• Title/Summary/Keyword: and Capping effect

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Effect of Ta/Cu Film Stack Structures on the Interfacial Adhesion Energy for Advanced Interconnects (미세 배선 적용을 위한 Ta/Cu 적층 구조에 따른 계면접착에너지 평가 및 분석)

  • Son, Kirak;Kim, Sungtae;Kim, Cheol;Kim, Gahui;Joo, Young-Chang;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.1
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    • pp.39-46
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    • 2021
  • The quantitative measurement of interfacial adhesion energy (Gc) of multilayer thin films for Cu interconnects was investigated using a double cantilever beam (DCB) and 4-point bending (4-PB) test. In the case of a sample with Ta diffusion barrier applied, all Gc values measured by the DCB and 4-PB tests were higher than 5 J/㎡, which is the minimum criterion for Cu/low-k integration without delamination. However, in the case of the Ta/Cu sample, measured Gc value of the DCB test was lower than 5 J/㎡. All Gc values measured by the 4-PB test were higher than those of the DCB test. Measured Gc values increase with increasing phase angle, that is, 4-PB test higher than DCB test due to increasing plastic energy dissipation and roughness-related shielding effects, which matches well interfacial fracture mechanics theory. As a result of the 4-PB test, Ta/Cu and Cu/Ta interfaces measured Gc values were higher than 5 J/㎡, suggesting that Ta is considered to be applicable as a diffusion barrier and a capping layer for Cu interconnects. The 4-PB test method is recommended for quantitative adhesion energy measurement of the Cu interconnect interface because the thermal stress due to the difference in coefficient of thermal expansion and the delamination due to chemical mechanical polishing have a large effect of the mixing mode including shear stress.

Inelastic Displacement Ratio for Strength-limited Bilinear SDF Systems (강도한계 이선형 단자유도 시스템의 비탄성 변위비)

  • Han, Sang-Whan;Lee, Tae-Sub;Seok, Seung-Wook
    • Journal of the Earthquake Engineering Society of Korea
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    • v.14 no.4
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    • pp.23-28
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    • 2010
  • This study evaluated the effect of vibration, level of lateral yielding strength, site conditions, ductility factor, strain-hardening ratio, and post-capping ratio of the strength limited bilinear SDF systems on the inelastic displacement ratio. The nonlinear response history analysis was conducted using 240 ground motions which were collected at the sites classified as site classes B, C, and D according to the NEHRP. To account for the P-$\Delta$ effects, this study considered negative stiffness ratios ranging from -0.1 to -0.5 of elastic stiffness. Four different damping ratios are used: 2, 5, 10, and 20%. From this study, an equation of inelastic displacement ratio was proposed using nonlinear regression analysis.

Effect of PVP(polyvinylpyrrolidone) on the Ag Nano Ink Property for Reverse Offset Printing (PVP(polyvinylpyrrolidone)가 리버스 오프셋용 은 나노 잉크 물성에 미치는 영향)

  • Han, Hyun-Suk;Kwak, Sun-Woo;Kim, Bong-Min;Lee, Taik-Min;Kim, Sang-Ho;Kim, In-Young
    • Korean Journal of Materials Research
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    • v.22 no.9
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    • pp.476-481
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    • 2012
  • Among the various roll-to-roll printing technologies such as gravure, gravure-offset, and reverse offset printing, reverse offset printing has the advantage of fine patterning, with less than 5 ${\mu}m$ line width. However, it involves complex processes, consisting of 1) the coating process, 2) the off process, 3) the patterning process, and 4) the set process of the ink. Each process demands various ink properties, including viscosity, surface tension, stickiness, and adhesion with substrate or clich$\acute{e}$; these properties are critical factors for the printing quality of fine patterning. In this study, Ag nano ink was developed for reverse offset printing and the effect of polyvinylpyrrolidone(PVP), used as a capping agent of Ag nano particles, on the printing quality was investigated. Ag nano particles with a diameter of ~60 nm were synthesized using the conventional polyol synthesis process. Ethanol and ethylene glycol monopropyl ether(EGPE) were used together as the main solvent in order to control the drying and absorption of the solvents during the printing process. The rheological behavior, especially ink adhesion and stickiness, was controlled with washing processes that have an effect on the offset process and that played a critical role in the fine patterning. The electrical and thermal behaviors were analyzed according to the content of PVP in the Ag ink. Finally, an Ag mesh pattern with a line width of 10 ${\mu}m$ was printed using reverse offset printing; this printing showed an electrical resistivity of 36 ${\mu}{\Omega}{\cdot}cm$ after sintering at $200^{\circ}C$.

A BIOACTIVITY STUDY OF PORTLAND CEMENT MIXED WITH β-GLYCEROPHOSPHATE ON HUMAN PULP CELL (β-glycerophosphate 혼합시 인간 치수 세포에 대한 Portland cement의 생활성에 관한 연구)

  • Oh, Young-Hwan;Jang, Young-Joo;Cho, Yong-Bum
    • Restorative Dentistry and Endodontics
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    • v.34 no.5
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    • pp.415-423
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    • 2009
  • The purpose of this study is to investigate the response of human pulp cell on Portland cement mixed with $\beta$-glycerophosphate. To investigate the effect of $\beta$-glycerophosphate and/or dexamethasone on human pulp cell, ALP activity on various concentration of $\beta$-glycerophosphate and dexamethasone was measured and mineral nodule of human pulp cell was stained with Alizarin red S. MTS assay and ALP activity of human pulp cell on Portland cement mixed with various concentration of $\beta$-glycerophosphate (10 mM, 100mM, 1M) was measured and the specimens were examined under SEM. Addition of $\beta$-glycerophosphate or dexamethasone alone had no effect however, the addition of 5 mM $\beta$-glycerophosphate and 100 nM dexamethasone had the largest increasement in ALP activity. There was no toxicity in all samples and the data showed that Portland cement mixed with 10 mM $\beta$-glycerophosphate had more increase in ALP activity compared with control. In conclusion, Portland cement mixed with $\beta$-glycerophosphate has no toxicity and promotes differentiation and mineralization of pulp cell compared with additive-free Portland cement. This implicated that application of Portland cement mixed with $\beta$-glycerophosphate might form more reparative dentin and in turn it would bring direct pulp capping to success.

Effect of Co Interlayer on the Interfacial Reliability of SiNx/Co/Cu Thin Film Structure for Advanced Cu Interconnects (미세 Cu 배선 적용을 위한 SiNx/Co/Cu 박막구조에서 Co층이 계면 신뢰성에 미치는 영향 분석)

  • Lee, Hyeonchul;Jeong, Minsu;Kim, Gahui;Son, Kirak;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.27 no.3
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    • pp.41-47
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    • 2020
  • The effect of Co interlayer on the interfacial reliability of SiNx/Co/Cu thin film structure for advanced Cu interconnects was systematically evaluated by using a double cantilever beam test. The interfacial adhesion energy of the SiNx/Cu thin film structure was 0.90 J/㎡. This value of the SiNx/Co/Cu thin film structure increased to 9.59 J/㎡.Measured interfacial adhesion energy of SiNx/Co/Cu structure was around 10 times higher than SiNx/Cu structure due to CoSi2 reaction layer formation at SiNx/Co interface, which was confirmed by X-ray photoelectron spectroscopy analysis. The interfacial adhesion energy of SiNx/Co/Cu structure decreased sharply after post-annealing at 200℃ for 24 h due to Co oxidation at SiNx/Co interface. Therefore, it is required to control the CoO and Co3O4 formation during the environmental storage of the SiNx/Co/Cu thin film to achieve interfacial reliability for advanced Cu interconnections.

Genetic Consideration of Sericite Deposits Derived from Granitic Rocks in the Taebaegsan Region (태백산지역에 분포하는 화강암체 기원 견운모광상의 성인적 고찰)

  • Yoo, Jang-Han;Chi, Sei-Jeong
    • Journal of the Mineralogical Society of Korea
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    • v.21 no.3
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    • pp.239-246
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    • 2008
  • Yeongweol sericite deposit of Gangwon Province is regarded as one of the sericite deposits derived from granitic rocks due to post-magmatic alkali metasomatism, and the other sericite deposit of the same origin is the Daehyun mine of Gyungbug Province. Sericite ores were originated from leucocratic granitic stocks of Cambrian-Triassic age which intruded the pegmatitic migmatite of the unknown age and granite of the Pre-cambrian age, respectivcly. Jangsan quartzite of the lowermost formations of the Paleozoic era, which played as the capping rock protected from the leakage of the hydrothermal solution. It is well known that those sericite deposits arc formed during formation of the geosyncline, and they are also situated in the margins of the Hambaeg Syncline. Leucocratic granites commonly contain pegmatites with tourmaline crystals, and are rich in potassium feldspars, and sodium plagioclase as well. Sericitized ores are mainly found as we go up to the higher elevations or to the margins of the stocks. And some of the Highest grade sericite ores show the monominerallic character composed of nearly pure sericite probably doc to the ultra greisenization. Chemical analysis shows higher $Na_{2}O$ and $K_{2}O$ contents $(2.00\sim7.03wt%)$ as the sericitizations arc preceded and they represent obvious greisenization. But low CaO contents $(0.05\sim4.51wt%)$ indicate that albitizations are so weak. Pyrophyllite of the Youngweol area is often accompanied by the sericite, indicating rather stronger thermal effect than the Daehyun mine. It is known that there are several Sn deposits originated from greisenization in the Taebaegsan region. And greisens are inclined to contain W, Mo and several REE's such as Be, Nb and Li, and so Taebaegsan region interbedded with lots of carbonate formations are still worthwhile to survey for those metallic deposits.

AN HISTOPATHOLOGICAL STUDY ON THE EFFECT OF $CO_2$ LASER IRRADIATION ON THE EXPOSED DENTAL PULP (탄산가스 레이저 조사가 노출 치수에 미치는 영향에 관한 연구)

  • Kim, Jong-Kyu;Lee, Keung-Ho
    • Journal of the korean academy of Pediatric Dentistry
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    • v.24 no.1
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    • pp.27-40
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    • 1997
  • This study investigated the effects of laser irradiation on the exposed pulp and the possibility of direct pulp capping with the $CO_2$ laser. Results were obtained from the observation of the residual pulpal healing process. Class V cavities on 48 anterior teeth from 8 adult dogs were prepared and pulp chambers were intentionally opened with dental explorer. The control group consisted of 16 teeth. $Dycal^{(R)}$(Caulk Co., U.S.A.) was applied to exposed site once bleeding was stopped. Cavities were sealed with $I.R.M^{(R)}$. In the experimental group 1 (16 teeth), laser(LASERSAT $CO_2^{(R)}$, Satelec Co.) was irradiated on the exposed pulp. The laser procedure followed the manufacturers recommendations for the treatment of human pulp(1.5 Watts, 0.2 seconds, unfocused), and cavities were sealed with $I.R.M^{(R)}$. In the experimental group 2 (16 teeth), laser was irradiated on the exposed pulp in a more powerful dosage(5.0 Watts, 0.2 seconds, unfocused), and cavities were sealed with $I.R.M^{(R)}$. Two dogs were sacrificed immediately after experiment and the others were sacrificed at intervals of one, three, and eight weeks respectively. All teeth were routinely processed and the pulpal tissues and odontoblastic layers were observed by the light microscope. The results were as follows; 1. In the control group, the initial mild inflammation had improved to normal by week eight. An active formation of reparative dentin was observed at week three, and at week eight, a firm dentin bridge was present beneath the $Dycal^{(R)}$ with no inflammatory responses in the remaining pulp. 2. In the experimental group 1, immediately following irradiation, the superficial shape of the exposed pulp was crater-like. And it was lined with the coagulated layer, $60{\sim}70{\mu}m$ in width. Moderate inflammatory pulpal conditions existing at week one were improved to mild at week eight. And from the week three specimens, a reparative dentin formation was observed in the adjacent odontoblastic layer of the exposed site. A dentin bridge at the exposed site, however, did not form during the experimental period. 3. In the experimental group 2, the width of the coagulation layer lining the crater was $70{\sim}130{\mu}m$. Beneath the coagulated layer, severe inflammatory pulpal responses were observed at week one, and conditions did not improve during the experimental period.

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Geomorphological Approach in Geological Mapping of the Miocene and Post-Miocene Formations in the Albudeite Area, Spain (동남(東南) Spain Albudeite 지역(地域)의 Miocene및 Post-Miocene Formation에 대한 지질조사(地質調査)에 있어서의 지형학적(地形學的)인 접근(接近))

  • Yun, Suckew
    • Economic and Environmental Geology
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    • v.6 no.3
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    • pp.171-182
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    • 1973
  • Gemorphological and photogeological techniqes are applied to the problem of geological mapping of a semi-arid area, Albudeite, Southeastern Spain. As a result of this, a geological and surface materials map is made which shows the upper Miocene formation, which mainly consists of marl, limestone and sandstone, is further subdivided into three members, i. e. lower, middle and upper, and the post-Miocene deposits were differentiated into seven stratigraphic units, and mapped. The relationships between geology, landforms and land comlexes previously reognized have been reviewed. The methods adopted have proved to be valuable in interpreting and mapping a compex relationship in which highly variable bedrock outcrops and shallow surface materiales produced under sub-aerial conditios.

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Analysis and Improvement Practise of Drainage Problem on Soil Profile at the Golf Course Fairway (골프코스 페어웨이 지반 토양의 배수불량 원인과 개선방안)

  • Lee, Jung-Ho;Jung, Gi-Rai;Lee, Jong-Min;Joo, Young-Kyoo
    • Asian Journal of Turfgrass Science
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    • v.26 no.2
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    • pp.129-134
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    • 2012
  • Research was focused on the improvement of poor drainage problems on golf course fairway which had not been performed soil test or properly amended during the course construction. The analysis of the drainage problem basically was caused by a deterioration of soil physical properties by the top layer compaction. The soil hardness reached about 3,000 Kpa around 5~6 cm of soil profile. The slow infiltration speed to subsoil by the compaction was caused directly a poor drainage capacity. However, the properly amended sand soil showed an apparent value of 1,500 Kpa through the subsoil. The water content test showed a similar result that higher rate of 20~30% and ideal rate of 8~12% at poor drainage area and successfully amended area, respectively. However, an imported topsoil media which had higher content of silt and clay from a trans-planted sod had made a heterogeneous soil profile and that caused a poor drain capacity by a low infiltration rate. Those drainage problems triggered to buildup a reduced soil layer by poor soil gas exchange. The soil environment of deoxidation enhanced anaerobic microbial population and induced methane gas build-up to 55 ppm, and that resulted an adverse effect on turf growth by root growth retardation, consequently.

Exchange coupling of Co/NiMn bilayer (Co/NiMn의 교환 자기결합에 관한 연구)

  • 안동환;조권구;주승기
    • Journal of the Korean Magnetics Society
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    • v.10 no.4
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    • pp.171-177
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    • 2000
  • Exchange coupling of Co/NiMn bilayers fabricated by RF magnetron sputtering method was studied. We investigated the variation of exchange coupling field (H$\sub$ex/) for different annealing temperature and time. The maximum exchange coupling field was obtained after 13hr annealing at 300 $^{\circ}C$. With respect to deposition sequence, it was demonstrated that NiMn-top bilayers had higher exchange coupling field than NiMn-bottom bilayers. Ta capping layer was shown to be essential in achieving exchange coupling and Auger Electron Spectroscopy (AES) proved that uncapped NiMn/Co bilayers did not have exchange coupling because of oxygen incorporation into film. We also observed the effect of Ta underlayer on exchange coupling. It was found that Ta underlayer had better not be used for attaining higher exchange coupling. XRD analysis showed that Ta underlayer helped bilayers develop texture, but it was not essential to exchange coupling of Co/NiMn bilayers, which is in contrast to NiFe/NiMn system. Furthermore, the NiMn and Co thickness dependence of exchange coupling has been investigated. The exchange coupling strength reached the maximum above 200 ${\AA}$ NiMn thickness and had inversely proportional relation with Co thickness.

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