• Journal of Sensor Science and Technology
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• v.13 no.3
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• pp.182-187
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• 2004

The fluorinated amorphous carbon thin films (a-C:F) were deposited by PECVD(plasma enhanced chemical vapor deposition). The precursors were $C_{4}F_{8}$ which had a similar ratio of target film's carbon to fluorine ratio, and $Si_{2}H_{6}$/He for capturing excessive fluorine ion. We varied deposition condition of temperature and working pressure to survey the effect of each changes. We measured dielectric constant, composition, and etc. At low temperature the film adhesion to substrate was very poor although the growth rate was very high, the growth rate was very low at high temperature. The EDS(energy dispersive spectroscopy) result showed carbon and fluorine peak for films and Si peak for substrate. There was no oxygen peak.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.366-366
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• 2008

Amorphous carbon (a-C) is an interesting materials and its characteristics can be varied by tuning it $sp^3$ fractions. The $sp^3$ fraction in a-C films depends on the kinetic energy of the deposited carbon ions. In this work, a-C films was synthesized on Si(100) and glass substrates at room temperature by closed-field unbalanced magnetron (CFUBM) sputtering with the increase of graphite target power density. The structural and physical properties of films were investigated by using Raman spectroscopy, X-ray photoelectron spectrometer (XPS), nano- indentation, atomic force microscope (AFM) and contact-angle measurement. We obtained the good tribological properties, such as high hardness up to 26 GPa., friction coefficient lower than 0.1 and the smooth surface (rms roughness: 0.12 nm). The increase of the physical properties with the increase of target power density are related to the increase of nano-clusters in the carbon network. Also, these results might be due to the increase of the subplantation and resputtering by the increase of ions density in the plasma.

• Journal of Korea Foundry Society
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• v.31 no.5
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• pp.267-273
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• 2011

Erosion and thermal shock resistance of several refractory materials have been investigated, which are expected to be used as nozzles in a planar flow casting equipment for amorphous alloys. The test was conducted on five materials; graphite, boron nitride, fused silica, alumina and zirconia. Test specimens were preheated and dipped into the melt of carbon steel and amorphous alloys. Some test specimens were rotated to develop high erosion and to shorten the test periods. Fused silica and boron nitride specimens showed the excellent erosion and thermal shock resistance irrespective of the kind of melt and melting atmosphere.

• Applied Chemistry for Engineering
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• v.26 no.1
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• pp.80-85
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• 2015

Silicon/carbon composites as anode materials for lithium-ion batteries were examined to find the cycle performance and capacity. Silicon/carbon composites were prepared by a two-step method, including the magnesiothermic reduction of SBA-15 (Santa Barbara Amorphous material No. 15) and carbonization of phenol resin. The electrochemical behaviors of lithium ion batteries were characterized by charge/discharge, cycle, cyclic voltammetry and impedance tests. The improved electrochemical performance attributed to the fact that silicon/carbon composites suppress the volume expansion of the silicon particles and enhance the conductivity of silicon/carbon composites (30 ohm) compared to that of using the pure silicon (235 ohm). The anode electrode of silicon/carbon composites showed the high capacity approaching 1,348 mAh/g and the capacity retention ratio of 76% after 50 cycles.

• Journal of Information Display
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• v.2 no.3
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• pp.72-77
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• 2001

Amorphous silicon thin-film transistors (a-Si TFTs) were incorporated into Mo-tip-based triode-type field emitters and diode-type ones of carbon nanotubes for an active-matrix cathode (AMC) plate of field emission displays. Also, we developed a novel surface-treatment process for the Mo-tip fabrication, which gleatly enhanced in the stability of field emission. The field emission currents of AMC plates on glass substrate were well controlled by the gate bias of a-Si TFTs. Active-matrix field emission displays (AMFEDs) with these AMC plates were demonstrated in a vacuum chamber, showing low-voltage matrix addressing, good stability and reliability of field emission, and highly uniform light emissions from the anode plate with phosphors. The optimum design of AMFEDs including a-Si TFTs and a new light shield/focusing grid is discussed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.11
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• pp.694-697
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• 2015

We investigated the characterizations of carbon films fabricated by dual magnetron sputtering under various RF powers for the improvement of physical properties in carbon fiber (CF). All sputtered carbon films exhibited amorphous structure, regardless of RF powers, resulting in uniform and smooth surfaces. The hardness and elastic modulus are increased with the increase of RF power, and the adhesion and friction properties of carbon films were improved with the increase of RF power. In the results, The increase of RF power in the sputtering method improved tribological properties of the carbon films, and these attributes can be expected to improve the physical properties of the carbon fiber reinforcement plastics.

• Laser Solutions
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• v.5 no.2
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• pp.17-22
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• 2002

Characteristics of micro carbon structures fabricated with laser-induced chemical vapor deposition (LCVD) are investigated. An argon ion laser (λ＝514.5nm) and ethylene gas were utilized as the energy source and precursor, respectively. The laser beam was focused onto a graphite substrate to produce carbon deposit through thermal decomposition of the precursor. Average growth rate of a carbon rod increased for increasing laser power and pressure. Micro carbon rods with good surface quality were obtained at near the threshold condition. Micro carbon rods with aspect ratio of about 100 and micro tubular structures were fabricated to demonstrate the possible application of this method to the fabrication of three-dimensional microstructures. Laser Raman spectroscopic analysis of the micro carbon structures revealed that the carbon rods are consisting of amorphous carbon.

• Journal of the Korean Vacuum Society
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• v.7 no.3
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• pp.242-247
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• 1998

Hydrogenated amorphous carbon nitride[a-C:H(N)] films were deposited on p-type Si(100) at room temperature with bias voltage of 200 V by DC saddle-field plasma-enhanced chemical vapor deposition. Effects of the ratio of $N_2$ to $CH_4$($N_2/CH_4$), in the range of 0 and 4 on such properties as optical properties, microstucture, relative fraction of nitrogen and carbon, etc. of the films have been investigated. The thickness of the a-C:H(N) film was abruptly decreased with the addition of nitrogen, but at $N_2/CH_4$>0.5, the thickness of the film gradually decreased with the increase of the $N_2/CH_4$. The ratio of N to C(N/C) of the films was saturated at 0.25 with the increase of $N_2CH_4$. N-H, C≡N bonds of the films increased but C-H bond decreased with the increase of $N_2CH_4$.Optical band gap energy of the film decreased from 2.53 eV at the ratio of $N_2CH_4$=4.

• Journal of the Korean Recycled Construction Resources Institute
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• v.6 no.4
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• pp.357-364
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• 2018

Fly ash is a material used as a concrete admixture. When fly ash is used for concrete manufacturing, it is expected to improve the performance such as reduction of cement usage and increase of chemical resistance. However, fly ash have some problems such as unburned carbon content and amorphous film on the surface of fly ash particles. When concrete is manufactured using fly ash containing a large amount of unburned carbon, there is a problem that the slump is lowered due to adsorption of AE agent. In addition, the amorphous film on the surface of the particles prevents the reactive substances from leaching out of the fly ash. Therefore, a method of surface treatment of fly ash using plasma has been studied to remove such unburned carbon and amorphous films. However, plasma has the problem that $O_3$ is generated when $O_2$ is used as an active gas. $O_3$ is a harmful substance and adversely affects the health of the experimenter. In this study, the surface of fly ash was treatment by arc discharge. Experimental results show that the unburned carbon is removed when the surface of fly ash is treatment by arc discharge and the amorphous film was broken and the reactivity was improved. Therefore, it is considered that arc discharge can treatment the surface of fly ash and improve the quality of fly ash.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.59-60
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• 2002

In this digest, we briefly review our current molecular dynamics (MD) simulations that utilize both the reactive empirical bond order potential (REBO) and the adaptive intermolecular REBO (AIREBO) potential energy functions. The AIREBO potential includes intermolecular interactions, so that self·assembled monolayers, and liquids, can be modeled. We have examined the mechanical and tribological properties of model self assembled monolayers and amorphous carbon films. Self-assembled monolayers are modeled by covalently bonding hydrocarbon chains to diamond substrates. Because the REBO potentials can model chemical reactions, specific compression and sliding induced chemical reactions were identified.