • 2001.07c
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    • pp.1375-1377
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    • 2001
  • This paper describes the fabrication and characteristics of CrN thin-film type pessure sensors, in which the sensing elements were deposited on SUS. 630 diaphragm by DC reactive magnetron sputtering in an argon-nitride atmosphere(Ar-(10%) $N_2$). The optimized condition of CrN thin-film sensing elements was thickness range of 3500$\AA$ and annealing condition($300^{\circ}C$, 3 hr) in Ar-10 %$N_2$ deposition atmosphere. Under optimum conditions, the CrN thin-films for strain gauges is obtained a high resistivity, $\rho$=1147.65 ${\mu}{\Omega}$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal, 11.17. The output sensitivity of fabricated CrN thin-film type pressure sensors is 2.36 mV/V, 4$\sim$20 mA and the maximum non-linearity is 0.4 %FS and hysteresis is less than 0.2 %FS..

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Electrical Properties of Metal - Insulator- Metal Diode for AM-LCD Driving

  • Kim, Jang-Kwon;Lee, Myung-Jae;Kim, Dong-Sik;Chung, Kwan-Soo
    • Proceedings of the IEEK Conference
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    • 2002.07b
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    • pp.1125-1128
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    • 2002
  • Tantalum pentoxide (Ta$_2$O$\sub$5/) is a candidate for use in metal-insulator-metal diode in switching devices for active-matrix liquid-crystal displays. The MIM diode with very low threshold voltage and perfect symmetry was fabricated. High quality Ta$_2$O$\sub$5/ thin films were obtained by using an anodizing method. Rutherford backscattering spectroscopy, transmission electron microscope observations, auger electron spectroscopy, ellipsometry measurements, and electrical measurements, such as current - voltage(I-V) measurements were performed to investigate Ta$_2$O$\sub$5/ films and their reliability and indicated that the obtained TaOx thin films were reliable Ta$_2$O$\sub$5/ films for the applications. Furthermore, in this paper, we discuss the effects of top-electrode metals and annealing conditions. The conduction mechanism of the leakage current and the symmetry characteristics related to the Schottky emission and Poole-Frankel effect are also discussed using the results of electrical measurements and conduction barrier theory.

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