• Title/Summary/Keyword: ZnO Grain

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Effect of deposition method of source/drain electrode on a top gate ZnO TFT Performance

  • Kopark, Sang-Hee;Hwang, Chi-Sun;Yang, Shin-Hyuk;Yun, Young-Sun;Park, Byung-Chang
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.254-257
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    • 2008
  • We have investigated the effect of source/drain electrode deposition method on a performance of top gate structured ZnO TFT performance. TFT using S/D of ITO film, consisted of bi-layer which deposited by ion beam assisted sputtering at the initial stage then deposited by DC magnetron sputtering, showed better performance compared to that using S/D of ITO deposited by just DC magnetron sputtering. Two ITO films exhibited different grain shapes and these resulted in different etching properties. We also suspect that charge trapping on the glass substrate (back channel) during the ITO film deposition may influence the characteristics of top gate structured ZnO TFT.

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The simulation of electrical characteristic and the microstructure of ZnO varistor with Voronoi network (보로노이 네트워크를 이용한 ZnO 바리스터의 미세구조와 전기적 전도특성의 시뮬레이션 연구)

  • Hwang, Hui-Dong;Han, Se-Won;Kang, Hyung-Boo
    • Proceedings of the KIEE Conference
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    • 1997.07d
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    • pp.1405-1407
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    • 1997
  • A microstructure of realistic ZnO varistor is constructed by Voronoi network and studied via computer simulation. In this network, the grain boundary condition is fitted from the experimental data. The effect of the variation of the uniformity of the varistor on the electrical characteristic of the varistor is simulated by using this boundary condition.

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5.1: Control of Electrical Characteristics of Solution Processed TFTs Depending on InGaZnO Composition Variation

  • Kim, Gun-Hee;Jeong, Woong-Hee;Ahn, Byung-Du;Shin, Hyun-Soo;Kim, Hyun-Jae
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.524-526
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    • 2009
  • The effects of In and Ga contents on characteristics of InGaZnO (IGZO) films grown by a sol-gel method and their thin film transistors (TFTs) have been investigated. Excess In incorporation into IGZO enhances the field effect mobilities of the TFTs due to the increase in conducting path ways, and decreases the grain size and the surface roughness of the films because more $InO_2^-$ ions induce cubic stacking faults with IGZO. Ga incorporation into results in decrease in carrier concentration of films and off-current of TFTs since Ga ion forms stronger chemical bonds with oxygen than Zn and In ions, acting as a carrier killer.

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C-axis orientation of ZnO thin films on sputtering conditions (증착 조건 변화에 따른 ZnO 박막의 c-축 배향성)

  • 성하윤;금민종;손인환;박용욱;전영하;박용서;김경환
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.901-904
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    • 2000
  • In order to investigate the effect of deposition conditions on crystallographic properties of ZnO thin films by Facing Targets Sputtering system which can deposit thin films in plasma-free situation and change the deposition conditions in wide range. The characteristics of zinc oxide thin films on power, inter targets distance, and substrate temperature were investigated by XRD(x-ray diffractometer), alpha-step (Tencor) analyses. The excellently c-axis oriented zinc oxide thin films were obtained at sputter pressure 1mTorr, sputtering current 0.4A, substrate temperature 300$^{\circ}C$, inter target distance 100mm. In these conditions, the rocking curve of zinc oxide thin films deposited on Glass was 3.9$^{\circ}$.

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스퍼터링 방법으로 성장시킨 ZnO 박막의 결정질 향상을 위한 고온성장

  • Kim, Yeong-Lee;An, Cheol-Hyeon;Gang, Si-U;Kim, Dong-Chan;Gong, Bo-Hyeon;Han, Won-Seok;Jeon, Sang-Uk;Jo, Hyeong-Gyun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2007.04a
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    • pp.163-164
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    • 2007
  • ZnO 박막의 결정질을 향상시키기 위해 고온에서 RF 마그네트론 스퍼터링 방법으로 성장시켰다. 성장온도가 증가 할수록 박막의 결정질이 향상 되는 것을 TEM과 XRD 결과로 확인할 수 있었다. 또한 성장온도가 증가 할수록 박막의 표면 형상이 three-dimensional islands 구조를 가지며, grain size와 표면 거칠기가 증가 하는 것을 관찰 할 수 있었다. 위의 실험 결과로 우리는 RF 스퍼터링 방법으로 고온성장하여 ZnO 박막의 결정질을 향상시켰다.

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Terbia Addition Effects on Accelerated aging Characteristics of (Pr, Co, Cr)-doped ZnO Varistors ((Pr, Co, Cr)-doped ZnO 바리스터의 가속열화특성에 테르비아 첨가효과)

  • Nahm, Choon-Woo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.6
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    • pp.508-513
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    • 2007
  • The electrical properties and stability of $ZnO-Pr_6O_{11}-CoO-Cr_2O_3-based$ varistors were investigated for different $Tb_4O_{11}$ amounts in the range of $0{\sim}1.0\;mol%$. As the $Tb_4O_{11}$ amount increased, the sintered density increased in the range of $99.1{\sim}101.1%$ of theoretical density and the average grain size decreased in the range of $7.7{\sim}4.8{\mu}m$. The varistor voltage increased in the range of $280.9{\sim}715.8V/mm$ and the nonlinear coefficient increased in the range of $26.4{\sim}44.4$ with the increased of $Tb_4O_{11}$ amount. The 0.25 mol% $Tb_4O_{11}$-doped varistors exhibited the high electrical stability, with -0.1% in variation rate of varistor voltage, -0.7% in variation rate of nonlinear coefficient, and +17.4% in variation rate of leakage current for specified dc accelerated aging stress of $0.95V_{1mA}/150^{\circ}C/24h$.

Microstructure, Electrical Properties, and Accelerated Aging Behavior of Er-Added ZPCC-YE Varistors

  • Nahm, Choon-Woo;Park, Jong-Hyuk
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.5
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    • pp.216-221
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    • 2010
  • The microstructure, electrical properties, and DC-accelerated aging behavior of the Zn-Pr-Co-Cr-Y-Er (ZPCC-YE) varistors were investigated for different amounts of erbium oxide ($Er_2O_3$). The microstructure consisted of zinc oxide grain and an intergranular layer ($Pr_6O_{11}$, $Y_2O_3$, and $Er_2O_3$-rich phase) as a secondary phase. The increase of $Er_2O_3$ amount decreased the average grain size and increased the sintered density. As the $Er_2O_3$ amount increased, the breakdown field increased from 5094 V/cm to 6966 V/cm and the nonlinear coefficient increased from 27.8 to 45.1. The ZPCC-YE varistors added with 0.5 to 1.0 mol% $Er_2O_3$ are appropriate for high voltage, with high nonlinearity and stability against DC-accelerated aging stress.

Electrical Properties of PCCYA-doped ZnO-based Varistors

  • Nahm, Choon-Woo
    • Transactions on Electrical and Electronic Materials
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    • v.9 no.3
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    • pp.96-100
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    • 2008
  • The microstructure, voltage-current, and capacitance-voltage relations ofP CCYA doped ZnO-based varistors were investigated for different amounts of $Al_2O_3$. As the $Al_2O_3$ amount increased, the average grain size (d) increased from d=4.3 to $d=5.5{\mu}m$ and the sintered density $({\rho})$ increased from ${\rho}=5.63$ to ${\rho}=5.67g/cm^3$. As the $Al_2O_3$ amount increased, the breakdown voltage $(V_B)$ increased from $V_B=633$ to $V_B=71$ V/mm and the non-ohmic coefficient $({\alpha})$ increased from ${\alpha}=47$ to ${\alpha}=4$. $Al_2O_3$ served as a donor due to the donor density $(N_d)$, which increases in the range of $N_d=0.77-1.85{\times}10^{18}/cm^3$ with increasing amount of $Al_2O_3$.

Effects of the Substrate Temperature on the Properties of Ni-Zn-Cu Ferrite Thin Films Deposited by RF Magnetron Sputtering (RF Magnetron Sputtering에 의해 증착된 Ni-Zn-Cu Ferrite 박막의 물성에 미치는 기판온도의 영향)

  • 공선식;조해석;김형준;김경용
    • Journal of the Korean Ceramic Society
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    • v.29 no.5
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    • pp.383-390
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    • 1992
  • We investigated the effect of substrate on the properties of the Ni-Zn-Cu ferrite thin films deposited on SiO2 (1000∼3000${\AA}$) / Si (100) substrate at various conditions by rf magnetron sputtering. A disktype Ni-Zn-Cu ferrite sintered by conventional ceramic process and argon gas were used as a target and a sputtering gas, repectively. The compositions of the thin films measured by EPMA were similar to target composition (Fe: 65.8 at%, Ni: 12.7 at%, Cu: 6.7 at%, Zn: 14.8 at%) irrespective of substrate temperature. Amorphous thin films were deposited when substrate was not intentionally heated, but the films came to crystallize with increasing substrate temperature, and crystalline thin films were deposited at substrate temperature above 200$^{\circ}C$. Below 250$^{\circ}C$ saturation magnetization (Ms), remanence (Mr) and coercivity (Hc) of the ferrite thin film increased with the substrate temperature due to the increase of grain size and the improvement of crystallinity. And above 250$^{\circ}C$, Ms, Mr increased slightly, but Hc of the amorphous thin films increased due to crystallization, whereas that of the crystalline thin films decreased because of grain growth and stress release.

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Influence of Sintering Temperature on Magnetic Properties of Ni-Zn-Cu Ferrites Used for Mangetic Shielding in NFC (NFC의 자기차폐용 Ni-Zn-Cu 페라이트의 자기특성에 미치는 소결온도의 영향)

  • Ryu, Yo-Han;Kim, Sung-Soo
    • Journal of Powder Materials
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    • v.23 no.2
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    • pp.132-135
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    • 2016
  • This study investigates the influence of sintering temperature on the magnetic properties and frequency dispersion of the complex permeability of Ni-Zn-Cu ferrites used for magnetic shielding in near-field communication (NFC) systems. Sintered specimens of $(Ni_{0.7}Zn_{0.3})_{0.96}Cu_{0.04}Fe_2O_4$ are prepared by conventional ceramic processing. The complex permeability is measured by an RF impedance analyzer in the range of 1 MHz to 1.8 GHz. The real and imaginary parts of the complex permeability depend sensitively on the sintering temperature, which is closely related to the microstructure, including grain size and pore distribution. In particular, internal pores within grains produced by rapid grain growth decrease the permeability and increase the magnetic loss at the operating frequency of NFC (13.56 MHz). At the optimized sintering temperature ($1225-1250^{\circ}C$), the highest permeability and lowest magnetic loss can be obtained.