• Transactions on Electrical and Electronic Materials
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• 제10권3호
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• pp.89-92
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• 2009

High-quality Al-N doped p-type ZnO thin films were deposited on Si and buffer layer/Si by DC magnetron sputtering in a mixture of $N_2$ and $O_2$ gas. The target was ceramic ZnO mixed with $Al_2O_3$ (2 wt%). The p-type ZnO thin films showed a carrier concentration in the range of $1.5{\times}10^{15}{\sim}2.93{\times}10^{17}\;cm^{-3}$, resistivity in the range of 131.2${\sim}$2.864 ${\Omega}cm$, mobility in the range of 3.99${\sim}$31.6 $cm^2V^{-1}s^{-l}$, respectively. It was easier to dope p-type ZnO films on Si substrates than on buffer layer/Si. The film grown on Si showed the highest quality of photoluminescence (PL) characteristics. The Al donor energy level depth $(E_d)$ of Al-N codoped ZnO films was reduced to about 50 meV, and the N acceptor energy level depth $(E_a)$ was reduced to 63 meV.

• Journal of Welding and Joining
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• 제18권3호
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• pp.51-59
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• 2000

Sink roll has been used in molten 55%Al-Zn alloy bath of continuous galvanizing line for sinking and stabilizing working steel strip in molten metal bath. In the process, the sink roll body inevitably build up dross compounds and pitting on the sink roll surface during 55%Al-Zn alloy coated strip production, and the life time of the sink roll is shorten by build up dross compounds and pitting. The present study examined the application of thermally sprayed ceramic coatings method on sink roll body for improving erosion resistance at molten 55% Al-Zn pool. In this experiment, the stainless steels such as STS 316L and STS 430F were used as the substrate materials. The CoNiCr and WE-Co powder were selected as bond coating materials. Moreover $Al_2O_3-ZrO_2-SiO_2 and ZrO_2-SiO_2$ powders selected as the top coating materials. Appearances of the specimens before and after dipping to molten 55%Al-Zn pool were compared and analyzed. As a result of this study, STS430F of substrate, WC-Co of bond spray coatings, $ZrO_2-SiO_2$ power of top spray coatings is the best quality in erosion resistance test at molten 55%Al-Zn pool

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.118-118
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• 2011

The Nano-Floating Gate Memory(NFGM) devices with ZnO:Cu thin film embedded in Al2O3 and AlOx-SAOL were fabricated and the electrical characteristics were evaluated. To further improve the scaling and to increase the program/erase speed, the high-k dielectric with a large barrier height such as Al2O3 can also act alternatively as a blocking layer for high-speed flash memory device application. The Al2O3 layer and AlOx-SAOL were deposited by MLD system and ZnO:Cu films were deposited by ALD system. The tunneling layer which is consisted of AlOx-SAOL were sequentially deposited at $100^{\circ}C$. The floating gate is consisted of ZnO films, which are doped with copper. The floating gate of ZnO:Cu films was used for charge trap. The same as tunneling layer, floating gate were sequentially deposited at $100^{\circ}C$. By using ALD process, we could control the proportion of Cu doping in charge trap layer and observe the memory characteristic of Cu doping ratio. Also, we could control and observe the memory property which is followed by tunneling layer thickness. The thickness of ZnO:Cu films was measured by Transmission Electron Microscopy. XPS analysis was performed to determine the composition of the ZnO:Cu film deposited by ALD process. A significant threshold voltage shift of fabricated floating gate memory devices was obtained due to the charging effects of ZnO:Cu films and the memory windows was about 13V. The feasibility of ZnO:Cu films deposited between Al2O3 and AlOx-SAOL for NFGM device application was also showed. We applied our ZnO:Cu memory to thin film transistor and evaluate the electrical property. The structure of our memory thin film transistor is consisted of all organic-inorganic hybrid structure. Then, we expect that our film could be applied to high-performance flexible device.----못찾겠음......

• The Korean Journal of Ceramics
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• 제7권2호
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• pp.85-92
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• 2001

Thin films of ZnO and Al doped ZnO were prepared by rf magnetron sputter techniques. When the oxygen fraction in Ar-O$_2$ sputter gas was about 2.0%, the films exhibited the composition of Zn:O=1.05:1. The films prepared at 250 W contain larger grains than the films grown at 100 W. However, high deposition rate seems to deteriorates the crystallinity as well as Al-substitution, resulting in lower concentration of mobile electrons. The Al-doped ZnO films which were deposited at $500^{\circ}C$ show resistance of 1$\times$10$^-2$ Wcm; optical band gap of the films ranges from 3.25 to 3.40 eV. These electrical and optical features are related with microstructural as well as crystalline characteristics of the films.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.324-324
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• 2007

Influence of $La_2O_3$ addition to $ZnO-B_2O_3$-based glass on the water leaching resistance of the glass was first investigated. The optimized $La_2O_3-ZnO-B_2O_3$ (LZB) glass was ball milled for varying time, followed by mixing with $Al_2O_3$ crystalline phase to form $Al_2O_3$-LZB glass composites at $875^{\circ}C$ for lh. Microwave dielectric properties of the composites were investigated as a function of the ball milling time of the LZB glass. Dielectric constant and quality factor of the composites were 6.01 and 11676 GHz, respectively, when the LZB glass was ball milled for 2h prior to mixing with $Al_2O_3$.

• 한국세라믹학회지
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• 제39권7호
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• pp.649-656
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• 2002

Zn(NO$_3$)$_2$ 수용액과 urea[CO(NH$_2$)$_2$]를 이용한 침전법과 Self-Assembled Monolayers(SAMs)를 이용한 microcontact printing 방법으로 미세 패턴화된 ZnO 박막을 Al/si0$_2$/si 기판 위에 제조하였다. Zn(NO$_3$)$_2$와 urea를 혼합하여 제조한 Zn(OH)$_2$ 박막은 침전온도와 urea 량이 증가할수록 Zn(OH)$_2$의 침전량이 증가하였고 Zn(NO$_3$)$_2$와 urea의 반응 시간이 증가함에 따라, Zn(OH)$_2$ 박막의 두께와 입자 크기가 증가하였다. Zn(NO$_3$)$_2$와 urea의 혼합비를 1 : 8, 용액의 침전 온도를 오일 bath내에서 8$0^{\circ}C$, 반응시간을 1시간으로 하여 Al/SiO$_2$/Si 기판 위에 침전된 Zn(OH)$_2$ 박막을 $600^{\circ}C$에서 1시간 동안 열처리하여, 미세 패턴을 형성하기 위한 균질한 크기의 ZnO 박막을 제조할 수 있었다. Microcontact printing방법으로 소수성과 친수성 SAMs인 Octadecylphosphonic Acid(OPA)와 2-Carboxyethylphosphonic Acid(CPA)를 각각 Al/SiO$_2$/Si 기판 위에 선택적으로 흡착한 후에 친수성 SAM인 CPA위에 Zn(OH)$_2$를 침전시켜 미세 패턴화된 ZnO 박막을 제조할 수 있었다

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.326-326
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• 2007

Influence of $Nd_2O_3$ addition to $ZnO-B_2O_3$-based glass on the water leaching resistance of the glass was first investigated. The optimized $Nd_2O_3-ZnO-B_2O_3$ (NZB) glass was ball milled for varying time, mixing with followed by $Al_2O_3$ crystalline phase to form $Al_2O_3$-NZB glass composites at $875^{\circ}C$ for 1h. Microwave dielectric properties of the composites were investigated as a function of the ball milling time of the NZB glass. Dielectric constant and quality factor were 5.70 and 9497 GHz, respectively, when the NZB glass was ball milled for 6h prior to mixing with $Al_2O_3$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 추계학술대회 논문집 전기물성,응용부문
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• pp.79-81
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• 2002

ZnO 나노와이어는 ZnO 파우더를 볼밀 처리하여 열증착 방법으로 $1380^{\circ}C$에서 촉매없이 Si 기판위에서 합성되었다. 합성된 ZnO 나노와이어의 길이와 직경은 $20{\sim}30{\mu}m$와 $50{\sim}200$ nm 였다. ZnO 나노와이어 표면을 atomic layer deposition(ALD) 방법으로 $Al_2O_3$ 박막을 얇게 코팅하였다. 성장온도는 $300^{\circ}C$였고, 사용한 전구체는 Trimethlaluminum(TMA)와 distilled water($H_2O$) 이다. Transmission electron microscopy(TEM) 으로 측정한 $Al_2O_3$ 박막의 두께는 40 nm 로서 매우 균일하게 ZnO 나노와이어에 증착되었음을 알 수 있었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1096_1097
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• 2009

Aluminium doped zinc oxide(ZnO:Al) thin film, which is mainly used as a transparent conducting electrode in electronic devices, has many advantages compared with conventional indium tin oxide(ITO). In this paper in order to investigate the possible application of ZnO:Al thin films as a transparent conducting electrode for flexible film-typed dye sensitized solar cell (FT-DSCs), ZnO:Al and ITO thin films were prepared on the polyethylene terephthalate (PET) substrate by r. f. magnetron sputtering method. Specially one-inched FT-DSCs using either a ZnO:Al or ITO electrode were also fabricated separately under the same manufacturing conditions. Some properties of both the FT-DSCs with ZnO:Al and ITO transparent electrodes, such as conversion efficiency, fill factor, and photocurrent were measured and compared with each other. The results showed that by doping the ZnO target with 2 wt% of $Al_2O_3$, the film deposited at discharge power of 200W resulted in the minimum resistivity of $2.2\times10^{-3}\Omega/cm$ and at ransmittance of 91.7%, which are comparable with those of commercially available ITO. Two types of FT-DSCs showed nearly the same tendency of I-V characteristics and the same value of conversion efficiencies. Efficiency of FT-DSCs using ZnO:Al electrode was around 2.6% and that of fabricated FT-DSCs using ITO was 2.5%. This means that ZnO:Al thin film can be used in FT-DSCs as a transparent conducting layer.

• 한국전기전자재료학회논문지
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• 제22권3호
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• pp.277-283
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• 2009

In this paper, aluminum doped zinc oxide (ZnO:Al) thin films on plastic substrate such as poly carbonate (PC), polyethylene terephthalate (PET) were prepared by RF magnetron sputtering method for flexible solar cell applications. Effects of the sputter pressure on the structural, electrical and optical properties were investigated. The crystallinity and the degree of the (002) orientation were deteriorated with increasing the sputter pressure. When the sputter pressure was higher, the conductivity of ZnO:Al films was improved because of the high carrier concentration and the Hall mobility. High quality ZnO:Al films with resistivity as low as $1.9{\times}10^{-3}{\Omega}-cm$ and the optical transmittance over 80 % in the visible region have been obtained on PC substrate at 2 mTorr.