• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.73-74
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• 2006

Carbon nanotubes (CNTs) have recently attracted great attention because of their excellent physical properties, such as high mechanical strength, thermal stability, and electronic properties. These useful properties of carbon nanotubes make themselves good candidates for various application field, such as a transistor, battery, field emission display, nanoscale inter-connects, and so on. Gas-phase techniques offer the unique ability to synthesize well-oriented arrays of CNTs. However, it is seldom reported that the pressure influences on the growth of CNTs under low substrate temperature. In this work, the effect of the working pressure and the influence of the catalyst preparation on the properties of CNTs grown by microwave plasma chemical vapor deposition (MPCVD) were investigated.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.69-70
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• 2006

The ITO thin films were prepared by Facing Targets Sputtering(FTS) method on polyethersulfon(PES) substrate. The ITO thin films were deposited with the film thickness of 100nm at room temperature and working gas pressure of 1 mTorr. As a function of sputtering conditions, electrical and optical properties of prepared ITO thin films were evaluated by Hall Effect Measurement(EGK) and UV-VIS spectrometer(HP), respectively. From the results, the ITO thin films was deposited was with a resistivity $8.3{\times}10^{-4}[{\Omega}-cm]$ and transmittance over 80% in the visible range.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.12
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• pp.1072-1076
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• 2007

We prepared the Al doped ZnO (AZO) thin film on polyethersulfon (PES) without any substrate heating by Facing Targets Sputtering (FTS) system. FTS system has two different facing targets. One is ZnO doped the content of Al 2 wt% and the other is Zn in order to decrease resistivity. The electrical, structural and optical properties of AZO thin films were investigated. To evaluate the as-deposited thin film properties, we employed four-point probe (CMT-R100nw, Changmin), Surface profiler (Alpha-step, Tencor), UV/VIS spectrometer (HP), X-ray diffractometer (XRD, Rigaku) and Field Emission Scanning Electron Microscopy (FESEM, Hitachi S-4700). As a result, We obtained that AZO thin film deposited on PES substrate at a DC Power of 150 W, working pressure of 1 mTorr and $O_2$ gas flow ratio of 0.2 exhibited the resistivity of $4.2{\times}10^{-4}\;[{\Omega}cm]$ and the optical transmittance of about 85 % in the visible range.

• Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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• 2003.10a
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• pp.324-327
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• 2003

The needs for the cryocooler which has high reliability and long MTTF are increased in the military and commercial thermal imaging system The gas contamination wear, leakage of the working fluid, fatigue and etc. have the significant effects on the reliability and MTTF(Mean Time To Failure) or MTBF(Mean Time Between Failure) of the Stirling cryocooler. In the KIMM, the Stilting cryocooler with the linear compressor was released after the several performance tests were performed. This paper describe the experimental facility for the MTTF evaluation and some typical results of the Stilling cryocooler.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1996.03a
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• pp.72-78
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• 1996

Based on experimental analysis, the characteristics of pulsating pressure wave propagation is clarified by testing of 4-stroke gasoline engine. The pulsating pressure wave in exhaust system is generated gyulsating gas flow due the working of exhaust valve. The pulsating pressure wave is closely concerned to the loss of engine power according to back pressure and exhaust noise. It is difficult to exactly calculate pulsating pressure wave nonlinear effect. Therefore, in the first step for solving these problems, this paper contains experimental model and analysis method which are applied two-port network analysis. Also, it shows coherence function, frequency response function. back pressure, and gradient of temperature in exhaust system.

• Journal of the Semiconductor & Display Technology
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• v.1 no.1
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• pp.9-13
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• 2002

A polyimide-type electrostatic chuck (ESC) was fabricated for the application of holding 8-inch silicon wafers in the oxide etching equipment. For the fabrication of the unipolar ESC, core technologies such as coating of polyimide films and anodizing treatment of aluminum surface were developed. The polyimide films were prepared on top of thin coated copper substrates for the good electrical contacts, and the helium gas cooling technique was used for the temperature uniformity of the silicon wafers. The ESC was essentially working with an unipolar operation, which was easier to fabricate and operate compared to a bipolar operation. The chucking force of the ESC has been measured to be about 580 gf when the applied voltage was 1.5 kV, which was considered to be enough force to hold wafers during the dry etching processing. The employment of the ESC in etcher system could make 8% enhancement of the wafer processing yield.

• Journal of the Korea Safety Management & Science
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• v.4 no.3
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• pp.1-11
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• 2002

It has been Management for stabilize Enterprise-Management for Economic demand for to Productivity, Automation, customer satisfaction, Especially Semiconductor-Industry has been, potential-risk in working to factory to machine equipment, all kinds of utility, gas, chemical, electronic, Fire. This study of basic-purpose has Research Different From as Follow to analysis and Solution For semiconductor product Factory of a actual point Data and specific-gravity to Relation for company-Injury. 1. It has been try to Injury-Tendency and cause-Analysis for our County-Manufacture-Occupation. 2, Semiconductor Injury of Actual-condition in Enforcement for problem and Analysis that Injury Problem has occupated it Submitted to Solution for ordinary Injury theory View to point Solve at for New Model has applicated to that nilem for processed to Solution.

• Transactions of the Korean Society of Automotive Engineers
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• v.10 no.5
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• pp.235-241
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• 2002

The process of energy separation in a low pressure vortex tube with air as a working medium is studied In detail. Experimental data of the temperature of the cold and hot air leaving the vortex tube are presented. The variation of the maximum wall temperature along the inner surface of the vortex tube and the temperature distribution in the vortex tube provides useful information about the location of the stagnation point of the flow field at the axis of the vortex tube. In this study Outer tube is used for the application of Diesel engine exhaust. The hot gas flow is fumed 180° and passes the outside of the vortex tube a second time heating it. From this geometric setup of a vortex tube the effects of energy separation and the prediction of the ignition of Diesel Soot is presented by experimental data.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2011.05a
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• pp.5-6
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• 2011

CO₂ reduction is the most urgent issue the world is facing. So, there should be a measure to reduce the CO₂ emission in construction industry which has more released CO₂ gas than other industries. CO₂ emission of building depend on using energy. Then efficient energy use process working efficiently at CO₂ reduction. Therefore In this study, author find the technical possibility of saving the building energy using the PCM which is able to control heat, storage heat and potential heat. So, it considered that apply to floor heating type which is major heating system of living space in Korea. And evaluate the Using possibility.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.419-422
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• 1999

We prepared CoCr thin film for perpendicular magnetic recording media by facing targets sputtering system(FTS system) which can deposit a high quality thin films in plasma-free state and wide range of working pressure. In this study, we investigated that the effect of sputtering condition , that Argon gas pressure and substrate temperature, on magnetic and crystallographic characteristic of CoCr thin film as well as the variation perpendicular coercivity in changing of film's thickness. Crystallographic and magnetic characteristic of prepared thin films were evaluated by x-ray fractometry(XRD), vibrating sample magnetometer(VSM) and kerr hysteresis loop measurement.