• 제어로봇시스템학회논문지
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• 제6권1호
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• pp.104-111
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• 2000

A fuzzy logic Run-by-Run(RbR) controller and an in -line wafer characteristics prediction scheme for the rapid thermal processing system have been developed for the study of process repeatability. The fuzzy logic RbR controller provides a framework for controlling a process which is subject to disturbances such as shifts and drifts as a normal part of its operation. The fuzzy logic RbR controller combines the advantages of both fuzzy logic and feedback control. It has two components : fuzzy logic diagnostic system and model modification system. At first, a neural network model is constructed with the I/O data collected during the designed experiments. The wafer state after each run is assessed by the fuzzy logic diagnostic system with featuring step. The model modification system updates the existing neural network process model in case of process shift or drift, and then select a new recipe based on the updated model using genetic algorithm. After this procedure, wafer characteristics are predicted from the in-line wafer characteristics prediction model with principal component analysis. The fuzzy logic RbR controller has been applied to the control of Titanium SALICIDE process. After completing all of the above, it follows that: 1) the fuzzy logic RbR controller can compensate the process draft, and 2) the in-line wafer characteristics prediction scheme can reduce the measurement cost and time.

• 한국수학사학회지
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• 제21권1호
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• pp.29-44
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• 2008

퍼지 논리는 1965년 Zadeh([13])에 의하여 소개된 이후 꾸준히 확장, 발전하였다. 퍼지 논리와 관련된 수학사 및 수학교육 논문([1], [2], [3], [4], [5], [7])들이 많이 발표되었지만 정작 퍼지 논리의 창시자인 Zadeh에 대한 연구 논문은 아직 발표되지 않았다. 본 논문에서는 Zadeh의 생애와 업적을 알아보고 이를 통해 우리가 배워야 할 점들에 대해 논의한다. 또한 이가 논리, 다가 논리, 퍼지 논리, 직관주의 논리 및 직관적 퍼지 집합을 비교, 분석하고 직관적 퍼지 집합에서 '직관적(intuitionistic)' 이라는 용어의 부적절성에 대해 논의한다.

• 대한전기학회논문지
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• 제43권3호
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• pp.468-477
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• 1994

Existing fuzzy control methods do not perform well when applied to systems containing nonlinearities arising from unkonwn deadzones. In particular, we show that a conventional fuzzy logic controller applied to a system with a deadzone suffers from poor transient performance and a large steady-syate error. In this paper, we propose a novel two-layered fuzzy logic controller for controlling systems with deadzones. The two-layered control structure consists of a fuzzy logic-based precompensator followed by a conventional fuzzy logic controller. Our proposed controller exhibits superior transient and steady-state performance compared to conventional fuzzy controllers. In addition, the controller is robust to variations in deadzone nonlinearities. We illustrate the effectiveness of our scheme using computer simulation examples.

• 한국자동차공학회논문집
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• 제2권5호
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• pp.23-29
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• 1994

The design procedure for fuzzy logic controller depends on the expert's knowledge or trial and error. Moreover, it is very difficult to guarantee the stability and robustness of the system due to the linguistic expression of fuzzy control. However, fuzzy logic control has succeeded in many control problems that the conventional control theory has difficulties to deal with. As a result, this control theory is applied to the engine control system which a mathematical model is difficult. In this study, the fuzzy logic is applied to obtain the gain of PI control at idle speed control system, and a simple engine model is developed in order to perform simulation. Experimental results show that the response to reach the target engine speed at idle speed control system is improved by adopting the gain obtained with fuzzy logic.

• 제어로봇시스템학회논문지
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• 제5권8호
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• pp.914-922
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• 1999

A study on the improvement of tracking performance of a 3 DOF planar parallel manipulator is performed. A class of adaptive tracking control sheme is designed using self tuning adaptive fuzzy logic control theory. This control sheme is composed of three classical PD controller and a multi learning type self tuning adaptive fuzzy logic controller set. PD controller is tuned roughly by manual setting a priori and fuzzy logic controller is tuned precisely by the gradient descent method for a global solution during run-time, so the proposed control scheme is tuned more rapidly and precisely than the single learning type self tuning adaptive fuzzy logic control sheme for a local solution. The control performance of the proposed algorithm is verified through experiments.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 1993년도 Fifth International Fuzzy Systems Association World Congress 93
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• pp.1207-1210
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• 1993

There is an opinion of regarding a simple fuzzy logic controller as a kind of Variable Structure Controller in recent years. The opinion may provide an analytical basis which describes the robustness to uncertainty and the stability of a fuzzy logic controller. So in this paper, a fuzzy logic controller based on the Variable Structure System with is designed for a robot manipulator which is a class of complex, nonlinear system with uncertainty. Fuzzy control rules, membership shape of the I/O variables of the fuzzy logic controller are designed for guaranteeing the stability of an overall control system. From a computer simulation of dynamic control of a two link robot manipulator, the design procedure of the fuzzy logic controller is validated.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1992년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 19-21 Oct. 1992
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• pp.112-116
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• 1992

In this paper, a fuzzy logic controller(FLC) is designed for the pointing loop of the spin-stabilized platform. For the fuzzy inference, a fuzzy accelerator board using the Togai InfraLogic software and digital fuzzy processor(DFP110FC) is designed, and a validation of an algorithm for fuzzy logic control is also presented. The pointing loop of the spin-stabilized platform using FLC has better performance of step responses than a proportional controller in case of same loop hain through the software simulation and the experiment of implemented hardware.

• 전자공학회논문지B
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• 제30B권4호
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• pp.56-66
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• 1993

In this paper, a fuzzy logic controll(FLC) is designed for the pointing loop of the spinstabilized platform. For the fuzzy inference, a fuzzy accelerator board using the Togai InfraLogic software and digital fuzzy processor(DFP110FC) is designed, and a validation of an algorithm for fuzzy logic control is also presented. Through the simulation and the experiment, it can be seen that the designed FLC shows better performance than a conventional controller using the same loop gain.

• 제어로봇시스템학회논문지
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• 제14권1호
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• pp.49-53
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• 2008

A fuzzy inference logic system is proposed for gas turbine engine fault isolation. The gas path measurements used for fault isolation are exhaust gas temperature, low and high rotor speed, and fuel flow. The fuzzy inference logic uses rules developed from a model of performance influence coefficients to isolate engine faults while accounting for uncertainty in gas path measurements. Inputs to the fuzzy inference logic system are measurement deviations of gas path parameters which are transferred directly from the ECM(Engine Control Monitoring) program and outputs are engine module faults. The proposed fuzzy inference logic system is tested using simulated data developed from the ECM trend plot reports and the results show that the proposed fuzzy inference logic system isolates module faults with high accuracy rate in the environment of high level of uncertainty.

• International Journal of Fuzzy Logic and Intelligent Systems
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• 제15권2호
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• pp.126-131
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• 2015

Studies on the control of inverted pendulum type systems have been widely reported. This is because this type of system is a typical complex nonlinear system and may be a good model to verify the performance of a proposed control system. In this paper, we propose the design of two fuzzy logic control systems for the control of a Segway mobile robot which is an inverted pendulum type system. We first introduce a dynamic model of the Segway mobile robot and then analyze the system. We then propose the design of the fuzzy logic control system, which shows good performance for the control of any nonlinear system. In this paper, we here design two fuzzy logic control systems for the position and balance control of the Segway mobile robot. We demonstrate their usefulness through simulation examples. We also note the possibility of simplifying the design process and reducing the computational complexity. This possibility is the result of the skew symmetric property of the fuzzy rule tables of the system.