Journal of the Korea Institute of Military Science and Technology (한국군사과학기술학회지)

The Korea Institute of Military Science and Technology (한국군사과학기술학회)
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A Study on the Transmittance, Heat-Resistance, and Mechanical Properties of SiO2, TiO2 Anti-Reflective Single Layers Deposited on Sapphire Substrate by MOCVD

금속유기화학증착법으로 사파이어 기판에 증착된 단층 SiO2, TiO2 저반사막의 광 투과율, 내열성, 기계적 특성에 관한 연구

  • Shim, Gyu-In (Department of Advanced Materials Science and Engineering, Yonsei University) ;
  • Eom, Hyengwoo (Department of Advanced Materials Science and Engineering, Yonsei University) ;
  • Kang, Hyung (The 4th Research and Development Institute, Agency for Defense Development) ;
  • Choi, Se-Young (Department of Advanced Materials Science and Engineering, Yonsei University)
  • 심규인 (연세대학교 신소재공학과) ;
  • 엄형우 (연세대학교 신소재공학과) ;
  • 강형 (국방과학연구소 제4기술연구본부) ;
  • 최세영 (연세대학교 신소재공학과)
  • Received : 2014.02.17
  • Accepted : 2014.09.05
  • Published : 2014.10.05
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Abstract

To improve sensing capability of infrared, heat-resistance and mechanical properties, the $SiO_2$ and $TiO_2$ anti-reflective layers were coated on sapphire substrate by MOCVD. The standard wavelength was 4,600nm, and the thickness of anti-reflective layers were 379 and 758nm in case of ${\lambda}/4$ and ${\lambda}/2$ of incident angle($65^{\circ}$), respectively. The $SiO_2$ and $TiO_2$ anti-reflective layers were coated 12.6 and 9.7nm/min of deposition rates by increasing oxygen pressure to set the ideal refractive index of 1.283. In case of $SiO_2({\lambda}/2)$ coating, the transmittance increased from 55.0 to 62.7%. The transmittance of $TiO_2({\lambda}/2)$ anti-reflective layer also increased from 55.0 to 64.8%. The flexural strength of $SiO_2({\lambda}/2)$ and $TiO_2({\lambda}/2)$ layer coated sapphire increased from 337.8 to 362.9 and 371.8MPa, respectively. The flexural strength at $500^{\circ}C$ of these materials also increased respectively to 304.5, 358.2MPa from 265.9MPa. From these results, we confirmed these materials can be used as transmission window of infrared light.

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References

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