• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1312-1315
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• 2004

Chemical Mechanical Polishing is referred to as a three body tribological system, because it includes two solids in relative motion and the slurry. On the assumption that the abrasives between the pad and the wafer could be a major reason of not only the friction force but also material removal during polishing. The friction force generated by the abrasives was inspected with the change of abrasive size and concentration in this paper. The variation of coefficient of friction with abrasive concentration and size could result from the condition of contact and load balance between wafer and abrasives carried by pad asperity. The simulation was performed in this paper and compared with the result of experiment. The material removal rate also estimated with abrasive concentration and size increasement.

• Maxillofacial Plastic and Reconstructive Surgery
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• v.40
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• pp.12.1-12.5
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• 2018

Background: Subcutaneous emphysema refers to swelling caused by the presence of air or gas in the interstices of loose connective tissue. In the head and neck area, it may follow the fascial planes and is characterized by sudden swelling, crepitus on palpation, infrequent pain, and air emboli on radiography. It usually occurs as a complication in dental treatment. Some reports have described subcutaneous emphysema caused by dental procedures; however, severe emphysema related to peri-implantitis after treatment has not been documented. Accordingly, the current report describes a rare case of subcutaneous cervical emphysema resulting from the use of an air-powder abrasive device to treat peri-implantitis. Case presentation: Based on a review of the existing literature and the present case, nine cases of subcutaneous emphysema due to air-powder abrasive device have been reported. In most cases, the emphysema resolved over time after treatment with prophylactic antibiotics; among these, two were related to peri-implantitis management. Conclusion: Considering the frequent use of air-powder abrasive devices to treat peri-implantitis, the potential risk of iatrogenic emphysema related to this procedure needs to be addressed more extensively.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.1
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• pp.83-88
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• 2016

Because of the increasing tool cost for cutting hard-to-cut materials, abrasive water jet (AWJ) milling recently has been regarded as a potential alternative machining method. However, it is difficult to control the depth and width of cut in AWJ milling because they vary depending on many AWJ cutting parameters. On 27 conditions within a limited range of pressure, feed rate, and abrasive flow rate, AWJ cutting was conducted on titanium, and depth profiles were measured with a laser sensor. From the depth profile data, depth and width of cut were acquired at each condition. The relationships between depth and parameters and between width and parameters were derived through regression analysis. The former can provide proper cutting conditions and the latter the proper pick feed necessary to generate a milled surface. It is verified that pressure mostly affects depth, whereas abrasive flow rate mostly affects width.

• 한국지구물리탐사학회:학술대회논문집
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• 2003.11a
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• pp.637-641
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• 2003

Abrasive powders were recovered from electrical industry sludge by simple physical separation for their recycling. The raw electrical industry sludge was filter pressed, dried, dispersed and then classified by air classifier at various conditions. The three kinds of particles with different particle size distribution were classified by controlling rotor speed and air volumes of the classifier. The recovered abrasive powders, which are classified at 5,000,9000 and 13,000 rpm of rotor speed, are almost same properties to raw pumice, garnet and rouge powders, respectively. The results of particle size analysis, X-ray diffraction and SEM observation show that the recovered powders can be reused as an abrasive powders.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1175-1178
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• 2005

Brittle materials, especially single-crystal silicon wafer, are widely used for sensors, IC industry, and MEMS applications. e general machining process of crack easy materials is by chemical agents, but it is hazardous and time consuming. Also, it is difficult to get high aspect ratio micro structure. As an alternative tool, an AJM(Abrasive jet machining) is promising method in terms of high aspect ratio and production cost. In this study, to get more precise detail compared to general AJM, photo polymer mask, SU-8, used in photolithography was applied in AJM. Process parameters such as abrasive diameter, air pressure, nozzle diameter, flow rate of abrasive in AJM and a variety of conditions in spin coating were decided. Finally, micro channel and mixer was fabricated to see the efficiency of the AJM with photo polymer mask.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.8
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• pp.899-904
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• 2011

This This study aims to verify burr formation and to remove the burrs in micro-channel fabrication using micro-machining tools. The machining processes are combined with micro-milling and magnetic abrasive deburring for AISI316 stainless steel. Depending on the micro-milling conditions that are applied, burrs are formed around the side walls. Magnetic abrasive deburring is used to remove these burrs. AISI316 stainless steel is a nonferrous material and its magnetic flux density, which is an important parameter for efficient magnetic abrasive deburring, is low. To enhance this magnetic flux density, we design and build a magnetic array table. The effect of removing burrs is evaluated via SEM and a surface tester.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.158-161
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• 2003

The primary aim of this study is to investigate new semi-abrasive free slurry including acid colloidal silica and hydrogen peroxide for copper chemical-mechanical planarization (CMP). In general, slurry for copper CMP consists of colloidal silica as an abrasive, organic acid as a complex-forming agent, hydrogen peroxide as an oxidizing agent, a film forming agent, a pH control agent and several additives. We developed new semi-abrasive free slurry (SAFS) including below 0.5% acid colloidal silica. We evaluated additives as stabilizers for hydrogen peroxide as well as accelerators in tantalum nitride CMP process. We also estimated dispersion stability and Zeta potential of the acid colloidal silica with additives. The extent of enhancement in tantalum nitride CMP was verified through anelectrochemical test. This approach may be useful for the application of single and first step copper CMP slurry with one package system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.380-381
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• 2006

Chemical mechanical polishing (CMP) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, the cost of ownership and cost of consumables are relatively high because of expensive slurry. In this paper, we studied the mixed abrasive slurry (MAS). In order to save the costs of slurry, the original silica slurry was diluted by de-ionized water (DIW). And then, $ZrO_2$, $CeO_2$, and $MnO_2$ abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry. We have also investigate the possibility of mixed abrasive slurry for the oxide CMP application.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.7
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• pp.79-86
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• 2010

The environment-friendly abrasive materials of starch series has a wide range of application value such as deburring of plastic injection products, paint exfoliation and surface treatment of painted products and polishing, etc. In this study, an experiment of paint exfoliation was performed by using the environment-friendly abrasive materials made of cheap starch, and its performance was reviewed. By adjusting the grit size of abrasive materials, nozzle pressure, nozzle feed and number of nozzle repetition, paint could be exfoliated effectively. In this experiment, it was found that the most suitable condition was grit size 0.75~1.0 mm, nozzle pressure 0.4 MPa, nozzle feed 5 mm/min and number of processing repetition 2 times.

• Transactions of the Korean Society of Mechanical Engineers
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• v.13 no.4
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• pp.611-617
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• 1989

A jet cutting system is a new concept of cutting device wihch requires high pressure up to thousands of atmospheric pressure. The use of water as a cutting medium brings in many of working advantages such as no dust, no gas, and no thermal distortion. And an introduction of abrasives into the water jet flow increases signigicantly cutting abilities and improves cutting performance. Cutting with abrasive water jet involves many operating variables, including design of the cutting system. For efficient cutting, the operating parameters have to chosen properly. In spite of several attempts to develop the cutting model theoretically, all of the optimization of the operating parameters is based upon exerimental results of each jet cutting system. In this paper, the effect of the parameters was measured and analysed in terms of pressure, abrasive, and transverse rate of a workpiece. Most of all, sufficient feeding of abrasives is the most important factor for efficient cutting performance.