• 제목/요약/키워드: a-C/B:H film

검색결과 279건 처리시간 0.031초

High Frequency Properties of Patterned Fe-Al-O Thin Films

  • N.D. Ha;Park, B.C.;B.K. Min;Kim, C.G.;Kim, C.O.
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2003년도 하계학술연구발표회 및 한.일 공동심포지엄
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    • pp.194-194
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    • 2003
  • As a result of the recent miniaturization an enhancement in the performance of thin film inductors and thin film transformers, there are increased demands for the thin films with high magnetic permeability in the high frequency range, high saturation magnetization, in high electrical resistivity, and low coercive force. In order to improve high frequency properties, we will investigate anisotropy field by shape and size of pattern. The Fe-Al-O thin films of 16mm and 1 $\mu\textrm{m}$ thickness were deposited on Si wafer, using RF magnetron reactive sputtering technique with the mixture of argon and oxygen gases. The fabricating conditions are obtained in the working partial pressure of 2mTorr, O$_2$ partial pressure of 5%, input power of 400W, and Al pellets on an Fe disk with purity of 99,9%. Magnetic properties of the continuous films as followed: the 4$\pi$M$\_$s/ of 19.4kG, H$\_$c/ of 0.6Oe, H$\_$k/ of 6.0Oe and effective permeability of 2500 up to 100㎒ were obtained. In this work, we expect to enhance effect of magnetic anisotropy on patterned of Fe-Al-O thin films.

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급액속도가 원심식 박막증발기의 운전 특성에 미치는 영향 (Effect of Feeding Rate for Operation Properties of Centrifugal Thin Film Evaporator)

  • 김병삼;박노현;박무현;한봉호
    • 한국식품과학회지
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    • 제23권4호
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    • pp.437-441
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    • 1991
  • 원심식 박막증발기를 이용해 마늘착즙을 증발 농축하면서 급액속도가 증발표면에서의 액의 흐름상태와 운전 특성에 미치는 영향에 대해서 조사하였다. 급액속도 $25{\sim}125kg/h$의 운전 조건하에서 증발표면에서의 이론적인 박막의 두께는 $0.52{\sim}0.89mm$ 그리고 체류시간은 $1.77{\sim}6.75$초로 계산되었다. 한편 Reynolds number로 판단해 볼 때 증발표면에서의 마늘착즙의 흐름은 대체로 층류로 여겨졌다. 일정한 증기 및 증발온도 조건하에서 농축비는 급액속도가 증가함에 따라 감소한 반면 증발속도와 총괄열전달계수는 어느 일정한 값까지 증가하다가 감소하는 경향을 나타내었다. 그리고 급액속도 $25{\sim}125kg/h$(증발온도 $40^{\circ}C$, 증기온도 $95{\sim}120^{\circ}C$, 급액의 초기농도 $32^{\circ}Brix$)에서 농축비는 $1.04{\sim}2.04$, 총괄열전달계수는 $3,074.33{\sim}17,614.70kJ/m^{2}{\cdot}h{\cdot}^{\circ}C$ 였다.

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플라즈마 중합된 ppMMA 유기 박막을 절연층으로 한 유기박막 트랜지스터의 제작 (Fabrication of OTFT with plasma polymerized methylmethacrylate organic thin film)

  • 임재성;신백균;유도현;박구범;임헌찬;조기선;이상희;이덕출
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.1347-1348
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    • 2007
  • In this paper, ITO gate electrode surface was modified using $O_2$ plasma and organic gate insulating layers were deposited on the ITO surface using plasma polymerization technique. In order to investigate the influence of the plasma coupling method and plasma conditions on the plasma polymerized methyl methacrylate (ppMMA) thin film properties, inductively coupled (ICP) and capacitively coupled plasma (CCP) were used to generate the plasma and the plasma parameters were varied. The ppMMAs were investigated using atomic force microscopy (AFM) and a Fourier Transform Infrared (FT-IR) spectroscopy. Dielectric constants of the ppMMA thin films were investigated using a impedance analyzer (HP4192A, LF Impedance Analyzer). Current-Voltage (I-V) characteristics of the organic thin film transistors (OTFTs) were investigated using a source measurement unit (SMU: Keithley 2612). Proposed method can be applied to dry-process to fabricate OTFTs during overall fabricating steps.

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Low-temperature synthesis of nc-Si/a-SiNx: H quantum dot thin films using RF/UHF high density PECVD plasmas

  • Yin, Yongyi;Sahu, B.B.;Lee, J.S.;Kim, H.R.;Han, Jeon G.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.341-341
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    • 2016
  • The discovery of light emission in nanostructured silicon has opened up new avenues of research in nano-silicon based devices. One such pathway is the application of silicon quantum dots in advanced photovoltaic and light emitting devices. Recently, there is increasing interest on the silicon quantum dots (c-Si QDs) films embedded in amorphous hydrogenated silicon-nitride dielectric matrix (a-SiNx: H), which are familiar as c-Si/a-SiNx:H QDs thin films. However, due to the limitation of the requirement of a very high deposition temperature along with post annealing and a low growth rate, extensive research are being undertaken to elevate these issues, for the point of view of applications, using plasma assisted deposition methods by using different plasma concepts. This work addresses about rapid growth and single step development of c-Si/a-SiNx:H QDs thin films deposited by RF (13.56 MHz) and ultra-high frequency (UHF ~ 320 MHz) low-pressure plasma processing of a mixture of silane (SiH4) and ammonia (NH3) gases diluted in hydrogen (H2) at a low growth temperature ($230^{\circ}C$). In the films the c-Si QDs of varying size, with an overall crystallinity of 60-80 %, are embedded in an a-SiNx: H matrix. The important result includes the formation of the tunable QD size of ~ 5-20 nm, having a thermodynamically favorable <220> crystallographic orientation, along with distinct signatures of the growth of ${\alpha}$-Si3N4 and ${\beta}$-Si3N4 components. Also, the roles of different plasma characteristics on the film properties are investigated using various plasma diagnostics and film analysis tools.

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커넥팅로드 베어링의 유막두께에 미치는 기관 운전조건 및 윤활유의 영향 (The Influence of Engine Operating Conditions and Lubricants on Oil Film Thickness of Engine Connecting Rod Bearing)

  • 이동호;장병주
    • 한국자동차공학회논문집
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    • 제2권5호
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    • pp.1-10
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    • 1994
  • By applying of total electric capacitance method on engine connecting rod bearing during engine operating, the influence of engine operating conditions and lubricants on bearing oil film thickness was investigated. Minimum oil film thickness increases with kinematic viscosity, but as increasing of viscosity, the increasing ratio of film thickness is reduced. Also minimum oil film thickness increases with engine speed but there is a limit. Above this limit, film thickness decreases in opposition because of crankshaft inertia. As increasing of engine torque and oil temperature, munimum oil film thickness decreases linearly. For non-Newtonian oils, the correlation between $100{\circ}C$ kinematic viscosity and munimum oil film thickness is very poor.

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Ion Beam Assisted DC Planar Magnetron Sputtering 장치에 의한 PDP용 방전전극 형성에 관한 연구 (A Study on Discharge Electrode Formation for PDP with Ion Beam Assisted DC Planar Magnetron Sputtering Device)

  • 김준호;손진부;신중홍;조정수;박정후
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 하계학술대회 논문집 E
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    • pp.1791-1793
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    • 1998
  • The thin film metal electrode for PDP needs low resistivity and strong adhesion. But the sputtered copper film is weak, in the adhesion between copper and glass. In this paper, we investigated the characteristics of resistivity and adhesion about Cu thin film using Ion Beam Assisted DC Planar Magnetron Sputtering(DCPM) Device.

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PECVD에 의하여 제조된 Phosphorus-Doped ${\mu}c$-Si:H 박막의 특성 (Properties of Phosphorus Doped ${\mu}c$-Si:H Thin Films Prepared by PECVD)

  • 이정노;문대규;안병태;임호빈
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1992년도 추계학술대회 논문집
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    • pp.22-27
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    • 1992
  • Phosphorus doped hydrogenated microcrystalline silicon (${\mu}c$-Si:H) thin films were deposited by PECVD (Plasma Enhanced Chemical Vapour Deposition) method using 10.2% $SiH_4$ gas (diluted in Ar) and 308ppm $PH_3$ gas (diluted in Ar). The structural, optical and electrical properties of the films were investigated as a function of substrate temperature(15 to $400^{\circ}C$) and RF power(10 to 120W). The thin film deposited by varing substrate temperature had columnar structure and microcrystalline phase. The volume fraction of microcrystalline phase in the films deposited at RF power of 80W, increased with increasing substrate temperature up to $200^{\circ}C$, and then decreased with further increasing substrate temperature. Volume fraction of microcrystalline phase increased monotonously with increasing RF power at substrate temperature of $250^{\circ}C$. With increasing volume fraction of microcrystalline, electrical resistivity of films decreased to 0.274 ${\Omega}cm$.

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Indium Tin Oxide (ITO) Coatings Fabricated Using Mixed ITO Sols

  • Cheong, Deock-Soo;Yun, Dong-Hun;Park, Sang-Hwan;Kim, Chang-Sam
    • 한국세라믹학회지
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    • 제46권6호
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    • pp.708-712
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    • 2009
  • ITO films were achieved by sintering at $500{\sim}550{^{\circ}C}$. This was possible by inducing a seeding effect on an ITO sol by producing crystalline ITO nanoparticles in situ during heat treatment. Two kinds of ITO sols (named ITO-A and ITO-B) were prepared at 2.0 wt% from indium acetate and tin(IV) chloride in different mixed solvents. The ITO-A sol showed a high degree of crystallinity of ITO without any detectable Sn$O_2$ on XRD at $350{^{\circ}C}$/1 h, but the ITO-B sol showed a small amount of Sn$O_2$ even after annealing at $600{^{\circ}C}$/1 h. The 10 wt% ITO-A//ITO-B showed the sheet resistance of 3600$\Omega$/□, while the ITO-B sol alone showed 5200 $\Omega$/□ by sintering at $550{^{\circ}C}$ for 30 min. Processing parameters were studied by TG/DSC, XRD, SEM, sheet resistance, and visible transmittance.

생광석 함유 폴리에틸렌 필름을 사용한 김치의 포장저장 (Packaging and Storage of kimchi with Polyethylene Film Contained Raw Ore)

  • 김순동;김미향;김미경
    • 한국식품저장유통학회지
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    • 제5권4호
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    • pp.355-362
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    • 1998
  • 적외선을 발생하는 생광석 분말을 0, 10, 20, 30 및 40%를 함유하는 폴리에틸렌필름(PFRO)을 제작하여 그 특성을 조사하는 한편 김치를 포장하여 1$0^{\circ}C$에서 저장하면서 대장균을 비롯한 균수와 품질변화를 조사하였다. pH와 산도의 변화로 평가한 숙성정도는 PFRO포장김치가 대조구에 비하여 숙성이 촉진되는 경향을 나타내었으나 숙성된 김치맛을 띠는 총기간은 길었다. PFRO포장김치는 대조구에 비하여 젖산균 수는 많으면서 대장균수는 현저하게 적었으며, L*값은 전반적으로 낮은 반면 a*, b*값은 높았다. PFRO포장김치는 대조구에 비하여 숙성 숙성초기부터 숙성된 맛과 적당한 아삭아삭한 맛을 나타내었으며, 종합적인 맛의 평가치가 높게 유지되는 일수가 길었다. 김치 포장에 적합한 생광석 함유율은 10-20%이었다.

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적양배추싹의 Shelf Life 예측 및 Aqueous ClO2, Fumaric Acid, UV-C 병합처리 (Predicting and Extending the Shelf Life of Red Cabbage Sprouts)

  • 천호현;박승종;정승훈;송경빈
    • 한국식품영양과학회지
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    • 제42권9호
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    • pp.1518-1523
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    • 2013
  • 적양배추싹의 저장온도에 따른 미생물학적 유통기한을 예측하기 위해서, 적양배추싹을 polyolefin film과 PA/PA/PE film에 각각 포장 후 4와 $10^{\circ}C$에 저장하여 저장기간 중 총호기성균 수를 측정하였다. 측정된 data를 Gompertz's model 식을 이용하여 최대성장속도와 유도기를 구하였고, shelf life 예측모델 식으로부터 계산된 적양배추싹의 shelf life는 polyolefin film과 PA/PA/PE film에 포장 후 $10^{\circ}C$에 저장된 시료가 각각 19.7과 22.6시간인 반면, $4^{\circ}C$에 저장된 시료는 49.4와 52.3시간으로 나타났다. 성장예측모델 식의 적합성 평가를 위해 $A_f$, $B_f$, MSE 값을 산출한 결과, 예측모델 식의 적합성이 뛰어났다. 한편, aqueous $10^{\circ}C$/fumaric acid와 UV-C 병합처리 된 적양배추싹 시료의 shlef life는 7일 이상으로 예측되었다. 따라서 aqueous $10^{\circ}C$/fumaric acid와 UV-C 병합처리 후 저온저장은 적양배추싹의 shelf life 연장에 효과적인 것으로 판단된다.