• 제목/요약/키워드: X-ray spectroscopy

검색결과 3,314건 처리시간 0.028초

Polymerization of Tetraethoxysilane by Using Remote Argon/dinitrogen oxide Microwave Plasma

  • Chun, Tae-Il;Rossbach, Volker
    • 한국염색가공학회지
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    • 제21권3호
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    • pp.19-25
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    • 2009
  • Polymerization of tetraethoxysilane on a glass substrate was investigated by remote microwave plasma using argon with portions of nitrous oxide as carrier gas. Transparent layer like a thickness of 0.5 ${\mu}m$ 3 ${\mu}m$ were obtained, differing in chemical composition, depending on plasma power and treatment time as well as on ageing time. In general the milder the treatment and the shorter the ageing was, the higher was the content of organic structural elements in the layer. We have identified that the chemical structure of our samples composed of mainly Si O and Si C groups containing aliphatics, carbonyl groups. These results were obtained by X ray photon spectroscopy, Fourier transformed infrared spectroscopy, and scanning electron microscope combined with Energy dispersive X ray spectroscopy.

양이온 결손 La$_{0.970}$Mn$_{0.970}$O$_3$의 X-ray Photoemission Spectroscopy 관측 (X-ray Photoemission Spectroscopy Study of Cation-Deficient La$_{0.970}$Mn$_{0.970}$O$_3$ System)

  • 정우환
    • 한국세라믹학회지
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    • 제36권1호
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    • pp.50-54
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    • 1999
  • 양이온 결손 La0.970Mn0.970O3의 x-ray photoemission spectroscopy를 온도를 함수로 측정하였다. 온도의 변화에 따라서 Mn 2p와 3d core level의 화학적 변동 및 이동이 관측되었다. 즉 Mn 2p 3/2와 1/2 및 La 3d core 스펙트럼은 온도의 증가와 함께 저 결합 에너지 측으로 이동이 관측되었다. 이러한 XPS 관측 결과는 Mn3+의 localization의 강도 변화에 의한 것으로 사료되며, Mn3+에 의한 Jahn-Teller효과 이외에도 conventional random potential 효과 역시 La0.790Mn0.970O3의 전도 carrier의 localization에 기여하는 것으로 사료된다.

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Structural Investigation of Bistrifluron Using X-Ray Crystallography, NMR Spectroscopy, and Molecular Modeling

  • Moon, Joon-Kwan;Kim, Jeong-Han;Rhee, Sang-Kee;Kim, Gang-Beom;Yun, Ho-Seop;Chung, Bong-Jin;Lee, Sang-San;Lim, Yoong-Ho
    • Bulletin of the Korean Chemical Society
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    • 제23권11호
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    • pp.1545-1547
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    • 2002
  • A new insecticide, bistrifluron acts as an inhibitor of insect development and interferes with the cuticle formation of insects. Since it shows low acute oral and dermal toxicities, it can be one of potent insecticides. Based on X-ray crystallography, NMR spectroscopy and molecular modeling, the structural studies of bistrifluron have been carried out.

X선을 이용한 표면 및 계면의 전자구조 측정방법 소개 (The introduction of X-ray spectroscopy for surface and interface electronic structures)

  • 조상완
    • 진공이야기
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    • 제1권1호
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    • pp.17-20
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    • 2014
  • This article introduces the basic concepts of various soft X-ray spectroscopies in the study of surface and interface electronic structures. Especially, recent results of X-ray photoelectron spectroscopy experiments on organic/inorganic thin films and a lead-free solder alloys will be discussed. Soft X-ray spectroscopies to understand the chemical and electrical properties would be of broad interest in the vacuum science communities.

웨이블렛과 신경망을 이용한 플라즈마-유도 X-Ray Photoelectron Spectroscopy 고장 패턴의 인식 (Recognition of Plasma- Induced X-Ray Photoelectron Spectroscopy Fault Pattern Using Wavelet and Neural Network)

  • 김수연;김병환
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 심포지엄 논문집 정보 및 제어부문
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    • pp.135-137
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    • 2006
  • To improve device yield and throughput, faults in plasma processing equipment should be quickly and accurately diagnosed. Despite many useful information of ex-situ sensor measurements, their applications to recognize plasma faultshave not been investigated. In this study, a new technique to identify fault causes by recognizing X-ray photoelectron spectroscopy (XPS) using neural network and continuous wavelet transformation (CWT). The presented technique was evaluated with the plasma etch data. A totalof 17 experiments were conducted for model construction. Model performance was investigated from the perspectives of training error, testing error, and recognition accuracy with respect to various thresholds. CWT-based BPNN models demonstrated a higher prediction accuracy of about 26%. Their advantages over pure XPS-based models were conspicuous in all three measures at small networks.

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[C70]풀러렌 산화 반응의 거동에 관한 초음파 분광학적 고찰 (Monitoring Oxidation Behavior of [C70]Fullerene by Ultrasonic Spectroscopy)

  • 고원배
    • Elastomers and Composites
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    • 제49권2호
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    • pp.155-159
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    • 2014
  • 1,2-dichlorobenzene용액에서 [$C_{70}$]풀러렌과 3-chloroperoxy benzoic acid 산화반응의 거동을 고분해능 초음파 분광기를 사용하여 고찰하였다. UV-vis spectroscopy, X-ray diffraction을 가지고 [$C_{70}$]풀러렌 산화 반응의 생성물을 확인하였다.

웨이브릿과 X-ray 광전자 분광법을 이용한 반도체 플라즈마 공정 감시 기법 (Monitoring of semiconductor plasma process using wavelet and X-ray photoelectron spectroscopy)

  • 박경영;김병환
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 심포지엄 논문집 정보 및 제어부문
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    • pp.281-283
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    • 2005
  • Processing Plasmas are very sensitive to a variation in process parameters, To maintain process quality and device field, plasma malfunction should be tightly monitored with high sensitivity. A new monitoring method is presented and this was accomplished by applying discrete wavelet transformation to X-ray photoelectron spectroscopy. XPS data were collected during a plasma etching of silicon carbide. Various effects of DWT factor on fault sensitivity were optimized experimentally. Compared to raw data, total percent sensitivity for DWT data demonstrated a significantly improved sensitivity to plasma faults induced by bias power.

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수중의 철 제거 시 생기는 산화철의 결정구조에 관한 연구 (On the Crystalline Structures of Iron Oxides formed During Removal Process of Iron in Water)

  • 조봉연
    • 대한토목학회논문집
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    • 제26권1B호
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    • pp.107-111
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    • 2006
  • 2종류의 제철 반응조에 있어서, 각종의 반응조건 하에 생성한 산화철을 x-ray회절과 M$\ddot{o}$ssbauer spectroscopy실험으로 철산화 물질을 동정한 결과, 여재 표면에 부착한 철 산화물의 결정은 pH 조건에 관계없이 Ferrihydrite($Fe_5HO_8{\cdot}4H_2O$)이었으며, Batch(회분) 실험에서 생긴 철 산화 물질은 가수분해에 의해 생긴 것으로, Microcrystalline Goethite 이었다.

다이오드 레이저를 이용한 금속 표면 열처리 특성 (Characteristics of Metal Surface Heat Treatment by Diode Laser)

  • 최성대;정선환;김기만;양승철;김잠규
    • 한국기계가공학회지
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    • 제6권3호
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    • pp.16-23
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    • 2007
  • An experimental investigation with diode laser system was carried out to study the effect of surface heat treatment on the die materials(SM45C, SKD11, SK3). The surface heat treatment characteristics of the laser beam are evaluated using hardness tests, optical microscopy, X-ray diffraction and energy dispersive X-ray spectroscopy(EDS). Results indicated that the beam size, focal length, feed rates are changed surface hardened characteristics. SM45C is higher hardness than other materials and composed to martensite grain at hardened zone, whereas other materials(SKD11, SK3)are low hardness than expected and composed to austenite and allayed martensite at hardened zone. The intensive X-ray diffraction patterns of (110)-(200)-(211) is detected hardened surface and the hardened surface distributed plenty of carbon density than metal zone.

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고전압 방전 플라즈마에 의한 질화탄소 박막 증착 시 플라즈마 영역에 가한 레이저 애블레이션의 효과 (Effect of a Laser Ablation on High Voltage Discharge Plasma Area for Carbon Nitride Film Deposition)

  • 김종일
    • 한국전기전자재료학회논문지
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    • 제15권6호
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    • pp.551-557
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    • 2002
  • Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with the without the presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor plume plasma expending into th ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The nitrogen content of the films was found to increase drastically with an increase of nitrogen pressure. The surface morphology of the films was studied using a scanning electron microscopy. Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtained films.