• Journal of the Semiconductor & Display Technology
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• v.14 no.3
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• pp.1-5
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• 2015

In photolithography process, resolution enhancement techniques such as optical proximity correction (OPC) and phase shift mask (PSM) have been applied to improve resolution. Especially, sub-resolution assist feature (SRAF) is one of the most important OPC to enhance image quality including depth of focus (DOF). However, imaging performance of the mask could be varied with the diffraction order amplitude changed by inserting SRAF. Therefore, in this study, we investigated the imaging properties and process margin of attenuated PSM with SRAF. Reflectivities of attenuated PSMs at 13.5 nm were 3, 6, 9% and simulation was performed by $PROLITH^{TM}$. As a result, aerial image properties and DOF as well as diffraction efficiency were improved by increasing the reflectivity of attenuated PSM. Additionally, printed critical dimension variations depending on SRAF width and space error were also reduced for attenuated PSM with high reflectivity. However, SRAF could be printed when reflectivity of attenuated PSM is high enough. In conclusion, optimization of reflectivity of attenuated PSM and SRAF to prevent side-lobe from being printed is needed to be considered.

• Journal of the Korean Geophysical Society
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• v.3 no.2
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• pp.77-90
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• 2000

Five electrical resistivity dipole-dipole and two seismic reflection surveys were performed in the southeastern margin of the Yongdong basin to delineate the shallow basin architecture. To investigate the intra-basin structure, twenty four resistivity sounding points and three dipole-dipole lines were selected especially in the vicinity of volcanic masses. The basin-fault boundaries are identified in electrical dipole-dipole resistivity section as high resistivity-contrast of approximately $1,500\;{\Omega}{\cdot}m$, characterized as a band of high standard-deviation. They are also effectively clarified in the seismic reflection data: amplitude and continuity contrasts in the common shot gather, first-arrival profiles, complex attribute plots. The intra-basin resistivity structures are constructed by interpolating vertical electrical sounding data and dipole-dipole profiles. The high-resistivity anomalies most likely originate from the northsouth-trending and northeast-dipping volcanic masses, which are to be further quantitatively investigated with geomagnetic and magnetotelluric surveys.

• Economic and Environmental Geology
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• v.34 no.2
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• pp.217-226
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• 2001

Stable isotope, paleoceanographic and sedimentological analyses were carried out along the core Ml5612 from the Mid-Atlantic Ridge. Distinct negative ${\delta}^{18}O anomalies punctuate the planktonic isotope records and correlate with the Heinrich-IRD cvents. The IRD layer in the corc contains varying amounts of quartz, K-feldspar, plagioclase, calcite, dolomite and mica, in which detrital carbonate contributes between I and 13% (except H3 and H6). Anomalies are strongest in the N. pachydenna (sin.) isotope record. Systematic changes in the ${\delta}^{18}O offset of G. hul/aides and G. inJlata signify variations in mid-latitude thermocline structure. In conjunction with negative benthic ${\delta}^{13}C anomalies, the data document a stronger contribution of a ${\delta}^{13}C depleted, nutrient-rich water mass during the IRD events. The ${\delta}^{13}C amplitude of > 1 $\textperthousand$ between 25 and 57 ka indicates changes between northern source (NADW) and southern source (AABW) water masses at this site. The IRD layers in the core Ml56l2 are correlative with those from the core S075-26KL and DSDP 609. The IRD layers from the Portuguese margin arc coeval with HI, H2 and H4 of the open North Atlantic. This similarity (and/or synchronicity in both regions may have been resulted from common changes in a North Atlantic thermohaline switch.

• Journal of the Korea institute for structural maintenance and inspection
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• v.27 no.2
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• pp.33-41
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• 2023

The application of seismic separation joints that can improve the deformation capacity of piping is an effective way to improve seismic performance. Seismic separation joints capable of axial expansion and bending deformation are installed where deformation is expected and used for the purpose of safely protecting the piping. Bellows are flexible and have low stiffness, so they can be used as seismic separation joints because they have excellent ability to respond to relatively large deformation. In this study, the seismic performance and limit state for bending deformation of 2-ply and 3-ply bellows specimens were evaluated. Seismic performance was evaluated by applying an increasing cyclic load to consider low-cycle fatigue due to seismic load. In order to confirm the margin for the limit state of the evaluated seismic performance, an experiment was conducted in which a cyclic loading of constant amplitude was applied. As a result of the experiment, it was confirmed that the bellows specimen was made of stainless steel and had a high elongation, so that the 2-ply bellows specimen had the limit performance of resisting within 3 cycles even at the maximum forced displacement of the 3-ply bellows specimen.

• Journal of the Korea institute for structural maintenance and inspection
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• v.28 no.3
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• pp.91-99
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• 2024

Piping systems are crucial facilities used in various industries, particularly in areas related to daily life and safety. Piping systems are fixed to the main structures of buildings and facilities but do not support external loads and serve as non-structural elements performing specific functions. Piping systems are affected by relative displacements owing to phase differences arising from different behaviors between two support points under seismic loads; this can cause damage owing to the displacement-dominant cyclic behavior. Fittings and joints in piping systems are representative elements that are vulnerable to seismic loads. To evaluate the seismic performance and limit states of fittings and joints in piping systems, a high-stroke actuator is required to simulate relative displacements. However, this is challenging because only few facilities can conduct these experiments. Therefore, element-level experiments are required to evaluate the seismic performance and limit states of piping systems connected by fittings and joints. This study proposed a method to evaluate the seismic performance of an elbow specimen that includes fittings and joints that are vulnerable to seismic loads in vertical piping systems. The elbow specimen was created by connecting straight pipes to both ends of a 90° pipe elbow using flexible groove joints. The seismic performance of the elbow specimen was evaluated using a cyclic loading protocol based on deformation angles. To determine the margin of the evaluated seismic performance, the limit states were assessed by applying cyclic loading with a constant amplitude.

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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• v.14 no.2
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• pp.90-101
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• 2009

Analysis of multi-channel seismic reflection data from the Southern Ulleung Basin reveals that Plio-Quaternary section in the area consists of nine stacked sedimentary units separated by erosional unconformities. On the southern slope, these sedimentary units are acoustically characterized by chaotic seismic facies without distinct internal reflections, interpreted as debris-flow bodies. Toward the basin floor, the sedimentary units are defined by well-stratified facies with good continuity and strong amplitude, interpreted as turbidite/hemipelagic sediments. The seismic facies distribution suggests that deposition of Plio-Quaternary section in the area was controlled mainly by tectonic movement and sea-level fluctuations. During the Pliocene, sedimentation was mainly controlled by tectonic movements related to the back-arc closure of the East Sea. The back-arc closure that began in the Miocene caused compressional deformation along the southern margin of the Ulleung Basin, resulting in regional uplift which continued until the Pliocene. Large amounts of sediments, eroded from the uplifted crustal blocks, were supplied to the basin, depositing Unit 1 which consists of debris-flow deposits. During the Quaternary, sea-level fluctuations resulted in stacked sedimentary units (2-9) consisting of debris-flow deposits, formed during sea-level fall and lowstands, and thin hemipelagic/turbidite sediments, deposited during sea-level rise and highstands.

• The Journal of Korean Society for Radiation Therapy
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• v.22 no.2
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• pp.113-122
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• 2010

Purpose: To evaluate the accuracy of a target position at static and dynamic state by using Dynamic phantom for the difference between tumor's actual movement during respiratory gated radiation therapy and skin movement measured by RPM (Real-time Position Management). Materials and Methods: It self-produced Dynamic phantom that moves two-dimensionally to measure a tumor moved by breath. After putting marker block on dynamic phantom, it analyzed the amplitude and status change depending on respiratory time setup in advance by using RPM. It places marker block on dynamic phantom based on this result, inserts Gafchromic EBT film into the target, and investigates 5 Gy respectively at static and dynamic state. And it scanned investigated Gafchromic EBT film and analyzed dose distribution by using automatic calculation. Results: As a result of an analysis of Gafchromic EBT film's radiation amount at static and dynamic state, it could be known that dose distribution involving 90% is distributed within margin of error of 3 mm. Conclusion: As a result of an analysis of dose distribution's change depending on patient's respiratory cycle during respiratory gated radiation therapy, it is expected that the treatment would be possible within recommended margin of error at ICRP 60.