• Title/Summary/Keyword: ambient gas

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Deposition Characteristics of Ti-Si-N Films Deposited by Radio Frequency Reactive Sputtering of Various Ratio of Ti/Si Targets in an $N_2$/Ar Ambient (Ti/Si의 조성비율이 다른 타겟을 이용한 sputtered Ti-Si-N 박막의 증착특성 연구)

  • Park, Sang-Gi;Kang, Bong-Joo;Yang, Hee-Jeong;Lee, Won-Hee;Lee, Eun-Goo;Kim, Hee-Jae;Lee, Jae-Gap
    • Korean Journal of Materials Research
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    • v.11 no.7
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    • pp.580-584
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    • 2001
  • We have investigated the deposition characteristics of Ti-Si-N films obtained by rf magnetron sputtering with ratios of Ti/Si targets in an $Ar/N_2$ gas mixture. The growth rate and stoichiometry dependence of the Ti-Si-N films on the ratio of Ti/Si and $N_2$ flow rate ratio were found to be due to the different nitriding rate of Ti and Si targets. Additionally, their different sputtering yield of nitrified Ti and Si make a reason as well. Lowering Si content in the film favored the formation of crystalline TiN, leading to the low resistivity. Increasing N content led to the Ti-Si-N films having a higher density and compressive stress, suggesting that the N content in the film is one of the most important factors determining the diffusion barrier characteristics. In the current work, the optimum process conditions for the formation of efficient diffusion barrier of Ti-Si-N film has successfully obtained by manipulating the Ti/Si ratio of target and $N_2$ flow rate ratio.

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Oxygen Permeation Properties of Tubular $Ba_{0.5}Sr_{0.5}Co_{0.8}Fe_{0.2}O_{3-{\delta}}$ (BSCF) Membranes under Different Condition of Feed Side and Permeate Side (공급 측과 투과 측 조건에 따른 $Ba_{0.5}Sr_{0.5}Co_{0.8}Fe_{0.2}O_{3-{\delta}}$ (BSCF) 관형 분리막의 산소투과 특성)

  • Kim, Jong-Pyo;Park, Jung-Hoon;Lee, Yong-Taek;Choi, Young-Jong
    • Membrane Journal
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    • v.21 no.2
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    • pp.155-162
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    • 2011
  • Dense tubular $Ba_{0.5}Sr_{0.5}Co_{0.8}Fe_{0.2}O_{3-{\delta}}$ (BSCF) membranes were prepared by extrusion technique. The phase structure of the $Ba_{0.5}Sr_{0.5}Co_{0.8}Fe_{0.2}O_{3-{\delta}}$ membranes was characterized by X-ray diffraction (XRD) and scanning electron microscope (SEM). Relative density of $Ba_{0.5}Sr_{0.5}Co_{0.8}Fe_{0.2}O_{3-{\delta}}$ tubular membrane was 94.10%. Oxygen permeation was measured at difference operating condition of feed side and permeate side in the temperature range from 700 to $950^{\circ}C$. The oxygen permeation flux of dense tubular $Ba_{0.5}Sr_{0.5}Co_{0.8}Fe_{0.2}O_{3-{\delta}}$ membrane reached maximum 1.37 mL/$min{\cdot}cm^2$ at $900^{\circ}C$ exposed to ambient air (feed side) and vacuum pump (permeate side).

W 도핑된 ZnO 박막을 이용한 저항 변화 메모리 특성 연구

  • Park, So-Yeon;Song, Min-Yeong;Hong, Seok-Man;Kim, Hui-Dong;An, Ho-Myeong;Kim, Tae-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.410-410
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    • 2013
  • Next-generation nonvolatile memory (NVM) has attracted increasing attention about emerging NVMs such as ferroelectric random access memory, phase-change random access memory, magnetic random access memory and resistance random access memory (RRAM). Previous studies have demonstrated that RRAM is promising because of its excellent properties, including simple structure, high speed and high density integration. Many research groups have reported a lot of metal oxides as resistive materials like TiO2, NiO, SrTiO3 and ZnO [1]. Among them, the ZnO-based film is one of the most promising materials for RRAM because of its good switching characteristics, reliability and high transparency [2]. However, in many studies about ZnO-based RRAMs, there was a problem to get lower current level for reducing the operating power dissipation and improving the device reliability such an endurance and an retention time of memory devices. Thus in this paper, we investigated that highly reproducible bipolar resistive switching characteristics of W doped ZnO RRAM device and it showed low resistive switching current level and large ON/OFF ratio. This may be caused by the interdiffusion of the W atoms in the ZnO film, whch serves as dopants, and leakage current would rise resulting in the lowering of current level [3]. In this work, a ZnO film and W doped ZnO film were fabricated on a Si substrate using RF magnetron sputtering from ZnO and W targets at room temperature with Ar gas ambient, and compared their current levels. Compared with the conventional ZnO-based RRAM, the W doped ZnO ReRAM device shows the reduction of reset current from ~$10^{-6}$ A to ~$10^{-9}$ A and large ON/OFF ratio of ~$10^3$ along with self-rectifying characteristic as shown in Fig. 1. In addition, we observed good endurance of $10^3$ times and retention time of $10^4$ s in the W doped ZnO ReRAM device. With this advantageous characteristics, W doped ZnO thin film device is a promising candidates for CMOS compatible and high-density RRAM devices.

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The study for VOCs analysis in long path by open path FT-IR spectrometer (Open path FT-IR spectrometer를 사용한 원거리의 VOCs 측정에 관한 연구)

  • Cho, Nam Wook;Cho, Won Bo;Kim, Hyo Jin
    • Analytical Science and Technology
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    • v.27 no.2
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    • pp.108-113
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    • 2014
  • The harmful materials as volatile organic compounds (VOCS) that is easy for gas to be changed from liquid on ambient temperature, those should be controlled by Korea Chemicals Management Association. The VOCs samples should be collected directly in place so that those could be analyzed. Generally but it couldn't avoid to have the risk of analyst. Moreover, if there is the place limited to entrance, it is impossible to collect directly and measure. Owing to such problem, it tried to be solved by open path FT-IR spectrometer that could be studied on the combustion gases within long path and VOCs samples were tried to measure to large volume by remote and real time. Firstly, it was to investigate optimized measured length between the system and benzene sample of VOCs. As result, The optimized measured length was confirmed with 15 meter length and the qualitative analysis could be measured on seven VOC samples. The calibration curve as quantitative analysis of benzene samples could be worked. On the basis of the result, the system as remote monitor could show to have potentiality.

Distribution of Persistent Organic Pollutants (POPs) in Different Sizes of Particles in the Ambient Air of the Pyeongteak Area (평택지역 대기 중 먼지 입경별 잔류성유기오염물질 분포특성 연구)

  • Kim, Dong-Gi;Woo, Jung-Sik;Kim, Yong-Jun;Jung, Hye-Eun;Park, Ju-Eun;Cho, Duck-Hee;Moon, Hee-Chun;Oh, Jo-Gyo
    • Journal of Environmental Health Sciences
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    • v.46 no.2
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    • pp.192-203
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    • 2020
  • Objectives: The concentration distributions of polychlorinated dibenzo-p-dioxins and dibenzofurans (PCDD/Fs), dioxin-like polychlorinated biphenlys (dl-PCBs), and polycyclic aromatic hydrocarbons (PAHs) in fine particles were investigated to provide basic data on POP behavior and composition analysis. Methods: The concentrations of PCDD/Fs, dl-PCBs, and PAHs by particle size were evaluated for TSP, PM10, and PM2.5. Also, fine dust component analysis and factor analysis were performed to identify the source of PCDD/Fs. Results: The particle size distribution was found to account for 24.3% of >10 ㎛, 14.5% of 2.5-10 ㎛, and 61.2% of <2.5 ㎛. The average contributions of coarse particles (>2.5 ㎛) and fine particles (<2.5 ㎛) were PCDD/Fs 67%, dl-PCBs 66%, benzo (a) pyrene 83% and PAHs 84%, and the contributions of fine particles (<2.5 ㎛) were higher than coarse particles (>2.5 ㎛). However, the contributions of coarse particles increased in April to September with higher temperatures, while those of fine particles increased in February to March with lower temperatures. Conclusions: Low chlorinated (4Cl-5Cl) PCDD/Fs were more adsorbed compared to coarse particles due to the influence of pollutant migration from particulate to gas phase according to temperature rise, whereas high chlorinated (6Cl-8Cl) PCDD/Fs were more adsorbed compared to fine particles. PCDD/Fs sources were assessed to be major sources of emissions, such as incineration facilities and/or open burning.

Enhanced Control Efficacy of a Fumigant, Chlorine Dioxide, by a Mixture Treatment with Carbon Dioxide (이산화탄소 혼합 처리를 통한 이산화염소 훈증 처리 효과 제고 기술)

  • Kim, Chulyoung;Kwon, Hyeok;Kim, Wook;Kim, Yonggyun
    • Korean journal of applied entomology
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    • v.56 no.3
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    • pp.253-259
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    • 2017
  • Fumigation using chlorine dioxide ($ClO_2$) has been regarded as a potential control technique against stored grain insect pests. The control efficacy can be enhanced with increase of opening rates of spiracles by facilitating the toxic gas delivery to internal body. To test this hypothesis, this study used the Indianmeal moth, Plodia interpunctella, which was known to be susceptible to $ClO_2$, and analyzed the opening rate of spiracles. A total of 9 pairs of spiracles were observed in P. interpunctella larvae, in which one pair was located on the prothorax and eight pairs were on the abdomen. Within the body, the spiracles were connected to longitudinal and transverse tracheal trunks. The open spiracles were determined by the dye-infiltration method. Based on this method, the opening rate of spiracles increased up to about 60% with increase of ambient temperatures. Furthermore, exposure to carbon dioxide stimulated the opening rate of spiracles up to about 95%. In contrast, exposure to $ClO_2$ prevented the spiracle opening and resulted in only 25% of spiracles in an opening state. The addition of carbon dioxide to $ClO_2$ treatment rescued the opening rate of spiracles as much as the carbon dioxide single treatment. Based on this modulatory activity of carbon dioxide against spiracles, the combined treatment of $ClO_2$ with carbon dioxide resulted in significant increase of its toxicity against P. interpunctella compared to a single $ClO_2$ treatment.

The Effect of Filter Media on the Biofiltration of Air Contaminated by Toluene (톨루엔으로 오염된 공기의 생물학적 여과에 대한 필터용 담체의 영향)

  • 홍성도;한희동;명성운;최호석;김인호
    • KSBB Journal
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    • v.16 no.6
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    • pp.603-608
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    • 2001
  • In this study, we studied on the remeval of toluene vapors in a lab-scale biofilter. Biofiltration was performed in a column fed downflow with contaminated air at ambient conditions. The column was packed with mixture of Peat and Calstene(5:3 vol. Ratio), Synthesized media, Bark and Wood chip, which were inoculated with microbial population of selected stains(Pseudomonas. putida, KCCM 11343, ATCC 12633). The microorganisms were immobilized on the bed medium and then biofilm were formed. The biofilter was operated under the conditions of various inlet toluene concentrations for 180 days and treated up to the elimination capacity of maximum 40 g/㎥hr at the inlet load of 30 g/㎥ hr with percentage removals of 20∼90% and gas retention times between 1 and 2 min. The pressure drop was very negligible through the biofilter columps because its value of 0.054 cmH$_2$O/m was much less than others. The effect of operating conditions such as flow rate, inlet toluene concentration and moisture contents on the performance of the biofilter was sequentially investigated in this study.

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Hydrogen Isotope Exchange Reaction in Electrical Discharge through D2/H2O System (전기방전하에서 D2/H2O 반응계의 수소 동위원소 교환반응)

  • Kim, H.J.;Park, Y.D.;Lee, W.M.
    • Journal of Hydrogen and New Energy
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    • v.9 no.2
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    • pp.77-84
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    • 1998
  • Hydrogen isotope exchange in mixtures of $H_2O/D_2$, $H_2O/D_2O$, or $D_2O/H_2$ can be facilitated under electrical discharge. For example, a simple DC corona discharge through the mixture creates a plasma in which the reactants are excited energetically. The reactants in such plasma, due to increase in population of excited quantum levels or due to production of radicals or ions, undergo very rapid chemical reactions even at ambient temperature. The isotope exchange reaction of hydrogen(H) and deuterium(D) produces the third kind of heavy water(HDO) and isotopic hydrogen gas(HD), as shown in $D_2+H_2O{\rightarrow}HD$ K=11.257(at $25^{\circ}C$) The reaction products can be detected with temporal resolution using the Fourier transform infrared(FTIR) absorption spectroscopy. Since $H_2O$, $D_2O$ and HDO are all infrared active with different absorption peaks, FTIR proves to be a useful tool for monitoring the reaction. Experimental results show that the electrical method is indeed a useful means to promote the reaction, showing a better efficiency than traditional catalytic methods.

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Ultrafine Particle Events in the Ambient Atmosphere in Korea

  • Maskey, Shila;Kim, Jae-Seok;Cho, Hee-Joo;Park, Kihong
    • Asian Journal of Atmospheric Environment
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    • v.6 no.4
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    • pp.288-303
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    • 2012
  • In this study, real time measurements of particle number size distribution in urban Gwangju, coastal Taean, and industrial Yeosu in Korea were conducted in 2008 to understand the occurrence of ultrafine particle (UFP) (<100 nm) events, the variation of its concentration among different sampling sites, and UFP formation pathways. Also, to investigate seasonal and long-term variation of the UFP number concentration, data were collected for the period of 5 years (2007, 2008, 2010, 2011, and 2012) in urban Gwangju. Photochemical and combustion events were found to be responsible for the formation of UFP in the urban Gwangju site, whereas only photochemical event led to the formation of UFP in the coastal Taean site. The highest UFP concentration was found in industrial Yeosu (the average UFP number fractions were 79, 59 and 58% in Yeosu, Gwangju, and Taean, respectively), suggesting that high amount of gas pollutants (e.g., $NO_2$, $SO_2$, and volatile organic carbon (VOC)) emitted from industries and their photochemical reaction contributed for the elevated UFP concentration in the industrial Yeosu site. The UFP fraction also showed a seasonal variation with the peak value in spring (61.5, 54.5, 50.5, and 40.7% in spring, fall, summer, and winter, respectively) at urban Gwangju. Annual average UFP number concentrations in urban Gwangju were $5.53{\times}10^3\;cm^{-3}$, $4.68{\times}10^3\;cm^{-3}$, $5.32{\times}10^3\;cm^{-3}$, $3.99{\times}10^3\;cm^{-3}$, and $2.16{\times}10^3\;cm^{-3}$ in the year 2007, 2008, 2010, 2011, and 2012, respectively. Comparison of the annual average UFP number concentration with urban sites in other countries showed that the UFP concentrations of the Korean sites were lower than those in other urban cities, probably due to lower source strength in the current site. TEM/EDS analysis for the size-selected UFPs showed that the UFPs were classified into various types having different chemical species. Carbonaceous particles were observed in both combustion (soot and organics) and photochemical events (sulfate and organics). In the photochemical event, an internal mixture of organic species and ammonium sulfate/bisulfate was identified. Also, internal mixtures of aged Na-rich and organic species, aged Ca-rich particles, and doughnut shaped K-containing particles with elemental composition of a strong C with minor O, S, and K-likely to be originated from biomass burning nearby agricultural area, were observed. In addition, fly ash particles were also observed in the combustion event, not in the photochemical event.

Determination of Volatile Organic Compounds emitted from Municipal Solid Waste Landfill Site by Thermal Desorption-Cryofocusing-GC/FID/FPD (열탈착-저온농축-GC/FID/FPD에 의한 도시 생활폐기물 매립장에서 방출되는 휘발성 유기화합물의 측정에 관한 연구)

  • Kim, Man-Goo;Jung, Young-Rim;Seo, Young-Min;Nam, Sung-Hyun;Kwon, Young-Jin
    • Analytical Science and Technology
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    • v.14 no.3
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    • pp.274-285
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    • 2001
  • In this study, the thermal desorption-cryofocusing-gas chromatographic(TD-C-GC) method was developed for determination of volatile organic compounds(VOCs) in ambient air and was applied at the municipal solid waste landfill sites. On-column cryofocusing was possible only with a 100 ml dewars bottle in TD-C-GC method with a stainless steel column. However, high operating pressure was needed for purging VOCs from the absorbent trap, which was able to solve by pressure programming with a electric pressure controller. By using both pressure and temperature programming brought increasing of resolution power in on-column cryofocusing method, but the high pressure caused a leakage of sample tube with repeated use. A loop cryofocusing devise was also developed and compared with the direct on-column method. In loop cryofocusing method, VOCs were concentrated on a 0.8mm i.d. loop which is located between the injector and separation column by using liquid nitrogen. In order to purge VOCs from the absorbent trap, only 0.4 psi of pressure was need in the loop cryofocusing method. Dual detection system was applied for the analysis of VOCs; a FID was used for hydrocarbons and a FPD was used for sulfur-containing compounds. Qualitative analysis was done by on-column cryofocusing GC-MS system. Among the large number of VOCs, toluene was the most abundant. Hydrogen sulfide, dimethyl sulfide, carbon disulfide, dimethyl disulfide and methyl propyl disulfide were detected at landfill site by FPD.

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