• Title/Summary/Keyword: ZrSiN

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Etch characteristics of TiN thin film adding $Cl_2$ in $BCl_3$/Ar Plasma ($BCl_3$/Ar 플라즈마에서 $Cl_2$ 첨가에 따른 TiN 박막의 식각 특성)

  • Um, Doo-Seung;Kang, Chan-Min;Yang, Xue;Kim, Dong-Pyo;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.168-168
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    • 2008
  • Dimension of a transistor has rapidly shrunk to increase the speed of device and to reduce the power consumption. However, it is accompanied with several problems like direct tunneling through the gate dioxide layer and low conductivity characteristic of poly-Si gate in nano-region. To cover these faults, study of new materials is urgently needed. Recently, high dielectric materials like $Al_2O_3$, $ZrO_2$, and $HfO_2$ are being studied for equivalent oxide thickness (EOT). However, poly-Si gate is not compatible with high-k materials for gate-insulator. Poly Si gate with high-k material has some problems such as gate depletion and dopant penetration problems. Therefore, new gate structure or materials that are compatible with high-k materials are also needed. TiN for metal/high-k gate stack is conductive enough to allow a good electrical connection and compatible with high-k materials. According to this trend, the study on dry etching of TiN for metal/high-k gate stack is needed. In this study, the investigations of the TiN etching characteristics were carried out using the inductively coupled $BCl_3$-based plasma system and adding $Cl_2$ gas. Dry etching of the TiN was studied by varying the etching parameters including $BCl_3$/Ar gas mixing ratio, RF power, DC-bias voltage to substrate, and $Cl_2$ gas addition. The plasmas were characterized by optical emission spectroscopy analysis. Scanning electron microscopy was used to investigate the etching profile.

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Hydrogen Depth Profiling by Nuclear Resonance Reaction (공명 핵반응을 이용한 수소적층 분석)

  • Kim, Y. S.;Kim, J. M.;Hong, W.;Kim, D. K.;Cho, S. Y.;Woo, H. J.;Kim, N. B.
    • Journal of the Korean Vacuum Society
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    • v.2 no.4
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    • pp.416-423
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    • 1993
  • Hydrogen depth profiling was performed by H(19F, $\alpha$${\gamma}$) nuclear resonance reactin . A cesium sputtering ion sorce and 1.7MV Tandem Van de Graaff accelerator was used for the production of 6.5MeV 19F ion. The ${\gamma}$ rays produced by the reaction were measure dby 3" $\times$3" and 6" $\times$8" Nal detectors . A test measurement was done for hydrogen contaminatin layer of a bare silicon wafer, Si3N4(H) and Zr(O)a-Si/Si for the purpose of verifying the applicability , detection limit and the reliability of the method.ility of the method.

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COMPARATIVE ANALYSIS OF STRUCTURAL CHANGES IN U-MO DISPERSED FUEL OF FULL-SIZE FUEL ELEMENTS AND MINI-RODS IRRADIATED IN THE MIR REACTOR

  • Izhutov, Aleksey.L.;Iakovlev, Valeriy.V.;Novoselov, Andrey.E.;Starkov, Vladimir.A.;Sheldyakov, Aleksey.A.;Shishin, Valeriy.Yu.;Kosenkov, Vladimir.M.;Vatulin, Aleksandr.V.;Dobrikova, Irina.V.;Suprun, Vladimir.B.;Kulakov, Gennadiy.V.
    • Nuclear Engineering and Technology
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    • v.45 no.7
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    • pp.859-870
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    • 2013
  • The paper summarizes the irradiation test and post-irradiation examination (PIE) data for the U-Mo low-enriched fuel that was irradiated in the MIR reactor under the RERTR Program. The PIE data were analyzed for both full-size fuel rods and mini-rods with atomized powder dispersed in Al matrix as well as with additions of 2%, 5% and 13% of silicon in the matrix and ZrN protective coating on the fuel particles. The full-size fuel rods were irradiated up to an average burnup of ${\sim}60%^{235}U$; the mini-rods were irradiated to an average burnup of ${\sim}85%^{235}U$. The presented data show a significant increase of the void fraction in the U-Mo alloy as the U-235 burnup rises from ~ 40% up to ~ 85%. The effect of irradiation test conditions and U-235 burnup were analyzed with regard to the formation of an interaction layer between the matrix and fuel particles as well as generation of porosity in the U-Mo alloy. Shown here are changes in distribution of U fission products as the U-235 burnup increases from ~ 40% up to ~ 85%.

Selective Oxidation of Hydrogen Over Palladium Catalysts in the Presence of Carbon Monoxide: Effect of Supports (Pd 촉매상에서 일산화탄소 존재 하 수소의 선택적 산화반응: 담체 효과)

  • Kim, Eun-Jeong;Kang, Dong-Chang;Shin, Chae-Ho
    • Korean Chemical Engineering Research
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    • v.55 no.1
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    • pp.121-129
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    • 2017
  • Pd based catalysts were prepared by impregnating palladium precursor using incipient wetness method on $TiO_2$, $Al_2O_3$, $ZrO_2$, and $SiO_2$ and were applied for the selective oxidation of $H_2$ in the presence of CO. Their physicochemical properties were studied by X-ray diffraction (XRD), $N_2$-sorption, temperature programmed desorption of CO (CO-TPD) and (CO+$H_2O$)-TPD, temperature programmed reduction of CO (CO-TPR) and XPS a. The results of CO- and (CO+$H_2O$)-TPD showed the correlation between peak temperature of TPD and catalytic activities for $H_2$ and CO conversion. The $Pd/ZrO_2$ catalyst exhibited the highest conversion of $H_2$. The addition of $H_2O$ vapor promotes the conversion of $H_2$ and CO by inducing easy desorption of CO and $H_2$ in the competitive adsorption of $H_2O$, CO and $H_2$.

Hardness and EDM Processing of MoSi$_2$Intermetallics for High Temperature Ship Engine (고온선박엔진용 MoSi$_2$금속간화합물의 경도와 방전가공특성)

  • 윤한기;이상필
    • Journal of Ocean Engineering and Technology
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    • v.16 no.6
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    • pp.60-64
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    • 2002
  • This paper describes the machining characteristics of the MoSi$_2$--based composites through the process of electric discharge drilling with various tubular electrodes. In addition to hardness characteristics, microstructures of Nb/MoSi$_2$laminate composites were evaluated from the variation of fabricating conditions, such as preparation temperature, applied pressure, and pressure holding time. MoSi$_2$-based composites have been developed in new materials for jet engines of supersonic-speed airplanes and gas turbines for high-temperature generators. These high performance engines may require new hard materials with high strength and high temperature-resistance. Also, with the exception of grinding, traditional machining methods are not applicable to these new materials. Electric discharge machining (EDM) is a thermal process that utilizes a spark discharge to melt a conductive material. The tool electrode is almost -unloaded, because there is n direct contact between the tool electrode and the work piece. By combining a non-conducting ceramic with more conducting ceramic, it was possible to raise the electrical conductivity. From experimental results, it was found that the lamination from Nb sheet and MoSi$_2$ powder was an excellent strategy to improve hardness characteristics of monolithic MoSi$_2$. However, interfacial reaction products, like (Nb, Mo)SiO$_2$and Nb$_2$Si$_3$formed at the interface of Nb/MoSi$_2$, and increased with fabricating temperature. MoSi$_2$composites, with which a hole drilling was not possible through the conventional machining process, enhanced the capacity of ED-drilling by adding MbSi$_2$, relative to that of SiC or ZrO$_2$reinforcements.

UBM 스퍼터링법으로 코팅한 벌크비정질합금(BMG) 박막의 특성 연구

  • Park, Hye-Seon;Yang, Ji-Hun;Jeong, Jae-Hun;Song, Min-A;Jeong, Jae-In;Sin, Seung-Yong;Mun, Gyeong-Il
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.335-335
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    • 2013
  • 최근 다기능 소재의 개발이 필요함에 따라 서로 상반되는 2가지 이상의 물성을 동시에 구현할 수 있는 소재의 개발이 요구되고 있다. 4 성분계 물질을 단일 타겟으로 제조함으로써 다수의 타겟을 이용하는 기존 PVD 방법의 복잡성과 재형성 등의 문제점을 해결하고 다기능성을 구현할 수 있는 코팅막을 제조할 수 있게 된다. 본 연구에서는 제조된 4 성분계 모물질을 UBM 최근 다기능 소재의 개발이 필요함에 따라 서로 상반되는 2가지 이상의 물성을 동시에 구현할 수 있는 소재의 개발이 요구되고 있다. 4 성분계 물질을 단일 타겟으로 제조함으로써 다수의 타겟을 이용하는 기존 PVD 방법의 복잡성과 재형성 등의 문제점을 해결하고 다기능성을 구현 할 수 있는 코팅막을 제조할 수 있게 된다. 본 연구에서는 제조된 4 성분계 모물질을 UBM 스퍼터링법을 이용하여 질화 공정을 도출하였고 질소 함량에 따른 물리적 특성 및 박막의 특성에 대해 연구하였다. BMG (Bulk Metallic Glass) 타겟을 이용하여 마그네트론 스퍼터링법으로 박막을 코팅하였다. 시편은 Si wafer, SUS 그리고 부식 특성 평가를 실시하기 위하여 냉연강판을 사용하였다. 시편은 아세톤, 알코올로 각각 10분간 초음파 세척한 후 진공장비에 장착하여 Ar 분위기에서 글로우 방전으로 청정을 30분간 실시하였다. 시편청정이 끝나면 ~$10^{-6}$ Torr까지 진공 배기를 실시하고 Ar 가스를 주입하여 2.5 mTorr로 진공도를 유지하여 스퍼터링으로 박막 코팅을 실시하였다. 스퍼터링 파워는 약 0.6 kW (2.0 A)으로 고정하였고 질소 유량은 0~10 SCCM으로 변화시켜 BMG 박막을 코팅하였다. 질소가 첨가된 BMG 박막에서는 시편의 색상이 노란빛으로 나타났으며 이것은 타겟의 조성 중 가장 많이 함유되어있는 Zr이 질화되어 색상의 변화가 일어난 것으로 판단된다. BMG 코팅을 위해서 진공용기로 주입한 질소의 유량이 소량인 경우에도 BMG 코팅층에 비교적 많은 양의 질소가 존재하였고 일정량 이상에서는 BMG 코팅층에 존재하는 질소의 양이 포화되는 현상을 보였다. 질소 유량 3, 4 SCCM의 BMG 코팅층에서 ZrN (111), ZrN (200) Peak이 관찰되었다. BMG 코팅층의 경도 측정결과 Bias 50 V 인가 시 ~22 Gpa로 경도가 가장 높았다. BMG 코팅층의 내부식 특성을 평가하기 위해 염수분무 시험을 실시하였고 ~$10{\mu}m$의 두께를 갖는 BMG 코팅층에서 염수분무 시작 후 48시간 만에 적청이 발생하였다.

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Seasonal Variation and Statistical Analysis of Particulate Pollutants in Urban Air (도시대기립자상물질중 오염성분의 계절적 변동 및 통계적 해석)

  • 이승일
    • Journal of environmental and Sanitary engineering
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    • v.9 no.2
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    • pp.8-23
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    • 1994
  • During the period from Mar., 1991 to Feb., 1992 66 tSP samples were collected by Hi volume air sampler at 1 sampling site in Seoul and the amount of concentration of 21 components(SO$_{4}$$^{2-}$, NO$_{3}$$^{-}$, NH$_{4}$$^{+}$, Cl$^{-}$, Al, Ba, Ca, Cd, Cr, Cu, Fe, It Mg, Mn, Na, Ni, Pt Si, Ti, Zn, Zr ) were measured. And monthly and seasonal variation were surveyed and the principal component analysis( PCA ) were carried out with respect to these amount of pollutants, minimum of visibility and radiation on a horizontal surface. The total amount of soluble ion in water was high in order o(SO$_{4}$$^{2-}$> NO$_{3}$$^{-}$> N%'>Cl$^{-}$ and metal ion was high in order of Na> Ca>Si> Fe> Al> K> Mg> Zn> Pb> Cu>Ti> Mn > Ba> Cr> Zr> Ni> Cd. There was Seasonal variation in concentration for SO$_{4}$$^{2-}$, NH$_{4}$$^{+}$, Cl$^{-}$, Na, Al, Ca, Bt Mg, Fe and Si. It was assumed that the components of the highest concentration on April were depend on yellow sand and the frequency of wind velocity and direction. As the results of PCA, the amount of pollution components was able to characterized with two principal components(Z$_{1}$, Z$_{2}$ ). The first principal components Z$_{1}$ was considered to be a factor indicating the pollutants originated from natural generation and The second principal components Z$_{2}$ was considered to be a factor indicating the pollutants originated from human work. The monthly concentration of pollutants in ISP, minimum of visibility and radiation on a horizontal surface was possible to evaluate by the use of these two principal components Z$_{1}$ and Z$_{2}$ .

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A study on machining of high strength ceramics for automobile engine parts (자동차 엔진 부품용 고강도 세라믹스의 기계 가공에 관한 연구)

  • 강재훈
    • Journal of the korean Society of Automotive Engineers
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    • v.12 no.5
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    • pp.60-75
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    • 1990
  • Advanced Ceramics have some excellent prosperities as the material for the mechanical component. It is, however, very difficult to grind ceramics with high efficiency because of their high strength, hardness and brittleness. In this study, various machining experiments are carried out to obtain the basic knowledge of grinding High Strength Ceramics with high efficiency and precision for the purpose of application to Automobile parts. Advanced Engineering Ceramics such as Si$_{3}$N$_{4}$, SiC, ZrO$_{2}$, $Al_{2}$O$_{3}$ are ground with diamond wheels using conventional grinding machine. Results obtained in this study provide some useful informations to attain the high efficiency grinding of Advanced Ceramics.

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A study on the Grindability of Fine Ceramics by Experimental Method (실험적 방법에 의한 파인세라믹스의 연삭성에 관한 연구)

  • Kim, Seong-Kyeum
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.3
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    • pp.35-42
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    • 2011
  • This paper describes the characteristics of high speed grinding and the influence of wheel surface speed V and a grindability of the grinding materials. The various fine ceramics pieces was ground by metal and vitrified bonded diamond wheel. The surface roughness of fine ceramics(Zirconia($ZrO_2$), Silicon Carbide(SiC), Silicon Nitride($Si_3N_4$), Alumina($Al_2O_3$)) decreases from $0.05{\mu}m(R_{max})$ to $0.025{\mu}m(R_{max})$ when the wheel speed at grinding point increases the wheel speed. Relation between the temperature at grinding point and surface roughness was linear. Abrasive jet machining(AJM), a specialized from of shot blasting, is considered one of the most helpful micro machining methods for hard and brittle materials such as glasses and ceramics by constant pressure grinding.

Grinding Characteristic of Advanced Ceramics (파인세라믹의 연삭가공특성)

  • Jung, Yoon-Gyo;Kang, Jae-Hoon
    • Journal of the Korean Society for Precision Engineering
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    • v.7 no.2
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    • pp.105-112
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    • 1990
  • Advanced ceramics have some excellent properities as the material for the mechanical component. It is, however, very difficult to grind ceramics with high efficiency because of their high strength, hardness and brittleness. In this paper, some experiments are carried out to find the basic grinding characteristic of advanced ceramics. Representative advanced ceramics, such as AL/sub 2/ O/sub 3/, ZrO/sub 2/, SiC and Si/sub 3/N/sub 4/and ground with diamond wheels. Special attention is paid to comparison between the conventional and creep feed grinding. Results obtained in this study provide some useful informations to attain the high efficiency grinding of advanced ceramics.

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