A Study on the Deposition Characteristics of ZnO Piezoelectric Thin film Bulk Acoustic Resonator (FBAR 응용을 위한 ZnO 압전 박막의 증착 특성에 관한 연구)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.16 no.8
- /
- pp.716-722
- /
- 2003