• Korean Journal of Materials Research
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• v.21 no.6
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• pp.309-313
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• 2011

The power capacitors used as vehicle inverters must have a small size, high capacitance, high voltage, fast response and wide operating temperature. Our thin film capacitor was fabricated by alumina layers as a dielectric material and a metal electrode instead of a liquid electrolyte in an aluminum electrolytic capacitor. We analyzed the micro structures and the electrical properties of the thin film capacitors fabricated by nano-channel alumina and metal electrodes. The metal electrode was filled into the alumina nano-channel by electroless nickel plating with polyethylene glycol and a palladium catalyst. The spherical metals were formed inside the alumina nano pores. The breakdown voltage and leakage current increased by the chemical reaction of the alumina layer and $PdCl_2$ solution. The thickness of the electroless plated nickel layer was 300 nm. We observed the nano pores in the interface between the alumina layer and the metal electrode. The alumina capacitors with nickel electrodes had a capacitance density of 100 $nF/cm^2$, dielectric loss of 0.01, breakdown voltage of 0.7MV/cm and leakage current of $10^4{\mu}A$.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1573-1575
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• 2004

An alumina membrane with nano-sized pores was fabricated by anodic oxidation. The shape and structure of the pore on alumina membrane were changed according to the roughness of aluminum surface. The shape and structure of the nano-sized pre were investigated according to purity of aluminum substrate for the anodization process. The aluminum substrates with 99.5% and 99.999% purities were used. The aluminum substrate(99.5%) was anodized after the processes of pressing, mechanical polishing, chemical polishing, and electrochemical polishing. The nano-sized pores with the pore size of 50 - 100nm, the cell size of 20-50nm and the thickness of $10{\mu}m{\sim}45{\mu}m$ were obtained. Even though the electrochemical polishing was used for the aluminum substrate (99.999%), the same characteristics as the aluminum substrate (99.5%) was obtained. The alumina membrane prepared by anodization for 5 min using fixed voltage method shows the pore with irregular shape. The pore shape was changed to regular shape after pore widening process.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.1971-1973
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• 2005

We fabricated an alumina membrane with nano-sized pore array by anodic oxidation using the thin film aluminum deposited on silicon wafer. It is important that the sample prepared by metal deposition method has a flat aluminum surface and a good adhesion between the silicon wafer and the thin film aluminum. The oxidation time was controlled by observation of current variation. The nano-sized pores with diameter of $60{\sim}120nm$ was obtained by $40{\sim}80$ voltage. The pore widening process was employed for obtaining the flat surface because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of rough surface. Finally, the sample was immersed to the phosphoric acid with 0.1M concentration to etching the barrier layer. The sample will be applied to electronic sensors, field emission display, and template for nano- structure.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.5
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• pp.420-425
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• 2008

PMMA light guiding plate with nano-sized pattern was fabricated using anodized aluminum oxide membrane as a template for nano imprint lithography. Nano-sized pore arrays were prepared by the self-organization processes of the anodic oxidation using the aluminum plate with 99.999% purity. Since the aluminum plate has a rough surface, the aluminum plate with thickness of 1mm was anodized after the pre-treatments of chemical polishing, and electrochemical polishing. The surface morphology of the alumina obtained by the first anodization process was controlled by the concentration of electrochemical solution during the first anodization. The surface morphology of the alumina was also changed according to temperature of the solution during chemical polishing performed after first anodization. The pore widening process was employed for obtaining the one-channel with flat surface and height of the channel because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of two-channel with rough surface. It is shown from SPM results that the nano-sized pattern on PMMA light guiding plate fabricated by nano imprint lithography method was well transferred from that of anodized aluminum oxide template.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.9
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• pp.801-806
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• 2003

In recent years, there has been large interest in the fabrication of the self organized nanoscale structures since not only their potential utilization in electronic, optoelectronic, and magnetic devices but also their fundamental interest such as uniformity and regularization. An attractive candidate of these materials is anodic porous alumina film(Al$_2$O$_3$) which is formed by the anodization of aluminum in an appropriate acid solution. In this study to fabricate the porous alumina film with very uniform and nearly parallel pores the anodization was carried out under constant voltage mode in 0.3M oxalic acid as an electrolyte. The hexagonally ordered arrays with a few $\mu\textrm{m}$ in size two-dimensional polycrystalline structure were obtained of which pore densities were 1.1${\times}$10$\^$10//$\textrm{cm}^2$.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.217-220
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• 2009

This paper presents fabrication method of nano-structured PMMA substrates as well as evaluations of their optical transmittance. For anti-reflective surface, surface coating method had been conventionally used. However, it requires high cost, complicated process and post-processing times. In this study, we suggested the fabrication method of anti-reflective surface by the hot embossing process. Using the nano patterned master fabricated by anodic aluminum oxidation process. Anodic aluminum oxide(AAO) is widely used as templates or a molds for various applications such as carbon nano tube (CNT), nano rod and nano dots. Anodic aluminum oxidation process provides highly ordered regular nano-structures on the large area, while conventional pattering methods such as E-beam and FIB can fabricate arbitrary nano-structures on small area. We fabricated a porous alumina hole array with various inter-pore distance and pore diameter. In order to replicate nano-structures using alumina nano hole array patterns, we have carried out hot-embossing process with PMMA substrates. Finally the nano-structured PMMA substrates were fabricated and their optical transmittances were measured in order to evaluate the charateristivs of anti-reflection. Anti-reflective structure can be applied to various displays and automobile components.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.625-628
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• 2004

Porous anodic alumina(PAA) which has arrays of nano size holes, was incorporated into organic light emitting devices. Porous anodic alumina on glass scattered the light generated from emitting layer and was decreased the waveguiding modes within the glass. An increase in the device coupling-out factor for the scattering structure is demonstrated.

• The Journal of Korean Academy of Prosthodontics
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• v.54 no.4
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• pp.354-363
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• 2016

Purpose: The aim of this study was to investigate whether the application of nano-structured alumina coating to the surface of Y-TZP could enhance the bond strength with resin cement. Materials and methods: A total of 80 zirconia plates were prepared and divided into four groups. : 1) airborne particle abrasion treatment (A) : 2) Rocatec treatment after airborne particle abrasion (R) : 3) nano-structured alumina coating treatment after polishing (PC) and 4) nano-structured alumina coating after airborne particle abrasion (AC). Alumina coating was formed by the hydrolysis of aluminium nitride (AlN) powder and heat treatment at $900^{\circ}C$. Coating patterns were observed with FE-SEM. Resin block was bonded to treated zirconia ceramics using resin cement. The shear bond strengths were measured before and after thermocycling. Results: The FE-SEM images show a dense and uniform nano-structured alumina coating structure, which enhances shear bond strength by increasing micro mechanical interlocking to resin cement. PC and AC groups showed higher shear bond strengths than A and R groups before and after thermocycling. A and R groups displayed significant drops in shear bond strength after thermocycling. However, PC and AC groups did not show any meaningful decreases in shear bond strength after thermocycling. Conclusion: Treatment of Y-TZP ceramics with nano-structured alumina coating could significantly increase their shear bond strength.

• Bulletin of the Korean Chemical Society
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• v.32 no.4
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• pp.1310-1314
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• 2011

Sodium beta-alumina (SBA) nano-powders were synthesized by the citrate sol-gel process, and the effects of the cationic surfactant n-cetyltrimethylammonium bromide surfactant (CTAB) were investigated. The structure and morphology of the nano-powders were characterized by X-ray diffraction (XRD) and transmission electron microscope (TEM) techniques, respectively. The effects of CTAB on the citrate sol-gel process and the SBA formation were investigated by thermo gravimetric/differential thermal analysis (TG/DTA) and Fourier transform infrared spectroscopy (FTIR). The conductivity of ceramic pellets of SBA was measured by electrochemical impedance spectroscopy (EIS). The results showed that the CTAB inhibited the agglomeration of SBA powders effectively and consequently decreased the crystallization temperature of SBA, about $150^{\circ}C$ lower than that of the sample without CTAB. The measured conductivity of SBA was $1.21{\times}10^{-2}S{\cdot}cm^{-1}$ at $300^{\circ}C$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.4
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• pp.297-302
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• 2009

We have successfully fabricated the alumina thick films using inkjet printing processes without a high temperature sintering process. Alumina suspension as dielectric ink was formulated by combining nano-sized alumina powders with an anionic polymer dispersant in formamide/water as co-solvent. The thickness of the printed alumina thick film was measured at around 5 um by field emission scanning electron microscope. The calculated packing density of 68.5 % from the printed alumina thick film was much higher than the same films fabricated by conventional casting or dip coating processes. Q factor of the dielectrics thick film infiltrated with cyanate ester resin was evaluated by impedance analyzer.