• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.280-287
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• 2002

We present technical issues involved in the development of actuators and sensors for applications to high-precision Micro Electro Mechanical System (MEMS). The technical issues include fabrication uncertainty and noise disturbance, causing major difficulties for MEMS to achieve high-precision actuation and detection functions. For nano-precision actuators, we solve the fabrication instability and electrical noise problems using digital actuators coupled with nonlinear mechanical modulators. For the high-precision capacitive sensors, we present a branched finger electrodes using high-amplitude anti-phase sensing signals. We also demonstrate the potential applications of the nanoactuators and nanodetectors to high-precision positioning MEMS.

• Transactions on Electrical and Electronic Materials
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• v.16 no.4
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• pp.173-178
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• 2015

In lieu of the excellent radio frequency (RF) performance of microelectromechanical system ( MEMS) switches, these micro switches need higher actuation voltage for their operation. This requirement is secondary to concerns over the swtiches’ reliability. This paper reports high reliability operation of RF MEMS switches with low voltage requirements. The proposed switch is optimised to perform in the Q-band, which results in actuation voltage of just 16.4 V. The mechanical stress gradient in the thin micro membrane is computed by simulating von Mises stress in a multi-physics environment that results in 90.4 MPa stress. The computed spring constant for the membrane is 3.02 N/m. The switch results in excellent RF performance with simulated isolation of above 38 dB, insertion loss of less than 0.35 dB and return loss of above 30 dB in the Q-band.

• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.27-33
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• 2004

This paper is concerned with development of a micro tensile testing machine for optical functional materials such as single or poly crystal silicon and nickel film. Two micro tensile testers have been developed for various types of materials and dimensions. One of the testers is actuated by a PZT and the other is actuated by a servo motor for a precise displacement control. The specifications of PZT actuated micro tensile tester developed are as follows: the volumetric size of tester is desktop sized of 710$\times$200$\times$270 $mm^3$; the minimum load capacity and the load resolution in the load cell of 1N are 3 mN and 0.1 mN respectively; the full stroke and the stoke resolution of piezoelectric actuator are 1 mm and 10nm respectively. A special automatic specimen installing equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimen for testing.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2011.04a
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• pp.282-284
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• 2011

Based on graphene oxide and multi-walled carbon nanotube layers, a wireless bi-layer actuator that can be remotely controlled with an electromagnetic induction system has been developed. The graphene-based bi-layer actuator exhibits a large one-way bending deformation under eddy current stimuli due to asymmetrical responses originating from the temperature difference of the two different carbon layers. In order to validate one-way bending actuation, the coefficients of thermal expansion of carbon nanotube and graphene oxide are mathematically formulated in this study based on the atomic bonding energy related to the bonding length. The newly designed graphene-based bi-layer actuator is highly sensitive to electromagnetic wave irradiation thus it can trigger a new actuation mode for the realization of remotely controllable actuators and is expected to have potential applications in various wireless systems.

• International Journal of Automotive Technology
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• v.6 no.5
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• pp.461-466
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• 2005

With the growing traffic density and increasing comfort requirements, the automation of the drive train has gained importance in vehicles. The automatic clutch actuation relieves a driver especially in urban and stop-and-go traffic environments. In this paper, an electro-mechanical actuator for clutch-by-wire (CBW) system is implemented as the first stage for the development of automated manual transmissions. The prototype of the automatic clutch actuator is designed systematically, which is composed of the electric motor, worm and worm wheel, and crank mechanism. A test rig is developed to perform the basic function test for the automatic clutch actuation. The developed prototype is validated by the experimental results performed on the test rig.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.719-722
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• 2005

In this paper, we present out recent progress in the LIPCA (Lightweight Piezo-Composite Actuator) application for actuation of a flapping wing device. The flapping device uses linkage system that can amplify the actuation displacement of LIPCA. The feathering mechanism is also designed and implemented such that the wing can rotate during flapping. The natural flapping-frequency of the device was about 9 Hz, where the maximum flapping angle was achieved. The flapping test under 5 Hz to 15 Hz flapping frequency was performed to investigate the flapping performance by measuring the produced lift and thrust. Maximum lift and thrust were produced when the flapping device was actuated at about the natural flapping-frequency.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.793-794
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• 2011

• Journal of the Korean Society for Precision Engineering
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• v.30 no.11
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• pp.1211-1216
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• 2013

In this study, a dynamic camera actuation system for simultaneous in situ image acquisition is developed to achieve real-time observation of transient liquid flow on a lab-on-a-disk. A disk-type electric circuit, namely circuit-on-a-disk, co-rotated with the lab-on-a-disk improves the dynamic image acquisition ability in terms of a frame rate. The circuit-on-a-disk is comprised of a camera connected with a motor, a microprocessor and a wireless communication module. The camera connected with the motor enables to realize dynamic tracking of a transient flow and real-time image acquisition. The obtained images can be simultaneously transferred by a video/audio transmitter unit to a personal computer. Also, the microprocessor receives signals from the personal computer, and then controls the focusing position of the camera. We are expecting that heaters, sensors, and light sources also can be integrated on the circuit-on-a-disk, and they will enable various functional actuations as well as precise image acquisition.

• Applied Chemistry for Engineering
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• v.23 no.1
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• pp.65-70
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• 2012

Structural changing materials which can induce the physical deformation of materials are interesting research topics with various potential applications. Particularly, light among many driving mechanisms is a non-contact energy source, hence the light-responsive system can be used where non-destructive, local irradiation, and remote control is needed. Here, a mainchain azobenzene polymer is synthesized and its physical and optical properties are observed and compared to that of a polymer having a light-responsive azobenzene moiety on its side chain. Further dispersion onto polyvinylalcohol hydrogel is made and its dual stability and actuation are observed upon UV-visible light irradiation. Extended azobenzene polymer blend films show an anisotropic light-actuation with non-polarized UV light at room temperature. This physical shape change is quite reversible and occurs at lower temperature than that of any other reported systems including liquid crystalline elastomers. It is successfully demonstrated that the simple physical azobenzene/polymer blending has a very good actuation compared to that of LCEs which need an elaborate chemical design and it can be further used in the areas requiring a dimensional shape change.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.51.4-51
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• 2002

$\textbullet$ A noval haptic mouse system is developed for human computer interface. $\textbullet$ Five bar mechanism is adapted for 2 dof force feedback with virtual environment. $\textbullet$ Double prismatic joint type mechanism is adapted to reflect 1 dof grabbing force feedback. $\textbullet$ Cable driven mechansim is used for actuation to reduce backlash and endow backdrivability. $\textbullet$ Virtual wall perception experiment is conducted to obtain force specification for haptic mouse. $\textbullet$ Average mouse workspace is measured using magnetic position tracker.