• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.50-53
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• 2003

CMP (chemical mechanical polishing) process remained to solve several problems in deep sub-micron integrated circuit manufacturing process. especially consumables (polishing pad, backing film, slurry, pad conditioner), one of the most important components in the CMP system is the slurry. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are important in determining polish rate and planarization ability of a CMP process. However, the cost of abrasives is still very high. So, in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Journal of Welding and Joining
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• v.15 no.4
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• pp.154-165
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• 1997

Abrasive wear characteristics of high Cr white cast iron-based hardfacing were investigated using the rubber wheel abrasion wear test method according with the ASTM G65-85. Mild steel was also tested for comparison with high Cr cast iron hardfacing. Wear experiments, where the applied force, wheel revolution rate and abrasive powder feed rate were selected as test valuables, were planned and analyzed by response surface method to evaluate wear statistically and quantitatively. Weight loss of high Cr cast iron hardfacing was mostly affected by the applied force and wheel revolution rate, and little by the powder feed rate. Weight loss of mild steel was greatly affected by the wheel revolution rate and powder feed rate, and slowly and steadily increased with the applied force. Abrasive wear mechanism of high Cr cast iron and mild steel was discussed in the light of the wear test results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.78-81
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• 2003

Polishing Processes are widely used in the glass, optical, die and semiconductor industry and are conventionally carried out using abrasive slurry and a polishing pad. But abrasive slurry process has a weak point that is high cost of handling of used slurry and hard controllability of slurry. Recently, some researches have attempted to solve these problems and one method is the development of a fixed abrasive pad. FAP has a couple of advantages including clean environment, lower CoC, easy controllability and higher form accuracy. But FAP also has a weak point that is need of dressing because of glazing and loading. The paper introduces the basic concept and fabrication technique of FAP using hydrophilic polymers with swelling characteristics in water and explains the self-conditioning phenomenon. Experimental results demonstrate to achieve nano surface roughness of soda lime glass for optical application

• Journal of Welding and Joining
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• v.23 no.1
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• pp.86-93
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• 2005

Abrasive waterjet (AWJ) can provide a more effective means for precision of difficult -to-machining materials such as ceramics and titanium alloys. The present study is focused on the surface roughness of abrasive waterjet cut surfaces. This paper investigated theoretical and experimental surface characteristics associated with abrasive waterjet cutting of titanium alloy Gr2. It is shown that the proper variations of several cutting parameters such as waterjet cutting pressure, cutting speed and cutting depth improve the roughness and characteristics on specimen surfaces produced by AWJ cutting. From the experimental results by AWJ cutting of titanium alloy Gr2, the optimal cutting conditions to improve the surface roughness and precision were proposed and discussed.

• Journal of Welding and Joining
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• v.19 no.5
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• pp.540-547
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• 2001

This study has evaluated the wear behavior of PTA (Plasma Transferred Arc) Inconel 625 and Stellite 6 overlays on Nimonic 80A substrate. Nimonic 80A alloy was also included for comparison. In order to evaluate the wear performance, three-body abrasive wear test and pin-on-disk dry sliding wear test were performed. Microstructural development during the solidification of deposits is also discussed. Wear test results show that the wear rate of Stellite 6 deposit is lower than that of Inconel 625 deposit and Nimonic 80A. The sliding wear resistance of overlay deposits follows a similar trend to the abrasive wear resistance, but for Nimonic 80A. The main wear mechanisms were abrasive wear for Inconel 625 deposit, adhesive wear and delamination for Stellite 6 deposit in pin-on-disk dry sliding wear test and ploughing in three-body abrasive wear test. Cross sectional examinations of the worn surface of pin specimens after pin-on-disk dry sliding wear test implies that the plastic deformation near worn surface has occurred during the wear testing.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.03a
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• pp.203-208
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• 1998

Materials of the Frame hole in fishing trackle reel is made up a number large and small holes. Thus, it is difficult to effective machining. Abrasive flow machining(AFM) is useful to polish a internal or external surface of the 3-dimensional shape parts, which are used in many fields such as aerospace, automative, semi-conductor, and medical component industries. The machining process is that two hydraulic cylinders, which are located face to face, enforce abrasive media to the passage between workpiece and tooling parts alternately, and then the abrasives include in the media pass the passage and polish the surface of workpiece. The media which is made of polymer and abrasives plays the role of the tool for deburring or polishing complex shap workpiece by its viscoelastic characteristics. In this study, the abrasive media for abrasive flow machining was made by mixing viscielastic polymer with alunina and silicon carbide abrasive. Also, we present AFM device design and preliminary results of an investigation in to some aspects of the AFM process performance in fishing trackle reel.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.10
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• pp.178-183
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• 2001

Abrasive jet machining(AJM) process is similar to the sand blasting and effectively removes hard and brittle materials. AJM has applied to rough working such as debarring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM is developed, and has become the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro grooving of glass. Diameter of hole and width of line in grooving is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro grooving of glass, but the size of machined groove increased about 2~4${\mu}{\textrm}{m}$. With the fine tuning of masking process and compensation of film wear. this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.984-987
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• 2002

Abrasive water-jet(AWJ) machining is a new cutting technology. The AWJ can cut various materials such as metal, glass and stone. However, the AWJ machining makes troubles including kerf, rounding and side taper. In this study, we investigated the correlation between parameters of abrasive water-jet machining and cutting characteristics. The machining parameters were the material thickness and the traverse speed. The experiment was conducted to cut the stainless steel(STS41) and the mild steel(SS41) specimens. The results of the experiment were presented as the relation between cutting conditions and troubles of a dimension error, a conner error, an uncut width and a kerf.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.585-590
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• 2002

Abrasive water-jet(AWJ) machining is a new cutting technology. The AWJ can cut various materials touch as metal, glass and stone. However, the AWJ machining makes troubles including kerf, rounding and side taper. In this study, we investigated the correlation between parameters of abrasive water-jet machining arid cutting characteristics. The machining parameter were the material thickness and the traverse speed. The experiment was conducted to cut the stainless steel(STS41) and the mild steel(SS41) specimens. The results of the experiment weirs presented as the relation between cutting conditions and trouble of a dimension error, a conner error, an uncut width and a kerf.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.3
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• pp.272-277
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• 2004

The primary aim of this study is to investigate new semi-abrasive free slurry including acid colloidal silica and hydrogen peroxide for copper chemical-mechanical planarization (CMP). In general, slurry for copper CMP consists of colloidal silica as an abrasive, organic acid as a complex-forming agent, hydrogen peroxide as an oxidizing agent, a film forming agent, a pH control agent and several additives. We developed new semi-abrasive free slurry (SAFS) including below 0.5％ acid colloidal silica. We evaluated additives as stabilizers for hydrogen peroxide as well as accelerators in tantalum nitride CMP process. We also estimated dispersion stability and Zeta potential of the acid colloidal silica with additives. The extent of enhancement in tantalum nitride CMP was verified through anelectrochemical test. This approach may be useful for the application of single and first step copper CMP slurry with one package system.