• 제목/요약/키워드: YAG-Laser

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고성능 투명박막트랜지스터 Source/Drain용 AZO박막 특성연구

  • 박온전;노지형;박재호;신주홍;조슬기;여인형;문병무
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.357-357
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    • 2012
  • 박막트랜지스터의 전극으로 Au, Ag, Mo, ITO와 같은 물질들이 이미 많이 연구되어 왔으며, 투명 Source/Drain 전극을 활용한 물질로는 ITO에 초점이 맞춰져 왔다. 하지만 ITO의 높은 가격과 Indium의 인체 유해한 독성 때문에 ITO를 대체하는 물질에 대해 많은 연구가 진행되고 있다. 그 중 Al이 도핑된 ZnO (AZO) 는 가시광 영역에서 85% 이상의 높은 투과율과 높은 전도성, 낮은 비저항으로 다양한 광전소자의 전극과 윈도우 물질로 많은 응용 가능성을 보여주고 있다. 본 실험에서는 고 품질의 박막성장이 가능하고, 박막의 두께를 세밀하게 조절할 수 있는 Pulsed Laser Deposition (PLD) 을 이용하여 온도변화에 따라 AZO 박막을 성장시키고 구조적, 전기적, 광학적 특성을 조사하였다. 또한 온도변화가 AZO 박막 특성에 미치는 영향을 분석하여 Source/Drain 전극으로 사용하기 위한 조건을 최적화하였고, 실제 투명박막트랜지스터 제작을 통해 소자의 I-V Curve 와 Transfer 특성을 확인하고, Transfer Length Method 방법을 이용하여 투명박막트랜지스터의 접촉저항, 채널 비저항 등을 확인해 보았다. 소결된 타겟으로는 99.99%의 순도를 갖는 ZnO-$Al_2O_3$ (98:2 wt%) 타겟을 이용하였으며, 장비조건으로는 355 nm의 파장대역을 갖는 Nd:YAG 레이저를 사용하였고, 실험변수로는 온도범위 RT, $200^{\circ}C$, $400^{\circ}C$, $600^{\circ}C$에서 실험을 진행하였다. AZO 박막의 구조적, 전기적 특성을 분석하기 위해 각각 X-Ray Diffraction (XRD), Hall measurement 장비를 사용하였으며, 광학적 특성을 분석하기 위한 투과도의 측정은 UV-Visible spectrophotometer 장비를 사용하였다.

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Study of Nano-scale Fullerene (C60) Clusters Formed in Micro-sized Droplet by UV Irradiation

  • Yeo, Seung-Jun;Ahn, Jeung-Sun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.571-571
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    • 2012
  • We discovered the formation of C60 aggregates in solution by means of photoluminescence spectroscopic study on C60 in solutions. From the in-depth investigation of temperature dependence of the luminescence of C60 in toluene, benzene and CS2 solutions, we reported that the C60 aggregates are formed during cooling at the freezing temperature of these solvents. Furthermore, the C60 aggregates can be changed to stable structures by irradiating with UV pulse-laser (Nd:YAG laser, 355nm). As a consequence, we could obtain nano-scale photo-polymerized C60 clusters, which appear as round-shaped nano- scale particles in high resolution transmission electron-microscopy (HRTEM) images. However, the yield of the nano-scale C60 clusters obtained by this method is too small. So we designed and developed a system to obtain C60 cluster of macroscopic quantity by using ultrasonic nebulizer. In this system, C60 solution was vaporized to several micro-sized droplets in vacuum, resulting in the formation of C60 aggregates by evaporating solvent (toluene). The system was invented to produce nano-scale carbon clusters by the irradiation of UV light upon C60 aggregates in vacuum. We have characterized the products, C60 cluster, obtained from the system by using UV absorption spectra and HPLC spectra. Although the products have a possibility of inclusion various forms of C60 cluster, results support that the product formed from the system by using vaporizer method establishes a new method to obtain C60 cluster in macroscopic quantity. In the presentation, the details of the system and the results of characterization are reported.

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How will surface treatments affect the translucency of porcelain laminate veneers?

  • Turgut, Sedanur;Bagis, Bora;Ayaz, Elif Aydogan;Korkmaz, Fatih Mehmet;Ulusoy, Kivanc Utku;Bagis, Yildirim Hakan
    • The Journal of Advanced Prosthodontics
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    • 제6권1호
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    • pp.8-13
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    • 2014
  • PURPOSE. The purpose of this study was to evaluate whether surface treatments affect the translucency of laminate veneers with different shades and thicknesses. MATERIALS AND METHODS. A total of 224 disc-shaped ceramic veneers were prepared from A1, A3, HT (High Translucent) and HO (High Opaque) shades of IPS e.max Press (Ivoclar Vivadent) with 0.5 mm and 1.0 mm thicknesses. The ceramics were divided into four groups for surface treatments. Group C: no surface treatments; Group HF: etched with hydrofluoric acid; Group SB: sandblasted with 50-${\mu}m$ $Al_2O_3$; and Group L; irradiated with an Er;YAG laser. A translucent shade of resin cement (Rely X Veneer, 3M ESPE) was chosen for cementation. The color values of the veneers were measured with a colorimeter and translucency parameter (TP) values were calculated. A three-way ANOVA with interactions for TP values was performed and Bonferroni tests were used when appropriate (${\alpha}=0.05$). RESULTS. There were significant interactions between the surface treatments, ceramic shades and thicknesses (P=.001). For the 0.5-mm-thick specimens there were significant differences after the SB and L treatments. There was no significant difference between the HF and C treatments for any shades or thicknesses (P>.05). For the 1-mm-thick ceramics, there was only a significant difference between the L and C treatments for the HT shade ceramics (P=.01). There were also significant differences between the SB and C treatments except not for the HO shades (P=.768). CONCLUSION. The SB and L treatments caused laminate veneers to become more opaque; however, HF treatment did not affect the TP values. When the laminate veneers were thinner, both the shade of the ceramic and the SB and laser treatments had a greater effect on the TP values.

Development of High Spectral Resolution Lidar System for Measuring Aerosol and Cloud

  • Zhao, Ming;Xie, Chen-Bo;Zhong, Zhi-Qing;Wang, Bang-Xin;Wang, Zhen-Zhu;Dai, Pang-Da;Shang, Zhen;Tan, Min;Liu, Dong;Wang, Ying-Jian
    • Journal of the Optical Society of Korea
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    • 제19권6호
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    • pp.695-699
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    • 2015
  • A high spectral resolution lidar (HSRL) system based on injection-seeded Nd:YAG laser and iodine absorption filter has been developed for the quantitative measurement of aerosol and cloud. The laser frequency is stabilized at 80 MHz by a frequency locking system and the absorption line of iodine cell is selected at the 1111 line with 2 GHz width. The observations show that the HSRL can provide vertical profiles of particle extinction coefficient, backscattering coefficient and lidar ratio for cloud and aerosol up to 12 km altitude, simultaneously. For the measured cases, the lidar ratios are 10~20 sr for cloud, 28~37 sr for dust, and 58~70 sr for urban pollution aerosol. It reveals the potential of HSRL to distinguish the type of aerosol and cloud. Time series measurements are given and demonstrate that the HSRL has ability to continuously observe the aerosol and cloud for day and night.

기판에 따른 p-type $CuCrO_2$ 박막의 성장방향변화 (Orientation control of $CuCrO_2$ films on different substrate by PLD)

  • Kim, Se-Yun;Sung, Sang-Yun;Jo, Kwang-Min;Hong, Hyo-Ki;Lee, Joon-Hyung;Kim, Jeong-Joo;Heo, Young-Woo
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
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    • pp.142-142
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    • 2011
  • Epitaxial $CuCrO_2$ thin films have been grown on single crystal substrate of c-plane $Al_2O_3$, $SrTiO_3$, YSZ and Quarts by laser ablation of a $CuCrO_2$ target using 266nm radiation from a Nd:YAG laser. X-ray measurements indicate that the $CuCrO_2$ grows epitaxially on all substrate, with its orientation dependent on the kinds of substrates. Most of the layer were polycrystalline with (001), (015) and random as the dominant surface orientation on c-plane YSZ, $SrTiO_3$ and quarts substrate, respectively. (001) orientated $CuCrO_2$ grows on C-plane $Al_2O_3$ and YSZ substrate, (015) orientated $CuCrO_2$ films are found on c-plane $SrTiO_3$ substrate and random orientated $CuCrO_2$ films grows on quarts substrate. These data are compared with the in-plane orientation and the mismatch of the $CuCrO_2$ and each substrate lattices in an attempt to relate the preferred orientation to the plane of the sapphire on which it is grown. Further characterization show that the grain size of the films increases for a substrate temperature increase, whereas the electrical properties of $CuCrO_2$ thin films depend upon their crystalline orientation.

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Qualitative Analysis and Plasma Characteristics of Soil from a Desert Area using LIBS Technique

  • Farooq, W. Aslam;Tawfik, Walid;Al-Mutairi, Fahad N.;Alahmed, Zeyad A.
    • Journal of the Optical Society of Korea
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    • 제17권6호
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    • pp.548-558
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    • 2013
  • In this work, laser induced breakdown spectroscopy (LIBS) is used to investigate soil samples collected from different desert areas of Riyadh city in Saudi Arabia. Both qualitative analysis and plasma parameters are studied via the observed LIBS spectra. These experiments have been done using a Spectrolaser-7000 system with 50 mJ fundamental wavelength of Nd:YAG laser and detection delay time of 1 microsecond. Many spectral lines are highly resolved for many elements like Al, Fe, Mg, Si, Mn, Na, Ca and K. The electron temperatures Te and electron densities Ne, for the constituent of generated LIBS plasma, are determined for all the collected samples. It is found that both Te and Ne vary from one desert area to other. This variation is due to the change of the elemental concentration in different desert areas that affects the sample's matrices. Time dependent measurements have also been performed on the soil samples. While the signal-to-base ratio (SBR) reached its optimal value at 1 microsecond, the plasma parameters Ne and Te reach values of $4{\times}10^{17}cm^{-3}$ and 9235 K, respectively, at 2.5 microsecond. The later indicate that the plasma cooling processes are slow in comparison to the previously observed results for metallic samples. The observed results show also that in the future it is possible to enhance the exploitation of LIBS in the remote on-line environmental monitoring application, by following up only the values of Ne and Te for one element of the soil desert sample using an optical fiber probe.

Bio-hybrid dental implants prepared using stem cells with β-TCP-coated titanium and zirconia

  • Safi, Ihab Nabeel;Hussein, Basima Mohammed Ali;Al-Shammari, Ahmed Majeed
    • Journal of Periodontal and Implant Science
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    • 제52권3호
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    • pp.242-257
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    • 2022
  • Purpose: This study investigated periodontal ligament (PDL) restoration in osseointegrated implants using stem cells. Methods: Commercial pure titanium and zirconium oxide (zirconia) were coated with beta-tricalcium phosphate (β-TCP) using a long-pulse Nd:YAG laser (1,064 nm). Isolated bone marrow mesenchymal cells (BMMSCs) from rabbit tibia and femur, isolated PDL stem cells (PDLSCs) from the lower right incisor, and co-cultured BMMSCs and PDLSCs were tested for periostin markers using an immunofluorescent assay. Implants with 3D-engineered tissue were implanted into the lower right central incisors after extraction from rabbits. Forty implants (Ti or zirconia) were subdivided according to the duration of implantation (healing period: 45 or 90 days). Each subgroup (20 implants) was subdivided into 4 groups (without cells, PDLSC sheets, BMMSC sheets, and co-culture cell sheets). All groups underwent histological testing involving haematoxylin and eosin staining and immunohistochemistry, stereoscopic analysis to measure the PDL width, and field emission scanning electron microscopy (FESEM). The natural lower central incisors were used as controls. Results: The BMMSCs co-cultured with PDLSCs generated a well-formed PDL tissue that exhibited positive periostin expression. Histological analysis showed that the implantation of coated (Ti and zirconia) dental implants without a cell sheet resulted in a well-osseointegrated implant at both healing intervals, which was confirmed with FESEM analysis and negative periostin expression. The mesenchymal tissue structured from PDLSCs only or co-cultured (BMMSCs and PDLSCs) could form a natural periodontal tissue with no significant difference between Ti and zirconia implants, consequently forming a biohybrid dental implant. Green fluorescence for periostin was clearly detected around the biohybrid implants after 45 and 90 days. FESEM showed the invasion of PDL-like fibres perpendicular to the cementum of the bio-hybrid implants. Conclusions: β-TCP-coated (Ti and zirconia) implants generated periodontal tissue and formed biohybrid implants when mesenchymal-tissue-layered cell sheets were isolated from PDLSCs alone or co-cultured BMMSCs and PDLSCs.

Characterization of BST films for high tunable thin film capacitor

  • 노지형;송상우;김지홍;고중혁;문병무
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.179-179
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    • 2009
  • This is for the electrical characterization by IDC pattern using BST$(Ba_{0.5}Sr_{0.5}TiO_3)$ thin film. BST materials had been chosen for high frequency applications due to it's high permitivity and tunability. The BST thin films have been deposited on $Al_2O_3$ Substrates by Nd-YAG pulsed laser deposition with a 355nm wavelength at $700\;^{\circ}C$. The post deposition annealing at $750^{\circ}C$ in flowing $O_2$ atmosphere for 1 hours. The capacitance of IDC patterns have been measured from 1 to 10 GHz as a function of electric field ($\pm40$ KV/cm) at room temperature using inter-digital Au electrodes deposited on top of BST. The IDC patterns have three type of fingers number. For the 10 pairs finger was the best capacitance onto $Al_2O_3$ substrate. The capacitance was 0.9pF. Also Dielectric constant was been 351 at 100 mTorr and annealing temperature $750^{\circ}C$ for 1 hour. The loss tangent was been 0.00531.

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염료감응 태양전지에서 전면전극/FTO 사이에 완충층으로서의 PLD로 증착한 $TiO_2$ 박막에 관한 연구 (A Study on $TiO_2$ Thin Film by PLD for Buffer Layer between Front Electrode and FTO of Dye-sensitized Solar Cell)

  • 송상우;노지형;이경주;지민우;문병무
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.465-466
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    • 2009
  • Dye-sensitized Solar Cell (DSC) is a new type of solar cell by using photocatalytic properties of $TiO_2$. The electric potential distribution in DSCs has played a major role in the operation of such cells. $TiO_2$ thin films were deposited on the ITO substrate by Nd:YAG Pulsed Laser Deposition(PLD) at room temperature and post-deposition annealing at $500^{\circ}C$ in flowing $O_2$ atmosphere for 1hour. The structural properties of $TiO_2$ thin films have investigated by X-ray diffraction(XRD). We manufactured DSC unit cells then I-V and efficiency were tested by solar simulator.

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$Al_2O_3$ 세라믹의 미세구멍 가공시 가공조건과 보조가스가 미치는 영향 (The influence of processing condition and assistance gas in microhole machining of $Al_2O_3$ ceramics)

  • 이광길
    • 한국생산제조학회지
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    • 제8권5호
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    • pp.115-120
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    • 1999
  • This research is a described result of experimental for the parameter's effecting the microhole machining by Nd-Yag laser, The parameters are energy, pulse interval time a kin of assisting gas and its pressure. The result reveals that parameter value of energy 0.08J, pulse 20Hz, interval time of 300 microseconds could be a good machining condition to make upper microhoel that is the diameter range of 50-70${\mu}{\textrm}{m}$. At tat time the assistant gas such air, $O_2$, Ar $N_2$, was appelied. Assistant gas of air makes heat affected zone enlarge due to burning of material surface. Also it makes microhole irregular and damageable. Because of refusion caused by chemical reaction with $Al_2O_3$ ceramic material . The $O_2$(99.9%) has good characteristics to get good drilling and smooth surface on pressure of 0.2kgf/$\textrm{cm}^2$ but it is expensive. Ar, $N_2$ make material crack and burnning and proved that to be unappropriate but, Ar was a better than $N_2$.

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