• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.240-240
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• 2010

A multiple alloy metal nano-dots memory using FN tunneling was investigated in order to confirm its structural possibility for future flash memory. In this work, a multiple FePt nano-dots device with a high work function (~5.2 eV) and extremely high dot density (${\sim}\;1.2{\times}10^{13}/cm^2$) was fabricated. Its structural effect for multiple layers was evaluated and compared to one with a single layer in terms of the cell characteristics and reliability. We confirm that MOS capacitor structures with 2-4 multiple FePt nano-dot layers provide a larger threshold voltage window and better retention characteristics. Furthermore, it was also revealed that several process parameters for block oxide and inter-tunnel oxide between the nano-dot layers are very important to improve the efficiency of electron injection into multiple nano-dots. From these results, it is expected that a multiple FePt nano-dots memory using Fowler-Nordheim (FN)-tunneling could be a candidate structure for future flash memory.

• 한국정보통신학회논문지
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• 제26권5호
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• pp.641-648
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• 2022

본 논문은 3D 프린터 출력 방식 중 하나인, 전자빔용해법(EBM)의 공정 간에 발생하는 결함에 영향을 미치는 요인들을 데이터 분석을 통해 규명하는 연구이다. 선행 연구들을 기반으로 결함발생에 주요한 원인으로 지목되는 요소들을 참고하였으며, 공정 간 발생하는 로그파일 분석을 통해 결함 발생과 연관된 변수들을 추출하였다. 또한, 해당 데이터가 시계열 데이터라는 점에 착안하여 window의 개념을 도입하여, 현재 공정 층으로부터 총 3개 전 층까지의 데이터를 포함하여 분석에 사용 될 변수들을 구성하였다. 해당 연구의 종속변수는 결함발생유무이기에 이진분류를 통한 분석을 하였으며, 이때 결함 층의 비율이 낮다는(약 4%) 문제로 인해 SMOTE 기법을 적용하여 균형잡힌 훈련용 데이터를 만들었다. 분석을 위해 Gridsearch CV를 활용한 XGBoost를 사용하였고, 분류 성능은 혼동행렬을 기반으로 평가하였다. 마지막으로, SHAP값을 통한 변수 중요도 분석을 통해 연구의 결론을 내렸다.

• 한국군사과학기술학회지
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• 제17권5호
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• pp.672-679
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• 2014

To improve sensing capability of infrared, heat-resistance and mechanical properties, the $SiO_2$ and $TiO_2$ anti-reflective layers were coated on sapphire substrate by MOCVD. The standard wavelength was 4,600nm, and the thickness of anti-reflective layers were 379 and 758nm in case of ${\lambda}/4$ and ${\lambda}/2$ of incident angle($65^{\circ}$), respectively. The $SiO_2$ and $TiO_2$ anti-reflective layers were coated 12.6 and 9.7nm/min of deposition rates by increasing oxygen pressure to set the ideal refractive index of 1.283. In case of $SiO_2({\lambda}/2)$ coating, the transmittance increased from 55.0 to 62.7%. The transmittance of $TiO_2({\lambda}/2)$ anti-reflective layer also increased from 55.0 to 64.8%. The flexural strength of $SiO_2({\lambda}/2)$ and $TiO_2({\lambda}/2)$ layer coated sapphire increased from 337.8 to 362.9 and 371.8MPa, respectively. The flexural strength at $500^{\circ}C$ of these materials also increased respectively to 304.5, 358.2MPa from 265.9MPa. From these results, we confirmed these materials can be used as transmission window of infrared light.

• 대기
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• 제33권4호
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• pp.423-440
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• 2023

The updated version of Global Ocean Data Assimilation and Prediction System (GODAPS) in the NIMS/KMA (National Institute of Meteorological Sciences/Korea Meteorological Administration), which has been in operation since December 2021, is being introduced. This technical note on GODAPS2 describes main progress and updates to the previous version of GODAPS, a software tool for the operating system, and its improvements. GODAPS2 is based on Forecasting Ocean Assimilation Model (FOAM) vn14.1, instead of previous version, FOAM vn13. The southern limit of the model domain has been extended from 77°S to 85°S, allowing the modelling of the circulation under ice shelves in Antarctica. The adoption of non-linear free surface and variable volume layers, the update of vertical mixing parameterization, and the adjustment of isopycnal diffusion coefficient for the ocean model decrease the model biases. For the sea-ice model, four vertical ice layers and an additional snow layer on top of the ice layers are being used instead of previous single ice and snow layers. The changes for data assimilation include the updated treatment for background error covariance, a newly added bias scheme combined with observation bias, the application of a new bias correction for sea level anomaly, an extension of the assimilation window from 1 day to 2 days, and separate assimilations for ocean and sea-ice. For comparison, we present the difference between GODAPS and GODAPS2. The verification results show that GODAPS2 yields an overall improved simulation compared to GODAPS.

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제11권10호
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• pp.4929-4947
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• 2017

In visual object tracking, Correlation Filter-based Tracking (CFT) systems have arouse recently to be the most accurate and efficient methods. The CFT's circularly shifts the larger search window to find most likely position of the target. The need of larger search window to cover both background and object make an algorithm sensitive to the background and the target occlusions. Further, the use of fixed-sized windows for training makes them incapable to handle scale variations during tracking. To address these problems, we propose two layer target representation in which both global and local appearances of the target is considered. Multiple local patches in the local layer provide robustness to the background changes and the target occlusion. The target representation is enhanced by employing additional reversed RGB channels to prevent the loss of black objects in background during tracking. The final target position is obtained by the adaptive weighted average of confidence maps from global and local layers. Furthermore, the target scale variation in tracking is handled by the statistical model, which is governed by adaptive constraints to ensure reliability and accuracy in scale estimation. The proposed structural enhancement is tested on VTBv1.0 benchmark for its accuracy and robustness.

• 분석과학
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• 제5권4호
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• pp.455-464
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• 1992

본 논문에서는 FT-IR 분광분석법을 이용하여 여러 가지 반응조건에서 기체상 silylation 반응에 의해 생성된 silylated layer의 depth를 비파괴적으로 정량하는 방법을 제안하였다. Silylated layer의 depth는 FT-IR 스펙트럼의 특성 봉우리들(Si-O-ph, Si-C, Si-H)의 흡광도를 바탕 스펙트럼 공제법으로 측정하여 SEM의 두께 측정치와 비교하여 정량하였다. FT-IR 분광분석법을 이용한 Silylated layer의 depth 분석은 비파괴적이고 정량적인 방법으로, 이 방법은 silylation process window를 설정하는 데 적합하다는 것을 알았다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 추계학술대회 논문집
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• pp.9-12
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• 1998

Film characteristics of thin reoxidized nitrided oxides were investigated by SIMS analysis and C-V method in order to use the gate dielectric for charge-trap type NVSMs instead of ONO stacked layers. Nitric oxide(NO) annealed film has the nitrogen content sharply peaked at the Si-SiO$_2$ interface, while it is broad for nitrous oxide($N_2$O) ambient. The nitrogen peak concentration increased with anneal temperature and time. The position of nitrogen content in the oxide layer was due to be precisely controlled. For the films annealed NO ambient at 80$0^{\circ}C$ for 30min. followed by reoxidized at 85$0^{\circ}C$, the maximum memory window of 3.5V was obtained and the program condition was +12V, 1msec for write and -l3V, 1msec for erase.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.132-132
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• 2010

In the nano-scale Si processing, patterning processes based on multilevel resist structures becoming more critical due to continuously decreasing resist thickness and feature size. In particular, highly selective etching of the first dielectric layer with resist patterns are great importance. In this work, process window for the infinitely high etch selectivity of silicon oxynitride (SiON) layers and silicon nitride (Si3N4) with EUV resist was investigated during etching of SiON/EUV resist and Si3N4/EUV resist in a CH2F2/N2/Ar dual-frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters, such as the CH2F2 and N2 flow ratio and low-frequency source power (PLF). It was found that the CH2F2/N2 flow ratio was found to play a critical role in determining the process window for ultra high etch selectivity, due to the differences in change of the degree of polymerization on SiON, Si3N4, and EUV resist. Control of N2 flow ratio gave the possibility of obtaining the ultra high etch selectivity by keeping the steady-state hydrofluorocarbon layer thickness thin on the SiON and Si3N4 surface due to effective formation of HCN etch by-products and, in turn, in continuous SiON and Si3N4 etching, while the hydrofluorocarbon layer is deposited on the EUV resist surface.

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제6권9호
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• pp.2323-2340
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• 2012

Recent advances in cognitive radio technology have drawn immense attention to higher layer protocols above medium access control, such as transmission control protocol (TCP). Most proposals to improve the TCP performance in cognitive radio (CR) networks have assumed that either all nodes are in CR networks or the TCP sender side is in CR links. In those proposals, lower layer information such as the CR link status could be easily exploited to adjust the congestion window and improve throughput. In this paper, we consider a TCP network in which the TCP sender is located remotely over the Internet while the TCP receiver is connected by a CR link. This topology is more realistic than the earlier proposals, but the lower layer information cannot be exploited. Under this assumption, we propose an enhanced TCP protocol for CR networks called TCP for cognitive radio (TCP-CR) to improve the existing TCP by (1) detection of primary user (PU) interference by a remote sender without support from lower layers, (2) delayed congestion control (DCC) based on PU detection when the retransmission timeout (RTO) expires, and (3) exploitation of two separate scales of the congestion window adapted for PU activity. Performance evaluation demonstrated that the proposed TCP-CR achieves up to 255% improvement of the end-to-end throughput. Furthermore, we verified that the proposed TCP does not deteriorate the fairness of existing TCP flows and does not cause congestions.

• Journal of the Optical Society of Korea
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• 제19권1호
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• pp.69-73
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• 2015

The mesothelium is an essential lining for maintaining the normal homeostasis of the closed body cavity and a central component of pathophysiologic processes. The mesothelium has been known as the end target for asbestos which induces asbestos-related lung diseases. Malignant mesothelioma (MM) is a rare and fatal neoplasm predominantly due to asbestos exposure. Adaptation of an advanced and reliable technology is necessary for early detection of MM because it is difficult to diagnose this disease in its early stages. Optical coherence tomography (OCT) provides cross-sectional images of micro-tissue structures with a resolution of $2-10{\mu}m$ that can image the mesothelium with a thickness of ${\sim}100{\mu}m$ and, therefore, enable investigation of early development of MM. The mesothelium is typically located at the pleura and tunica vaginalis of the scrotum. In this study, we developed animal window models in the above two anatomical sites to visualize mesothelial layers within the mesothelium. OCT images at the two locations were also acquired.