• Title/Summary/Keyword: X-ray spectroscopy

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Polymerization of Tetraethoxysilane by Using Remote Argon/dinitrogen oxide Microwave Plasma

  • Chun, Tae-Il;Rossbach, Volker
    • Textile Coloration and Finishing
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    • v.21 no.3
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    • pp.19-25
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    • 2009
  • Polymerization of tetraethoxysilane on a glass substrate was investigated by remote microwave plasma using argon with portions of nitrous oxide as carrier gas. Transparent layer like a thickness of 0.5 ${\mu}m$ 3 ${\mu}m$ were obtained, differing in chemical composition, depending on plasma power and treatment time as well as on ageing time. In general the milder the treatment and the shorter the ageing was, the higher was the content of organic structural elements in the layer. We have identified that the chemical structure of our samples composed of mainly Si O and Si C groups containing aliphatics, carbonyl groups. These results were obtained by X ray photon spectroscopy, Fourier transformed infrared spectroscopy, and scanning electron microscope combined with Energy dispersive X ray spectroscopy.

X-ray Photoemission Spectroscopy Study of Cation-Deficient La$_{0.970}$Mn$_{0.970}$O$_3$ System (양이온 결손 La$_{0.970}$Mn$_{0.970}$O$_3$의 X-ray Photoemission Spectroscopy 관측)

  • 정우환
    • Journal of the Korean Ceramic Society
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    • v.36 no.1
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    • pp.50-54
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    • 1999
  • We have measured the x-ray photoemission spectroscopy of cation deficient La0.970Mn0.970O3 as a function of temperature. Detailed results on the chemical shifts and changes in Mn 2p and Lp 3d core levels due to variation of temperature have been obtained. The Mn 2p 3/2 and 1/2 main peaks and La 3d core spectrum shift to lower binding energy levels with increasing temperature. This XPS behavior is correlated with the strength of localization of Mn3+. The Jahn-Teller effect due to Mn3+ besides the conventional random potential effects is likely to localize charge carriers in La-.970Mn0.970O3.

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Structural Investigation of Bistrifluron Using X-Ray Crystallography, NMR Spectroscopy, and Molecular Modeling

  • Moon, Joon-Kwan;Kim, Jeong-Han;Rhee, Sang-Kee;Kim, Gang-Beom;Yun, Ho-Seop;Chung, Bong-Jin;Lee, Sang-San;Lim, Yoong-Ho
    • Bulletin of the Korean Chemical Society
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    • v.23 no.11
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    • pp.1545-1547
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    • 2002
  • A new insecticide, bistrifluron acts as an inhibitor of insect development and interferes with the cuticle formation of insects. Since it shows low acute oral and dermal toxicities, it can be one of potent insecticides. Based on X-ray crystallography, NMR spectroscopy and molecular modeling, the structural studies of bistrifluron have been carried out.

The introduction of X-ray spectroscopy for surface and interface electronic structures (X선을 이용한 표면 및 계면의 전자구조 측정방법 소개)

  • Cho, Sang Wan
    • Vacuum Magazine
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    • v.1 no.1
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    • pp.17-20
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    • 2014
  • This article introduces the basic concepts of various soft X-ray spectroscopies in the study of surface and interface electronic structures. Especially, recent results of X-ray photoelectron spectroscopy experiments on organic/inorganic thin films and a lead-free solder alloys will be discussed. Soft X-ray spectroscopies to understand the chemical and electrical properties would be of broad interest in the vacuum science communities.

Recognition of Plasma- Induced X-Ray Photoelectron Spectroscopy Fault Pattern Using Wavelet and Neural Network (웨이블렛과 신경망을 이용한 플라즈마-유도 X-Ray Photoelectron Spectroscopy 고장 패턴의 인식)

  • Kim, Soo-Youn;Kim, Byung-Whan
    • Proceedings of the KIEE Conference
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    • 2006.04a
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    • pp.135-137
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    • 2006
  • To improve device yield and throughput, faults in plasma processing equipment should be quickly and accurately diagnosed. Despite many useful information of ex-situ sensor measurements, their applications to recognize plasma faultshave not been investigated. In this study, a new technique to identify fault causes by recognizing X-ray photoelectron spectroscopy (XPS) using neural network and continuous wavelet transformation (CWT). The presented technique was evaluated with the plasma etch data. A totalof 17 experiments were conducted for model construction. Model performance was investigated from the perspectives of training error, testing error, and recognition accuracy with respect to various thresholds. CWT-based BPNN models demonstrated a higher prediction accuracy of about 26%. Their advantages over pure XPS-based models were conspicuous in all three measures at small networks.

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Monitoring Oxidation Behavior of [C70]Fullerene by Ultrasonic Spectroscopy ([C70]풀러렌 산화 반응의 거동에 관한 초음파 분광학적 고찰)

  • Ko, Weon Bae
    • Elastomers and Composites
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    • v.49 no.2
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    • pp.155-159
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    • 2014
  • High resolution ultrasonic spectroscopy was used to observe the oxidation of [$C_{70}$]fullerene with 3-chloroperoxy benzoic acid in 1,2-dichlorobenzene. UV-vis spectroscopy and X-ray diffraction confirmed the resulting roducts of [$C_{70}$]fullerene oxidation.

Monitoring of semiconductor plasma process using wavelet and X-ray photoelectron spectroscopy (웨이브릿과 X-ray 광전자 분광법을 이용한 반도체 플라즈마 공정 감시 기법)

  • Park, Kyoung-Young;Kim, Byung-Whan
    • Proceedings of the KIEE Conference
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    • 2005.05a
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    • pp.281-283
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    • 2005
  • Processing Plasmas are very sensitive to a variation in process parameters, To maintain process quality and device field, plasma malfunction should be tightly monitored with high sensitivity. A new monitoring method is presented and this was accomplished by applying discrete wavelet transformation to X-ray photoelectron spectroscopy. XPS data were collected during a plasma etching of silicon carbide. Various effects of DWT factor on fault sensitivity were optimized experimentally. Compared to raw data, total percent sensitivity for DWT data demonstrated a significantly improved sensitivity to plasma faults induced by bias power.

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On the Crystalline Structures of Iron Oxides formed During Removal Process of Iron in Water (수중의 철 제거 시 생기는 산화철의 결정구조에 관한 연구)

  • Cho, Bong-Yeon
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.26 no.1B
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    • pp.107-111
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    • 2006
  • The samples collected from two reactors are analyzed by X-ray diffraction and M$\ddot{o}$ssbauer spectroscopy in this study. It is concluded that the iron oxide crystal attached on anthracite media which possesses catalytic ability is identified to be Ferrihydrite, regardless of the value of pH from the analysis of the iron oxide. Iron oxide in Batch reactor is identified to be Microcrystalline goethite.

Characteristics of Metal Surface Heat Treatment by Diode Laser (다이오드 레이저를 이용한 금속 표면 열처리 특성)

  • Choi, Seong-Dae;Cheong, Seon-Hwan;Kim, Gi-Man;Yang, Seung-Cheol;Kim, Jam-Gyu
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.6 no.3
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    • pp.16-23
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    • 2007
  • An experimental investigation with diode laser system was carried out to study the effect of surface heat treatment on the die materials(SM45C, SKD11, SK3). The surface heat treatment characteristics of the laser beam are evaluated using hardness tests, optical microscopy, X-ray diffraction and energy dispersive X-ray spectroscopy(EDS). Results indicated that the beam size, focal length, feed rates are changed surface hardened characteristics. SM45C is higher hardness than other materials and composed to martensite grain at hardened zone, whereas other materials(SKD11, SK3)are low hardness than expected and composed to austenite and allayed martensite at hardened zone. The intensive X-ray diffraction patterns of (110)-(200)-(211) is detected hardened surface and the hardened surface distributed plenty of carbon density than metal zone.

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Effect of a Laser Ablation on High Voltage Discharge Plasma Area for Carbon Nitride Film Deposition (고전압 방전 플라즈마에 의한 질화탄소 박막 증착 시 플라즈마 영역에 가한 레이저 애블레이션의 효과)

  • 김종일
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.6
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    • pp.551-557
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    • 2002
  • Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with the without the presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor plume plasma expending into th ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The nitrogen content of the films was found to increase drastically with an increase of nitrogen pressure. The surface morphology of the films was studied using a scanning electron microscopy. Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtained films.