• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.110-110
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• 2009

최근 차세대 비휘발성 메모리(NVM) 기술은 메모리의 성능과 기존의 한계점을 효과적으로 극복하며 활발한 연구를 통해 비약적으로 발전하고 있으며 특히, phase-change random access memory (PRAM)은 ferroelectric random access memory (FeRAM)과 magneto-resistive random access memory (MRAM)과 같은 다른 NVM 소자와 비교하여 기존의 DRAM과 구조적으로 비슷하고 상용화가 빠르게 진행될 수 있을 것으로 예상되는 바, PRAM에 사용되는 상변화 물질의 식각을 수행하고 X-ray photoelectron spectroscopy (XPS)를 통해 표면의 열화현상을 관찰하였다.

• 한국세라믹학회지
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• 제37권9호
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• pp.900-908
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• 2000

일반적인 유리용융과 열처리법을 이용하여 많은 양의 금속구리 미립자가 분산된 Zinc Phosphate 유리를 제조하였다. 금속산화물로는 Cu$_2$O를, 환원제로는 SnO를 사용하였다. XRD와 전자회절로부터 열처리에 의해 금속구리의 결정상이 석출됨을 알 수 있었고, TEM에 의해 석출상의 크기는 수~20nm 정도임을 알 수 있었다. 또한 570nm에서의 광흡수 피크로부터도 금속구리의 석출을 확인할 수 있었다. 석출입자의 크기와 흡광은 석출을 위한 열처리 온도와 시간이 증가함에 따라 증가하였다. XPS 스펙트럼으로는 구리의 산화상태 중 Cu$^{2+}$ 이온의 상태만을 분명히 할 수 있었다. 매질유리의 BO/NBO의 비는 열처리 전후 크게 변화가 없었으며, 열처리 후 Cu$^{2+}$ 이온이 다소 감소되는 경향을 보였다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1999년도 추계학술발표강연 및 논문개요집
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• pp.139-139
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• 1999

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2008년도 추계종합학술대회 B
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• pp.95-99
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• 2008

반도체 소자의 소형화에 따라 낮은 비저항을 가진 구리가 ULSI의 금속배선으로 사용되고 있다. 구리선의 비저항은 RC delay와 집적회로의 신호전달에 영향을 미치게 된다. 본 논문에서는 전기도금 된 구리박막의 비저항에 대해 전해액이 미치는 영향을 조사하였다. 4탐침 표면저항측정기로 비저항을 평가하였고, XRD (X-ray Diffraction), AFM (Atomic Force Microscope), FE-SEM (Field Emission Scanning Electron Microscope), XPS (X-ray Photoelectron Spectroscopy)로 박막의 특성을 조사하였다. 실험한 결과, 전해액의 조건이 전기도금으로 증착된 낮은 비저항을 갖는 구리박막의 형성에 있어 중요한 역할을 하는 것을 확인하였다.

• 청정기술
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• 제20권1호
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• pp.28-34
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• 2014

본 연구에서는 나노 크기의 결정 구조를 가진 타이타니아 담체를 용매열합성법(solvothermal method)을 활용하여 합성한 후 팔라듐과 구리를 담지한 촉매를 제조하였다. 제조된 촉매를 수중 질산성 질소 저감 반응에 적용한 결과, 타이타니아 담체의 결정 크기가 반응 활성에 영향을 미치는 것이 확인되었다. 결정 크기가 작은 담체를 활용한 촉매가 더 빠른 속도로 질산성 질소를 저감하였지만, 반응 중 pH가 높게 형성되어 질소 선택도가 매우 낮은 현상을 보였다. 이를 해결하기 위해 pH 완충제인 이산화탄소를 공급하여 질소 선택도를 약 60% 증가시켰다. 상기에 언급한 촉매를 대상으로 질소 흡-탈착, X-ray diffraction (XRD), $H_2$-temperature programmed reduction (TPR), X-ray photoelectron spectroscopy (XPS) 등의 다양한 특성화 분석을 수행하여 촉매의 반응활성과 물성간의 상관관계에 대해 조사하였다.

• 한국전기전자재료학회논문지
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• 제13권7호
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• pp.563-567
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• 2000

We presented the etch results of indium-tin oxide thin films by using SF$_{6}$/O$_2$gas electron cyclotron resonance plasma and conducted X-ray phtoelectron spectroscopy and quadrupole mass spectrometer analyses for the etch characteristics. The etch rate of the films was greatly dependent on that of oxygen which was the major constituent element of the films. The oxygen was removed by the forms like $O_2$or SOF$_2$. We examined the ratio of atomic content of O and In and the change of this ratio was related to the removal rate of InF$_{x}$ and the S-metal bonding.ing.

• 대한화학회지
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• 제66권5호
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• pp.341-348
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• 2022

In this work, radio frequency magnetron sputtering was used to deposit zinc selenide thin films on p-type silicon (100) wafers and glass substrates in a high vacuum chamber. Several surface characterization instruments were implemented to study the thin films. X-ray photoelectron spectroscopy results revealed that oxidized Zn bound to Se (Zn-Se) at 1022.7 ± 0.1 eV becomes the dominant oxidized species when Se concentration exceeds 70%. Scanning electron microscopy coupled with energy dispersive spectroscopy showed that incorporating Se in Zn thin films will lead to formation of ZnSe grains on the surface. Contact angle measurements indicated that ZnSe-60 exhibited the lowest total surface free energy value of 24.94 mN/m. Lastly, ultraviolet-visible spectrophotometry and ultraviolet photoelectron spectroscopy data evinced that the energy band gap gradually increases with increasing Se concentration with ZnSe-70 having the highest work function value of 4.91 eV.

• 대한화학회지
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• 제60권5호
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• pp.299-309
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• 2016

In this study, the physicochemical and electrochemical properties of carbon nanomaterials and synthesized nano-carbon/Si composites were studied. The nano-carbon/Si composites were ball-milled to a nano size and coated with pyrolytic carbon using Chemical Vapor Deposition (CVD). They were then finely mixed with respective nano-carbon materials. The physicochemical properties of samples were analyzed using Scanning Electron Microscopy (SEM), Energy Dispersive X-ray Spectroscopy (EDS), Raman spectroscopy, X-ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), and surface area analyzer. The electrochemical characteristics were investigated using the galvanostatic charge-discharge and cyclic voltammetry (CV) measurements. Three-electrode cells were fabricated using the carbon nanomaterials and nano-carbon/Si composites as anode materials and LiPF₆ and LiClO₄ as electrolytes of Li secondary batteries. Reversibility using LiClO₄ as an electrolyte was superior to that of LiPF₆ as the electrolyte. The initial discharge capacities of nano-carbon/Si composites were increased compared to the initial discharge capacities of nano-carbon materials.

• 한국진공학회지
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• 제6권S1호
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• pp.1-15
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• 1997

Titanium oxide films were prepared by ion beam enhanced deposition where the films were synthesized by deposition titianium atoms and simultaneously bombarding with xenon ion beam at an energy of 40 keV in an $O_2$ environ,ent. Structure and composition of titanium oxide films were investigated by X-ray Doffractopm (XRD) Ritjerfprd Backscattering Spectroscopy (RBS) and X-ray Diffraction(XRD) Rutherford Backscattering Spectroscopy (RBS) and X-ray photoelectron spectroscopy (XPS) The results show that thestructure of the prepared films exhibit a rutile phase structure wit high(200) orientation and the O/Ti ratio of the titanium oxide films was about 2:1 XPS anlysis shows that $Ti^{2+},Ti^{3+}\;and\;Ti^{4+}$ chemical states exist on the titanium oxide films. the blood compatibility of the titanium oxide films was studied by measurements of blood clotting time and platelet adhesion. The results show that the anticoagulation property of titanium oxide films improved significantly and better than that of LTI-carbon which was widely used to fabricate artificial heart valve.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.374.1-374.1
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• 2016

Copper and zinc are well known elements with antibacterial effect. So in this research, Cu and Zn (CZ) nanofibers (NFs) were fabricated by electrospinning method using polyvinylpyrrolidone (PVP) for adjusting viscosity. The CZ/PVP precursor solutions were prepared with copper sulfate pentahydrate, and zinc acetate dihydrate. Distilled water was used for solvent and PVP was used to regulate the viscosity of precursor solution. The CZ/PVP NF composites were obtained by electrospinning method using the precursor solution. The average diameter of obtained CZ/PVP NFs was determined by optical microscopy using Motic image plus 2.0 program and was found to be 490 nm. The chemical environment of the obtained CZ/PVP NF composites was investigated with X-ray photoelectron spectroscopy (XPS). After heating the obtained CZ/PVP NF composites at 353 K, the solvent was removed. The characteristic C 1s, Cu 2p, and Zn 2p core level XPS peaks were observed. After calcination the CZ/PVP NF composites at 873 K in Ar environment for 5 hrs, PVP was decomposed at this temperature and CZ NF was obtained. This was confirmed by decreasing the intensity of C 1s.