• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.05a
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• pp.274-278
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• 2002

The purpose of this study was to characterize the reaction of Cu surface with Cu slurry and CMP performance as a function of additives in CMP slurry. The polish rate of Cu was dependent on the kind of organic acids added in slurry. It was considered that polish rate of Cu was dependent on the concentration of carboxylates and mean particle size. When the etchant and oxidant were added in slurry, the highest removal rate and lower etch rate were measured at neutral pH. The addition of etchant, oxidant and pH adjustor played key roles of CMP ability in slurry. As the pH increased, polish rate of Cu was increased by the enhanced the mechanical effects due to effective dispersion of slurry particles. Alumina abrasives was more desirable for 1st step slurry because of high removal rate of Cu and high selectivity ratio among TaN and Cu.

• Journal of the Korean Ceramic Society
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• v.26 no.3
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• pp.445-451
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• 1989

Hydrolysis of aluminum isopropoxide with excess water in the presence of excess isopropyl alcohol resulted in the formation of boehmite in independence of temperature of hydrolysis and aging. Stoichiometric and substoichiometric amount of water hydrolyzed aluminum isopropoxide to pseudo-boehmite and amorphous one, respectively. $\alpha$-Al2O3 with 0.3${\mu}{\textrm}{m}$ in median size was produced by calcination of boehmite, bseudo-boehmite and amorphous boehmite at 125$0^{\circ}C$, 120$0^{\circ}C$, and 115$0^{\circ}C$ for one hour, respectively. Singnificant reduction in particle size was found during transition from $\theta$-Al2O3 to $\alpha$-Al2O3. $\alpha$-Al2O3 produced in this study was relatively uniform spherical and its purity was found to be over 99.9%.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.173-174
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• 2006

X-ray analysis on iron ores and reduced iron powders revealed that the main acid-insoluble substances were hexagonal and tetragonal quartz, another substances were sillimanite, alumina-silicate, an unnamed zeolite, all contained Si and Al. Their particle size was in the range of $3{\sim}7\;{\mu}m$. Statistics analysis showed that the AIC for high-grade magnetite powder was $(0.130{\pm}0.010)%$) during the latest five months. The predicting value for reduced iron powder should be 0.179%. However, the testing value for reduced iron powder was $(0.192{\pm}0.014)%$. The limited difference of 0.013% might imply rare pollution coming from the reduction and milling processes. The most important step for control AIC should be the separation process of iron ore powders.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 1997.04a
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• pp.5-5
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• 1997

Rapidly-solidified P/M aluminium alloys for automobile and home appliance industries were developed. Rapidly-solidification made it possible to refine microstructures and to expand the range of alloy composition. For example, Al-Si alloys containing transition metal have lower thermal expansion coefficient, more excellent wear resistance, higher strength, and better machinability than those of conventional aluminium alloys. Therefore, in Japan, the technologies on powder-extrusion and powder-forging of aluminium alloy powders are developed for fifteen years, and applied to several parts, such as cylinder liners of motor cycle engines, rotors and vanes of compressors for car air conditioner, oil pump rotor for racing car, and so on. In this presentation, applications for automobile are mentioned. In particular, cylinder liners made of particle-dispersed composites with fine alumina and graphite are in detail described.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1292-1295
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• 2004

본 연구는 Cu CMP공정 중 알루미나 연마입자의 wafer 표면에서의 점착과 오염을 AFM (Atomic Force Microscopy)을 사용하여 슬러리내에서 점착력 측정과 실제 연마 후 wafer 표면의 오염을 실험적으로 비교 평가하였다. 연마입자의 adhesionn force 측정에 있어서도 역시 wafer들의 zetapotential 결과와 잘 일치하였으며, 모든 wafer 종류에 관계없이, 산성 영역에서 염기성영역의 슬러리가 적용됨에 따라 adhesion force가 작아짐을 확인할 수 있었다. 특히 FSG wafer의 zetapotential 결과는 비록 산성 분위기에서는 양성 전하값을 나타내었으나, 염기성 분위기의 pH에서는 급격하게 음성 전하값을 나타내었고, 이는 adhesionn force결과와 FESEM 결과와 잘 일치하였다.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.11a
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• pp.217-220
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• 2008

Slag mass deposition was required to predict accurate performance of kick motor (KM) system. Slag mass accumulation was analyzed through the aluminum oxide particle paths to predict slag mass deposition. Numerical analysis to solve both flow field and droplet accumulation was performed with Fluent 6.3 program. The effects for the acceleration and diameters of the aluminum oxide particles was analyzed, finally total slag mass accumulation was acquired. It confirmed that the slag mass deposition was agreed well with previously slag mass prediction based on KM ground test.

• Design & Manufacturing
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• v.18 no.3
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• pp.37-43
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• 2024

With the development of technology in the electrical and electronic field, research on heat dissipation materials that can efficiently emit and control heat to solve the heat generation problem is being actively conducted. Since heat dissipation materials require electrical insulation and thermal conductivity, the polymer composite material was manufactured by mixing chemically stable silicone resins and ceramic fillers, and thermal conductivity and mechanical properties were observed. At the same filling amount, the larger the particle size and the higher the high thermal conductivity filler was added, the higher the thermal conductivity was, mechanical properties were confirmed to have higher tensile strength and elongation as the particles were smaller and the tissue was denser. After selecting materials in consideration of thermal conductivity and mechanical properties, an appropriate mixing ratio is considered important.

• Journal of the Korean Ceramic Society
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• v.41 no.5
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• pp.375-380
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• 2004

Pb(Ni$\_$1/3/Nb$\_$2/3/)O$_3$-PbZrO$_3$-PbTiO$_3$ thick films were screen-printed on platinized alumina substrates and fired at 800-1000$^{\circ}C$. Two kinds of powders with different particle size were prepared by attrition and ball milling methods. Effects of particle size of starting material on the microstructure and electrical properties of the thick films were investigated. Average particle size of attrition milled-powder (0.44 ${\mu}$m) was much smaller than that of ball milled-powder (2.87 ${\mu}$m). Average grain size of the thick film prepared from attrition-milled powder was smaller than that of the thick film prepared from ball-milled powder at the sintering temperature of 800$^{\circ}C$. However, the difference in average particle size became smaller with increasing the sintering temperature. Thick films prepared from attrition-milled powders showed more uniform and denser microstructures at all firing temperatures. Thick films prepared from attrition-milled powders had better electrical properties at the firing temperature above 900$^{\circ}C$ than thick films prepared from ball-milled powders. Dielectric constant, remanent polarization and coercive field of the thick film prepared from attrition-milled powders and fired at 900$^{\circ}C$ were 559, 16.3 ${\mu}$C/cm$^2$, and 51.3 kV/cm, respectively.

• Journal of the Korea Society of Computer and Information
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• v.18 no.1
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• pp.149-156
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• 2013

In this paper, Commercial program, STAR-CCM+, was used for computer simulation. And also Multi Inner Stage(MIS) cyclone which especially designed for the real experiments of particle removal efficiency. Under negative pressure condition of outlet, computer simulation was performed to predict the removal efficiency for $5{\mu}m$ and $10{\mu}m$ particles by using a turbulence model and lagrangian method. The simulation results are 55.7% and 64.1% for $5{\mu}m$ and $10{\mu}m$ particles, respectively. To compare the simulation results with the actual test of MIS cyclone, we generated the $SiO_2$ particles by heat reactor. Although removal efficiency of actual tests is 63~76% at different flow rate, the size of $SiO_2$ particles which confirmed by SEM(scanning electron microscope) and WAPS(wide range aerosol particle spectrometer) is too small(15~30nm) to compare each results. And so the alternative experiments were performed by using commercial alumina particles ($5{\mu}m$, $10{\mu}m$ and $20{\mu}m$). It was shown that the actual removal efficiency, 76~95%, from MIS cyclone is higher than simulated one.

• Applied Chemistry for Engineering
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• v.16 no.5
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• pp.648-652
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• 2005

A super ionic conductor, $K^+$-beta-aluminas, which is known to be difficult to obtain in the form of dense sintered density under atmospheric pressure, was pulverized to 350 nm mean particle size using attrition mill. The sample were pressed into tablet form by uniaxial pressing. The specimen was sintered under atmospheric pressure in powder form. Sintering temperature range was $1400^{\circ}C$ to $1650^{\circ}C$ at $50^{\circ}C$ intervals. Additionally, zone sintering was carried out to control the growth grain at high temperature ($1600^{\circ}C$). The density of specimens that were sintered at $1600^{\circ}C$ and $1650^{\circ}C$, and sintered at $1600^{\circ}C$ by zone sintering were about 93% and 95%, respectively. In the case of the lengthened sintering time to 2 h, the density of specimen was reduced to lower than 90%, since the particles were grown to the duplex microstructure.