• Title/Summary/Keyword: Working Gas

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Estimation of the operating characteristics of a turbopump driven by a pyro-starter (파이로시동기로 작동되는 터보펌프의 구동특성 예측)

  • Kim Cheul-Woong;Seol Woo-Seok
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2006.05a
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    • pp.167-170
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    • 2006
  • For a short time a pyre-starter should turn the blades of a turbine to the adequate rotational speed by a single operation. Through this process the pressures of the components of a propellant rise rapidly up to the operating point, and the components enter into a gas-generator. Combustion in the gas-generator occurs to keep the turbopumps working. In this research characteristic parameters of a pyre-starter which correspond to the required performance of the turbopump before the gas-generator starts to work were selected

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Fabrication and Gas Sensing Characteristics of $MoO_3$ Thin Film Sensor ($MoO_3$ 박막센서 제조 및 가스감지특성)

  • Hwang, Jong-Taek;Jang, Gun-Eik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.826-829
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    • 2002
  • $MoO_3$ thin films were deposited on electrode and heater screen-printed alumina substrates in en atmosphere by RF reactive sputtering. The deposition was performed at $300^{\circ}C$ with 350W of a forward power in an $Ar-O_2$ atmosphere. The working pressure was maintained at $3{\times}10^{-2}$mtorr and all deposited films were annealed at $500^{\circ}C$ for 5hours. The surface morphology of films was observed by using a SEM and crystalline phases were analyzed by XRD. The sensing properties were investigated in term of gas concentration under exposure of reducing gases such as $H_2$, $NH_3$ and CO.

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Applications of Plasma Modeling for Semiconductor Industry

  • Efremov, Alexandre
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.3-6
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    • 2002
  • Plasma processing plays a significant role in semiconductor devices technology. Development of new plasma systems, such as high-density plasma reactors, required development of plasma theory to understand a whole process mechanism and to be able to explain and to predict processing results. A most important task in this way is to establish interconnections between input process parameters (working gas, pressure, flow rate, input power density) and various plasma subsystems (electron gas, volume and heterogeneous gas chemistry, transport), which are closely connected one with other. It will allow select optimal ways for processes optimization.

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Combined Heat Treating characteristics of Hot Work Tool Steel (열간금형 공구강의 복합열처리 특성에 관한 연구)

  • Kim, Y.H.;Kim, D.K.
    • Journal of the Korean Society for Heat Treatment
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    • v.11 no.4
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    • pp.315-323
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    • 1998
  • This study has been conducted to develope the combined heat treating technique of gas carburising - gas nitriding and gas carburising to improve the hot working performance of type H3 hot work tool steel. Case depth and carbrides coarsening were increased with increasing carburising temperature and time, respectively. Surface hardness showed decreasing tendency with increasing 2nd tempering temperature after carburising treatment. After carburising, 2nd treatment at 500 to 600 was chosen according to a hardness demand of final product. High temperature tempering resistance showed more excellent quality during such carburising-nitriding or carburising than complex treatment as after conventional hardening.

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Preparation of ITO Transparent Conductive thin film for Display at Room Temperature (디스플레이용 ITO 투명전도막의 저온 제작)

  • Kim Kyung-Hwan;Kim Hyun-Woong
    • Journal of the Semiconductor & Display Technology
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    • v.4 no.4 s.13
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    • pp.5-8
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    • 2005
  • In this study, we prepared the ITO thin film for TOLED(Top-emitting OLED) or flexible display at room temperature using the FTS(Facing Targets Sputtering Apparatus). We observed characteristics of deposited thin films as a function of sputtering conditions. XRD patterns were independence trom oxygen gas flow and input current. But electrical and optical properties were strongly dependence. In the results, we could prepare good properties of ITO thin films resistivity of $4.27X10^{-4}[\Omega-cm]$, transmittance of over 80% at working gas pressure 1[mTorr], input current 0.6[A], oxygen gas ratio 0.3[sccm], at room temperature.

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Cycle Analysis of Diffusion Absorption Refrigerator (확산형 흡수식 냉장고의 사이클 해석)

  • 김선창;김영률;백종현;박승상
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.14 no.10
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    • pp.817-824
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    • 2002
  • A diffusion absorption refrigerator is a heat-generated refrigeration system. It uses a three-component working fluid consisting of the refrigerant (ammonia), the absorbent (water) and the auxiliary gas (typically hydrogen). This system has no moving parts and the associated noise and vibration. In this study, the operating characteristics of diffusion absorption refrigerator are investigated through cycle modeling and simulation. System parameters considered in this study are the charged concentration of ammonia aqueous solution, the concentration difference between absorber inlet and outlet and the system pressure determined by the amount of auxiliary gas charged. It was found that there exists a critical value of concentration difference that maximizes the refrigerating capacity. And the lower the system pressure, the higher the refrigerating capacity.

A study of discharge characteristics by Xe content rates of AC PDP (Xe 분압비에 따른 AC PDP의 방전특성 연구)

  • Lee, Don-Kyu;Seo, Dong-Hyun;Kim, Dong-Hyun;Lee, Hoo-June;Park, Jung-Hu
    • Proceedings of the KIEE Conference
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    • 2003.07c
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    • pp.1716-1718
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    • 2003
  • In order to realize the PDP that is better than CRT TV, high luminance and high efficient PDP panel should be fabricated. In order to meet these conditions it is inevitable trend to use high Xe% gas working gas. In this paper, we studied the relationships between the static margin, the discharge delay and jitter of PDP and Xe% in Ne gas.

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Reactive ion Etching Characterization of SiC Film Deposited by Thermal CVD Method for MEMS Application (MEMS 적용을 위한 Thermal CVD 방법에 의해 증착한 SiC막의 반응성 이온 Etching 특성 평가)

  • 최기용;최덕균;박지연;김태송
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.3
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    • pp.299-304
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    • 2004
  • In recent years, silicon carbide has emerged as an important material for MEMS application. In order to fabricate an SiC film based MEMS structure by using chemical etching method, high operating temperature is required due to high chemical stability Therefore, dry etching using plasma is the best solution. SiC film was deposited by thermal CVD at the temperature of 100$0^{\circ}C$ and pressure of 10 torr. SiC was dry etched with a reactive ion etching (RIE) system, using SF$_{6}$/O$_2$ and CF$_4$/O$_2$ gas mixture. Etch rate has been investigated as a function of oxygen concentration in the gas mixture, rf power, working pressure and gas flow rate. Etch rate was measured by surface profiler and FE-SEM. SF$_{6}$/O$_2$ gas mixture showed higher etch rate than CF$_4$/O$_2$ gas mixture. Maximum etch rate appeared at RF Power of 450W. $O_2$ dilute mixtures resulted in an increasing of etch rate up to 40%, and the superior anisotropic cross section was observe

Preparation of ITO Thin Films for Display Application with $O_2$ Gas Flow Ratio and Input Current by FTS (Facing Targets Sputtering) System

  • Kim, H.W.;Keum, M.J.;Lee, K.S.;Kim, H.K.;Kim, K.H.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1477-1479
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    • 2005
  • In this work, the ITO thin films were prepared by FTS (Facing Targets Sputtering) system under different sputtering conditions which were varying $O_2$ gas flow, input current at room temperature. As a function of sputtering conditions, electrical and optical properties of prepared ITO thin films were measured. The electrical, optical characteristics and surface roughness of prepared ITO thin films were measured. In the results, as increasing $O_2$ gas 0.1[sccm] to 0.7[sccm], resistivity of ITO thin film was increased with a decreasing carrier concentration, $O_2$ gas over 0.3[sccm] the carrier mobility have a similarly value. Transmittance of prepared ITO thin films were improved at increasing $O_2$ gas 0.1[sccm] to 0.7[sccm]. And transmittance of all of the prepared ITO thin films was over 80%. We could obtain resistivity $6.19{\times}10^{-4}[{\omega}{\cdot}cm]$, carrier mobility $22.9[cm^2/V{\cdot}sec]$, carrier concentration $4.41{\times}10^{20}[cm^{-3}]$ and transmittance over 80% of ITO thin film prepared at working pressure 1mTorr, input current 0.4A without any substrate heating.

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Transient Analysis of Pressure Behavior of Cryogenics in Closed Vessel (극저온 저장용기의 내부압력 거동에 대한 비정상해석)

  • 강권호;김길정;박영무
    • Journal of Energy Engineering
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    • v.5 no.1
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    • pp.19-27
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    • 1996
  • Self-pressurization of cylindrical container of cryogen is numerically analyzed. The container is axi-symmetric and heated from side wall with constant heat flux. Natural convection by external heat flux is studied numerically using finite difference method. Oxygen, nytrogen and hydrogen are working fluids in this paper. Liquid is considered incompressible fluid and vapor is assumed to behave as gas meeting with virial equation of gas. The Second virial coefficients of gas are obtained from Lennard-jones model. The important variables which have effects on self-pressurization are external heat flux, heat capacity of wall and initial ullage in container. The most important variable of them is external heat flux. The pressure rise calculated from the virial gas model is slightly different from that calculated using Ideal gas model for oxygen.

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