Measurement of Effective Transverse Piezoelectric Coefficients $(e_{31,f})$ of Fabricated Thick PZT Films on $SiN_x/Si$ Substrates
($SiN_x/Si$ 기판에 제조된 후막 PZT의 횡 압전 계수 $(e_{31,f})$ 측정)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2004.07b
- /
- pp.965-968
- /
- 2004