• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.215-215
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• 2003

현재 이용되고 있는 위상 변위 마스크, 즉 Cr 계열의 마스크나 MoSiON 마스크는 DUV지역에서 낮은 굴절률을 갖는다. 그 겯과 마스크의 두께가 90 nm 이상이 되고, 웨이퍼에서 패턴 형성 시 에러율이 증가하게 된다. 본 연구에서는 DUV 지역에서 굴절률이 높을 것이라고 예상되는 Zr과 Hf의 oxide를 위상 변위 마스크 물질의 선정하고 각 물질의 전자 상태와 천이 상태를 분석하여 위상변위 마스크로써의 이용가능성을 연구하자 한다. 상온에서 Zr, Hf oxide의 안정한 구조는 cubic 구조와 monoclinic 구조이다. 현재 cubic 구조의 Zr, Hf oxide에 대한 전자 상태는 연구가 많이 되어 있는 반면 monoclinic 구조에서의 전자상태 연구는 미흡하다. 본 연구에서는 monoclinic 구조를 이용하여 Zr, Hf oxide의 클러스터 모델을 제작하였다. 제작된 클러스터 모델에 대하여 DV-X$\alpha$ 계산법을 적용, 기저상태의 전자상태를 계산하였다. 그리고 각 모델에서 Zr L-edge, Hf L-edge 그리고 O K-edge의 천이상태를 연구하여, 기저 상태의 전자상태와 천이상태를 연구하여 광학 성질과의 연관성을 연구하고자 하였다.

• Korean Journal of Materials Research
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• v.12 no.3
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• pp.220-224
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• 2002

The oxide scales formed on $Ni_3Al$-7.8%Cr-1.3%Zr-0.8%Mo-0.025%B after oxidation at 900, 1000 and 110$0^{\circ}C$ in air were studied using XRD, SEM, EPMA and TEM. The oxide scales consisted primarily of $NiO,\; NiAl_2O_4,\;{\alpha}-Al_2O_3,\; monoclinic-ZrO_2,\; and \;tetragonal-ZrO_2$. The outer layer of the oxide scale was rich in Ni-oxides, whereas the internal oxide stringers were rich in Al-oxides and $ZrO_2$. Within the above oxide scales, Cr and Mo tended to exist as dissolved ions.

• Journal of the Korean Ceramic Society
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• v.47 no.2
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• pp.106-112
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• 2010

This paper presents some experimental results on incubation time for massive hydriding of Zr alloys with oxide thickness. Oxide effects experiments on massive hydriding reaction of commercial Zr alloy claddings and pre-oxidized Zr alloys with hydrogen gas were carried out in the temperature range from 300 to $400^{\circ}C$ with thermo-gravimetric apparatus. Experimental results for oxide effects on massive hydriding kinetics show that incubation time is not proportional to oxide thickness and that the massive hydriding kinetics of pre-filmed Zr alloys follows linear kinetic law and the hydriding rate are similar to that of oxide-free Zr alloys once massive hydriding is initiated. There was a difference in micro-structures between oxide during incubation time and oxide after incubation time. Physical defects such as micro-cracks and pores were observed in only oxide after incubation time. Therefore, the massive hydriding of Zr alloys seems to be ascribed to short circuit path, mechacical or physical defects, such as micro-cracks and pores in the oxide rather than hydrogen diffusion through the oxide resulting from the increase of oxygen vacancies in the hypostoichiometric oxide.

• Bulletin of the Korean Chemical Society
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• v.19 no.8
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• pp.856-862
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• 1998

Vanadium oxide catalyst supported on ZrO2-WO3 was prepared by adding the Zr(OH)4 powder into a mixed aqueous solution of ammonium metavanadate and ammonium metatungstate followed by drying and calcining at high temperatures. The characterization of prepared catalysts was performed using solid-state 51V NMR and FTIR. In the case of calcination temperature at 773 K, for the samples containing low loading V2O5 below 18 wt % vanadium oxide was in a highly dispersed state, while for samples containing high loading V2O5 equal to or above 18 wt % vanadium oxide was well crystallized due to the V2O5 loading exceeding the formation of monolayer on the surface of ZrO2-WO3. The ZrV2O7 compound was formed through the reaction Of V2O5 and ZrO2 at 873 K and the compound decomposed into V2O5 and ZrO2 at 1073 K, which were confirmed by FTIR and 51V NMR.

• Bulletin of the Korean Chemical Society
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• v.13 no.6
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• pp.605-612
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• 1992

Chromium oxide/zirconia catalysts were prepared by dry impregnation of powdered $Zr(OH)_4$ with ($NH_4$)$_2$CrO$_4$aqueous solution. The characterization of prepared catalysts was performed using FTIR, XPS, XRD and DTA methods, and by the measurement of surface area. The addition of chromium oxide to zirconia shifted the transitions of $ZrO_2$ from amorphous to tetragonal phase and from tetragonal to monoclinic phase to higher temperature due to the strong interaction between chromium oxide and zirconia, and the specific surface area of catalysts increased in proportion to the chromium oxide content. Since the $ZrO_2$ stabilizes supported chromium oxide, chromium oxide was well dispersed on the surface of zirconia, and ${\alpha}$-$Cr_2O_3$ was observed only at the calcination temperature above 1173 K. Upon the addition of only small amount of chromium oxide (1 wt% Cr) to $ZrO_2$, both the acidity and acid strength of catalyst increased remarkably, showing the presence of two kinds of acid sites on the surface of $CrO_x$/$ZrO_4$-Bronsted and Lewis.

• Proceedings of the Korean Nuclear Society Conference
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• 1998.05b
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• pp.99-104
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• 1998

40$0^{\circ}C$ $H_2O$ steam 분위기에서 Zr-2,5wt%Nb 및 Zr-20wt%Nb 합금의 산화거동을 열처리조건에 따른 미세조직 관점에서 고찰하였으며, 형성된 oxide를 분석하여 산화기구를 규명하고자 하였다. Zr-Nb 합금의 산화거동은 열처리에 따라 협성된 조직상에 매우 민감하였는데, 주 조직인 a-Zr 상 보다는 $\beta$상들에 ($\beta$-Zr, $\beta$-Nb) 보다 큰 영향을 받는 것으로 보인다. $\beta$-Zr 상은 $\alpha$-Zr 상에 비해 부식저항성이 낮으며, 그 양에 관계없이 유사한 정도의 부식거동을 보인다. $\beta$-Nb 상의 경우, 미세한 크기로 적은양이 존재하는 경우 부식저항성에 별다른 영향이 없어 보이는 반면, 상당량의 $\beta$-Nb 상이 조대한 크기로 (약 0,2$\mu\textrm{m}$) 존재하는 경우 매우 불안정한 부식거동을 보였다. 이들 $\beta$상들의 낮은 산화저항성은 Nb$_2$O$_{5}$ 을 포함한 Nb 계 oxide의 형성에 주로 기인한 것으로 추정된다.

• Transactions of the Korean hydrogen and new energy society
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• v.17 no.1
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• pp.21-30
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• 2006

[ $M/Fe_2O_3$ ] (M=Rh, Ce and Zr) mixed oxides were prepared using urea method to develop a medium for chemical hydrogen storage by their redox cycles. And their redox behaviors by repeated cycles were studied using temperature programmed reaction(TPR) technique. Additives such as Rh, Ce and Zr were added to iron oxides in order to lower the reaction temperature for reduction by hydrogen and re-oxidation by water-splitting. From the results, concentration of urea used as a precipitant had little effect on particle size and reduction property of iron oxide. TPR patterns of iron oxide consisted of two reduction peaks due to the course of $Fe_2O_3\;{\rightarrow}\;Fe_3O_4\;{\rightarrow}\;Fe$. The results of repeated redox tests showed that Rh added to iron oxide have an effect on lowering the re-oxidation temperature by water-splitting. Meanwhile, Ce and Zr additives played an important role in prevention of deactivation by repeated cycles. Finally, Fe-oxide(Rh, Ce, Zr) sample added with Rh, Ce and Zr showed the lowest re-oxidation temperature by water-splitting and maintained high $H_2$ recovery in spite of the repeated redox cycles. Consequently, it is expected that Fe-oxide(Rh, Ce, Zr) sample can be a feasible medium for chemical hydrogen storage using redox cycle of iron oxide.

• Applied Science and Convergence Technology
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• v.24 no.2
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• pp.33-40
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• 2015

$ZrO_2$ and Al-Zr composite oxide film was prepared by vacuum assisted sol-gel dip coating method and anodizing. $ZrO_2$ films annealed above $400^{\circ}C$ have tetragonal structure. $ZrO_2$ layers inside etch pits were successfully coated from the $ZrO_2$ sol. The double layer structures of samples were obtained after being anodized at 100 V to 600 V. From the TEM images, it was found that the outer layer was $Al_2O_3$, the inner layer was multi-layer of $ZrO_2$, Al-Zr composite oxide and Al hydrate. The capacitance of $ZrO_2$ coated foil exhibited about 28.3% higher than that of non-coating foil after being anodized at 100 V. The high capacitance of $ZrO_2$ coated foils anodized at 100 V can be attributed to the relatively high percentage of inner layer in total thickness. The electrical properties, such as withstanding voltage and leakage current of coated and non-coated Al foils showed similar values. From the results, $ZrO_2$ and Al-Zr composite oxide is promising to be used as the partial dielectric of high voltage capacitor to increase the capacitance.

• Applied Chemistry for Engineering
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• v.18 no.6
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• pp.618-624
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• 2007

thermochemical methane reforming consisting of two steps on Cu/Fe/Zr mixed oxide media was carried out using a fixed bed infrared reactor. In the first step, the metal oxide was reduced with methane to produce CO, $H_2$ and the reduced metal oxide in the temperature of 1173 K. In the second step, the reduced metal oxide was re-oxidized with steam to produce $H_2$ and the metal oxide in the temperature of 973 K. The reaction characteristics on the added amounts of Cu in Cu/Fe/Zr mixed oxide media and the cyclic tests were evaluated. With the increase of the added amount of Cu in Cu/Fe/Zr mixed oxide media, the conversion of $CH_4$, the selectivity of $CO_2$ and the $H_2/CO$ molar ratio were increased, while the selectivity of CO was decreased in the first step. On the other hand, the evolved amount of $H_2$ was decreased with increasing the added amount of Cu in the second step. The $Cu_xFe_{3-x}O_4/ZrO_2$ medium added with Cu of x = 0.7 showed good regeneration properties in the 10th cyclic tests indicating that the medium had high durability. In addition, the gasification of the deposited carbon in the water splitting step was promoted with the addition of Cu in the media.

• Journal of the Korean Magnetics Society
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• v.15 no.4
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• pp.231-235
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• 2005

We studied the microstructural evolution of ZrTM-Al (TM=Nb and Ti) alloy films, MR and electrical properties of the MTJ with $ZrTM-AlO_x$ barrier as a function of Zr/TM ratio. We observed that the ternary-oxide barrier reduced the TMR ratio due mainly to the structural defects such as the surface roughness. The change in TMR ratio and $V_h$ with Zr/TM ratio exactly corresponds to the systematic changes in the microstructural variation. Although the MTJ with ternary oxide reduced the TMR and the electrical stabilities, the junction resistances decreased as the Ti and Nb concentration increased due to the band-gap reduction caused by the formation of extra bands