• 한국세라믹학회지
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• 제31권9호
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• pp.969-974
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• 1994

After adding 8Y-ZrO2 powders to 3Y-ZrO2 powders at ratios of 0, 33, 50, 67, and 100% by weight, the mixed yttria-stabilized zirconia specimens were fabricated into thin plate using tape~casting method and then sintered at 150$0^{\circ}C$ for 4h in air. The crystalline structure, microstructure and electrical properties of the sintered zirconia thin plates were investigated by using X-ray diffractometer, scanning electron microscope and impedance analyser, respectively. At the temperatures higher than 75$0^{\circ}C$, the sintered thin plate with 33% 8Y-ZrO2 content shows higher mechanical properties and lower electrical resistivity than 8Y-ZrO2 thin plate which is generally used as an electrolyte for solid oxide fuel cells. This is due to the fact that the zirconia thin plates with low 8Y-ZrO2 content maintain the slope of low temperature region up to high temperatures, whereas at temperatures higher than 50$0^{\circ}C$ the slope decrease in the zirconia thin plates with high 8Y-ZrO2 content.

• 한국세라믹학회지
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• 제25권4호
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• pp.373-379
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• 1988

$\alpha$-Al2O3-15m/o ZrO2 powder was prepared by a sol-gel method from boehmite and zirconium acetate. The transformation temperature of boehmite to $\alpha$-Al2O3 in the system Al2O3-ZrO2 was increased due to the coupled crystallization. On the other hand, the transformation temperature from boehmite to $\alpha$-Al2O3-15m/o ZrO2 could be prepared at 110$0^{\circ}C$ for 100min. The specific surface area of the product of $\alpha$-Al2O3-15m/o ZrO2 was 13.2$m^2$/g.

• Korean Chemical Engineering Research
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• 제62권1호
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• pp.125-131
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• 2024

본 연구에서는 제조된 Ni/Ce_xZr_1-xO₂ 촉매를 허니컴 구조의 금속 모노리스 구조체 표면에 코팅하여 수증기 메탄 개질 반응에 대한 활성을 연구하였다. Ce/Zr의 비율을 달리한 지지체를 합성하여 수증기 메탄 개질 반응에서의 거동을 확인하였으며, Ni 함량이 촉매 활성에 미치는 영향을 분석하기 위해 다양한 Ni 함량의 촉매를 제조하였다. 촉매의 특성은 XRD, BET, TPR 및 SEM으로 분석하였으며 TPR 분석에서 활성 금속 Ni이 CeO₂-ZrO₂ 혼합물 지지체와 강한 상호작용으로 Ni-Ce-Zr 산화물을 형성하였음을 나타내었다. 15 wt% Ni/Ce_0.80Zr_0.20O₂ 촉매는 수증기 메탄 개질 반응에서 가장 높은 활성 및 안정성을 보였다. 우수한 산소저장 및 공여 특성의 CeO₂와 열적 특성의 ZrO₂를 복합소재로 제조하여 활성과 안정성이 향상된 촉매를 합성하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.138-138
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• 2017

차세대 CMOS 소자의 지속적인 고직접화를 위해서는 높은 gate capacitance와 낮은 gate leakage current를 확보를 위한, 적절한 metal gate electrode와 high-k dielectric 물질의 개발이 필수적으로 요구된다. 특히, gate dielectric으로 적용하기 위한 다양한 high-k dielectric 물질 후보군 중에서, 높은 dielectric constant와, 낮은 leakage current, 그리고 Si과의 우수한 열적 안정성을 가지는 Zr silicates 또는 Hf silicates(ZrSiO4와 HfSiO4) 물질이 높은 관심을 받고 있으며, 이를 원자층 증착법을 통해 구현하기 위한 노력들이 있어왔다. 그러나, 현재까지 보고된 원자층 증착법을 이용한 Zr silicates 및 Hf silicates 공정의 경우, 개별적인 Zr(또는 Hf)과 Si precursor를 이용하여 ZrO2(또는 HfO2)과 SiO2를 반복적으로 증착하는 방식으로 Zr silicates 또는 Hf silicates를 형성하고 있어, 전체 공정이 매우 복잡해지는 문제점 뿐 아니라, gate dielectric 내에서 Zr과 Si의 국부적인 조성 불균일성을 야기하여, 제작된 소자의 신뢰성을 떨어뜨리는 문제점을 나타내왔다. 따라서, 본 연구에서는 이러한 문제점을 개선하기 위하여, 하나의 precursor에 Zr (또는 Hf)과 Si 원소를 동시에 가지고 있는 DNS-Zr과 DNS-Hf bimetallic precursor를 이용하여 새로운 ZrSiO4와 HfSiO4 ALD 공정을 개발하고, 그 특성을 살펴보고자 하였다. H2O와 O3을 reactant로 사용한 원자층 증착법 공정을 통하여, Zr:Si 또는 Hf:Si의 화학양론적 비율이 항상 일정한 ZrSiO4와 HfSiO4 박막을 형성할 수 있었으며, 이들의 전기적 특성 평가를 진행하였으며, dielectric constant 및 leakage current 측면에서 우수한 특성을 나타냄을 확인할 수 있었다. 이러한 결과를 바탕으로, bimetallic 전구체를 이용한 ALD 공정은 차세대 고성능 논리회로의 게이트 유전물질에 응용이 가능할 것으로 판단된다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2004년도 춘계학술발표대회 및 제6회 신소재 심포지엄
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• pp.47-47
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• 2004

• 한국재료학회지
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• 제9권1호
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• pp.73-80
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• 1999

The effect of alloy compositions of the bond coating on the plasma sprayed-thermal barrier coatings was investigated. The performance of the coating composed of Rene80/NiCrAl/ZrO$_2$-CeO$_2$-Y$_2$O$_3$ and Rene80/CoNiCrAlY/ZrO$_2$-CeO$_2$-Y$_2$O$_3$was evaluated by isothermal and thermal cyclic test in an ambient atmosphere at 115$0^{\circ}C$. The failure of Rene80/NiCrAl/ZrO$_2$-CeO$_2$-Y$_2$O$_3$ coatings was occurred at the bond coating/ceramic coating interface while Rene80/CoNiCrAlY/ZrO$_2$-CeO$_2$-Y$_2$O$_3$ coating was failed at the substrate/bond coating interface after thermal cyclic test. The lifetime of Rene80/NiCrAl/ZrO$_2$-CeO$_2$-Y$_2$O$_3$coatings was longer than Rene80/CoNiCrAlY/ZrO$_2$-CeO$_2$-Y$_2$O$_3$coating. The oxidation rate of the NiCrAl bond coating examined by TGA was lower than CoNiCrAlY bond coatings. In summary, these results suggest that Rene80/CoNiCrAlY/ZrO$_2$-CeO$_2$-Y$_2$O$_3$system as thermal barrier coating be not suitable considering the durability of the coating layer for high temperature oxidation and thermal stress.

• 한국재료학회지
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• 제15권12호
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• pp.751-755
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• 2005

Fibrous $Al_2O_3-(m-ZrO_2)/t-ZrO_2$ composites having core/shell structure were fabricated by multi-extrusion process. The effect o volume fraction between core ($Al_2O_3-(m-ZrO_2)$) and shell ($t-ZrO_2$ was investigated to understand the relationship between microstructure and material properites, in which the volume fractions of core and shell were varied as 40:60, 50:50 and 60:40. The material properties o hardness and bending strength were increased as the volume fraction of core was increased, and their maximum values were about 1320 Hv and 750MPa, respectively. However, as the volume fraction of core increased, the values of relative density and fracture toughness were decreased from 97.1 to $96.5\%$ and from $6.5MPa{\cdot}m^{1/2}$ to $5.7MPa{\cdot}m^{1/2}$, respectively.

• 한국재료학회지
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• 제2권3호
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• pp.172-179
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• 1992

$Al_2O_3/ZrO_2$복합분말에 상릉분말을 침가하여 상압소결법으로 $Al_2O_3/ZrO_2$복합체를 제조한 후, 밀도, 강도, 경도 및 파괴인성등의 물성을 측정하였으며 미세구조 및 파괴단면도 관찰하였다. 상용분말의 침가량이 중량비로 50%이하인 경우에는 평균 꺽임 강도가 640 MPa정도로 거의 변화가 없었으며, 50%이상 첨가된 경우에는 강도가 저하되었는데, 이는 미세조직과 관계가 있는 것으로 생각된다. 또한 파괴인성(4.3-5.3 $Mpam^{1/2}$)값은 상용분말 첨가량에 비례하여 증가하였다. 파괴단면 관찰결과 파괴원인으로는 가공에서 생기는 표면 결함, $ZrO_2$ agglomeration에 의한 crack-like void 및 $Al_2O_3/ZrO_2$ nano복합체 분말과 상용분말간의 소결성 차이에서 생기는 계면 분리등이 관찰되었는데, nano 복합 분말만을 사용한 소결체에서는 가공에 의한 표면 결함만이 파괴원으로 작용하였다. 또한, 파괴형태는 주로 transgranular fracture이었다

• 한국세라믹학회지
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• 제25권4호
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• pp.364-372
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• 1988

The mechanical properties and microstructure of ceramics of the system Al2O3-ZrO2-Y2O3 sintered at 1$650^{\circ}C$ for 2h after powder preparation by the precipitation method from Al2(SO4)3.18H2O, ZrOCl2.8H2O and YCl3.6H2O were investigated. The Al2O3-ZrO2-Y2O3 ceramics sintered at 1$650^{\circ}C$ for 2h after mixing alpha-Al2O3 and ZrO2-Y2O3 powders, both were separately precipitated and calcined, were found to have the relative density higher than 97.5% so that the strengthening and toughening mechanisms could be explained mainly as the stress-induced phase transformation. On the other hand, the sintered bodies prepared by co-precipitating the three starting materials were measured to have the relative density lower than 85% so that the degradation of strength were observed above 15 vol% ZrO2 contents due to the high porosity by which the effect of stress-induced phase transformation was assumed to be depressed.

• 한국세라믹학회지
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• 제16권4호
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• pp.213-224
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• 1979

The present work was undertaken: (1) to determine if CaO-partially stabilized $ZrO_2$ prepared by Hot Petroleum Drying Method would show better ionic conductor as an oxygen sensor in molten metals than that prepared by Oxide Wet Mixing Method and than CaO-fully stabilized $ZrO_2$, and (2) to understand the nature of conduction mechanism of CaO-partially stabilized $ZrO_2$ by a comparison of measured electrical conductivity data with theory on defect structure of pure monoclinic $ZrO_2$ and fully stabilized cubic $ZrO_2$. The DC electrical conductivity was measured by 3-probe technique and the AC electrical conductivity by 2-probe technique as a function of temperature in the range 973-1373 K and oxygen partial pressure in the range 10-1-10-25Mpa. The results of the experiments were as follows: 1. CaO-partially stabilized $ZrO_2$ prepared by Hot petroleum Drying Method showed at T=1094-1285 K and $Po_2$=10-7-10-25 MPa a nearly ionic conduction with 4 times higher conductivity than that prepared by Oxide Wet Mixing Method. 2. High-oxygen pressure conductivity tends toward a Po_2^{+1/5}-Po_2^{+1/6}$dependence. An analysis of possible defect structures suggests that CaO-partially stabilized $ZrO_2$ has an anti-Frenkel defect in which singly or doubly ionized oxygen interstitials and defect electrons predominate at T=1094-1285 K and $Po_2$=10-1-10-7MPa. 3. The activation energy for pure electron hole-conduction and ionic conduction of CaO-partially stabilized $ZrO_2$ was found to be 130 KJ/mol at T=973-1373 K, $Po_2$=2, 127 10-2 MPa(air) and 153KJ/mol at T=1094-1285 K respectively.