• Vacuum Magazine
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• v.3 no.4
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• pp.4-7
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• 2016

An X-ray Free Electron laser facility (PAL-XFEL) has been built in Pohang Accelerator Laboratory to provide X-ray FEL radiations for photon users. The machine consists of a 10 GeV normalconducting S-band linear accelerator and two undulator beamlines. The hard and soft X-ray beamlines will provide FEL radiations with wavelengths of 0.6 to 0.1 nm and 4.5 to 1 nm, respectively. Beam commissioning of PAL-XFEL is ongoing and user service will start in 2017. In this report, the PAL-XFEL layout and the working principle are discussed.

• Journal of the Optical Society of Korea
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• v.14 no.2
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• pp.146-151
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• 2010

A comprehensive real-time spectral phase interferometry for direct electric field reconstruction (SPIDER) apparatus for characterizing femtosecond laser pulses is demonstrated. The SPIDER provides the temporal profiles of femtosecond laser pulses, reconstructed at the speed of 3.5 Hz, with parameters of the spectral phase such as group delay dispersion and third-order dispersion. The apparatus is applied successfully to optimize the spectral dispersion of a kHz femtosecond Ti:Sapphire laser by adjusting a grating compressor in real time.

• Proceedings of the Optical Society of Korea Conference
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• 1998.08a
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• pp.192-193
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• 1998

At Rutherford Appleton Laboratory(RAL), a high-repetition rate ps exicmer laser-plasma x-ray source has been developed for x-ray lithography with a calibrated output of up to 1 watt X-ray average power at 1nm wavelength. In a previous reports this compact x-ray source was used to print 0.18$\mu$m lines for a gate on Si-FET devices and deep three-dimensional structure with 100$\mu$m length, 25$\mu$m width, and 48 $\mu$m depth for a nanotechnology. The deep X-ray lithography is called as LIGA thchnology and getting a wide interest as a new technology for a nano-device. In this report all this works are summarized.

• Proceedings of the Optical Society of Korea Conference
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• 1995.06a
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• pp.185-189
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• 1995

A high-power Nb:glass laser system(Simmyung I) has been contructed and tested. In this system, we used a Nb:YLF laser as a master oscillator, a 4-pass amplifier for pre-amplification, 5 stages of rod amplifiers, and spatial filtering and image reaying usits. The system has demonstrated in excess of 80J(2TW) with 40 psec(FWHM) pulse duration. Output energy, gain and spatial were measured at each amplification stage. With this laser system a preliminary X-ray generation experiment was performed. Pinhole images, X-ray diode signals and X-ray speriment were obtained for the irradiated target of copper. Detailed descriptions of the system performance and the X-tay generation experiment are presented.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.26 no.5
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• pp.567-577
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• 2016

The hutches which are installed in the beamline are largely classified into two, i.e XPP (X-ray pump probe) and CXI (Coherent X-ray image). Laser room is installed on the hutch and provides laser to XPP and CXI simultaneously. And two hutches have heavy crane to install some optics equipments. Safety and reliability of hutch structures should be taken into account for the precise operating of the laser facilities, so vibration analysis is essential to do this. The main purpose of vibration analysis is to install hutch structures with large stiffness. We have changed materials specification several times to install hutch structures having strong stiffness. Now hutch structures were installed and checked vibration status at laser room and XPP hutch. The results of laser table and robot arm satisfy vibration criteria. This paper explains about the design and vibration analysis of hutch structures.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.6
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• pp.551-557
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• 2002

Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with the without the presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor plume plasma expending into th ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The nitrogen content of the films was found to increase drastically with an increase of nitrogen pressure. The surface morphology of the films was studied using a scanning electron microscopy. Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtained films.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.240-243
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• 2002

Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with and without the Presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor Plume plasma expending into the ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The surface morphology of the films was studied using a scanning electron microscopy Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtain films.

• Journal of the Optical Society of Korea
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• v.5 no.1
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• pp.1-4
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• 2001

The results of investigating $SiL_{2,3}$/ X-ray emission valence spectra of amorphous silicon films irradiated by excimer laser are presented. It is found that laser annealing leads to crystallization of amorphous silicon films and the crystallinity increases with the laser energy density from 250 to 400 mJ/$\textrm{cm}^2$. The vertical structure of the film is investigated by changing the accelerating voltage on the X-ray tube, and the chemical and structural state of Si$_3$N$_4$ buffer layer is found not to be changed by the excimer laser treatment.

• Journal of Welding and Joining
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• v.19 no.1
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• pp.88-94
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• 2001

DUPIC (Direct use of spent PWR fuel in CANDU reactors) nuclear fuel is a CANDU fuel fabricated remotely from spent PWR fuel materials in a hot cell. The soundness of the end closure welds of nuclear fuel elements is an important factor for the safety and performance of nuclear fuel. To evaluate the soundness of the end closure welds of DUPIC fuel element, a precise X-ray inspection system is developed using a micro-focus X-ray generator with an image intensifier and a real time camera system. The fuel elements made of Zircaloy-4 and stainless steel by an Nd:YAG laser welding and a TIG welding aye inspected by the developed inspection system. The soundness of the welds of the fuel elements was confirmed by the X-ray inspection process, and the irradiation test of DUPIC fuel elements has been successfully completed at the HANARO research reactor.

• Korean Journal of Optics and Photonics
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• v.1 no.1
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• pp.46-51
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• 1990

Laser plasma was generated by a 1GW iodine photodissociation laser ($\lambda$=1.315$\mu\textrm{m}$, E=12.7J) whose output beam was focused on a molybdenum target surface. The experiment was conducted in a vacuum chamber under 1D-sTorr and several tens of laser shooting were necessary for sufficient exposure for the PBS resist of 111m thickness. Aluminium was coated on the top of the resist by 0.1$\mu\textrm{m}$ thickness which acts as an X-ray filter to cut off the visible and the ultraviolet lights. A bio-specimen was put directly on the aluminium coated resist and located at a distance of 3 cm from the X-ray source. The replicas of a steel mesh, spider's web. and a red blood cell were obtained by this technique and were observed by Nomarski microscope and SEM. The limitation of its resolution is determined by the X-ray source size and Fresnel diffraction effect, and its theoretical prediction is well matched with the experimental results. In this experiment, a resolution better than 0.1$\mu\textrm{m}$ could be obtained. ained.