Effect of Deposition Conditions on Deposition Mechanism and Surface Morphology of TiO2 Thin Films Deposited by Chemical Vapor Deposition (화학증착법에 의해 성장된 TiO2박막의 증착기구와 표면형상에 미치는 증착조건의 영향)
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- Journal of the Korean Ceramic Society
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- v.26 no.4
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- pp.539-549
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- 1989