• Title/Summary/Keyword: aerosol-deposition

Search Result 205, Processing Time 0.022 seconds

Electrical properties of piezoelectric PZT thick film by aerosol deposition method (에어로졸 증착법에 의한 압전 PZT 후막의 전기적 특성)

  • Kim, Ki-Hoon;Bang, Kook-Soo;Park, Dong-Soo;Park, Chan
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.25 no.6
    • /
    • pp.239-244
    • /
    • 2015
  • Lead zirconate titanate (PZT) thick films with thickness of $10{\sim}20{\mu}m$ were fabricated on silicon substrate by aerosol deposition method. As-deposited films on silicon were annealed at the temperatures of $700^{\circ}C$. The electrical properties of films deposited by PZT powders were characterized using impedance analyzer and Sawyer-Tower circuit. The PZT powder was prepared by both conventional solid reaction process and sol-gel process. The remanent polarization, coercive field, and dielectric constant of the $10{\mu}m$ thick film with solid reaction process were $20{\mu}C/cm^2$, 30 kV/cm and 1320, respectively. On the other hand, the PZT films by sol-gel process showed a poor dielectric constant of 635. The reason was probably due to the presence of pores produced from organic residue during annealing.

Fabrication of Ceramic and Ceramic-Polymer Composite Thick Films by Aerosol Deposition Method (Aerosol Deposition Method을 응용한 세라믹 후막과 세라믹 -폴리머 복합체 후막 제작)

  • Cho, Sung-Hwan;Yoon, Young-Joon;Kim, Hyung-Jun;Kim, Hyo-Tae;Kim, Ji-Hoon;Nam, Song-Min;Baik, Hong-Koo;Kim, Jong-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2009.06a
    • /
    • pp.170-170
    • /
    • 2009
  • aerosol deposition method(ADM)은 에어로졸화 된 고상의 원료분말을 노즐을 통해 분사시켜 소결과정을 거치지 않고도 상온에서 고밀도 후막을 제조할 수 있으며, 세라믹, 고분자, 금속 등의 다양한 코팅이 가능하다. 본 연구에서는 ADM들 이용하여 세라믹 후막 및 세라믹-폴리머 복합체 후막을 제조하였고 60 mm 노즐을 이용하여 대면적 세라믹 후막 성장도 시도되었다. 세라믹 후막의 원료로는 낮은 유전율과 우수한 품질계수를 갖는 $Al_2O_3$ 분말과 AlN의 분말이 사용되었으며, 세라믹에 비하여 높은 탄성과 1,500~2,000의 품질계수를 갖는 테프론(teflon) 분말이 세라믹과의 복합체 후막성장에 사용되었다. 세라믹-폴리머 복합체의 경우, 폴리머의 함유량에 따라 후막 내부의 결정립 크기가 20 때의 평균 결정립을 갚는 세라믹 후막에 비해 최대 10배 정도까지 증가하는 것을 확인할 수 있었으며, 이에 따라 후막에서의 유전특성 및 전기적인 특성, 열전도도, 투과율이 크게 변화하는 것을 확인할 수 있었다. 본 연구에서는 이러한 물성 변화에 대한 원인 고찰을 위하여 후막의 미세구조 및 화학조성 등에 다양한 분석이 이루어졌으며, 상온에서 성막되는 후막의 고분자 기판으로의 응용을 위한 최적의 공정조건을 제시하고자 한다.

  • PDF

Effect of PZN addition on microstructure of PZT thick films by aerosol deposition process (에어로졸 증착법에 의한 PZT 후막의 미세구조에 미치는 PZN 첨가의 영향)

  • Jang, Joo-Hee;Park, Yoon-Soo;Park, Dong-Soo;Park, Chan
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.28 no.1
    • /
    • pp.14-20
    • /
    • 2018
  • Lead zinc niobate (PZN) added lead zirconate titanate (PZT) thick films with thickness of $5{\sim}10{\mu}m$ were fabricated on silicon and sapphire substrates using aerosol deposition method. The contents of PZN were varied from 0 %, 20 % and 40 %. The initial particles (PZT, 2PZN-8PZT, 4PZN-6PZT) had irregular shape and submicron sizes. The as-deposited film had fairly dense microstructure without any crack, and showed only a perovskite single phase formed with nano-sized grains. The as-deposited films on silicon were annealed at the temperatures of $700^{\circ}C$, and the films deposited on sapphire were annealed at $900^{\circ}C$ in the electrical furnace. The effects of PZN addition on the microstructural evolution were observed using by FE-SEM and HR-TEM.

Effect of Post-Annealing on the Microstructure and Electrical Properties of PMN-PZT Films Prepared by Aerosol Deposition Process (후열처리 공정이 에어로졸 증착법에 의해 제조된 PMN-PZT 막의 미세구조와 전기적 특성에 미치는 영향)

  • Hahn, Byung-Dong;Ko, Kwang-Ho;Park, Dong-Soo;Choi, Jong-Jin;Yoon, Woon-Ha;Park, Chan;Kim, Doh-Yeon
    • Journal of the Korean Ceramic Society
    • /
    • v.43 no.2 s.285
    • /
    • pp.106-113
    • /
    • 2006
  • PMN-PZT films with thickness of $5\;{\mu}m$ were deposited on $Pt/Ti/SiO_2/Si$ substrate at room temperature using aerosol deposition process. The films showed fairly dense microstructure without any crack. XRD and TEM analysis revealed that the films consisted of randomly oriented nanocrystalline and amorphous phases. Post-annealing process was employed to induce crystallization and grain growth of the as-deposited films and to improve the electrical properties. The annealed film showed markedly improved electrical properties in comparison with as-deposited film. The film after annealing at $700^{\circ}C$ for 1h exhibited the best electrical properties. Dielectric constant $(\varepsilon_r)$, remanent polarization $(P_r)$ and piezoelectric constant $(d_{33})$ were 1050, $13\;{\mu}C/cm^2$ and 120 pC/N, respectively.

Multi-walled Carbon Nanotube-Reinforced Hydroxyapatite Coating on Ti Substrates by Aerosol Deposition (에어로졸 증착법에 의해 티타늄 기판위에 제조된 다중벽 탄소나노튜브 강화 수산화아파타이트 코팅층)

  • Hahn, Byung-Dong;Park, Dong-Soo;Ryu, Jung-Ho;Choi, Jong-Jin;Yoon, Woon-Ha;Lee, Byung-Kuk;Kim, Hyoun-Ee
    • Journal of the Korean Ceramic Society
    • /
    • v.45 no.10
    • /
    • pp.610-617
    • /
    • 2008
  • Multi-walled carbon nanotube(CNT) reinforced hydroxyapatite composite coating with a thickness of $5{\mu}m$ has been successfully deposited on Ti substrate using aerosol deposition(AD). The coating had a dense microstructure with no cracks or pores, showing good adhesion with the Ti substrate. Microstructural observation using field-emission scanning electron microscopy(FE-SEM) and transmission electron microscopy(TEM) showed that CNTs with original tubular morphology were found in the hydroxyapatite-CNT(HA-CNT) composite coating. Measurements of hardness and elastic modulus for the coating were performed by nanoindentation tests, indicating that the mechanical properties of the coating were remarkably improved by the addition of CNT to HA coating. Therefore, HA-CNT composite coating produced by AD is expected to be potentially applied to the coating for high load bearing implants.

Dielectric Properties of Al2O3 Thick Films Grown by Aerosol Deposition Method (에어로졸 데포지션법으로 성막된 Al2O3 후막의 유전특성)

  • Park, Jae-Chang;Yoon, Young-Joon;Kim, Hyo-Tae;Koo, Eun-Hae;Nam, Song-Min;Kim, Jong-Hee;Shim, Kwang-Bo
    • Journal of the Korean Ceramic Society
    • /
    • v.45 no.7
    • /
    • pp.411-417
    • /
    • 2008
  • Aerosol Deposition Method (ADM) is a novel technique to grow ceramic thick films with high density and nano-crystal structure at room temperature. $^{1,2)}$ For these unique advantages of ADM, it would be applied to the fabrication process of 3-D integration ceramic modules effectively. However, it is critical to control the properties of starting powders, because a film formation through ADM is achieved by impaction and consolidation of starting powders on the substrates. We fabricated alumina thick films by ADM for the application to integral substrates for RF modules. When the as-received alumina powders were used as a starting material without any treatments, it was observed that the dielectric properties of as-deposited alumina films, such as relative permittivity and loss tangent, showed high dependency on the frequency. In this study, some techniques of powder pre-treatments to improve the dielectric properties of alumina thick films will be shown and the effects of starting powders on the properties of AD films will be discussed.

Importance of Hardness and Elasticity of Polymer Powders on Growth of Ceramic-based Polymer Composite Thick Films Using Aerosol Deposition Method (Aerosol Deposition Method를 이용한 세라믹 기반 폴리머 복합체 후막의 성장에 있어 폴리머 파우더의 경도와 탄성의 중요성)

  • Na, Hyun-Jun;Yoon, Young-Joon;Kim, Jong-Hee;Nam, Song-Min
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2008.06a
    • /
    • pp.345-345
    • /
    • 2008
  • 최근 전자 소자의 고주파화, 소형화에 대한 요구가 증대 되면서 많은 소자들을 하나의 시스템에 3차원적으로 실장시키는 SOP (System-on-Package)가 새로운 대안으로 떠오르고 있으며 SOP를 실현하기 위해서는 집적기판에 대한 저온화 공정 기술이 절실히 필요한 실정이다. 현재 집적기판에 사용되는 재료로서 세라믹이 널리 알려져 있지만 세라믹은 취성이 있으며 $1000^{\circ}C$ 이상의 고온화 공정 프로세스를 필요로 하는 근본적인 약점이 있다. 이에 본 연구에서는 상온에서 고속으로 치밀한 성막을 가능케 하는 Aerosol Deposition Method (ADM)를 이용하여 최초로 세라믹-폴리머 복합체 후막을 성공적으로 제작하였다. XRD와 FT-IR 분석 결과 $Al_2O_3$-PMMA, $Al_2O_3$-PI 혼합물을 출발 파우더로 사용하여 제조한 후막이 세라믹-폴리머 복합체임을 확인할 수 있었다. 또한 SEM 분석결과 $Al_2O_3$-PMMA 복합체와 $Al_2O_3$-PI 복합체의 표면 양상이 매우 다르다는 점을 확인하였으며 $Al_2O_3$-PMMA 복합체의 성막률이 $Al_2O_3$-PI 복합체의 성막률에 비해 매우 낮음을 확인하였다. 이러한 현상들은 폴리머 파우더들의 경도와 탄성 차이 때문인 것으로 사료되어 이를 증명하기 위한 실험을 실시하였다. 결국 PMMA 막과 PI 막에 대한경도측정결과와 PMMA 파우더와 PI 파우더의 유성 볼밀링 전후에 대한 SEM 이미지를 통해 PMMA 파우더가 PI 파우더에 비해 경도가 낮으며 반면 탄성이 높다는 것을 간접적으로 확인할 수 있었다. 이와 같은 분석을 통하여 ADM을 이용한 세라믹-폴리머 복합체 후막의 제조에 있어 폴리머 파우더의 경도와 탄성이 매우 큰 영향을 미친다는 것을 알 수 있었다. 본 연구에서는 세라믹-폴리머 복합체 후막을 성공적으로 제조하기 위해서 폴리머 파우더의 적절한 선택이 중요함을 알 수 있었으며 ADM을 이용한 세라믹-폴리머 복합체 후막의 제조에 대한 가이드 라인을 제시할 수 있을 것으로 기대된다.

  • PDF

Flexible Durability and Characteristics of ZnO, AZO and ITO Thin Films Grown by Aerosol Deposition Process (에어로졸 증착 공정으로 제조된 ZnO, AZO, ITO 박막의 특성과 유연 내구성)

  • Lee, Dong-Won;Cho, Myung-Yeon;Lee, Sang-Hun;Kim, Yong-Nam;Lee, Daeseok;Koo, Sang-Mo;Oh, Jong-Min
    • Journal of IKEEE
    • /
    • v.21 no.4
    • /
    • pp.404-407
    • /
    • 2017
  • We investigated the microstructure, electrical and optical characteristics of ZnO, AZO and ITO films using aerosol deposition process. As gas consumption increased, the electrical and optical characteristics of ZnO, AZO and ITO films were improved, and electrical and optical characteristics of ZnO, AZO and ITO films with a thickness of 400 nm were successfully fabricated on PET substrates at room temperature. The mechanical flexibility durability test shows that the ZnO films can withstand 5,000 cycles and AZO and ITO films occurs to crack in films with degradation of resistance and transmittance. Even though the AZO and ITO films shows slightly lower durability than the ZnO films, this is expected to improve performance of films through optimized processing condition and particle size control.

Electrochemical Corrosion Properties of YSZ Coated AA1050 Aluminium Alloys Prepared by Aerosol Deposition (에어로졸 증착법에 의한 YSZ 코팅된 AA1050 알루미늄 합금의 전기화학적 부식 특성)

  • Ryu, Hyun-Sam;Lim, Tae-Seop;Ryu, Jung-Ho;Park, Dong-Soo;Hong, Seong-Hyeon
    • Journal of the Korean Ceramic Society
    • /
    • v.48 no.5
    • /
    • pp.439-446
    • /
    • 2011
  • Yttria stabilized zirconia (YSZ) coating was formed on AA1050 Al alloys by aerosol deposition (AD), and its electrochemical corrosion properties were investigated in 3.5 wt% NaCl and 0.5M $H_2SO_4$ solutions. The crack-free, dense, and ~5 ${\mu}m$ thick YSZ coating was successfully obtained by AD. The as-deposited coating was composed of cubic-YSZ nanocrystallites of ~10 nm size. The potentiodynamic test indicated that the YSZ coated Al alloy had much lower corrosion current densities (2 nA/$cm^2$) by comparison to uncoated sample and exhibited a passive behavior in anodic branch. Particularly, a pitting breakdown potential could not be identified in $H_2SO_4$. EIS tests revealed that the impedance of YSZ coated sample was ${\sim}10^6{\Omega}cm^2$ in NaCl and ${\sim}10^7{\Omega}cm^2$ in $H_2SO_4$, which was about 3 or 4 orders of magnitude higher than that of uncoated sample. Consequently, the corrosion resistance of Al alloy had been significantly enhanced by the YSZ coating.

Fabrication of High Density BZN-PVDF Composite Film by Aerosol Deposition for High Energy Storage Properties (상온분말분사공정을 이용한 고밀도 폴리머-세라믹 혼합 코팅층 제조 및 에너지 저장 특성 향상)

  • Lim, Ji-Ho;Kim, Jin-Woo;Lee, Seung Hee;Park, Chun-kil;Ryu, Jungho;Choi, Doo hyun;Jeong, Dae-Yong
    • Korean Journal of Materials Research
    • /
    • v.29 no.3
    • /
    • pp.175-182
    • /
    • 2019
  • This study examines paraelectric $Bi_{1.5}Zn_{1.0}Nb_{1.5}O_7$ (BZN), which has no hysteresis and high dielectric strength, for energy density capacitor applications. To increase the breakdown dielectric strength of the BZN film further, poly(vinylidene fluoride) BZN-PVDF composite film is fabricated by aerosol deposition. The volume ratio of each composition is calculated using dielectric constant of each composition, and we find that it was 12:88 vol% (BZN:PVDF). To modulate the structure and dielectric properties of the ferroelectric polymer PVDF, the composite film is heat-treated at $200^{\circ}C$ for 5 and 30 minutes following quenching. The amount of ${\alpha}-phase$ in the PVDF increases with an increasing annealing time, which in turn decreases the dielectric constant and dielectric loss. The breakdown dielectric strength of the BZN film increases by mixing PVDF. However, the breakdown field decreases with an increasing annealing time. The BZN-PVDF composite film has the energy density of $4.9J/cm^3$, which is larger than that of the pure BZN film of $3.6J/cm^3$.