• 제목/요약/키워드: Wire-Bonding

검색결과 219건 처리시간 0.023초

CdTe 멀티에너지 엑스선 영상센서 패키징 기술 개발 (Development of Packaging Technology for CdTe Multi-Energy X-ray Image Sensor)

  • 권영만;김영조;유철우;손현화;김병욱;김영주;최병정;이영춘
    • 한국방사선학회논문지
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    • 제8권7호
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    • pp.371-376
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    • 2014
  • CdTe 멀티에너지 X선 영상센서와 ROIC를 패키징 하기 위한 flip chip bump bonding, Au wire bonding 및 encapsulation 공정조건을 개발하였으며 성공적으로 모듈화 하였다. 최적 flip chip bonding 공정 조건은 접합온도 CdTe 센서 $150^{\circ}C$, ROIC $270^{\circ}C$, 접합압력 24.5N, 접합시간 30s일 때이다. ROIC에 형성된 SnAg bump의 bonding이 용이하도록 CdTe 센서에 비하여 상대적으로 높은 접합온도를 설정하였으며, CdTe센서가 실리콘 센서에 비하여 쉽게 파손되는 것을 고려하여 접합압력을 최소화하였다. 패키징 완료된 CdTe 멀티에너지 X선 모듈의 각각 픽셀들은 단락이나 합선 등의 전기적인 문제점이 없는 것을 X선 3D computed tomography를 통해 확인할 수 있었다. 또한 Flip chip bump bonding후 전단력은 $2.45kgf/mm^2$ 로 측정되었으며, 이는 기준치인 $2kgf/mm^2$ 이상으로 충분한 접합강도를 가짐을 확인하였다.

와이어 본딩용 초음파 공구혼 설계에 관한 연구 (Design of Ultrasonic Tool Horn for Wire Wedge Bonding)

  • 이봉구;오명석;마정범
    • 한국생산제조학회지
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    • 제22권4호
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    • pp.717-722
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    • 2013
  • In this study, we investigated the design of a wire wedge bonding ultrasonic tool horn using finite element method (FEM) simulations. The proposed method is based on an initial design estimate obtained by FEM analysis. An ultrasonic excitation causes various vibrations of a transducer horn and capillary. A simulated ultrasonic transducer horn and resonator are then built and characterized experimentally using a laser interferometer and electrical impedance analyzer. The vibration characteristics and resonance frequencies close to the exciting frequency are identified using ANSYS. FEM analysis is developed to predict the resonance frequency of the ultrasonic horn and use it in the optimal design of an ultrasonic horn mode shape.

패키지 박리 개선을 위한 플라즈마 세정 효과 (Plasma Cleaning Effect for Improvement of Package Delamination)

  • 구경완;김도우;왕진석
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제54권7호
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    • pp.315-318
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    • 2005
  • The effect of plasma cleaning was examined on package delamination phenomena in the integrated circuit (IC) packaging process. Without plasma cleaning, delamination was observed for all three experimental treatments applied after the packaging step, which include bake of If, reflow, and bake of If followed by reflow However, no delamination was observed when the plasma cleaning was performed before and after the wire bonding step. Plasma cleaning was found to be a critical step to improve the reliability of the package by reducing the possibility of contact failure between die pad and bonding wire.

Comparison of the Power Consumption between the Ceramic and Wire Bonding Packaging Methods for Solid State Electrochemical Carbon dioxide Sensors

  • Kim, Tae Wan;Park, Chong-Ook
    • 센서학회지
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    • 제25권3호
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    • pp.173-177
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    • 2016
  • Tape casting ceramics technology has been adopted for the fabrication of solid state electrochemical $CO_2$ sensors and the packaging substrates. The fabricated $CO_2$ sensors exhibit a fast response and a good recovery with the almost theoretical sensitivity of 37 mV/decade, corresponding to a sensor operating temperature of 373 K. The two packaging methods, the wire bonding package and the surface- mounted on the ceramic package, were compared with respect to their power consumption and mass production feasibility. In terms of the ease of fabrication, the surface mount packaging technology is superior to the wire bonding technology but its power consumption is approximately twice that of the wired package.

목재(木材)파티클과 철강결체(鐵鋼結締)가 보오드의 물리적(物理的) 성질(性質)에 미치는 영향(影響) (Effect of Combining Wood Particles and Wire Net on the Physical Properties of Board)

  • 이필우
    • Journal of the Korean Wood Science and Technology
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    • 제13권3호
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    • pp.3-26
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    • 1985
  • The object of this study was to investigate the effects on physical and mechanical properties of wood particle and sawdust board combined with wire net. Conventional forming, press-lam, and veneer comply boards combining one to four wire net sheets were made from wood particle and sawdust with different spacings (8, 10, 12, and 18 Mok) and different wire diameters (0.35, 0.50, and 0.80mm) composing wire net. They were compared and analyzed statistically with specific gravity, thickness swelling, length swelling, bending properties (modulus of rupture, modulus of elasticity, work to proportional limit, and total work), internal bonding strength, and screw holding strength between wood particle and sawdust boards. The results obtained at this study as cording to the discussions might be concluded as follows; 1. In specific gravity, both particle and sawdust boards by press-lam method were higher than by conventional forming and veneer comply method, and the boards containing more wire net sheets also showed higher value. But the wire net spacings(Mok) had no influence on specific gravity. In general, particle board showed higher specific gravity than sawdust board. Veneer comply board showed lowest specific gravity values. 2. Both particle and sawdust boards by press-lam method was slightly lower than by conventional forming and veneer comply method in thickness swelling. The sawdust board containing 8, 12. and 18 Mok wire net showed lower thickness swelling than the corresponding particle board, but both sawdust and particle boards containing the T8 and 10 Mok wire net showed higher and similar thickness swelling. 3. Both particle and sawdust boards containing wire net showed no difference in MOR and MOE of bending. Comply board was the highest and particle board showed slightly higher than sawdust board in MOR and MOE values. 4. In work to proportional limit and total work in bending, both particle and sawdust boards containing thicker wire diameter and more wire net sheets showed higher value. From these facts, it is conceivable that boards with thicker wire diameter and more wire net sheets show increasing resistance against external force. But there was no significant difference between particle and sawdust borads. 5. In resistance against delamination (internal bonding strength), both sawdust and particle boards containing wire net showed lower value than control, and also showed decreasing tendency with more number of wire net sheet composed. Particle board showed higher resistance against delamination than sawdust board. 6. In screw holding strength, sawdust board containing thicker wire diameter and more wire net sheets showed higher value, but particle board by press-lam method was higher than by conventional forming and veneer comply method. Screw holding strength of particle board was higher than that of sawdust board.

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형상기억합금 선재가 삽입된 폴리머기지 능동복합재료의 회복력에 미치는 계면 접합강도의 영향 (Effect of interface bonding strength on the recovery force of SMA reinforced polymer matrix smart composites)

  • 김희연;김경섭;홍순형
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2003년도 춘계학술발표대회 논문집
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    • pp.18-21
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    • 2003
  • The effect of interface bonding strength on the recovery force of SMA wire reinforced polymer matrix composites was investigated by pullout test. Firstly, the recovery forces and transformation temperatures of various prestrained SMA wires were measured and 5% prestrained SMA wires were prepared for the reinforcements of composites. EPDM incorporated with 20vol% silicon carbide particles(SiCp) of 6, 12, $60{mutextrm{m}}$ size were used as matrix. Pullout test results showed that the interface bonding strength increased when the SiCp size decreased due to the increase of elastic modulus of matrix. Cyclic test of composites was performed through control of DC current at the constant displacement mode. The abrupt decrease of recovery force during cycle test at high current was occurred by thermal degradation of matrix. This was in good agreement with temperature related in the thermal degradation of matrix. The hysteresis of recovery force with respect to the temperature was compared between wire and composite and the hysterisis of composites was smaller than the wire due to less thermal conduction.

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반도체 패키지용 Au Wire의 표면처리용 린스 성분에 따른 표면오염 비교 연구 (A Correlation Study on Surface Contamination of Semiconductor Packaging Au Wire by Components of Rinse)

  • 김하영;추연룡;임지수;박규식;김지원;강다희;라윤호;제갈석;윤창민
    • 접착 및 계면
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    • 제25권2호
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    • pp.63-68
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    • 2024
  • 본 연구에서는 반도체 패키지용 와이어 본딩 공정에서 금(Au) wire의 표면처리에 적용되는 린스의 종류에 따른 Au wire의 오염 현상을 확인하고자 하였다. Au wire의 표면처리를 위해 실리콘(Si) 성분이 함유된 린스와 유기 계통으로만 이루어진 린스를 주로 사용하고 있으며, 실제 영향성을 확인하기 위해 두 종류의 1.0wt% 린스 용액으로 Au wire에 표면처리를 진행하였다. 이후, 반도체 공정에서 발생할 수 있는 Si 성분이 포함된 분진과의 반응성을 확인하기 위한 모사 실험을 진행하였다. 그 결과, optical microscopy(OM) 및 scanning electron microscopy(SEM) 분석을 통해 Si 성분이 함유된 린스로 표면처리한 Au wire의 경우 분진이 다량 흡착되었으며, 유기 계통으로만 이루어진 린스로 표면처리한 Au wire에는 소량의 분진이 흡착된 것을 확인하였다. 이는 Si 성분이 함유된 린스의 경우 상대적으로 극성을 띠기에, 주성분이 극성인 분진과 극성 상호작용을 일으키기 때문이다. 따라서 Si 성분이 존재하지 않는 린스를 사용하여 Au wire를 표면처리할 경우 분진에 의한 오염 현상이 감소하여 실제 와이어 본딩 공정에서 불량률을 낮추는 효과를 볼 수 있을 것으로 기대한다.

Surface Analysis of Aluminum Bonding Pads in Flash Memory Multichip Packaging

  • Son, Dong Ju;Hong, Sang Jeen
    • Transactions on Electrical and Electronic Materials
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    • 제15권4호
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    • pp.221-225
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    • 2014
  • Although gold wire bonding techniques have already matured in semiconductor manufacturing, weakly bonded wires in semiconductor chip assembly can jeopardize the reliability of the final product. In this paper, weakly bonded or failed aluminum bonding pads are analyzed using X-ray photoelectron spectroscopy (XPS), Auger electron Spectroscopy (AES), and energy dispersive X-ray analysis (EDX) to investigate potential contaminants on the bond pad. We found the source of contaminants is related to the dry etching process in the previous manufacturing step, and fluorocarbon plasma etching of a passivation layer showed meaningful evidence of the formation of fluorinated by-products of $AlF_x$ on the bond pads. Surface analysis of the contaminated aluminum layer revealed the presence of fluorinated compounds $AlOF_x$, $Al(OF)_x$, $Al(OH)_x$, and $CF_x$.

광삼각법을 이용한 고반사 BGA 볼의 정밀 높이 측정 방법 (3D Accuracy Enhancement of BGA Shiny Round Ball Using Optical Triangulation Method)

  • 주병권;조택동
    • 한국정밀공학회지
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    • 제32권9호
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    • pp.799-805
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    • 2015
  • The further development of information, communication and digital media technologies requires the use of advanced, miniaturized semiconductor chips that operate at a high frequency. Die bonding and wire bonding methods for semiconductor packaging have been replaced by direct attachment to the substrate after forming a bump on the chip. However, the height of the bump or ball is an important factor for defects during assembly. This paper proposes an algorithm to measure the height of the bumps or balls in semiconductor packaging with greater accuracy. The performance of the proposed algorithm is experimentally validated. Non-contact 3D measurements of a shiny round ball is quite difficult, and it is not easy to obtain accurate data. This paper thus proposes an optical method and technique to improve the measurement accuracy.

초고주파 소자 실장을 위한 유전체를 이용하는 본딩와이어 기생 효과 감소 방법 (Reduction of the bondwire parasitic effect using dielectric materials for microwave device packaging)

  • 김성진;윤상기;이해영
    • 전자공학회논문지D
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    • 제34D권2호
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    • pp.1-9
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    • 1997
  • For the reduction of parasitic inductance and matching of bonding wire in the package of microwave devices, we propose multiple bonding wires buried in a dielectric material of FR-4 composite. This structure is analyzed using the method of moments (MoM) and compared with the common bondwires and ribbon interconnections. The FR-4 composite is modelled by the cole-cole model which can consider the loss and the variation of the permittivity in a frequency. At 20 GHz, the parasitic reactance is reduced by 90%, 80%, 60% compared to those of a single bonding wire in air, double bonding wires in air and ribbon interconnection in air, respectively. Also, the new bondwire shows very good matching of 60.ohm characteristic impedance and has 15dB, 10dB, 5dB improvement of the return loss and 2.5dB, 0.7dB, 0.2dB improvement of the insertion loss compared to the common interconnections. This technique can minimize the parasitic effect of bondwires in microwave device packaging.

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