• Title/Summary/Keyword: X-선 분석

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Structural characterization of oxynitride films by synchrotron x-ray reflectivity analysis (방사광 X-선 반사도론 이용한 oxynitride 나노박막의 두께와 계면 거칠기 측정)

  • 장창환;주만길;신광수;오원태;이문호
    • Proceedings of the Korea Crystallographic Association Conference
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    • 2002.11a
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    • pp.44-44
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    • 2002
  • 방사광 X-선 반사도를 이용하여 나노 스케일의 두께를 가진 oxynitride 박막의 계면 구조 및 두께를 측정하였다. Oxynitride 박막에서 nitrogen 분포의 분석은 두께가 극도로 얇아지는 요즘의 반도체 제작에서 매우 중요한 과제로 대두되고 있다. (1) X-선 반사도 측정을 분석하여 박막 깊이에 따른 전자밀도분포와 계면에서의 거칠기 및 각 층의 두께가 결정되었다. X-선 반사도 측정 분석으로부터 Nitrogen은 SiO₂와 Si substrate 계면에 위치하며, 화학조성분포와 층 구조의 상관성을 SIMS를 이용한 조성분포 측정과 비교하였다.

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Fire Performance Testing Method for Fire Retardant EPS Sandwich Panel Using X-ray Analysis (X-선 분석법을 이용한 난연 EPS 샌드위치 패널의 화재성능평가 방법에 관한 연구)

  • Shim, Ji-Hun;Cho, Nam-Wook
    • Fire Science and Engineering
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    • v.29 no.6
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    • pp.76-83
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    • 2015
  • EPS sandwich panel contains flame retardants that slow down ignition during fires,reduce the amount of heat generated, and block the spread of combustion. However, if a sandwich panel does not satisfy standards for fire-retardant performance, it may increase damage to property and human life. It is difficult to test the fire-retardant performance of a finishing material with the naked eye, so it is necessary to develop convenient and fast evaluation methods that are convenient and fast. In this study, a fire safety evaluation method for EPS sandwich panel was analyzed using X-ray to detect specific components related to the fire-retardant performance X-ray fluorescence analysis (XRF) indicated that suitable panel products contained more aluminum in comparison to unsuitable products. Gibbsite was identified as the main crystalline material of flame retardant EPS through X-ray diffraction analysis (XRD) and was included in both suitable products and unsuitable products, but there was a difference in crystalline structure. This study was verifies the possibility of evaluating fire-retardant performance using ultimate analysis and crystal analysis through these X-ray methods.

Noise Characteristic Analysis of X-Ray Fluorescence Spectrum (형광 X-선 스펙트럼의 잡음 특징 분석)

  • Lee, Jae-Hwan;Chon, Sun-Il;Yang, Sang-Hoon;Park, Dong-Sun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.5
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    • pp.2298-2304
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    • 2012
  • X-ray fluorescence spectrum analysis method can be applied in many areas, including concentration analysis of RoHS elements and heavy metals etc. and we can get analysis results in a relatively short time. Because X-ray fluorescence spectrum has noises and several artifacts that lowers the accuracy of the analysis. This paper analyzes the characteristics of the noise of the X-ray fluorescence spectrum to increase the accuracy of analysis. X-ray fluorescence spectrum have the characteristics of shot noise (Poisson noise), so the noise size is relatively large in the small signal portion and the noise the size is relatively small in the large part of the signal. Existing methods of analysis and to remove noises is a method for general purposes algorithm. Since these algorithm does not reflect these noise characteristics, we get distorted analysis result. We can design efficient noise remove algorithm based on the accurate noise analysis method, and we expect high accuracy results of the elemental concentration analysis result.

Improvement of Measurement Accuracy by Correcting Systematic Error Associated with the X-ray Diffractometer (X-선 회절 장비의 기계적 오차 수정을 통한 분석 정확도 향상)

  • Choi, Dooho
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.10
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    • pp.97-101
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    • 2017
  • X-ray diffractometers are used to characterize material properties, such as the phase, texture, lattice constant and residual stress, based on the diffracted beams obtained from specimens. Quantitative analyses using X-rays are typically conducted by measuring the peak positions of the diffracted beams. However, the long-term use of the diffractomer, like any other machine, results in errors associated with the mechanical parts, which can deteriorate the accuracy of the quantitative analyses. In this study, the process of correcting systematic errors in the $2{\theta}$ range of $30{\sim}90^{\circ}$ is discussed, for which strain-free Si powders from NIST were used as the standard specimens. For the evaluation of the impact of such error correction, we conducted a quantitative analysis of the true lattice constant for tungsten thin films.

The Measurement and Evaluation of X-ray Characteristics of Cadmium Sulfide as a Multi-function Dosimeter (다기능 선량계로서의 Cadmium sulfide의 X-선에 대한 특성 평가)

  • Park, Sung-Kwang;Park, Young-Min;Cho, Heung-Lae;Nam, Sang-Hee
    • Progress in Medical Physics
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    • v.14 no.3
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    • pp.161-166
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    • 2003
  • To evaluate the performance of cadmium sulfide as a multi-function X-ray dosimeter, we made an X-ray detector that was based on cadmium sulfide using evaporation technology, and measured its response to X-ray exposure. The voltages of cadmium sulfide were measured on the various X-ray tube potentials, X-ray tube currents and exposure times. The regression analysis of the voltage response of CdS on the tube-potential variation was y=0.0995x-0.1146 ($R^2$=0.9595, $\sigma$=0.08, standard error=2%) and the regression analysis of the voltage response of CdS on the tube-potential variation was y=0.0439x+1.1891 ($R^2$=0.9021, $\sigma$=0.04, standard error=1.8%) The regression analysis of the voltage response of CdS on the X-ray exposure time variation was y=8.2853+5.5878 ($R^2$=0.7287, $\sigma$=0.06, standard error=1.9%). In conclusion, cadmium sulfide responded linearly to the variation X-ray conditions, suggesting cadmium sulfide to be a feasible X-ray sensor of multi-function dosimeter related instruments.

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AN X-RAY EXPERIMENT WITH TWO-STAGE KOREAN SOUNDING ROCKET (중형 과학로켓을 활용한 천체 X-선 관측실험 결과 분석)

  • 남욱원;최철성
    • Journal of Astronomy and Space Sciences
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    • v.15 no.2
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    • pp.373-389
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    • 1998
  • The test result of the X-ray observation system is presented which have been developed at Korea Astronomy Observatory for 3 years(1995 -1997). The instrument, which is composed of detector and signal processing parts, is designed for the future observations of compact X-ray sources. The performance of the instrument was tested by mounting on the two-stage Korean Sounding Rocket, which was launched from Taean rocket flight center on June 11 at 10:00 KST 1998. Telemetry data was received from individual parts of the instrument for 32 and 55.7 sec, respectively, since the launch of the rocket. In this paper, the result of the data analysis based on the received telemetry data and discussion about the performance of the instrument is reported.

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Micrometer Spatial Resolution Imaging System Using Synchrotron X-ray (Synchrotron X-선을 이용한 Micrometer 공간 분해능 영상시스템)

  • 홍진오;정해조;정하규;제정호;김은경;유형식;김희중
    • Journal of Biomedical Engineering Research
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    • v.22 no.2
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    • pp.165-169
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    • 2001
  • 최근 포항 방사광 가속기 연구소에 미세구조 X-선 영상 실험을 위한 5C1 방사광(Synchrtoron Radiation) 빔라인이 건설되었다. 광대역의 에너지 스펙트럼을 가진 방사광 X-선이 물체를 투과한 후 CdWO$_{4}$ scintillator에 의해 가시광선으로 바뀌고, 그 빛을 CCD 카메라로 받아들여 영상을 획득하게 된다. 방사광 X-선은 일반 의료진단용 X-선에 비하여 위상이 일치하고, 평행하며, 그 양이 풍부한 특성들을 갖고 있다. 방사광 영상시스템과 X-선 유방촬영 시스템에서 영상을 획득하여 영상특성들을 비교, 분석하였다. 고-분해능 X-선 시험 패턴(20 line pairs mm$^{-1}$), 유방촬영 팬텀, 파라핀에 고정한 인체 유방암조직과 포르말린에 고정한 인체 유방암조직, 그리고 capillary tube내 micro-bubbles등의 방사광 영상은 기존의 X-선 유방촬영시스템에서 얻은 영상보다 분해능이 뛰어나고 영상질도 우수하였다. 방사광 X-선 영상시스템은 micrometer 공간 분해능 영상을 획득할 수 있어 많은 기초분야의 영상연구와 의료영상분야에서도 활발하게 활용될 것으로 기대된다.

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Pigment Analysis for Wall Paintings According to Verification of Penetration Depth for X-ray: Ssanggyesa Daeungjeon (Main Hall of Ssanggyesa Temple) in Nonsan (X-선 투과깊이 검증에 따른 벽화 안료의 정밀분석: 논산 쌍계사 대웅전)

  • Chun, Yu-Gun;Lee, Chan-Hee
    • Journal of Conservation Science
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    • v.27 no.3
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    • pp.269-276
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    • 2011
  • We have suggested effective P-XRF analysis method for pigment painting layer by calculating penetration depth of X-ray. This experiment calculated that X-ray generated from P-XRF was possible penetration until 1.17mm deep in the pigment painting. Based on the experimental results, analysis for eight color pigments on wall paintings in Ssanggyesa Main Hall, most pigments were painted traditional pigments. However pigments on recently restorated wall painting were used synthetic modern pigments.

X-선 Lang 토포그래피를 이용한 사파이어 단결정 웨이퍼 결함 분석

  • Jeon, Hyeon-Gu;Bin, Seok-Min;Lee, Yu-Min;O, Byeong-Seong;Kim, Chang-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.371-371
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    • 2013
  • 사파이어 단결정 웨이퍼는 제조과정에서 결정 성장 조건 및 기계적 연마에 의하여 내부적인 결함이 발생할 수 있다. 사파이어 단결정은 일반적으로 LED용 기판 재료로 사용되며, 내부결함이 발생 시 기판 위의 GaN 등 layer의 결함도 함께 증가하므로 기판의 결함을 줄이는 과정이 중요한 이슈이다. 이 과정에 X-선 토포그래피는 단결정의 내부 결함을 모니터링 하는데 있어서 매우 유용한 방법이다. 이에 본 연구에서는 사파이어 단결정 웨이퍼에 내재하는 결함 형태를 X-선 Lang 토포그래피 방법(X-ray Lang Topography)으로 이미징하여 관찰, 분석하였다. Lang 토포그래피 방법은 X-선 투과법으로 넓은 부분을 우수한 강도와 분해능으로 내부 결함을 관찰할 수 있는 장점을 지니고 있다. X-선 source는 Mo $k{\alpha}$ 1을 사용하였으며, 시료는 c-plane 사파이어 웨이퍼를 사용하였다. 사파이어 웨이퍼의 (110), (102) 회절면의 X-선 토포그래피 이미지를 통해 전위 결함의 유형에 따른 이미지 패턴의 형성 메커니즘에 대해 연구하였고, 측정 회절면과 두께, 표면 데미지에 따른 전위 결함 이미지의 변화를 확인하였다. X-선 토포그래피 이미지를 통해 단결정 c-plane 사파이어 웨이퍼의 전위 결함의 형성 메카니즘 연구와 유형별 이미지와 회절면, 두께, 표면 데미지에 따른 이미지 변화 등을 확인하였다.

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Texture Analysis of Cu Interconnects Using X-ray Microdiffraction (X-ray Microdiffraction 을 이용한 구리 Interconnect의 Texture 분석)

  • 정진석
    • Korean Journal of Crystallography
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    • v.12 no.4
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    • pp.233-238
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    • 2001
  • X-ray microdiffraction which uses x-ray beam focused down to a micron size from synchrotron radiation sources allow precision measurements of local orientation and strain variations in polycrystalline materials. Using x-ray microdiffraction setup at Pohang Light Source, we investigated the tex-ture of Cu interconnects with various widths on Si wafer by collecting Laue images and focused to about 2×3㎛ ² in size. Our results show that 1㎛ wide Cu interconnect had grains in rather ran- dom orientation. On the other hand the 20㎛ wide interconnects showed a 〈111〉fiber texture near the center. The grains were 2∼5㎛ long at the 1㎛ wide interconnect and 6∼8㎛ in size at the 20㎛ wide interconnect.

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