• Title/Summary/Keyword: ZrO_2$

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Densification and Electrical Properties of Screen-printed PZT Thick Films (스크린 프린팅법으로 제작한 PZT 후막의 치밀화와 전기적 특성)

  • Park, Sang-Man;Lee, Sung-Gap
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.7
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    • pp.667-672
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    • 2006
  • Ferroelectric $Pb(Zr_{0.52}Ti_{0.48})O_3$ (PZT(52/48)) thick films were fabricated by the screen-Printing method on the alumina substrates, and $PbTiO_3$ (PT) Precursor solution, which prepared by sol-gel method, was spin-coated on the PZT(52/48) thick films to obtain a densification. Its structural and electrical properties of the PZT(52/48) thick films with the treatment of PT precursor solution coating were investigated. The particle size of the thick films was increased with increasing the number of coatings and the thickness of the PZT-6 (6: number of coatings) films was about $60{\mu}m$. The relative dielectric constant increased and the dielectric loss decreased with increasing the number of PT sol coatings. The relative dielectric constant and dielectric loss of the PZT-6 thick film were 475 and 2 %, respectively. The remanent polarization, coercive field and breakdown strength of the PZT-6 film were $32.6{\mu}C/cm^2$, 15 kV/cm and 60 kV/cm, respectively.

Effect on Mechanical Properties of 3Y-TZP; (II) Addition of Alumina (3Y-TZP의 기계적 물성에 미치는 영향: (II) 알루미나의 첨가)

  • Yang, Seong-Koo;Bae, Kyung-Man;Cho, Bum-Rae;Kang, Jong-Bong
    • Journal of the Korean Ceramic Society
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    • v.42 no.6 s.277
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    • pp.417-424
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    • 2005
  • Although a lot of studies in fracture toughness of Y-TZP ceramics for structural applications have been done, it remains an important challenge to be able to improve fracture toughness of Y-TZP ceramics. In this research, milling method adding monoclinic zirconia and $Al_2O_3$ to 3Y-TZP was introduced to improve the fracture toughness of 3Y-TZP. Experimental results showed that addition of small amount of $Al_2O_3$ causes to make lots of oxygen vacancies (VO) by substituting $Al^{3+}$ for $Zr^{4+}$. It is believed that the produced vacancies provides useful routes far mass transfer. Y-TZP ceramics having higher microhardness and better fracture toughness was fabricated by sintering at $1400^{\circ}C$.

Direct UV laser projection ablation to engrave 6㎛-wide patterns in a buildup film (빌드업 필름의 선폭 6㎛급 패턴 가공을 위한 직접식 UV 레이저 프로젝션 애블레이션)

  • Sohn, Hyonkee;Park, Jong-Sig;Jeong, Jeong-Su;Shin, Dong-Sig;Choi, Jiyeon
    • Laser Solutions
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    • v.17 no.3
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    • pp.19-23
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    • 2014
  • To directly engrave circuit-line patterns as wide as $6{\mu}m$ in a buildup film to be used as an IC substrate, we applied a projection ablation technique in which an 8 inch dielectric ($ZrO_2/SiO_2$) mask, a DPSS 355nm laser instead of an excimer laser, a ${\pi}$-shaper and a galvo scanner are used. With the ${\pi}$-shaper and a square aperture, the Gaussian beam from the laser is shaped into a square flap-top beam. The galvo scanner before the $f-{\theta}$ lens moves the flat-top beam ($115{\mu}m{\times}105{\mu}m$) across the 8 inch dielectric mask whose patterned area is $120mm{\times}120mm$. Based on the results of the previous research by the authors, the projection ratio was set at 3:1. Experiments showed that the average width and depth of the engraved patterns are $5.41{\mu}m$ and $7.30{\mu}m$, respectively.

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A Study on Acoustic Emission Characteristics through the Cyclic Thermal Test of Thermal Barrier Coating by Plasma Spray Process (플라즈마 용사법에 의한 열차폐 코팅의 열피로에 따른 AE신호 특성 연구)

  • Park J.H.;Lee K.H.;Ye K.H.;Kim S.T.;Jeon C.H.;Kim J.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1349-1352
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    • 2005
  • This paper is to investigate a defect for thermal barrier coating layers by acoustic emission method in 4-point bending test. The two-layer thermal barrier coating is composed of $150\mu{m}\;CoNiCrAlY\;bond\;coating\;by\;vacuum\;plasma\;spray(VPS)\;process\;and\;250\mu{m}\;ZrO_2-8wt%Y_2O_3$ ceramic coating layer by air plasma spray(APS) process on Inconel-718. The specimen prepared by cyclic thermal test(500, 1000, 2000cycle) at $1050^{\circ}C$ The AE monitoring system is composed of PICO type sensor, a wide band pre-amplifier(40dB), PC and AE DSP(16/32 PAC) board. The AE event, amplitude, Cumulative energy and count of coating specimens is evaluated according to cyclic thermal test.

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The Effects of Grain Size on the Degradation Phenomena of PZT Ceramics (입자의 크기가 PZT 세라믹스의 열화현상에 미치는 영향)

  • 정우환;김진호;조상희
    • Journal of the Korean Ceramic Society
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    • v.29 no.1
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    • pp.65-73
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    • 1992
  • The effect of grain size on the time-dependent piezoelectrice degradation of a poled PZT of MPB composition Pb0.988Sr0.012 (Zr0.52Ti0.48)O3 with 2.4 mol% of Nb2O5 was studied, and the degradation mechanism was discussed. Changes in the internal bias field and the internal stress both responsible for the time-dependent degradation of poled PZT were examined by the polarization reveral technique, XRD and Vickers indentation, respectively. The piezoelectric degradation increased with increasing time and grain size, and the internal bias field due to space charge diffusion decreased with increasing grain size of poled PZT. The internal bias field, however, was almost insensitive to the degradation time regardless of the grain size. On the other hand, both the x-ray diffraction peak intensity ratio of (002) to (200) and the fracture behavior including the crack propagation support that the ferroelectric domain rearrangement of larger grain size showed rapid relaxation of the internal stress compared with smaller one, which is thought the origin of the larger piezoelectric degradation in the former. In conclusion, the contribution of space charge diffusion on the piezoelectric degradation of PZT is strongly dependent on both the grain size and the composition. Thus, the relaxation of internal stress due to the ferroelectric domain rearrangement as well as the amount and time-dependence of the internal bias field due to space charge diffusion should be considered simultaneously in the degradation mechanism of PZT.

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The Piezoelectric and Dielectric Properties of PZT-PMN Piezoelectric Ceramics (PZT-PMN 압전 세라믹의 압전 및 유전 특성)

  • Lee, J.S.;Lee, Y.H.;Chae, H.I.;Jeong, S.H.;Lim, K.J.
    • Proceedings of the KIEE Conference
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    • 2001.07c
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    • pp.1439-1441
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    • 2001
  • In this paper, the piezoelectric and dielectric properties as a function of x and r in $yPbZr_xTi_{1-x}O_3-(1-y)Pb(Mn_{1/3}Nb_{2/3})O_3$ piezoelectric ceramics is investigated. As a results, when y is 0.95 and x is 0.505, electromechanical coupling factor($k_p$), permittivity(${{\varepsilon}_{33}}^T/{\varepsilon}_0$), piezoelectric strain constant($d_{33}$) and mechanical quality factor($Q_m$) are 58[%], 1520, 272 [pC/N] and 1550, respectively. From XRD analysis, when x is 0.505, it is MPB which present rhombohedral and tetragonal phase in same quantity. Also, From SEM observation. when sintering temperature is 1150[$^{\circ}C$], grain size is about 2 [${\mu}m$]. As y decreases, piezoelectric and dielectric properties and curie temperature decreases, but mechanical quality factor and sintering temperature increases.

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Effect of Process Parameters on Deposition Characteristics in Fabrication of Coated Tools (코팅공구의 제조에서 공정인자가 증착특성에 미치는 영향)

  • 김종희
    • Journal of Surface Science and Engineering
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    • v.28 no.6
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    • pp.368-375
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    • 1995
  • Thermal CVD method is in general used for the fabrication of TiC/$Al_2O_3$-coated carbide tools. The growth of TiC layer and the coating morphology depended on the chemical composition of the hard metal substrate on which the tool properties were strongly influenced. TiC-coated layer was grown by the diffusion of carbon from the substrate, whereas the growth of $Al_2O_3$ layer was unrelated to the composition of substrate. In the nitride hard coatings of Zr, Nb and Mo metals deposited on high speed steel substrate by magnetron sputtering, the reactivity of the metal elements was decreased with increasing group number in one period of the periodic system. The hard material films exhibited the highest adhesion with the chemical composition of stoichiometry or substoichiometry. The critical load as a measure of adhesion was evaluated using scratch tester. The CVD tools indicated the values of 80 and 40N in the coated layers with proper bonding to the substrate and with $\eta$ phase of 1$\mu\textrm{m}$ in the interface respectively, but the nitride films prepared by sputtering of PVD showed only the values between 10 and 20N.

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Electrocaloric Effect in Emerging Fluorite-Structure Ferroelectrics (새로운 플루오라이트 구조 강유전체의 Electrocaloric Effect)

  • Yang, Kun;Park, Ju Yong;Lee, Dong Hyun;Park, Min Hyuk
    • Korean Journal of Materials Research
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    • v.30 no.9
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    • pp.480-488
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    • 2020
  • The electrocaloric effect can be observed in pyroelectric materials based on conversion between electrical and thermal energy, and can be utilized for the future environment-friendly refrigeration technology. Especially, a strong electrocaloric effect is expected in materials in which field-induced phase transition can be achieved. Emerging fluorite-structure ferroelectrics such as doped hafnia and zirconia, first discovered in 2011, are considered the most promising materials for next-generation semiconductor devices. Besides application of fluorite-structure ferroelectrics for semiconductor devices based on their scalability and CMOS-compatibility, field-induced phase transition has been suggested as another interesting phenomenon for various energy-related applications such as solid-state cooling with electrocaloric effect as well as energy conversion/storage and IR/piezoelectric sensors. Especially, their giant electrocaloric effect is considered promising for solid-state-cooling. However, the electrocaloric effect of fluorite-structure oxides based on field-induced phase transition has not been reviewed to date. In this review, therefore, the electrocaloric effect accompanied by field-induced phase transition in fluorite-structure ferroelectrics is comprehensively reviewed from fundamentals to potential applications.

Development of the Heat-Resistant Functionally Gradient Material with Metal Substrate (금속기지 내열 경사기능 복합재료 개발에 관한 연구)

  • Kim, Bu-Ahn;Nam, Ki-Woo;Cho, Mun-Ho
    • Journal of Ocean Engineering and Technology
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    • v.13 no.1 s.31
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    • pp.62-69
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    • 1999
  • 67Ni-22Cr-10Al-1Y and $ZrO_2-8Y_2O_3$ were coated on the substrate surface of ST304 and Al2024 by the plasma spraying method. The adgesion of the films varies depending on the substrates and the laminating method. In the case of STS304, the cracks were observed at thermal shock temperature difference ${Delta}T$ of $900^{circ}C$ in the non functionally gradient material(NFGM) and at $1100^{circ}C$ in the functionally gradient material(FGM). The film adhesion of the FGM is better than that of the NFGM in ST304. The cumulative AE count of the FGM of STS304 increased continuously at the bending test. But the NFGM of STS304 showed discontinuity of the AE count. The total AE count for the FGM of STS304 decreased as the number of thermal shock increased, and this tendency was evident as the thermal shock temperature difference increased.

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Electro-mechanical properties of Multilayer Ceramic Actuators (적층형 세라믹 액츄에이터의 전기-기계적 거동)

  • Jeong, Soon-Jong;Koh, Jung-Hyuk;Ha, Mu-Su;Lee, Jae-Suk;Song, Jae-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05c
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    • pp.253-256
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    • 2003
  • This study presents the combined effect of electric field application and mechanical compressive stress loading on deformation in a multilayer ceramic actuator, designed with stacking alternatively $0.2(PbMn_{1/3}Nb_{2/3}O_3)-0.8(PbZr_{0.475}Ti_{0.525}O_3)$ ceramics and Ag-Pd electrode. The deformation behaviors were thought to be attributed to relative $180^{\circ}$domain quantities which is determined by pre-loaded stress and electric field. The non-linearity of piezoelectricity and strain are dependent upon the young's modulus resulting from the domain reorientation.

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